Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
01/1999
01/28/1999WO1999003623A1 Refractory metal silicide alloy sputter targets, use and manufacture thereof
01/28/1999DE19743799C1 Apparatus for introducing rod shaped target material into electron beam evaporation installations
01/28/1999DE19742691C1 Method and apparatus for coating substrates
01/28/1999DE19742619C1 Method and apparatus for introducing powdery solids or liquids into an inductively coupled plasma
01/28/1999DE19732002A1 Magnetron cathode for a target sputtering unit
01/28/1999DE19731025A1 Magnetron Magnetron
01/28/1999DE19726966C1 Verfahren zur Herstellung einer transparenten Silberschicht mit hoher spezifischer elektrischer Leitfähigkeit , Glasscheibe mit einem Dünnschichtsystem mit einer solchen Silberschicht und deren Verwendung A method for producing a transparent silver layer with a high specific electric conductivity, glass sheet with a thin-layer system with such a silver layer, and the use thereof
01/27/1999EP0893944A1 System and method for neutralizing an ion beam using water vapor
01/27/1999EP0892861A1 Boron and nitrogen containing coating and method for making
01/27/1999EP0892860A1 Cathodic sputtering device
01/27/1999EP0892859A1 Process for preparing endohedral fullerenes or fullerene derivatives
01/27/1999EP0820359A4 Method and apparatus for circuit board treatment
01/27/1999EP0755460B1 Process to produce diamond films
01/27/1999CN2305408Y Multipurpose vacuum coating machine
01/27/1999CN1206459A Modification of metal surfaces
01/27/1999CN1206220A Accelerator-decelerator electrostatic lens for variably focusing and mass resolving ion beam in ion implanter
01/27/1999CN1206175A Exchange bonding film and magneto-resistive effect element and head using the same
01/26/1999US5864425 Nickel phosphorus alloy adhesion layer between gold and silica; for optical fibers
01/26/1999US5864143 High current ion implanter and method of ion implant by the implanter
01/26/1999US5863842 Vacuum exhausting apparatus, semiconductor manufacturing apparatus, and vacuum processing method
01/26/1999US5863831 Process for fabricating semiconductor device with shallow p-type regions using dopant compounds containing elements of high solid solubility
01/26/1999US5863631 Cobalt, chromium, platinum; for magnetic recording disks using magnetorestrictive read head
01/26/1999US5863608 Vacuum depositing a fluorinated ethylene-cyclooxyaliphatic substituted ethylenic copolymer with glass transition temperature 160 to 240 degree c., applying second coating over first of same polymer which is in castable liquid state
01/26/1999US5863398 Hot pressed and sintered sputtering target assemblies and method for making same
01/26/1999US5863397 Target mounting apparatus for vapor deposition system
01/26/1999US5863396 Method and apparatus for fabricating a wafer spacing mask on a substrate support chuck
01/26/1999US5863393 Low angle, low energy physical vapor deposition of alloys
01/26/1999US5863379 Multilayer film forming apparatus and film forming method
01/26/1999US5863340 Deposition ring anti-rotation apparatus
01/26/1999US5863336 Apparatus for fabrication of superconductor
01/26/1999CA2061944C A diamond and/or diamond-like carbon-coated hard material
01/21/1999WO1999003142A1 Method for optimising the etch rate of a polycrystalline layer
01/21/1999WO1999003137A1 Fuel delivery system and method
01/21/1999WO1999003134A1 Programmable electrical interlock system for a vacuum processing system
01/21/1999WO1999003131A1 Apparatus and method for delivering a gas
01/21/1999WO1999003125A1 Method and apparatus for neutralising space charge in an ion beam
01/21/1999WO1999002757A1 Reflective surface for cvd reactor walls
01/21/1999WO1999002752A1 Substrate processing apparatus having a substrate transport with a front end extension and an internal substrate buffer
01/21/1999WO1999002751A1 Automatic positive pressure seal access door
01/21/1999WO1999002750A1 Titanium sputtering target and method of manufacture
01/21/1999WO1999002743A1 Metal article with fine uniform structures and textures and process of making same
01/21/1999WO1999002288A1 Intermetallic aluminides and silicides sputtering targets, and methods of making same
01/21/1999WO1999002195A2 Coronary stent with a radioactive, radiopaque coating
01/21/1999DE19730884A1 Chromium oxynitride sputter deposition from pure chromium target
01/21/1999DE19730296A1 Implant for use in the body, e.g. heart flap
01/21/1999DE19730083A1 Verfahren zur gezielten Herstellung von n-leitenden Bereichen in Diamantschichten mittels Ionenimplantation A process for the targeted production of n-type regions in diamond layers by ion implantation
01/20/1999EP0892081A2 Vacuum coating apparatus for all-round coating of substrates by rotation in the particle flux
01/20/1999EP0632849B1 Abrasion-resistant overcoat for coated substrates
01/20/1999CN1205658A Radiation-cured edge-masking process for high speed electrogalvanizing
01/20/1999CN1205365A Article having decorative and protective coating
01/19/1999US5861599 Rod-fed electron beam evaporation system
01/19/1999US5861086 Method and apparatus for sputter etch conditioning a ceramic body
01/19/1999US5861069 Method for forming an indium antimonide layer
01/19/1999CA2020565C Liquid transfer article having a vapor deposited protective polymer film
01/19/1999CA2017720C Sog with moisture-resistant protective capping layer
01/14/1999WO1999001589A1 Colorless diamond-like carbon coatings
01/14/1999WO1999001277A1 Diamond-like carbon over-coats for optical recording media devices and method thereof
01/14/1999DE19715791C1 PVD of zirconia thermal barrier coatings for turbine blades
01/14/1999CA2296095A1 Colorless diamond-like carbon coatings
01/13/1999EP0890979A1 Method for optimisation of the deposition and etching process as a function of the structure of the polycrystalline film to be deposited and etched
01/13/1999EP0890659A2 Process for applying protective and decorative coating on an article
01/13/1999EP0890657A1 Method of implanting low doses of ions into a substrate
01/13/1999EP0889927A2 Process for producing an adhesive coating on polymethyl methacrylate (pmma) substrate surfaces
01/13/1999CN2303851Y Composite target
01/13/1999CN1204724A 活塞环 Piston Ring
01/12/1999US5859500 Metal ion plasma generator having rotatable anode plate
01/12/1999US5858863 Fabricating various kinds of semiconductor devices for a short period of time.
01/12/1999US5858558 Composite material contains chromium, molybdenum, and silicon suitable for forming gas turbine engine components and structural coatings
01/12/1999US5858478 Magnetic field pulsed laser deposition of thin films
01/12/1999US5858473 Forming transparent film covering semiconductor film over substrate, ion doping semiconductor film with phosphorus, irradiating with beam of excimer laser pulses to activate phosphorus
01/12/1999US5858471 Selective plasma deposition
01/12/1999US5858456 Method for metal coating discrete objects by vapor deposition
01/12/1999US5858450 Film forming method and apparatus therefor
01/12/1999US5858184 Sputtering titanium layer on substrate, forming titanium oxide layer, sputtering titanium nitride layer
01/12/1999US5858183 Titanium nitride
01/12/1999US5858182 Forming over air bearing surface wear resistant carbon layer of nitrogenated or hydrogenated carbon, forming lubricating carbon layer having different elemental content
01/12/1999US5858181 Physical vapor deposition of titanium nitride on a nonconductive substrate
01/12/1999US5858180 Magnetic field generator, coating method and apparatus including same, and devices having coating aligned therewith
01/12/1999US5858125 Magnetoresistive materials
01/12/1999US5858101 System providing a controlled deposition of wafers
01/12/1999US5857611 Sputter target/backing plate assembly and method of making same
01/07/1999WO1999000529A1 Metallic chromium-tantalum oxide composition, sputtering targets and magnetic recording media
01/07/1999WO1999000528A1 Coatings with a silver layer
01/07/1999EP0888464A1 Target, magnetron source with said target, and process for producing said target
01/07/1999EP0888463A1 Means for vacuum coating of bulk material
01/07/1999EP0888418A1 Diffusion coated furnace tubes for the production of ethylene
01/07/1999EP0828696A4 Mixed oxide high index optical coating material and method
01/07/1999EP0815281B1 Photoionic microhead device
01/07/1999EP0699246B1 Apparatus for coating substrates
01/06/1999CN2303003Y Flat magnetic control sputtering indium tin oxides film type winding and coating machine
01/05/1999US5856676 Water-removing exhaust system for an ion implanter and a method for using the same
01/05/1999US5856242 Method of producing dielectric thin film element
01/05/1999US5856235 Heat resistance
01/05/1999US5856206 Method for fabricating bragg reflector using in situ laser reflectometry
01/05/1999US5856027 Gas turbine engines
01/05/1999US5856017 Plastic film with thin film of aluminum oxide or silicon oxide
01/05/1999US5855967 Method of protecting surfaces on diamond, diamondlike carbon or carbon
01/05/1999US5855966 Molding tool substrate
01/05/1999US5855950 Immersion in oxygen gas; oxidation of aluminum
01/05/1999US5855746 Buffered nitrogenated carbon overcoat for data recording disks and method for manufacturing the same