Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
07/1999
07/20/1999US5925404 Multilayer magnetic material with desulfurization to lower cost
07/20/1999US5925265 Exerting the actions of an electric field and a magnetic field on a processing gas; high etch selectivity between a mask and an underlying layer
07/20/1999US5925227 Multichamber sputtering apparatus
07/20/1999US5925226 Apparatus and method for clamping a substrate
07/20/1999US5925225 Method of producing smooth titanium nitride films having low resistivity
07/20/1999US5924904 Method for manufacturing a discharge tube body for high-pressure discharge lamps and method for manufacturing a hollow tube body
07/20/1999CA2130167C Nondestructive determination of plasma processing treatment
07/20/1999CA2016028C Method of fabricating oxide superconducting film
07/15/1999WO1999035306A2 Thermal barrier coating ceramic structure
07/15/1999WO1999035302A1 Coaxial resonant multiport microwave applicator for an ecr plasma source
07/15/1999WO1999035301A1 Method for coating foil comprised of nickel or nickel alloy
07/15/1999WO1999035300A1 Method for coating foil comprised of nickel or nickel alloy
07/15/1999WO1999035299A1 Method for preparing thin films of fluorinated compounds
07/15/1999DE4027472A1 Mfg. ultra-hard, dual band, antireflective coating for IR windows
07/15/1999DE19900159A1 Connecting pipe for reactive gas supply to vapor deposition chamber
07/15/1999DE19822570C1 High density hot isostatically pressed indium-tin oxide sputter target
07/15/1999DE19808163C1 Airlock system for transfer chamber of vacuum coating installation
07/15/1999DE19800758A1 Verfahren zum Beschichten von Folie aus Nickel oder einer Nickellegierung und beschichtete Folie aus Nickel oder einer Nickellegierung Process for coating foil comprised of nickel or a nickel alloy and coated film of nickel or a nickel alloy
07/14/1999EP0928977A1 Plastic optical component having a reflection prevention film and mechanism for making reflection prevention film thickness uniform
07/14/1999EP0928343A1 Process for coating brass with hard, multicolored layers
07/14/1999CN1222586A Coated article
07/13/1999US5923056 Flash memory device
07/13/1999US5922478 Polished brass colored abrasion, corrosion and acid resistant door knobs/bathroom fixtures
07/13/1999US5922460 Composite materials
07/13/1999US5922182 Apparatus for coating substrates especially with magnetizable materials
07/13/1999US5922181 Black matrix laminated film and reactive sputtering apparatus
07/13/1999US5922180 Targets, shielding plate, emitters
07/13/1999US5922179 Apparatus for etching and coating sample specimens for microscopic analysis
07/13/1999US5922177 Magneto-optical recording medium and producing method thereof
07/13/1999US5922176 Spark eliminating sputtering target and method for using and making same
07/13/1999US5922142 Photovoltaic devices comprising cadmium stannate transparent conducting films and method for making
07/13/1999US5921559 Sealing structure for an airtight chamber
07/13/1999CA2258432A1 A metallic article having a thermal barrier coating and a method of application thereof
07/13/1999CA1340651C Magnetron sputtering apparatus and process
07/08/1999WO1999034431A1 Method of producing silicon oxide film, method of manufacturing semiconductor device, semiconductor device, display, and infrared irradiating device
07/08/1999WO1999034424A1 Precleaning step prior to metallization for sub-quarter micron application
07/08/1999WO1999034399A1 Plasma device including a powered non-magnetic metal member between a plasma ac excitation source and the plasma
07/08/1999WO1999034396A2 Installation with an electron-cyclotron resonance ion source for doping stents with radioactive and non-radioactive atoms
07/08/1999WO1999034029A1 Magnetic body sputtering target
07/08/1999WO1999034028A1 SPUTTERING TARGET, Al INTERCONNECTION FILM, AND ELECTRONIC COMPONENT
07/08/1999WO1999025908B1 Thin films having a rock-salt-like structure deposited on amorphous surfaces
07/08/1999DE19757852A1 Implantation von radioaktiven ·3··2·P-Atomen Implantation of radioactive · 3 · · 2 · P atoms
07/08/1999CA2314953A1 Implantation of radioactive p32 atoms
07/07/1999EP0927839A2 Combined oil ring and manufacturing method thereof
07/07/1999EP0853685B1 Transparent heat protection foil and process for producing the same
07/07/1999CN1222204A Reactive magnetron sputtering appts. and method
07/07/1999CN1221970A Sputtering apparatus for sputtering high melting point metal and method for manufacturing semiconductor device having high melting point metal
07/07/1999CN1044012C Vacuum plasma vapor deposition appts.
07/07/1999CN1044011C Appts. for ionically plating
07/07/1999CN1044010C Method for resistance heating of metal using pyrolytic boron nitride coated graphite boat
07/07/1999CN1044008C Porous metal body, process for producing same and battery plate formed therefrom
07/06/1999US5919515 Ferroelectric thin film, electric device and method for preparing ferroelectric thin film
07/06/1999US5919345 Uniform film thickness deposition of sputtered materials
07/06/1999US5919342 Uniform electrical resistance
07/06/1999US5919328 Blood collection tube assembly
07/06/1999US5919321 Target material of metal silicide
07/06/1999US5919126 Coronary stent with a radioactive, radiopaque coating
07/06/1999CA2123479C Anode structure for magnetron sputtering systems
07/06/1999CA2106419C Chemical vapour deposition process for depositing a fluor glass film on a substrate
07/06/1999CA2027750C Molded synthetic resin articles having thin metal film and production process thereof
07/01/1999WO1999033093A1 Vacuum treatment installation
07/01/1999DE19756162A1 Sputtering unit
06/1999
06/30/1999EP0926927A1 Apparatus and method for preparing organic EL devices
06/30/1999EP0926699A1 Method and apparatus for deflecting charged particles
06/30/1999EP0926258A2 Getter system for purifying the working atmosphere in physical vapor deposition processes
06/30/1999EP0926257A1 Pre-oxidation method
06/30/1999EP0926256A1 Antibacterial hardwares and method of production thereof
06/30/1999EP0925386A1 Workpiece with wear-protective coating
06/30/1999EP0925382A1 Wear-resistant edge layer structure for titanium or its alloys which can be subjected to a high mechanical load and has a low coefficient of friction, and method of producing the same
06/30/1999EP0824603B1 Device for vapour-depositing a material on high surface area substrates
06/30/1999EP0686706B1 White decorative part and process for producing the same
06/30/1999CN2326612Y Thin-shell structure of vacuum coating room
06/30/1999CN1221212A Method for controlling thicknesses of layers formed by deposition equipment for processing semiconductors
06/30/1999CN1221042A Getter system for purifying work atmosphere in processes of physical vapor deposition
06/29/1999US5918111 Method and apparatus for manufacturing chalcopyrite semiconductor thin films
06/29/1999US5916820 Thin film forming method and apparatus
06/29/1999US5916642 Generating a vapor of the material to be encapsulated such as copper and germenium, generating hydrogen arc discharge that discharge encapsulating product, contacting vapor of material and discharge product to encapsulate material in carbon tube
06/29/1999US5916456 Diamond treatment for passivating stress surface defects
06/29/1999US5916401 Coating of substrates
06/29/1999CA2136455C Process for producing anti-microbial effect with complex silver ions
06/29/1999CA2136454C Process of activating anti-microbial materials
06/24/1999WO1999031714A1 Single wafer load lock chamber for pre-processing and post-processing wafers in a vacuum processing system
06/24/1999WO1999031712A1 Ion implanting apparatus and method
06/24/1999WO1999031341A1 Vehicle door latch mechanism
06/24/1999WO1999031292A1 Coated cemented carbide cutting tool and method of coating it with diamond
06/24/1999WO1999031290A1 Magnetron sputtering source
06/24/1999WO1999031289A1 Sliding member having chromium nitride film formed thereon
06/24/1999DE19857699A1 Apparatus for producing a magnetic film
06/24/1999DE19754986A1 Sputtering cathode
06/24/1999DE19752889C1 Coating surfaces with indium-tin oxide while being argon ion bombarded to allow low temperature coating
06/23/1999EP0924744A1 Sputtering cathode
06/23/1999EP0924316A1 Coating system, method for its fabrication, and its use
06/23/1999EP0924043A2 Method for precision polishing non-planar, aspherical surfaces
06/23/1999CN1220707A Method for forming carbon film
06/23/1999CA2254515A1 Getter system for purifying the work atmosphere in the processes of physical vapor deposition
06/22/1999US5914018 Sputter target for eliminating redeposition on the target sidewall
06/22/1999US5914017 Apparatus for, and method of, removing hydrocarbons from the surface of a substrate
06/22/1999US5913978 Apparatus and method for regulating pressure in two chambers
06/22/1999US5913653 Device for transporting substrates
06/17/1999WO1999030358A2 Ion implantation process