Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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07/20/1999 | US5925404 Multilayer magnetic material with desulfurization to lower cost |
07/20/1999 | US5925265 Exerting the actions of an electric field and a magnetic field on a processing gas; high etch selectivity between a mask and an underlying layer |
07/20/1999 | US5925227 Multichamber sputtering apparatus |
07/20/1999 | US5925226 Apparatus and method for clamping a substrate |
07/20/1999 | US5925225 Method of producing smooth titanium nitride films having low resistivity |
07/20/1999 | US5924904 Method for manufacturing a discharge tube body for high-pressure discharge lamps and method for manufacturing a hollow tube body |
07/20/1999 | CA2130167C Nondestructive determination of plasma processing treatment |
07/20/1999 | CA2016028C Method of fabricating oxide superconducting film |
07/15/1999 | WO1999035306A2 Thermal barrier coating ceramic structure |
07/15/1999 | WO1999035302A1 Coaxial resonant multiport microwave applicator for an ecr plasma source |
07/15/1999 | WO1999035301A1 Method for coating foil comprised of nickel or nickel alloy |
07/15/1999 | WO1999035300A1 Method for coating foil comprised of nickel or nickel alloy |
07/15/1999 | WO1999035299A1 Method for preparing thin films of fluorinated compounds |
07/15/1999 | DE4027472A1 Mfg. ultra-hard, dual band, antireflective coating for IR windows |
07/15/1999 | DE19900159A1 Connecting pipe for reactive gas supply to vapor deposition chamber |
07/15/1999 | DE19822570C1 High density hot isostatically pressed indium-tin oxide sputter target |
07/15/1999 | DE19808163C1 Airlock system for transfer chamber of vacuum coating installation |
07/15/1999 | DE19800758A1 Verfahren zum Beschichten von Folie aus Nickel oder einer Nickellegierung und beschichtete Folie aus Nickel oder einer Nickellegierung Process for coating foil comprised of nickel or a nickel alloy and coated film of nickel or a nickel alloy |
07/14/1999 | EP0928977A1 Plastic optical component having a reflection prevention film and mechanism for making reflection prevention film thickness uniform |
07/14/1999 | EP0928343A1 Process for coating brass with hard, multicolored layers |
07/14/1999 | CN1222586A Coated article |
07/13/1999 | US5923056 Flash memory device |
07/13/1999 | US5922478 Polished brass colored abrasion, corrosion and acid resistant door knobs/bathroom fixtures |
07/13/1999 | US5922460 Composite materials |
07/13/1999 | US5922182 Apparatus for coating substrates especially with magnetizable materials |
07/13/1999 | US5922181 Black matrix laminated film and reactive sputtering apparatus |
07/13/1999 | US5922180 Targets, shielding plate, emitters |
07/13/1999 | US5922179 Apparatus for etching and coating sample specimens for microscopic analysis |
07/13/1999 | US5922177 Magneto-optical recording medium and producing method thereof |
07/13/1999 | US5922176 Spark eliminating sputtering target and method for using and making same |
07/13/1999 | US5922142 Photovoltaic devices comprising cadmium stannate transparent conducting films and method for making |
07/13/1999 | US5921559 Sealing structure for an airtight chamber |
07/13/1999 | CA2258432A1 A metallic article having a thermal barrier coating and a method of application thereof |
07/13/1999 | CA1340651C Magnetron sputtering apparatus and process |
07/08/1999 | WO1999034431A1 Method of producing silicon oxide film, method of manufacturing semiconductor device, semiconductor device, display, and infrared irradiating device |
07/08/1999 | WO1999034424A1 Precleaning step prior to metallization for sub-quarter micron application |
07/08/1999 | WO1999034399A1 Plasma device including a powered non-magnetic metal member between a plasma ac excitation source and the plasma |
07/08/1999 | WO1999034396A2 Installation with an electron-cyclotron resonance ion source for doping stents with radioactive and non-radioactive atoms |
07/08/1999 | WO1999034029A1 Magnetic body sputtering target |
07/08/1999 | WO1999034028A1 SPUTTERING TARGET, Al INTERCONNECTION FILM, AND ELECTRONIC COMPONENT |
07/08/1999 | WO1999025908B1 Thin films having a rock-salt-like structure deposited on amorphous surfaces |
07/08/1999 | DE19757852A1 Implantation von radioaktiven ·3··2·P-Atomen Implantation of radioactive · 3 · · 2 · P atoms |
07/08/1999 | CA2314953A1 Implantation of radioactive p32 atoms |
07/07/1999 | EP0927839A2 Combined oil ring and manufacturing method thereof |
07/07/1999 | EP0853685B1 Transparent heat protection foil and process for producing the same |
07/07/1999 | CN1222204A Reactive magnetron sputtering appts. and method |
07/07/1999 | CN1221970A Sputtering apparatus for sputtering high melting point metal and method for manufacturing semiconductor device having high melting point metal |
07/07/1999 | CN1044012C Vacuum plasma vapor deposition appts. |
07/07/1999 | CN1044011C Appts. for ionically plating |
07/07/1999 | CN1044010C Method for resistance heating of metal using pyrolytic boron nitride coated graphite boat |
07/07/1999 | CN1044008C Porous metal body, process for producing same and battery plate formed therefrom |
07/06/1999 | US5919515 Ferroelectric thin film, electric device and method for preparing ferroelectric thin film |
07/06/1999 | US5919345 Uniform film thickness deposition of sputtered materials |
07/06/1999 | US5919342 Uniform electrical resistance |
07/06/1999 | US5919328 Blood collection tube assembly |
07/06/1999 | US5919321 Target material of metal silicide |
07/06/1999 | US5919126 Coronary stent with a radioactive, radiopaque coating |
07/06/1999 | CA2123479C Anode structure for magnetron sputtering systems |
07/06/1999 | CA2106419C Chemical vapour deposition process for depositing a fluor glass film on a substrate |
07/06/1999 | CA2027750C Molded synthetic resin articles having thin metal film and production process thereof |
07/01/1999 | WO1999033093A1 Vacuum treatment installation |
07/01/1999 | DE19756162A1 Sputtering unit |
06/30/1999 | EP0926927A1 Apparatus and method for preparing organic EL devices |
06/30/1999 | EP0926699A1 Method and apparatus for deflecting charged particles |
06/30/1999 | EP0926258A2 Getter system for purifying the working atmosphere in physical vapor deposition processes |
06/30/1999 | EP0926257A1 Pre-oxidation method |
06/30/1999 | EP0926256A1 Antibacterial hardwares and method of production thereof |
06/30/1999 | EP0925386A1 Workpiece with wear-protective coating |
06/30/1999 | EP0925382A1 Wear-resistant edge layer structure for titanium or its alloys which can be subjected to a high mechanical load and has a low coefficient of friction, and method of producing the same |
06/30/1999 | EP0824603B1 Device for vapour-depositing a material on high surface area substrates |
06/30/1999 | EP0686706B1 White decorative part and process for producing the same |
06/30/1999 | CN2326612Y Thin-shell structure of vacuum coating room |
06/30/1999 | CN1221212A Method for controlling thicknesses of layers formed by deposition equipment for processing semiconductors |
06/30/1999 | CN1221042A Getter system for purifying work atmosphere in processes of physical vapor deposition |
06/29/1999 | US5918111 Method and apparatus for manufacturing chalcopyrite semiconductor thin films |
06/29/1999 | US5916820 Thin film forming method and apparatus |
06/29/1999 | US5916642 Generating a vapor of the material to be encapsulated such as copper and germenium, generating hydrogen arc discharge that discharge encapsulating product, contacting vapor of material and discharge product to encapsulate material in carbon tube |
06/29/1999 | US5916456 Diamond treatment for passivating stress surface defects |
06/29/1999 | US5916401 Coating of substrates |
06/29/1999 | CA2136455C Process for producing anti-microbial effect with complex silver ions |
06/29/1999 | CA2136454C Process of activating anti-microbial materials |
06/24/1999 | WO1999031714A1 Single wafer load lock chamber for pre-processing and post-processing wafers in a vacuum processing system |
06/24/1999 | WO1999031712A1 Ion implanting apparatus and method |
06/24/1999 | WO1999031341A1 Vehicle door latch mechanism |
06/24/1999 | WO1999031292A1 Coated cemented carbide cutting tool and method of coating it with diamond |
06/24/1999 | WO1999031290A1 Magnetron sputtering source |
06/24/1999 | WO1999031289A1 Sliding member having chromium nitride film formed thereon |
06/24/1999 | DE19857699A1 Apparatus for producing a magnetic film |
06/24/1999 | DE19754986A1 Sputtering cathode |
06/24/1999 | DE19752889C1 Coating surfaces with indium-tin oxide while being argon ion bombarded to allow low temperature coating |
06/23/1999 | EP0924744A1 Sputtering cathode |
06/23/1999 | EP0924316A1 Coating system, method for its fabrication, and its use |
06/23/1999 | EP0924043A2 Method for precision polishing non-planar, aspherical surfaces |
06/23/1999 | CN1220707A Method for forming carbon film |
06/23/1999 | CA2254515A1 Getter system for purifying the work atmosphere in the processes of physical vapor deposition |
06/22/1999 | US5914018 Sputter target for eliminating redeposition on the target sidewall |
06/22/1999 | US5914017 Apparatus for, and method of, removing hydrocarbons from the surface of a substrate |
06/22/1999 | US5913978 Apparatus and method for regulating pressure in two chambers |
06/22/1999 | US5913653 Device for transporting substrates |
06/17/1999 | WO1999030358A2 Ion implantation process |