| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
|---|
| 01/05/1999 | US5855745 Vacuum pump for controlling pressure |
| 01/05/1999 | US5855744 Non-planar magnet tracking during magnetron sputtering |
| 01/05/1999 | US5855686 Method and apparatus for vacuum deposition of highly ionized media in an electromagnetic controlled environment |
| 01/05/1999 | US5855684 Method for the plasma assisted high vacuum physical vapor coating of parts with wear resistant coatings and equipment for carrying out the method |
| 01/05/1999 | US5855683 Thin film deposition apparatus |
| 01/05/1999 | US5855682 Plasma thin-film forming apparatus |
| 01/05/1999 | US5855679 Semiconductor manufacturing apparatus |
| 01/05/1999 | CA2161611C Hard composite material for tools |
| 12/30/1998 | WO1998059089A1 Method for making a non-sticking diamond-like nanocomposite |
| 12/30/1998 | WO1998059088A1 Sputter coating system and method using substrate electrode |
| 12/30/1998 | WO1998059087A2 Method for bias sputtering |
| 12/30/1998 | WO1998058885A1 Silicon oxynitride protective coatings |
| 12/30/1998 | EP0887438A1 Process for improving the inner surface of hollow bodies and device for carrying out the process |
| 12/30/1998 | EP0887435A1 Free-standing rotating evaporation source |
| 12/30/1998 | EP0887434A1 Apparatus for level control of a molten metal pool |
| 12/30/1998 | EP0887433A1 Silicon dioxide deposition by plasma activated evaporation process |
| 12/30/1998 | EP0887128A2 Method for manufacturing vacuum chamber |
| 12/30/1998 | EP0886880A1 Method and apparatus for the coating of workpieces |
| 12/30/1998 | EP0886685A2 Improved thermal barrier coating system and methods |
| 12/30/1998 | CN2302262Y Transparent heat insulation diaphragm |
| 12/30/1998 | CN1203595A Process for hydrogenating dihydrofuranes to tetrahydrofuranes |
| 12/29/1998 | US5853888 Surface modification of synthetic diamond for producing adherent thick and thin film metallizations for electronic packaging |
| 12/29/1998 | US5853873 Hard composite material for tools |
| 12/29/1998 | US5853871 Magnetic recording medium |
| 12/29/1998 | US5853862 Barrier composite films and method of producing the same |
| 12/29/1998 | US5853826 Method of improving the color of transparent materials |
| 12/29/1998 | US5853817 Method for producing a thin film resin matrix |
| 12/29/1998 | US5853816 Method of coating a sputter cathode with a layer of material to be applied to a substrate by sputtering |
| 12/29/1998 | US5853805 Apparatus and process for forming electrodes of electronic components |
| 12/29/1998 | US5853800 Material for and method of preparing water-repellent coatings on optical substrates |
| 12/29/1998 | US5853795 Luminant for field emission display fabricated through physical vapor deposition and method for fabricating the same |
| 12/29/1998 | US5853552 Process for the production of electroluminescence element, electroluminescence element |
| 12/29/1998 | US5853176 Vacuum chamber and method of manufacturing the vacuum chamber |
| 12/29/1998 | CA2042777C Diamond having multiple coatings and methods for their manufacture |
| 12/24/1998 | DE19743720C1 Cost effective production of iron alloy foil with high resistance to high temperature oxidation |
| 12/23/1998 | WO1998058415A1 Controlled conversion of metal oxyfluorides into superconducting oxides |
| 12/23/1998 | WO1998058117A1 Surface coatings |
| 12/23/1998 | WO1998058100A1 Method and device for vacuum-coating a substrate |
| 12/23/1998 | WO1998058098A1 Magnetic parts and method for using same |
| 12/23/1998 | WO1998058095A1 Method for plasma-activated electron beam evaporation and device for carrying out said method |
| 12/23/1998 | EP0886305A2 Method and apparatus for handling disc substrates, e.g. silicon wafers |
| 12/23/1998 | EP0886290A1 Transparent decoration key top and its manufacturing method |
| 12/23/1998 | EP0885984A2 Coated hard tool having multi-layer coating |
| 12/23/1998 | EP0885983A1 Method for coating a substrate with a diamond like nanocomposite composition |
| 12/23/1998 | EP0885982A1 Method for the coating of an object |
| 12/23/1998 | EP0885981A2 Process and apparatus for treating substrates by means of ions produced by low voltage arc discharge |
| 12/23/1998 | EP0885451A1 Transparent contacts for organic devices |
| 12/23/1998 | EP0885079A1 Method for producing near net shape planar sputtering targets and an intermediate therefor |
| 12/23/1998 | EP0809721B1 Method and apparatus for producing single crystal carbon films |
| 12/23/1998 | EP0804634B1 Wearing protection layer |
| 12/23/1998 | EP0804625B1 Method for improving oxidation and spalling resistance of diffusion aluminide coatings |
| 12/23/1998 | CN2301452Y Rotary target column magnetic control sputtering device |
| 12/23/1998 | CN1202536A Method for producing ion feedback preventing film of microchannel plate |
| 12/23/1998 | CN1202535A Plasma film deposition apparatus capable of stably depositing variety of materials having variety of characteristics |
| 12/23/1998 | CA2295194A1 Controlled conversion of metal oxyfluorides into superconducting oxides |
| 12/23/1998 | CA2237534A1 Rod-fed source pool height monitor |
| 12/22/1998 | US5852346 Forming luminescent silicon material and electro-luminescent device containing that material |
| 12/22/1998 | US5851955 Efficient growth of HTS films with volatile elements |
| 12/22/1998 | US5851938 Glass material variable in volume by irradiation with ultraviolet light |
| 12/22/1998 | US5851908 Method for introduction of an impurity dopant in SiC, a semiconductor device formed by the method and a use of highly doped amorphous layer as a source for dopant diffusion into SiC |
| 12/22/1998 | US5851680 Boron-doped titanium nitride coatings and coated parts |
| 12/22/1998 | US5851660 Method of fabricating a thin-film magnetic recording medium and thin-film magnetic recording medium |
| 12/22/1998 | US5851659 Sliding members and a method of preparation thereof |
| 12/22/1998 | US5851656 Magnetic recording medium |
| 12/22/1998 | US5851475 Surface treatment of ceramic articles |
| 12/22/1998 | US5851366 Adhering metal to glass |
| 12/22/1998 | US5851365 Low pressure reactive magnetron sputtering apparatus and method |
| 12/22/1998 | US5851364 Method for forming aluminum contacts |
| 12/22/1998 | US5851363 Multilayer film materials system |
| 12/22/1998 | US5851344 Ultrasonic wave assisted contact hole filling |
| 12/22/1998 | US5851299 Passive shield for CVD wafer processing which provides frontside edge exclusion and prevents backside depositions |
| 12/22/1998 | US5851297 Method and apparatus for preparing crystalline thin-films for solid-state lasers |
| 12/22/1998 | US5851296 Vacuum processing apparatus and method |
| 12/22/1998 | CA2117411C Layered structure comprising insulator thin film and oxide superconductor thin film |
| 12/17/1998 | DE19826259A1 Plasma CVD process application |
| 12/17/1998 | DE19727647A1 Cathodic sputtering apparatus with adjustable target |
| 12/17/1998 | DE19727646A1 Evaporation boat with multiple cavities |
| 12/16/1998 | EP0884761A1 Sputtering apparatus with a rotating magnet array |
| 12/16/1998 | EP0884760A2 Electron-beam excited plasma generator |
| 12/16/1998 | EP0884401A1 Method and system for coating the inside of a processing chamber |
| 12/16/1998 | EP0884400A1 Hard coating material, sliding member covered with hard coating material, and manufacturing method thereof |
| 12/16/1998 | EP0714454B1 Masking means and cleaning techniques for surfaces of substrates |
| 12/16/1998 | CN2300656Y Vacuum sputtering film plating machine |
| 12/16/1998 | CN1202260A Magnetic recording medium and production thereof |
| 12/16/1998 | CN1202000A Method and apparatus for treating semiconductor wafer |
| 12/16/1998 | CN1201870A Dual-walled exhaust tubing for vacuum pump |
| 12/16/1998 | CN1201720A Vacuum treating apparatus for coating film |
| 12/16/1998 | CN1041221C Surface treatment of precision metallic coupling moving parts |
| 12/16/1998 | CN1041220C Surface treatment of high speed steel cutter |
| 12/15/1998 | US5850356 Simulation apparatus for optimizing sputtering apparatus and simulation method therefor |
| 12/15/1998 | US5850089 Modulated-structure of PZT/PT ferroelectric thin films for non-volatile random access memories |
| 12/15/1998 | US5849415 Molecularly bonded inherently conductive polymers on substrates and shaped articles thereof |
| 12/15/1998 | US5849373 Process for the synthesis of nanophase dispersion-strengthened aluminum alloy |
| 12/15/1998 | US5849371 Laser and laser-assisted free electron beam deposition apparatus and method |
| 12/15/1998 | US5849370 Method for producing low scatter, low loss, environmentally stable dielectric coatings |
| 12/15/1998 | US5849367 Elemental titanium-free liner and fabrication process for inter-metal connections |
| 12/15/1998 | US5849359 Variable tilting tumbler vacuum coating apparatus |
| 12/15/1998 | US5849163 Process for formation of epitaxial film |
| 12/15/1998 | US5849162 Sputtering device and method for reactive for reactive sputtering |
| 12/15/1998 | US5849087 Vacuum treatment system for applying thin layers to substrates such as headlights reflectors |