Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
05/2003
05/14/2003CN1108231C Amorphous diamond coating of knife blade
05/14/2003CN1108225C 光学系统 Optical system
05/13/2003US6564317 Method and apparatus for securing computer firmware wherein unlocking of nonvolatile memory is prohibited unless address line masking Is disabled during an initialization event
05/13/2003US6563578 In-situ thickness measurement for use in semiconductor processing
05/13/2003US6562492 Laminated structure, and manufacturing method thereof
05/13/2003US6562490 Glazing panel
05/13/2003US6562471 Aluminum-titanium alloy with high specular reflectivity, reflecting coatings comprising same and mirrors and parts comprising said coating
05/13/2003US6562445 Diamond-like carbon hard multilayer film and component excellent in wear resistance and sliding performance
05/13/2003US6562418 Dry pressing powders of boron and a binder to form a disk; baking to remove the binder therefrom; and sintering disk in a microwave environment utilizing microwave energy to heat
05/13/2003US6562417 Depositing method and a surface modifying method for nano-particles in a gas stream
05/13/2003US6562414 Method of coating polyolefin floor tile
05/13/2003US6562405 Tapered shape increasing thermal conductance and reducing temperature gradient
05/13/2003US6562400 Method and apparatus for forming deposition film, and method for treating substrate
05/13/2003US6562289 Activation, passivation, coating with metal
05/13/2003US6562207 Refractory metal silicide alloy sputter targets, use and manufacture thereof
05/13/2003US6562200 Pressure in the film-forming space is maintained at a pressure lower than the pressure in the sputtering space and a pressure sufficient for sputtered particles to move in the film forming space with their mean free path
05/13/2003US6562199 For reading a magnetic field intensity of a magnetic recording medium or the like as a signal; vacuum cooling chamber; lamination
05/13/2003US6562186 Apparatus for plasma processing
05/13/2003US6562150 Steel sheet for heat shrink band and manufacturing method thereof
05/13/2003US6562143 Method for cleaning hazardous waste from vacuum chambers in molecular beam epitaxy processing
05/13/2003US6562141 Dual degas/cool loadlock cluster tool
05/13/2003US6561679 Decorative coating for exterior automotive lighting applications
05/13/2003CA2198983C Device for coating a substrate surface
05/13/2003CA2153848C Oxide thin film having quartz crystal structure and process for producing the same
05/08/2003WO2003038871A1 Non-contacting deposition control of chalcopyrite thin films
05/08/2003WO2003038142A1 Apparatus for vacuum deposition, specifically for metallizing plastic film
05/08/2003WO2003038141A2 Method for producing a uv-absorbing transparent wear protection layer
05/08/2003WO2003037993A1 Pigment with a metallic lustre
05/08/2003WO2003037613A1 Forming thin films on substrates using a porous carrier
05/08/2003WO2003014718A3 Method and apparatus for non-destructive target cleanliness characterization by types of flaws sorted by size and location
05/08/2003WO2002035221A9 Method for chlorine plasma modification of silver electrodes
05/08/2003WO2002025271A3 A method for quantifying the texture homogeneity of a polycrystalline material
05/08/2003US20030087472 Method of reducing carbon incorporation into films produced by chemical vapor deposition involving organic precursor compounds
05/08/2003US20030087471 Self-aligned hybrid deposition
05/08/2003US20030087197 Biocompatibility protective coating; dielectrics; prevent current leakage
05/08/2003US20030087044 Device for the regulation of a plasma impedance
05/08/2003US20030087037 Layered product, capacitor and a method for producing the layered product
05/08/2003US20030087033 Systems and methods for an angle limiting deposition mask
05/08/2003US20030086856 For use in optoelectronics and electronic devices; density, hardness
05/08/2003US20030085426 Semiconductor device, method of forming epitaxial film, and laser ablation device
05/08/2003US20030085123 Electro-dip coating while reducing edge migration on stoving by electro-deposition of coating containing heat-curable binder; curing with ultraviolet radiation
05/08/2003US20030085122 Sputtering device
05/08/2003US20030085121 Mesh shield in a sputter reactor
05/08/2003US20030085116 For forming metal oxide films for use as back reflecting layers in semiconductors
05/08/2003US20030085115 Comprises openings in shutters which provide uniform radial and circumferential thickness; dielectrics
05/08/2003US20030085114 Comprises common cathode/heat sink; avoids cross-contamination; improved materials handling; for production of magnetic/optical storage films
05/08/2003US20030084587 Substrate processing system
05/08/2003CA2464733A1 Forming thin films on substrates using a porous carrier
05/07/2003EP1308535A1 High-temperature strength member
05/07/2003EP1307907A1 Method for depositing a fluorine-doped silica film
05/07/2003EP1307607A1 Method and device for plasma treatment of moving metal substrates
05/07/2003EP1307604A1 METHOD FOR PRODUCING A TOOL WHICH CAN BE USED TO CREATE SURFACE STRUCTURES IN THE SUB-$g(m)M RANGE
05/07/2003EP1307602A2 Chromium-containing cemented tungsten carbide body
05/07/2003EP1307600A1 Method for reducing the oxygen and oxide content in cobalt to procuce cobalt sputtering targets
05/07/2003EP1286387A9 Method to reduce photoresist contamination from silicon carbide films
05/07/2003EP1194609B1 Method and means for drill production
05/07/2003EP1192291B1 Device for monitoring intended or unavoidable layer deposits and corresponding method
05/07/2003EP1147066B1 Glazing panel
05/07/2003EP1109946B1 Optical lens support and method for using same
05/07/2003EP0926256B1 Antibacterial metallic materials and method of production thereof
05/07/2003EP0888463B1 Means for vacuum coating of bulk material
05/07/2003EP0731751B1 Diamond-coated tools and process for making
05/07/2003CN2549016Y Vacuum arc automatic generating the arc
05/07/2003CN1416601A Amorphous electrode compsns.
05/07/2003CN1416553A Production management system, and host computer and recorded medium used in system
05/07/2003CN1416477A Plasma polymerization system and method for plasma polymerization
05/07/2003CN1415865A Argentiferous copper alloy for journal bearing
05/07/2003CN1415780A Method for preparing nano membrane device
05/07/2003CN1415779A Manufacturing method for producing target material with high resistance used in metal film resistor with high stability by using sputtering technique
05/07/2003CN1415778A Nano composite film containing stibium and its preparation method
05/07/2003CN1107823C 密封系统 Sealing Systems
05/07/2003CN1107569C Vacuum caser machining equipment
05/06/2003US6559593 Onto luminescent polymer using discharge gas with light emission spectrum of lower energy than argon
05/06/2003US6559461 Wafer scanning support unit of ion implantation apparatus
05/06/2003US6559454 Ion beam generation apparatus
05/06/2003US6559328 Metallic complex
05/06/2003US6559066 Substrate for use in display element, method of manufacturing the same, and apparatus for manufacturing the same
05/06/2003US6559065 Vapor deposition method and vapor deposition apparatus for forming organic thin films
05/06/2003US6558822 A hard film improved in high-temperature, oxidation resistance without impairing high sliding properties (wear and friction resistance); bearings/seals for rotary machines, e.g. steam/gas turbines; highly oriented crystal structure
05/06/2003US6558816 Coated article with polymeric basecoat having the appearance of stainless steel
05/06/2003US6558757 Method and device for coating substrates in a vacuum
05/06/2003US6558749 Method for manufacturing a workpiece with wear-protective coating
05/06/2003US6558735 Reusable mass-sensor in manufacture of organic light-emitting devices
05/06/2003US6558517 Physical vapor deposition methods
05/06/2003US6558509 Dual wafer load lock
05/06/2003US6558507 Plasma processing apparatus
05/06/2003US6558100 Vacuum processing apparatus and a vacuum processing system
05/06/2003US6557607 Apparatus for manufacturing micro-structure
05/02/2003EP1306888A2 Semiconductor processing apparatus for continuously forming semiconductor film on flexible substrate
05/02/2003EP1306879A2 Ion implanting method and apparatus
05/02/2003EP1306858A1 Ultraviolet-transparent conductive film and process for producing the same
05/02/2003EP1306569A2 Bearing structure
05/02/2003EP1306463A1 Holder for plates
05/02/2003EP1305838A2 Low-temperature fabrication of thin-film energy-storage devices
05/02/2003EP1305563A1 Heat exchange foam
05/02/2003EP1305455A2 Method and apparatus for processing metals, and the metals so produced
05/02/2003EP1305453A1 Ring-shaped high-density plasma source and method
05/02/2003EP1305452A1 Gcib size diagnostics and workpiece processing
05/02/2003EP1208067B1 Transparent conductor and means for making same
05/02/2003EP0789788B1 In situ getter pump system and method