Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
03/2003
03/13/2003WO2002057839A3 Improving the stability of ion beam generated alignment layers by surface modification
03/13/2003WO2002031217B1 Sputter targets
03/13/2003WO2002019366A3 Cold cathode ion beam deposition apparatus with segregated gas flow
03/13/2003WO2001073870A3 Integrated capacitor-like battery and associated method
03/13/2003US20030050195 Synthesis of YBa2Cu3O7 using sub-atmospheric processing
03/13/2003US20030049496 Thin film protective layer with buffering interface
03/13/2003US20030049470 Ceramic containing hafnia, germanium oxide on metallic substrate
03/13/2003US20030049463 Heat treatable coated articles with anti-migration barrier layer between dielectric and solar control layers, and methods of making same
03/13/2003US20030049083 Amorphous carbon coated tool and fabrication method thereof
03/13/2003US20030047817 Apparatus for depositing thin film
03/13/2003US20030047812 Thin film aluminum alloy and sputtering target to form the same
03/13/2003US20030047697 Preparation of radiation image storage panel
03/13/2003US20030047443 For providing sputtered atoms for deposition on a substrate
03/13/2003US20030047191 Method and apparatus for plasma cleaning of workpieces
03/13/2003US20030047139 Apparatus and method for introducing small amounts of refractory elements into a vapor deposition coating
03/12/2003EP1290715A2 Mobile plating system and method
03/12/2003EP1290240A1 Methods for replication, replicated articles, and replication tools
03/12/2003EP1289751A1 Coated article having the appearance of stainless steel
03/12/2003EP1289750A1 Coated article having the appearance of stainless steel
03/12/2003EP1198609B1 Process for producing a hard-material-coated component
03/12/2003EP0948662B1 A method for manufacturing an absorbent layer for solar collectors and a device for performing the method
03/12/2003CN1402800A Method and apparatus for coating substrate in vacuum
03/12/2003CN1402598A Method for mfg. field luminescence display device
03/12/2003CN1402589A Method for mfg. diamondoid composite diaphragm of loudspeaker
03/12/2003CN1401816A Ion beam reinforced magnetic control sputter diffusion coating apparatus process
03/12/2003CN1401815A Method and apparatus for vacuum film-coating of small size workpiece
03/12/2003CN1103054C Vapor deposition materials, optical amtrix with optical coatings and mfg method thereof
03/11/2003US6532134 Silicon coating on air bearing surface for magnetic thin film heads
03/11/2003US6532069 Particle-measuring system and particle-measuring method
03/11/2003US6531726 Lead zirconate titanate; conductive oxide film of a metal sputtered on said ferroelectric film
03/11/2003US6531403 Method of etching an object, method of repairing pattern, nitride pattern and semiconductor device
03/11/2003US6531324 MFOS memory transistor & method of fabricating same
03/11/2003US6530997 Use of gaseous silicon hydrides as a reducing agent to remove re-sputtered silicon oxide
03/11/2003US6530733 Substrate processing pallet and related substrate processing method and machine
03/06/2003WO2003019988A1 Multi-face forming mask device for vacuum deposition
03/06/2003WO2003019648A1 Semiconductor processing system
03/06/2003WO2003018865A1 Method and apparatus for producing uniform isotropic stresses in a sputtered film
03/06/2003WO2003018864A1 Vacuum arc vapor deposition process
03/06/2003WO2003018863A2 Method for producing a fluorescent material layer
03/06/2003WO2003018862A2 Method for producing a nanostructured coating
03/06/2003WO2003018506A1 Mixed sintered compact of silicon and silicon dioxide and method for preparation thereof
03/06/2003WO2003018270A1 Metallized cutlery and tableware
03/06/2003WO2002093664A8 Cesium dispensers and process for the use thereof
03/06/2003WO2002092873A3 Relationship to other applications and patents
03/06/2003WO2002081770A3 Room temperature luminescent erbium oxide thin films for photonics
03/06/2003WO2002078042A3 Neutral particle beam processing apparatus
03/06/2003WO2002040418A3 Method of making coated articles and coated articles made thereby
03/06/2003WO2002036846A3 Sputtering target assemblies
03/06/2003US20030045217 Superhard material article of manufacture
03/06/2003US20030045113 Fabrication method of semiconductor integrated circuit device
03/06/2003US20030045046 Process for forming a diffusion barrier material nitride film
03/06/2003US20030044682 Anode thin film for lithium secondary battery and preparation method thereof
03/06/2003US20030044652 Heat treatable coated article with anti-migration barrier between dielectric and solar control layer portion, and methods of making same
03/06/2003US20030044517 Method for manufacturing electroluminescence element and evaporation mask
03/06/2003US20030044516 Method for manufacturing electroluminescence display panel and evaporation mask
03/06/2003US20030043712 Phase change optical recording medium
03/06/2003US20030043464 Optical coatings and associated methods
03/06/2003US20030042226 Method of forming a nano-supported sponge catalyst on a substrate for nanotube growth
03/06/2003US20030042133 Method for depositing a metal barrier layer
03/06/2003US20030042132 Vacuum sputtering of oxide, carbide, nitride on rubber
03/06/2003US20030042131 Vapor deposition of films; high density plasma
03/06/2003US20030042130 Target for magnetron sputtering; generating, controlling magnetism; circulating tunnel loop
03/06/2003US20030041924 Hardness; lubricity; friction resistance; wear resistance; for use as automotive/aeronautical component, tool for injection molding, or for use in medicine (joint replacement)
03/06/2003US20030041894 Thin film flexible solar cell
03/06/2003US20030041801 Industrial vapor conveyance and deposition
03/06/2003US20030041654 Systems and methods of monitoring thin film deposition
03/06/2003DE10141522C1 Verfahren zur Herstellung einer Leuchtstoffschicht A process for preparing a phosphor layer
03/06/2003DE10119463C2 Verfahren zur Herstellung einer Chalkogenid-Halbleiterschicht des Typs ABC¶2¶ mit optischer Prozesskontrolle A process for producing a chalcogenide semiconductor layer of the type ABC¶2¶ with optical process control
03/05/2003EP1289033A2 Anode thin film for lithium secondary battery and preparation method thereof
03/05/2003EP1288332A2 Vacuum processing apparatus and method for processing an object
03/05/2003EP1288331A1 Vapor deposition crucible opened on both sides
03/05/2003EP1288174A1 Glass coated with heat reflecting colored film and method for manufacturing the same
03/05/2003EP1287545A2 Configurable vacuum system and method
03/05/2003EP1287172A2 High purity niobium and products containing the same, and methods of making the same
03/05/2003EP1286790A1 Combinatorial synthesis of material chips
03/05/2003EP0925386B1 Workpiece with wear-protective coating
03/05/2003CN2538813Y Projecting tube aluminium evaporation heater
03/05/2003CN1102743C Antireflection coating for temp. sensitive substrate
03/04/2003US6529321 Protective overcoat for replicated diffraction gratings
03/04/2003US6528812 Radiation image read-out method and apparatus
03/04/2003US6528805 Dose monitor for plasma doping system
03/04/2003US6528442 Sputtering target reduces occurrence of particles during sputtering, decreases the number of interruption or discontinuance of sputtering to improve production efficiency, and forms a protective film for optical disks with large
03/04/2003US6528189 Article with a protective coating system including an improved anchoring layer and method of manufacturing the same
03/04/2003US6528130 Liquefaction and cooling of oil smoke using vacuum and diffusion pumps; vapor deposition
03/04/2003US6528124 Disk carrier
03/04/2003US6528118 Placing mesh at predetermined distance above surface; applying material such that mesh causes a shadow effect on first material, forming groove; removing mesh; applying second material to first material to produce structured porosity
03/04/2003US6527919 Thin film stent
03/04/2003US6527866 Apparatus and method for deposition of thin films
02/2003
02/27/2003WO2003017332A1 Device for manipulation of a composite
02/27/2003WO2003017297A1 Methods and apparatus for depositing magnetic films
02/27/2003WO2003017258A1 Magnetic recording medium, its manufacturing method, and magnetic recording/reproducing apparatus
02/27/2003WO2003016589A1 Coatings with low permeation of gases and vapors
02/27/2003WO2003016585A1 Sintered tungsten target for sputtering and method for preparation thereof
02/27/2003WO2003016584A1 A process for the manufacturing of a sputter target
02/27/2003WO2003016583A1 A sputter target
02/27/2003WO2002091461A3 Ionized pvd with sequential deposition and etching
02/27/2003WO2002090613A3 Process for making platelets
02/27/2003WO2002082506A3 Continuous thermal evaporation system
02/27/2003WO2002072908A3 Rotary fluid bearing coatings and coining and processes for manufacturing the same
02/27/2003WO2002072278A3 Protective cage for coating of medical devices