| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 01/30/2003 | US20030021908 Gas cluster ion beam process for smoothing MRAM cells |
| 01/30/2003 | US20030021382 Method and apparatus for fabricating mercuric iodide polycrystalline films for digital radiography |
| 01/30/2003 | US20030021079 Ceramic film and manufacturing method therefor, ferroelectric capacitors, semiconductor device and other devices |
| 01/30/2003 | US20030020170 Method for fabricating a wiring line assembly for a thin film transistor array panel substrate |
| 01/30/2003 | US20030020157 Ceramic and method of manufacturing the same, dielectric capacitor, semiconductor device, and element |
| 01/30/2003 | US20030019858 Ceramic heater with thermal pipe for improving temperature uniformity, efficiency and robustness and manufacturing method |
| 01/30/2003 | US20030019841 Use of perfluoroketones as vapor reactor cleaning, etching, and doping gases |
| 01/30/2003 | US20030019839 Maintenance method and system for plasma processing apparatus etching and apparatus |
| 01/30/2003 | US20030019746 Hollow cathode target and methods of making same |
| 01/30/2003 | US20030019745 Oblique deposition apparatus |
| 01/30/2003 | US20030019740 A target body with a mirror-symmetrical, concavely constructed atomization surface and a magnetic circuit arrangement operable to generate a magnetic field over the surface; stable plasma discharge |
| 01/30/2003 | US20030019739 Multilayer film deposition apparatus, and method and apparatus for manufacturing perpendicular-magnetic-recording media |
| 01/30/2003 | US20030019582 Electrostatic control of deposition of, and etching by, ionized materials in semiconductor processing |
| 01/30/2003 | US20030019519 Substrate for solar cell, solar cell having the same, and production process of solar cell |
| 01/30/2003 | US20030019430 Vapor deposition system |
| 01/30/2003 | US20030019326 Sputtering target, method of making same, and high-melting metal powder material |
| 01/29/2003 | EP1278706A1 Manufacturing process of christmas tree decorations and racks for their fixing during this process |
| 01/29/2003 | EP1278631A2 Method of making reactive multilayer foil and resulting product |
| 01/29/2003 | EP1088116B1 Method for applying a coating system to surfaces |
| 01/29/2003 | EP0951579B1 Method of manufacturing hollow metal objects with elaborated cavities |
| 01/29/2003 | EP0914670B1 Cathode arc source |
| 01/29/2003 | EP0880694B1 Ultrasonic sputtering target testing method |
| 01/29/2003 | EP0779938B1 Double-sided reflector films |
| 01/29/2003 | CN1394344A Manufacturing device for substrate with transparent conductive film |
| 01/29/2003 | CN1393575A Molecular beam source apparatus for film deposition and method for depositing film by molecular beam |
| 01/29/2003 | CN1100269C Rapid photoelectric response material metal-insulator embedded cluster film and its preparing method |
| 01/28/2003 | US6512998 Sputter profile simulation method |
| 01/28/2003 | US6512667 Supercapacitor using iron oxide as active material of electrodes formed on current collector which is portion of peripheral surface of case, chassis, compartment, cover, frame or housing of appliance or vehicle |
| 01/28/2003 | US6512281 Method of forming a semiconductor device and an improved deposition system |
| 01/28/2003 | US6512240 Method and apparatus for reading a radiation image that has been stored in a photostimulable screen |
| 01/28/2003 | US6512229 Process for preparing a bolometer material and bolometer device |
| 01/28/2003 | US6511717 Method for coating substrates with improved substrate preheating |
| 01/28/2003 | US6511703 Protective overcoat for replicated diffraction gratings |
| 01/28/2003 | US6511702 Apparatus and method to control the molecular weight distribution of a vapor |
| 01/28/2003 | US6511587 Sputtering targets and method for the preparation thereof |
| 01/28/2003 | US6511585 Enhanced macroparticle filter and cathode arc source |
| 01/28/2003 | US6511584 Configuration for coating a substrate by means of a sputtering device |
| 01/23/2003 | WO2003007411A2 Method for producing a plasma-polymerized polymer electrolyte membrane and a polyazol membrane coated by plasma-polymerization |
| 01/23/2003 | WO2003007059A1 Substrate with ito coating film and manufacture thereof |
| 01/23/2003 | WO2003006706A1 Method for making diamond-coated composite materials |
| 01/23/2003 | WO2003006704A1 Method and device for producing an optically effective system of layers |
| 01/23/2003 | WO2003006703A1 A method for reactive sputtering deposition |
| 01/23/2003 | WO2003006702A1 Hafnium silicide target for gate oxide film formation and its production method |
| 01/23/2003 | WO2003006701A1 Method of depositing aluminium nitride |
| 01/23/2003 | WO2003006393A1 Visible-light-responsive photoactive coating, coated article, and method of making same |
| 01/23/2003 | WO2002057507A9 Method for making a film by pulsed laser ablation |
| 01/23/2003 | WO2002043905A3 A method and apparatus for the production of metal powder granules by electric discharge |
| 01/23/2003 | US20030018381 Manufacturing medical devices by vapor deposition |
| 01/23/2003 | US20030017717 Methods for forming dielectric materials and methods for forming semiconductor devices |
| 01/23/2003 | US20030017714 Substrate processing apparatus and method for manufacturing semiconductor device |
| 01/23/2003 | US20030017371 Layer of a metal oxide dopant and exposing to ultraviolet radiation |
| 01/23/2003 | US20030017297 Panel display device and method for forming protective layer within the same |
| 01/23/2003 | US20030017277 Laser energy strikes a target substrate comprising a rheological fluid, causing a portion of the rheological fluid to evaporate and propel a jet of nonevaporated rheological fluid onto a receiving substrate |
| 01/23/2003 | US20030017259 Method of manufacturing electroluminescence display apparatus |
| 01/23/2003 | US20030017258 After a substrate and a mask disposed below the substrate are aligned with each other while an upper surface of the substrate is supported by adsorption, an elctroluminescence element material is adhered to the substrate through mask |
| 01/23/2003 | US20030016460 Antiglare optical device |
| 01/23/2003 | US20030016346 Method for forming optical thin films on substrate at high accuracy and apparatus therefor |
| 01/23/2003 | US20030015432 Container-shaped physical vapor deposition targets |
| 01/23/2003 | US20030015420 Low price, disposability, reduced drift of the device and suitability for biomedical and pharmaceutical applications |
| 01/23/2003 | US20030015140 Physical vapor deposition of organic layers using tubular sources for making organic light-emitting devices |
| 01/23/2003 | US20030015136 Workpiece support |
| 01/23/2003 | DE4332674C2 Vorrichtung zum Arretieren eines flachen, vorzugsweise kreisscheibenförmigen Substrats am Substratteller einer Vakuumbeschichtungsanlage A device for locking a flat, preferably circular disc-shaped substrate on the substrate plate of a vacuum coating system |
| 01/23/2003 | CA2453934A1 Method for making diamond-coated composite materials |
| 01/23/2003 | CA2448447A1 Method for producing a plasma-polymerized polymer electrolyte membrane and a polyazol membrane coated by plasma-polymerization |
| 01/22/2003 | EP1278244A2 Panel display device and method for forming protective layer within the same |
| 01/22/2003 | EP1278230A2 Dual wafer load lock |
| 01/22/2003 | EP1278094A2 Geometrical beamsplitter and method for manufacturing the same |
| 01/22/2003 | EP1278042A1 Method for forming optical thin films on substrate at high accuracy and apparatus therefor |
| 01/22/2003 | EP1277233A2 Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module |
| 01/22/2003 | EP1183404B1 Device for coating bottles and bodies for transporting bottles |
| 01/22/2003 | CN1392904A Method for producing evaporation source |
| 01/22/2003 | CN1392816A Coating method and device for solder material |
| 01/22/2003 | CN1392286A Process for prapring vanadium oxide film |
| 01/22/2003 | CN1099682C Metal oxidation film resistor and mfg. technology thereof |
| 01/21/2003 | US6509102 Titanium film |
| 01/21/2003 | US6509083 High coercivity magnetic recording medium comprising a sputter textured layer |
| 01/21/2003 | US6509070 Laser ablation, low temperature-fabricated yttria-stabilized zirconia oriented films |
| 01/21/2003 | US6509069 Method of reducing the cleaning requirements of a dielectric chuck surface |
| 01/21/2003 | US6509066 Sensitized photoconductive infrared detectors |
| 01/21/2003 | US6509065 Plasma enhanced chemical deposition of conjugated polymer |
| 01/21/2003 | US6509061 Maintaining relatively small vapour incidence angle andadequate deposition rate for industrial use; uniformity; microtip electron source for flat screens |
| 01/21/2003 | US6508990 In situ monitoring and controlling removal of contaminants from semiconductor surface using infrared radiation |
| 01/21/2003 | US6508885 Edge sealing structure for substrate in low-pressure processing environment |
| 01/21/2003 | US6508883 Throughput enhancement for single wafer reactor |
| 01/21/2003 | US6508632 Physical vapor deposition (PVD), which is also referred to as "sputtering"; alloy sheets parallel to and spaced apart from the screens that define the confinement volume |
| 01/21/2003 | US6508473 Piston ring |
| 01/16/2003 | WO2003005504A1 Planar waveguide amplifier |
| 01/16/2003 | WO2003005477A2 Thin film battery and method of manufacture |
| 01/16/2003 | WO2003005077A1 Thin film forming method and thin film forming device |
| 01/16/2003 | WO2003004722A1 Method for cleaning reaction container and film deposition system |
| 01/16/2003 | WO2003004720A1 Apparatus for vacuum vaporization |
| 01/16/2003 | WO2003004719A1 Mask and substrate holder arrangement |
| 01/16/2003 | WO2003004174A1 Masking article for use in vehicle manufacturing |
| 01/16/2003 | WO2002049119A3 Thin film flexible solar cell |
| 01/16/2003 | WO2002043104A3 Hybrid scanning system and methods for ion implantation |
| 01/16/2003 | WO2002042516A3 Sputter deposition of lithium phosphorous oxynitride material |
| 01/16/2003 | WO2002021627A3 Thin film battery and method of manufacture |
| 01/16/2003 | US20030014314 Manufacturing flow control method and system |
| 01/16/2003 | US20030014140 Product management system, and host computer and recorded medium used in the system |
| 01/16/2003 | US20030012981 Method of manufacturing electroluminescence display apparatus |