| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 02/13/2003 | US20030032750 Biaxially oriented polypropylene metallized film for packaging |
| 02/13/2003 | US20030031928 Electrochemical device |
| 02/13/2003 | US20030031882 Genuine gold coating process and product |
| 02/13/2003 | US20030031805 Method for producing cutting tools |
| 02/13/2003 | US20030031791 Exposing high-purity copper to a plasma of a chlorine gas to etch the high-purity copper, and form copper chlorides, transporting said copper chlorides onto the surface of a substrate to be coated; efficiency, purity |
| 02/13/2003 | US20030030961 Method and apparatus for chucking a substrate |
| 02/13/2003 | US20030030910 Multi-layer antistatic/antireflective coating for video display screen with adjustable light transmission |
| 02/13/2003 | US20030030879 Deposition system design for arrayed wave-guide grating |
| 02/13/2003 | US20030030377 Plasma display panel and fabrication method of the same |
| 02/13/2003 | US20030030078 MOS transistor having aluminum nitrade gate structure and method of manufacturing same |
| 02/13/2003 | US20030030013 Apparatus for implanting an ion on a target and method for the same |
| 02/13/2003 | US20030029727 Calculating the reaction rates for desired reagents of the gas plasma and of a metal and/or metal compound to be deposited, simulating the edge coverage of a predetermined structure with the deposited metal; comparing an experimental verification |
| 02/13/2003 | US20030029716 Uses quarter wavelength antenna and electron cyclotron resonance magnets to enhance the plasma density to improve the qulaity |
| 02/13/2003 | US20030029715 An Apparatus For Annealing Substrates In Physical Vapor Deposition Systems |
| 02/13/2003 | US20030029610 Thermally conductive chuck for vacuum processor |
| 02/13/2003 | US20030029382 Thin film forming method and apparatus |
| 02/13/2003 | DE4421144C2 Beschichtetes Werkzeug mit erhöhter Standzeit Faced with increased tool life |
| 02/13/2003 | CA2454446A1 Method and apparatus for fabricating mercuric iodide polycrystalline films for digital radiography |
| 02/12/2003 | EP1282919A1 Indium-tin-oxide (ito) layer and method for producing the same |
| 02/12/2003 | EP0973955B1 Method for producing a coating containing titanium boride |
| 02/12/2003 | EP0853136B1 Aluminum or aluminum alloy sputtering target |
| 02/12/2003 | CN1396964A Composite element and method for preparation thereof |
| 02/12/2003 | CN1396844A Method and apparatus for processing insulating substrates |
| 02/12/2003 | CN1396801A Process for integrating metal electrodes to diamond stock |
| 02/12/2003 | CN1396630A Process for preparing Ge crystal film on non-crystal material by magnetically controlled sputtering |
| 02/12/2003 | CN1396306A Plating and osmosizing combined process for preparing multiple elements osmosized anticorrosion Ni-base-alloy |
| 02/12/2003 | CN1396301A Vacuum steam coating polymerization device and method for forming organic envelope using the device |
| 02/12/2003 | CN1396300A Process for preparing large-area zinc oxide film with nano lines by physical gas-phase deposition |
| 02/12/2003 | CN1396042A Adhesive film recovery device and method |
| 02/12/2003 | CN1101593C Method and apparatus for ion beam formation in ion implanter |
| 02/11/2003 | US6518193 Substrate processing system |
| 02/11/2003 | US6517692 Apparatus for flow-line treatment of articles in an artificial medium |
| 02/11/2003 | US6517691 Substrate processing system |
| 02/11/2003 | US6517687 Ultraviolet filters with enhanced weatherability and method of making |
| 02/11/2003 | US6517249 Bearing with amorphous boron carbide coating |
| 02/11/2003 | US6516814 Method of rapid prevention of particle pollution in pre-clean chambers |
| 02/06/2003 | WO2003010112A1 Silicon monoxide sintered product and method for production thereof |
| 02/06/2003 | WO2003009998A1 Deposition film |
| 02/06/2003 | WO2002093664A3 Cesium dispensers and process for the use thereof |
| 02/06/2003 | WO2002069380A3 Atomically thin highly resistive barrier layer in a copper via |
| 02/06/2003 | WO2001086282A8 Cleanliness evaluation in sputter targets using phase |
| 02/06/2003 | US20030027019 Magnetic disk comprising a first carbon overcoat having a high SP3 content and a second carbon overcoat having a low SP3 content |
| 02/06/2003 | US20030027015 Fr metal machining |
| 02/06/2003 | US20030027013 Thermal barrier coating |
| 02/06/2003 | US20030027000 Formed via chemical vapor deposition onto float glass ribbon; photocatalytic upon exposure to electromagnetic energy; insulating glass window panes |
| 02/06/2003 | US20030026990 Method for forming carbonaceous hard films |
| 02/06/2003 | US20030026903 Systems and methods for fabrication of coating libraries |
| 02/06/2003 | US20030026901 Glass, ceramic plate with recesses; high temperature infrared radiators |
| 02/06/2003 | US20030026601 Vapor deposition and in-situ purification of organic molecules |
| 02/06/2003 | US20030026014 ND filter having composite PVD film of metal and its oxide |
| 02/06/2003 | US20030026001 Geometric beamsplitter and method for its fabrication |
| 02/06/2003 | US20030024808 Methods of sputtering using krypton |
| 02/06/2003 | US20030024807 A gas supply provides a chemically reactive molecular gas to an ion source that generates a divergent ion current directed at a target. |
| 02/06/2003 | US20030024479 Vacuum deposition apparatus |
| 02/05/2003 | EP1282161A1 LOW RELATIVE PERMITTIVITY SIO x? FILM, PRODUCTION METHOD, SEMICONDUCTOR DEVICE COMPRISING THE FILM |
| 02/05/2003 | EP1282139A1 Multilayer-coated reflective mirrors for x-ray optical systems, and methods for producing same |
| 02/05/2003 | EP1282116A1 Polycrystalline structure film and method of making same |
| 02/05/2003 | EP1281788A1 Sprayed ZrO2 thermal barrier coating with vertical cracks |
| 02/05/2003 | EP1281513A2 Method of making abrasion resistant laminates using coated pressing surfaces |
| 02/05/2003 | EP1281512A1 Biaxially oriented polypropylene metallized film for packaging |
| 02/05/2003 | EP1280565A2 Self-supporting laminated films, structural materials and medical devices |
| 02/05/2003 | EP1127173B1 Apparatus for flow-line treatment of articles in an artificial medium |
| 02/05/2003 | CN1395726A Magnetic recording medium, method of mfg. thereof, and megnetic recording device |
| 02/05/2003 | CN1395465A Method for forming electromagnetic wave interference shading film on non-conductive material |
| 02/05/2003 | CN1395453A Method for manufacturing electric field luminous display device |
| 02/05/2003 | CN1395452A Method for manufacturing electric field luminous display device |
| 02/05/2003 | CN1395298A Forming method and device for barrier layer of semiconductor element |
| 02/05/2003 | CN1395270A Catalyst for forming carbon fibre, its making method and electronic transmitter |
| 02/05/2003 | CN1395138A Method for manufacturing indium-tin oxide film |
| 02/05/2003 | CN1394983A Method for preparing boron target |
| 02/05/2003 | CN1100772C Process for hydrogenating dihydrofuranes to tetrahydrofuranes |
| 02/04/2003 | US6515843 Semiconductor capacitive device |
| 02/04/2003 | US6515288 Vacuum bearing structure and a method of supporting a movable member |
| 02/04/2003 | US6514870 In situ wafer heat for reduced backside contamination |
| 02/04/2003 | US6514835 Stress control of thin films by mechanical deformation of wafer substrate |
| 02/04/2003 | US6514826 Method of forming a gate electrode in a semiconductor device |
| 02/04/2003 | US6514814 Capacitor containing amorphous and polycrystalline ferroelectric films and fabrication method therefor, and method for forming amorphous ferroelectric film |
| 02/04/2003 | US6514642 Phase shift mask and method of manufacture |
| 02/04/2003 | US6514577 Surface treatment method for a contact portion of a diaphragm spring |
| 02/04/2003 | US6514390 Induction coupled plasma (ICP) generators, for coating semiconductor wafers by coupling electromagnetic energy and magnetically shielding targets; noncontamination |
| 02/04/2003 | US6514389 Method of processing a workpiece |
| 02/04/2003 | US6514348 Substrate processing apparatus |
| 02/04/2003 | US6513451 Controlling the thickness of an organic layer in an organic light-emiting device |
| 01/30/2003 | WO2003009394A1 Method of film-forming transparent electrode layer and device therefor |
| 01/30/2003 | WO2003009367A1 Hafnium silicide target for forming gate oxide film and method for preparation thereof |
| 01/30/2003 | WO2003009318A2 Support with getter-material for microelectronic, microoptoelectronic or micromechanical device |
| 01/30/2003 | WO2003009317A2 Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 01/30/2003 | WO2003009015A1 Optical element having lanthanum fluoride film |
| 01/30/2003 | WO2003008661A1 Sputtering target and transparent conductive film |
| 01/30/2003 | WO2003008660A1 Depositing a tantalum film |
| 01/30/2003 | WO2003008658A1 Ito sintered body sputtering target for forming high-resistance film and its manufacturing method |
| 01/30/2003 | WO2003008656A2 Sputtering targets, sputter reactors, methods of forming cast ingots, and methods of forming metallic articles |
| 01/30/2003 | WO2002088413A3 Sputter targets comprising ti and zr |
| 01/30/2003 | US20030022492 Metal film and manufacturing method therefor, and laminated ceramic electronic component and manufacturing method therefor |
| 01/30/2003 | US20030022487 Barrier formation using novel sputter-deposition method |
| 01/30/2003 | US20030022463 Use of membrane properties to reduce residual stress in an interlayer region |
| 01/30/2003 | US20030022030 Barium strontium titanate buffer layer |
| 01/30/2003 | US20030022029 Surface coated sintered alloy member |
| 01/30/2003 | US20030022027 Stick resistant ceramic coating for cookware |
| 01/30/2003 | US20030021971 Use of membrane properties to reduce residual stress in an interlayer region |