Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
06/2003
06/12/2003US20030108805 Aligning mask segments to provide an assembled mask for producing oled devices
06/12/2003US20030108778 Surface-coated carbide alloy tool
06/12/2003US20030108673 Comprises aluminum/zinc vapor deposited films; for rare earth metal-based permanent magnets
06/12/2003US20030108672 Method and device for synthesizing diamond
06/12/2003US20030108671 Composite material comprising a substrate with a barrier layer
06/12/2003US20030108665 Fabricating fluoride crystal materials such as calcium fluoride, magnesium fluoride, suitable for optical elements, lenses, window materials, prisms, employed in a wide wavelength range
06/12/2003US20030107818 Optical thin film and manufacturing method thereof
06/12/2003US20030107098 Ultraviolet-transparent conductive film and process for producing the same
06/12/2003US20030107075 Method for forming refractory metal-silicon-nitrogen capacitors and structures formed
06/12/2003US20030106881 Dry surface cleaning apparatus
06/12/2003US20030106791 Vacuum; continuous traveling web
06/12/2003US20030106790 Programmable flux gradient apparatus for co-deposition of materials onto a substrate
06/12/2003US20030106789 Chamber for the transport of workpieces in a vacuum atmosphere, a chamber combination and a method for transporting a workpiece
06/12/2003US20030106616 Method of producing exchange coupling film and method of producing magnetoresistive sensor by using exchange coupling film
06/12/2003US20030106196 Sputter mask plate having surfaces and apertures having dual counterbore construction
06/12/2003DE10207835C1 Channel spark source for a stable electron beam e.g. an electron gun, has a conical sleeve in the hollow cathode with a gas feed and an adjusted pressure drop to give a large number of shots without loss of beam quality
06/11/2003EP1318541A2 Aligning mask segments to provide an assembled mask for producing oled devices
06/11/2003EP1318209A1 Sputtering apparatus and film forming method
06/11/2003EP1318208A2 Method of depositing heusler alloy thin film by co-sputtering
06/11/2003EP1318207A1 Silicon monoxide vapor deposition material, process for producing the same, raw material for producing the same, and production apparatus
06/11/2003EP1317764A2 Faraday system for ion implanters
06/11/2003EP1317353A1 Method for providing a semitransparent metallic aspect to cosmetic case or compact components and resulting components
06/11/2003EP1115919B1 Effusion cell and method of use in molecular beam epitaxy
06/11/2003EP0944745B1 Process and device for forming a coating on a substrate by cathode sputtering
06/11/2003CN1423833A Method and apparatus for plasma cleaning of workpieces
06/11/2003CN1423511A Tension mask assembly for vacuum deposition organic electrofluorescent device film
06/11/2003CN1422978A Clamp of contactless fixture mode for cavity surface evaporating coating of semiconductor laser
06/11/2003CN1422977A Method for depositing Hersler alloy film by co-sputtering method
06/11/2003CN1422976A Thermal phisical steam depositing source for producing organic luminescent device
06/11/2003CN1422607A Needle with coating for muscle stimulation treatment device
06/11/2003CN1111140C Product with coating
06/10/2003US6577915 To predict ion and neutral flux distributions on a substrate as a function of reactor settings using a calibrated profile simulator during semiconductor plasma processing
06/10/2003US6576566 Apparatus and method for forming thin film at low temperature and high deposition rate
06/10/2003US6576523 Layered product, capacitor and a method for producing the layered product
06/10/2003US6576349 Heat treatable low-E coated articles and methods of making same
06/10/2003US6576294 Method for forming barrier film
06/10/2003US6575671 Chromium-containing cemented tungsten carbide body
06/10/2003US6575552 Positive pulsed voltage and a negative pulsed voltage is applied to the article in a plasma containing ions to be implanted to implant ions in the article surface. This implants ions at right angles
06/10/2003CA2234031C Dual-walled exhaust tube for vacuum pump
06/05/2003WO2003046903A1 Method of manufacturing disk-like optical recording medium and the optical recording medium
06/05/2003WO2003046255A1 Field emission device and method of fabricating same
06/05/2003WO2003046252A2 Buffing diamond-like carbon (dlc) to improve scratch resistance
06/05/2003WO2003046251A1 Vacuum-coating facility for coating web material
06/05/2003WO2003046250A1 Sputtering target and production method therefor
06/05/2003WO2003046249A1 MgO VAPOR DEPOSITION MATERIAL AND METHOD FOR PREPARATION THEREOF
06/05/2003WO2003046248A2 Improved method for coating a support
06/05/2003WO2003046247A1 METHOD OF SYNTHESIZING A COMPOUND OF THE FORMULA Mn+1AXn, FILM OF THE COMPOUND AND ITS USE
06/05/2003WO2003046246A1 Device and method for vacuum film formation
06/05/2003WO2003046245A2 Process for making angstrom scale and high aspect functional platelets
06/05/2003WO2003045836A1 Differential stress reduction in thin films
06/05/2003WO2003045554A1 Method and apparatus for producing photocatalyst element
06/05/2003WO2002042513A3 Hollow cathode target and methods of making same
06/05/2003US20030104254 Substrate after coating is subjected to a dry blast treatment using a granular blast agent that has a maximum diameter of 150 mu m.
06/05/2003US20030104220 High transmittance, low emissivity coatings for substrates
06/05/2003US20030104187 Reflection preventing film
06/05/2003US20030104185 Method for producing a multi-functional, multi-ply layer on a transparent plastic substrate and a multi-functional multi-ply layer produced according to said method
06/05/2003US20030104142 Generation and control of a magnetic field by a magnetic filter.
06/05/2003US20030103857 Sputter target made of a silicon alloy and process for producing a sputter target
06/05/2003US20030102811 Plasma coil
06/05/2003US20030102288 System and method for production of optically transparent and electrically conductive
06/05/2003US20030102208 Low pressure ionization; using magnet
06/05/2003US20030101937 Thermal physical vapor deposition source for making an organic light-emitting device
06/05/2003US20030101932 Tension mask assembly for use in vacuum deposition of thin film of organic electroluminescent device
06/05/2003CA2467912A1 Process for making angstrom scale and high aspect functional platelets
06/04/2003EP1316986A1 Vacuum arc vapor deposition process and apparatus
06/04/2003EP1316849A2 Method of removing color centers from film coated fluoride optical elements
06/04/2003EP1316627A1 Hard coating coated parts
06/04/2003EP1316625A1 Thermal physical vapor deposition source
06/04/2003EP1315845A1 Method for producing a coating of fluorescent material
06/04/2003EP1315682A2 Methods of obtaining photoactive coatings and/or anatase crystalline phase of titanium oxides and articles made thereby
06/04/2003EP1228262B1 Method and device for production of plane-parallel wafers
06/04/2003EP1007757B1 Plastic containers with an external gas barrier coating
06/04/2003EP0889927B1 Process for producing an adhesive coating on polymethyl methacrylate (pmma) substrate surfaces
06/04/2003CN1421937A Position mask part of combine mask provided for producing organic luminous diode
06/04/2003CN1421542A Organic material evaporating source
06/04/2003CN1110862C Thin film piezoelectric array with enhanced coupling and fabrication method thereof
06/04/2003CN1110844C Method for forming barrier layer
06/04/2003CN1110841C Sputtering apparatus and method for producing semiconductor device with the same
06/03/2003USH2066 Puddles; two-dimensional arrays; Josephson junctions
06/03/2003US6574060 Magnetic storage apparatus
06/03/2003US6573542 Capacitor electrodes arrangement with oxygen iridium between silicon and oxygen barrier layer
06/03/2003US6573517 Ion implantation apparatus
06/03/2003US6572940 Coatings with a silver layer
06/03/2003US6572744 Dual collimated deposition apparatus and method of use
06/03/2003US6572738 Vacuum treatment system and process for manufacturing workpieces
06/03/2003US6571865 Heat transfer surface
06/03/2003US6571729 Apparatus for depositing a thin film on a data recording disk
06/03/2003US6571728 Process for producing organic electroluminescent display and apparatus for producing the same
05/2003
05/30/2003WO2003044838A1 Method of manufacturing high-mobility organic thin films using organic vapor phase deposition
05/30/2003WO2003044836A2 High temperature superconducting composite conductors
05/30/2003WO2003044241A1 Spattering target for use in forming preventive film for optical recording medium, method for preparing the target, and optical recording medium having preventive film formed by use of the target
05/30/2003WO2003044240A1 Ionic plasma deposition apparatus
05/29/2003US20030099835 Scratch resistance (SR) of a coated article is improved by buffing the coated article after deposition of the layer(s) of the coating. For example, in certain embodiments a diamond-like carbon (DLC) inclusive layer(s) is deposited on a
05/29/2003US20030099416 Rolling sliding member and rolling apparatus
05/29/2003US20030099038 Thin film filter for optical multiplexer/demultiplexer
05/29/2003US20030098124 Aligning mask segments to provide a stitched mask for producing oled devices
05/29/2003US20030098103 High-purity aluminum sputter targets and method of manufacture
05/29/2003US20030098102 >/= 99.999 weight% aluminum and having a grain structure >/= 99% recrystallized and size of < 125 mu m
05/29/2003US20030097989 Vapor deposition crucible
05/28/2003EP1315218A2 Aligning mask segments to provide a stitched mask for producing oled devices