| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 06/26/2003 | US20030118412 Surface-coated machining tools |
| 06/26/2003 | US20030116849 Sputter target, barrier film and electronic component |
| 06/26/2003 | US20030116714 Radiation detector and method of manufacture thereof |
| 06/26/2003 | US20030116528 Metal alloy elements in micromachined devices |
| 06/26/2003 | US20030116432 Adjustable throw reactor |
| 06/26/2003 | US20030116427 Self-ionized and inductively-coupled plasma for sputtering and resputtering |
| 06/26/2003 | US20030116426 Thin film; concurrent sputtering; random access memory |
| 06/26/2003 | US20030116425 Electric arc spraying; controlling film thickness, surface roughness |
| 06/26/2003 | US20030116276 Methods of roughening a ceramic surface |
| 06/26/2003 | US20030116090 Apparatus and method for direct current plasma immersion ion implantation |
| 06/26/2003 | US20030116088 Deposition apparatus for organic light-emitting devices |
| 06/26/2003 | US20030115984 Cemented carbide with binder phase enriched surface zone |
| 06/26/2003 | CA2470959A1 Film forming device, and production method for optical member |
| 06/26/2003 | CA2470332A1 Amorphous iron-silicide film exhibiting semiconductor characteristics and method of preparing same |
| 06/25/2003 | EP1321542A1 Thermal barrier coating systems and materials |
| 06/25/2003 | EP1321541A2 Nickel aluminide coating and coating systems formed therewith |
| 06/25/2003 | EP1321537A1 Cylindrical target and method of manufacturing the cylindrical target |
| 06/25/2003 | EP1320867A2 Reducing deposition of process residues on a surface in a chamber |
| 06/25/2003 | EP1320636A1 Method and device for depositing especially, organic layers by organic vapor phase deposition |
| 06/25/2003 | EP1060284B1 Protecting layer |
| 06/25/2003 | EP1038051B1 Thermal barrier coating ceramic structure |
| 06/25/2003 | EP0900132B1 Method employing uv laser pulses of varied energy density to form blind vias in multilayered targets |
| 06/25/2003 | EP0871792B1 Process for coating a substrate with titanium dioxide |
| 06/25/2003 | CN2557533Y Rolling-ball all position ion-implantation and deposition surface reinforced treatment device |
| 06/25/2003 | CN1426488A Cemented carbide tool and method of making |
| 06/25/2003 | CN1426118A Device for producing electroluminescence display and steam coating using electromagnet and steam coating method for said device |
| 06/25/2003 | CN1112461C Durable sputtered metal oxide coating |
| 06/24/2003 | US6583544 Ion source having replaceable and sputterable solid source material |
| 06/24/2003 | US6583381 Precision controlling energy beam during material removal or tranfer |
| 06/24/2003 | US6582779 Silicon nitride components with protective coating |
| 06/24/2003 | US6582641 Apparatus and method for making metal oxide sputtering targets |
| 06/24/2003 | US6582572 Target fabrication method for cylindrical cathodes |
| 06/24/2003 | US6582569 A DC magnetron sputter reactor for sputtering copper, its method of use, and shields and other parts promoting self-ionized plasma (SIP) sputtering. Also, a method of coating copper into a narrow and deep via or trench using SIP |
| 06/24/2003 | US6582568 A fixture configured to position a wafer adjacent a plasma; a first target comprising a metal; a second target comprising a first material; and a sputtering device adapted to (i) sputter said metal from said first target onto a surface of said wafer |
| 06/24/2003 | US6582566 Process and device for reducing the ignition voltage of plasmas operated using pulses of pulsed power |
| 06/24/2003 | US6582535 Tungsten target for sputtering and method for preparing thereof |
| 06/24/2003 | US6582523 Organic source boat structure for organic electro-luminescent display fabricating apparatus |
| 06/24/2003 | US6581669 Sputtering target for depositing silicon layers in their nitride or oxide form and a process for its preparation |
| 06/24/2003 | US6581258 Method of forming electrode film |
| 06/24/2003 | CA2298278C Composite film and process for its manufacture |
| 06/21/2003 | CA2412455A1 Stabilized zirconia thermal barrier coating with hafnia |
| 06/19/2003 | WO2003050322A1 Ito sputtering target with few nodules |
| 06/19/2003 | US20030113591 Low pressure coated article having the appearance of stainless steel |
| 06/19/2003 | US20030113590 Formed by electroplating nickel and refractory nitride/alloy layers; vapor deposition; abrasion/corrosion resistance |
| 06/19/2003 | US20030113589 Low pressure coated article with polymeric basecoat having the appearance of stainless steel |
| 06/19/2003 | US20030113588 Magnetic recording medium and method of manufacturing the same |
| 06/19/2003 | US20030113558 Low pressure coated article with polymeric basecoat having the appearance of stainless steel |
| 06/19/2003 | US20030113557 Low pressure coated article with polymeric basecoat |
| 06/19/2003 | US20030113543 Polymer layer; vapor deposited layer of refractory metal or alloy nitride; having the appearance of nickel |
| 06/19/2003 | US20030113481 Directly forming individual anti-reflection, active, and electrode layers without going through the intermediate steps. |
| 06/19/2003 | US20030111342 Sputter coating apparatus |
| 06/19/2003 | US20030111335 Antiferromagnetic layer and a ferromagnetic layer laminate |
| 06/18/2003 | EP1319732A1 Film formation apparatus and method and cleaning method |
| 06/18/2003 | EP1319730A1 High temperature corrosion resistant alloy, thermal barrier coating material with metal bonding layer, and gas turbine using high temperature corrosion resistant alloy |
| 06/18/2003 | EP1319092A1 Substrate with photocatalytic coating |
| 06/18/2003 | EP0912641B1 Multilayer interference pigment with transparent central layer |
| 06/18/2003 | CN1425196A Conductive interconnections |
| 06/18/2003 | CN1425194A Method of depositing metal film and metal deposition cluster including supercritical drying/cleaning module |
| 06/18/2003 | CN1425189A Method of manufacturing group-III nitride compound semiconductor |
| 06/18/2003 | CN1425187A Method and apparatus for ionized physical vapor deposition |
| 06/18/2003 | CN1425186A Method and device for separating ion mass, and ion doping device |
| 06/18/2003 | CN1424867A Ion beam radiation device and method for choking basis charge accumulation |
| 06/18/2003 | CN1424775A Mask for producing organic LED device by calibrating multiple madk sections for assembly |
| 06/18/2003 | CN1424734A Preparation for vacuum capacitive sensor dielectric film |
| 06/18/2003 | CN1424598A Optical systems |
| 06/18/2003 | CN1424434A Tools for coating hard film |
| 06/18/2003 | CN1424428A Method and device for vacuum arc vapour deposition |
| 06/18/2003 | CN1424427A Thin film depositing devices |
| 06/18/2003 | CN1424424A Large-area sedimentation devices for preparing film by ultrasonic atomizing effect |
| 06/18/2003 | CN1111903C Process for manufacture of highlyÔÇÿepsilonÔÇÖdielectric or ferroelectric coating |
| 06/18/2003 | CN1111902C Semiconductor device with aluminum containing interconnected wires |
| 06/18/2003 | CN1111656C Bearing liners and their manufacture |
| 06/17/2003 | US6580057 Enhanced cooling IMP coil support |
| 06/17/2003 | US6580051 Direct and efficient conversion of ceramic material |
| 06/17/2003 | US6579786 Method for depositing a two-layer diffusion barrier |
| 06/17/2003 | US6579634 Plurality of magnetic components embedded in a pattern in an isolating component comprising a magnetic component of large coercive force and one of a magnetic component of small coercive force |
| 06/17/2003 | US6579627 Nickel-base superalloy with modified aluminide coating, and its preparation |
| 06/17/2003 | US6579624 Functional film having optical and electrical properties |
| 06/17/2003 | US6579609 Molded resin article consisting essentially of crystallizable polyester resin derived from aliphatic and/or cycloaliphatic diols and aromatic dicarboxylic acids, and nucleating agent, having specified heat deflection temperature |
| 06/17/2003 | US6579590 Thermally-assisted magnetic recording disk with multilayered thermal barrier |
| 06/17/2003 | US6579567 Process for selectively masking turbine components during vapor phase diffusion coating |
| 06/17/2003 | US6579467 Ferroelectric composition, ferroelectric vapor deposition target and method of making a ferroelectric vapor deposition target |
| 06/17/2003 | US6579463 Tunable nanomasks for pattern transfer and nanocluster array formation |
| 06/17/2003 | US6579431 Diffusion bonding of high purity metals and metal alloys to aluminum backing plates using nickel or nickel alloy interlayers |
| 06/17/2003 | US6579428 Arc evaporator, method for driving arc evaporator, and ion plating apparatus |
| 06/17/2003 | US6579427 Coated articles |
| 06/17/2003 | US6579426 Use of variable impedance to control coil sputter distribution |
| 06/17/2003 | US6579425 System and method for forming base coat and thin film layers by sequential sputter depositing |
| 06/17/2003 | US6579424 Method for the production of substrates, magnetron source and sputter-coating chamber |
| 06/17/2003 | US6579423 Light transmitting electromagnetic wave filter and process for producing the same |
| 06/17/2003 | US6579422 Method and apparatus for manufacturing flexible organic EL display |
| 06/17/2003 | US6579421 Transverse magnetic field for ionized sputter deposition |
| 06/17/2003 | US6579420 An improved scanning apparatus, a highly uniform thin film is deposited on a substrate with material sputtered from targets by collisions with energetic ion beams |
| 06/17/2003 | US6578881 Fluid-tight pipe union |
| 06/12/2003 | WO2003048407A1 Gcib processing to improve interconnection vias and improved interconnection via |
| 06/12/2003 | WO2003048406A2 Coating method and coating |
| 06/12/2003 | WO2003048064A1 Heat treatable coated article with anti-migration barrier between dielectric and solar control layer portion, and methods of making same |
| 06/12/2003 | WO2002079815B1 Bipolar plasma source, plasma sheet source, and effusion cell utilizing a bipolar plasma source |
| 06/12/2003 | US20030109092 Surface smoothing device and method thereof |
| 06/12/2003 | US20030109076 Method for producing group-III nitride compound semiconductor device |