| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 09/18/2003 | US20030175422 Applying lubricant by vapor deposition |
| 09/18/2003 | US20030175142 Rare-earth pre-alloyed PVD targets for dielectric planar applications |
| 09/18/2003 | US20030174610 Information recording media, manufacturing technique and information recording method |
| 09/18/2003 | US20030173217 High-power ion sputtering magnetron |
| 09/18/2003 | US20030173216 Sputtertarget |
| 09/18/2003 | US20030173215 Sputtering target with a partially enclosed vault |
| 09/18/2003 | US20030173208 Forming a tapered waveguide, comprising: depositing a core layer over a substrate with a shadow mask; and patterning the core layer |
| 09/18/2003 | US20030173207 Biased pulse DC reactive sputtering of oxide films |
| 09/18/2003 | US20030173029 Plasma processing apparatus |
| 09/18/2003 | US20030172953 Of a vacuum apparatus, especially one that forms films on the surface of an optical element for use in a semiconductor exposure system, etc. |
| 09/18/2003 | US20030172508 Rapid cycle chamber having a top vent with nitrogen purge |
| 09/17/2003 | EP1344863A1 Ironing sole plate with hardened and coated surface |
| 09/17/2003 | EP1344652A2 Transfer of organic material from a donor to form a layer in an oled device |
| 09/17/2003 | EP1123455B1 Product with a heat insulating layer and method for the production of a heat insulating layer |
| 09/17/2003 | EP1019946B1 Device for coating panel-shaped substrates |
| 09/17/2003 | EP0996767B1 Reflective surface for cvd reactor walls |
| 09/17/2003 | EP0687190B1 A spatially distributed sma actuator film |
| 09/17/2003 | CN2573508Y Film coating apparatus |
| 09/17/2003 | CN2573490Y Apparatus for producing magnetic-controlled sputtered hot-bend film-coated glass |
| 09/17/2003 | CN1443357A Thin film rare earth permanent magnet, and method for mfg. same |
| 09/17/2003 | CN1443252A Surface modified stainless steel |
| 09/17/2003 | CN1443027A Method of manufacturing organic electro luminous display device |
| 09/17/2003 | CN1442506A Manufacturing technology of diffusion coating molybdenum silicide gradient material |
| 09/17/2003 | CN1442376A Method of preventing darkening (blackening) of aluminium cover in water bath sterilization |
| 09/17/2003 | CN1121730C Method of forming metal or its oxide layers on ion conductive polymer membranes |
| 09/17/2003 | CN1121507C High sputtering resistant target material containing mixed rare earth elements and its producing technique |
| 09/16/2003 | US6620736 Electrostatic control of deposition of, and etching by, ionized materials in semiconductor processing |
| 09/16/2003 | US6620527 Aluminum multilayer formed on a substrate, aluminum crystal particles are substantially larger size in one layer, and more densely arranged also, the other layer has higher resist; interconnects on semiconductors |
| 09/16/2003 | US6620525 Thermal barrier coating with improved erosion and impact resistance and process therefor |
| 09/16/2003 | US6620520 Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof |
| 09/16/2003 | US6620498 Coated body with nanocrystalline CVD coating for enhanced edge toughness and reduced friction |
| 09/16/2003 | US6620496 Method of removing surface protrusions from thin films |
| 09/16/2003 | US6620491 Tool of a surface-coated boron nitride sintered compact |
| 09/16/2003 | US6620481 Magnetic recording medium, magnetic recording medium manufacture method, and information regeneration apparatus |
| 09/16/2003 | US6620465 Thermal conductivity of the applied coating on each airfoil decreasing with increasing distance from the ingot and the thickness of the coating decreasing with increasing distance from the ingot |
| 09/16/2003 | US6620301 Method for forming a sputtered layer and apparatus therefor |
| 09/16/2003 | US6620300 Coating for optical fibers and method therefor |
| 09/16/2003 | US6620299 Process and device for the coating of substrates by means of bipolar pulsed magnetron sputtering and the use thereof |
| 09/16/2003 | US6620298 Forming high quality films |
| 09/16/2003 | US6620297 Porous getter devices with reduced particle loss and method for manufacturing same |
| 09/16/2003 | US6620296 Target sidewall design to reduce particle generation during magnetron sputtering |
| 09/16/2003 | US6620288 Substrate treatment apparatus |
| 09/16/2003 | US6620254 Planetary system workpiece support and method for surface treatment of workpieces |
| 09/16/2003 | US6620252 Metallization module for cathode-ray tube (CRT) applications |
| 09/16/2003 | US6620250 Method and apparatus for shielding a device from a semiconductor wafer process chamber |
| 09/16/2003 | US6620249 Method and apparatus for depositing thin layers |
| 09/16/2003 | US6619537 Diffusion bonding of copper sputtering targets to backing plates using nickel alloy interlayers |
| 09/16/2003 | US6618943 Method of manufacturing a droplet deposition apparatus |
| 09/12/2003 | WO2003075291A1 Left handed materials using magnetic composites |
| 09/12/2003 | WO2003075263A1 Chemically ordered, cobalt-platinum alloys for magnetic recording |
| 09/12/2003 | WO2003074757A1 Method for selectively removing hydrogen from molecules |
| 09/12/2003 | WO2003074756A1 Disk-like member holding device |
| 09/12/2003 | WO2003074755A1 Method for formation of titanium nitride films |
| 09/12/2003 | WO2003074754A2 Coating method and apparatus |
| 09/12/2003 | WO2003074753A1 Getter metal alloy coating and device and method for the production thereof |
| 09/12/2003 | WO2003074442A1 Thin film coating having transparent base layer |
| 09/12/2003 | WO2003074441A1 Thin film coating having niobium-titanium layer |
| 09/12/2003 | WO2003033761A3 Multi-chamber installation for treating objects under vacuum, method for evacuating said installation and evacuation system therefor |
| 09/12/2003 | WO2003028090A3 Integration of barrier layer and seed layer |
| 09/12/2003 | WO2002086622A3 Ion-beam deposition process for manufacturing binary photomask blanks |
| 09/12/2003 | WO2002086621A3 Ion-beam deposition process for manufacturing multilayered attenuated phase shift photomask blanks |
| 09/12/2003 | WO2002086620A3 Ion-beam deposition process for manufacturing attenuated phase shift photomask blanks |
| 09/11/2003 | US20030170975 Method for forming a metal extrusion free via |
| 09/11/2003 | US20030170939 Method of manufacturing gate insulated field effects transistors |
| 09/11/2003 | US20030170505 High-temperature strength member |
| 09/11/2003 | US20030170504 Laminates of alternating films of varying refractive indices on a transparent substrate where the high refractive film is an amorphous composite of titanium oxide and another metal oxide; stress resistance; stability; optical properties |
| 09/11/2003 | US20030170449 Combined high frequency/direct current sputtering of an ITO target to form a transparent film with particularly low resistance and a small surface roughness; process gas is supplemented by an argon/hydrogen mixture |
| 09/11/2003 | US20030170431 Heat-resistant resin film with metal layer and wiring board, and method for manufacturing them |
| 09/11/2003 | US20030170407 Structures and method for producing thereof |
| 09/11/2003 | US20030170383 Nanostructures |
| 09/11/2003 | US20030170380 Method of manufacturing organic electroluminescent display |
| 09/11/2003 | US20030168613 Multi-layer optical interference filter deposited by using only one starting coating material |
| 09/11/2003 | US20030168539 Refiner and method for treating the surface of a tool of a refiner of this type |
| 09/11/2003 | US20030168334 Conducting deposition using krypton gas and, using a sputter target comprising components selected from the nickel, titanium, and palladium in proportions so as to produce a thin film alloy of in a magnetron sputter deposition |
| 09/11/2003 | US20030168333 Metal or metal alloy based sputter target and method for the production thereof |
| 09/11/2003 | US20030168173 Vacuum processing device and vacuum processing method |
| 09/11/2003 | US20030168168 Unitary removable shield assembly |
| 09/11/2003 | US20030168131 High purity tantalum, products containing the same, and methods of making the same |
| 09/11/2003 | US20030168096 Thin-film solar cell and manufacture method therefor |
| 09/11/2003 | US20030168013 Elongated thermal physical vapor deposition source with plural apertures for making an organic light-emitting device |
| 09/11/2003 | US20030167612 Dual wafer load lock |
| 09/10/2003 | EP1343203A2 Method for forming a metal extrusion free via |
| 09/10/2003 | EP1342820A1 Production method for composite oxide thin film and device therefor and composite oxide film produced thereby |
| 09/10/2003 | EP1342808A1 Elongated thermal physical vapor deposition source with plural apertures for making an organic light-emitting device |
| 09/10/2003 | EP1342275A1 Epitaxial oxide films via nitride conversion |
| 09/10/2003 | EP1342274A2 Substrate for solar cell, solar cell having the same, and production process of solar cell |
| 09/10/2003 | EP1342263A2 Ionized metal plasma deposition process having enhanced via sidewall coverage |
| 09/10/2003 | EP1341949A2 Method and system for icosaborane implantation |
| 09/10/2003 | EP1341948A1 Target comprising thickness profiling for an rf magnetron |
| 09/10/2003 | EP1341947A2 Coated substrate, method for reducing the emissivity of substrates, and the use thereof |
| 09/10/2003 | EP1341637A1 Friction stir welding of metal matrix composites, ferrous alloys, non-ferrous alloys, and superalloys using a superabrasive tool |
| 09/10/2003 | EP1268872B1 Method for controlling reactive sputtering processes |
| 09/10/2003 | EP1144713B1 High target utilization magnetic arrangement for a truncated conical sputtering target |
| 09/10/2003 | EP1099004A4 Thin film stent |
| 09/10/2003 | CN1441855A Method for inhibiting production of projections in metal deposited-film |
| 09/10/2003 | CN1441854A Process for production of super thin protective coatings |
| 09/10/2003 | CN1441462A Evaporating method for growing film on semiconductor wafer |
| 09/10/2003 | CN1441082A Sputtering target and its producing method |
| 09/10/2003 | CN1441081A Small substrate baffle for organic luminous film plating machine with automatic recognition function |
| 09/10/2003 | CN1441080A System and method for producing luminous device |