Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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10/01/2003 | CN1445811A Sputtering device and its electrode and manufacturing method of the electrode |
10/01/2003 | CN1445037A PVD coated cutting tip |
10/01/2003 | CN1123064C Thin film forming method and semiconductor light emitting device manufacturing method |
10/01/2003 | CN1123052C Method and apparatus for ionized physical vapor deposition |
10/01/2003 | CN1123051C Method for ion beam transport and ion implantation apparatus |
10/01/2003 | CN1123034C Luminescent device and its manufacturing method and organic luminescent device structure |
10/01/2003 | CN1122933C Sputtering apparatus simulation method |
09/30/2003 | US6628084 Method and apparatus for the excitation of a plasma |
09/30/2003 | US6627904 Ion implantation apparatus |
09/30/2003 | US6627542 Continuous, non-agglomerated adhesion of a seed layer to a barrier layer |
09/30/2003 | US6627332 Organic electroluminescent device |
09/30/2003 | US6627322 For use in sun glasses, external light shielding glass, ultraviolet radiation protective and insulating materials or electromagnetic shielding materials |
09/30/2003 | US6627320 Method for producing composition for vapor deposition, composition for vapor deposition, and method for producing optical element with antireflection film |
09/30/2003 | US6627317 Heat treatable coated articles with anti-migration barrier layer between dielectric and solar control layers, and methods of making same |
09/30/2003 | US6627097 Shadow mask, a method of forming the shadow mask, and a method of manufacturing a semiconductor device with using the shadow mask |
09/30/2003 | US6627050 Method and apparatus for depositing a tantalum-containing layer on a substrate |
09/30/2003 | US6627049 Method of making grooving or parting insert |
09/30/2003 | US6627007 Surface modified stainless steel |
09/30/2003 | US6625899 Vacuum processing apparatus |
09/25/2003 | WO2003079432A2 Automatically adjusting serial connections of thick and thin layers and method for the production thereof |
09/25/2003 | WO2003079420A1 Evaporation source for deposition process and insulation fixing plate, and heating wire winding plate and method for fixing heating wire |
09/25/2003 | WO2003079405A2 Method for forming thin film layers by simultaneous doping and sintering |
09/25/2003 | WO2003079397A1 Vacuum plasma generator |
09/25/2003 | WO2003078689A1 Nanolayered coated cutting tool and method for making the same |
09/25/2003 | WO2003078687A1 Porous material and process for producing the same |
09/25/2003 | WO2003078685A1 Functional device and method of manufacturing the device, vertical magnetic recording medium, magnetic recording and reproducing device, and information processing device |
09/25/2003 | WO2003078679A1 Apparatus and method for applying diamond-like carbon coatings |
09/25/2003 | WO2003078677A2 Device for targeted application of deposition material to a substrate |
09/25/2003 | WO2003009318A3 Support with getter-material for microelectronic, microoptoelectronic or micromechanical device |
09/25/2003 | WO2003009317A3 Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
09/25/2003 | US20030181337 Forming a protective, nonreacting coating on unsupported superconductive particles; coating with a ductile material to be driven through the first thin coating to a superconductive state by proximity to the core; large-scale production |
09/25/2003 | US20030181068 Methods for forming thin film layers by simultaneous doping and sintering |
09/25/2003 | US20030181065 Low contamination components for semiconductor processing apparatus and methods for making components |
09/25/2003 | US20030180984 Diamond substrate having piezoelectric thin film, and method for manufacturing it |
09/25/2003 | US20030180638 Transfer of organic material from a donor to form a layer in an oled device |
09/25/2003 | US20030180572 A silver coverings contains an amorphous carbon solid lubricant, for bearings |
09/25/2003 | US20030180571 A ceramic coatings with submicron grains is formed by vapor deposition and vacuum deposition; for turbine engines, heat resistance |
09/25/2003 | US20030180554 Unidirectional silicon steel sheet of ultra-low iron loss and method for production thereof |
09/25/2003 | US20030180546 Heat treatable coated article with chromium nitride IR reflecting layer and method of making same |
09/25/2003 | US20030180495 Optical device substrate film-formation apparatus, optical disk substrate film-formation method, substrate holder manufacture method, substrate holder, optical disk and a phase-change recording type of optical disk |
09/25/2003 | US20030180474 Evaporation method and manufacturing method of display device |
09/25/2003 | US20030180462 Rotating; uniform coating; surface photoresist patterns |
09/25/2003 | US20030180461 Process of direct growth of carbon nanotubes on a substrate at low temperature |
09/25/2003 | US20030180457 Manufacturing system, manufacturing method, method of operating a manufacturing apparatus, and light emitting device |
09/25/2003 | US20030180454 Vacuum deposiiton; rotation |
09/25/2003 | US20030180450 Plasma plating; vacuum exposure; applying direct current signal; then radio frequency; heating, controlling temperature |
09/25/2003 | US20030180177 Ag alloy film and sputtering-target for the Ag alloy film |
09/25/2003 | US20030180024 Submicron hollow spaces |
09/25/2003 | US20030178752 Indium oxide powder, method for preparing the same, and method for manufacturing high-density indium tin oxide target |
09/25/2003 | US20030178751 Tin oxide powder, method for preparing the same, and method for manufacturing high-density indium tin oxide target |
09/25/2003 | US20030178734 Process for making angstrom scale and high aspect functional platelets |
09/25/2003 | US20030178395 Method and apparatus for fabrication of miniature structures |
09/25/2003 | US20030178301 Planar magnetron targets having target material affixed to non-planar backing plates |
09/25/2003 | US20030178300 Method of manufacturing an object in a vacuum recipient |
09/25/2003 | US20030178299 Rotation-magnetron-in-magnetron (RMIM) electrode, method of manufacturing the RMIM electrode, and sputtering apparatus including the RMIM electrode |
09/25/2003 | US20030177981 Reducing maintainence; forming cut out on interior circum-ferential edge to increase spacing from chuck |
09/25/2003 | US20030177949 Methods for producing enhanced interference pigments |
09/25/2003 | US20030177672 Pressing iron soleplate having a hardened and coated surface |
09/25/2003 | DE20309444U1 Resistance-heated ceramic boat for metal vaporization has parallel top and base with sloping sides and recessed underside at ends |
09/24/2003 | EP1347076A1 PVD-Coated cutting tool insert |
09/24/2003 | EP1346085A1 Methods and apparatus for producing m'n based materials |
09/24/2003 | EP1346080A1 Injector and method for prolonged introduction of reagents into plasma |
09/24/2003 | EP1346007A1 Multiple source deposition process |
09/24/2003 | EP1345729A1 Friction stir welding using a superabrasive tool |
09/24/2003 | EP1345701A2 Centrifugal type contaminant collector trap for ion implanter |
09/24/2003 | CN2575113Y Multi enamel glass equipment burning furnace |
09/24/2003 | CN2575112Y Integrated enamel glass equipment firing furnace |
09/24/2003 | CN1444605A Continuous processing apparatus by plasma polymerization with vertical chamber |
09/24/2003 | CN1444423A Long-strip thermal physical steam depsotion source for making organic luminescent device |
09/24/2003 | CN1444297A Method for transferring organic material from donator to form one layer in organic light-emitting diode device |
09/24/2003 | CN1444295A Device and method for mfg. GaN base |
09/24/2003 | CN1444214A Information recording medium, medium mfg. method, information recording method and reproducing method |
09/24/2003 | CN1443893A Iron bottom plate with hard protective layer |
09/24/2003 | CN1443870A Method for preparing high photoconductive gain carbon nitride film |
09/24/2003 | CN1443869A Heating device for electronic film material growth |
09/24/2003 | CN1122117C Plasma reactor with a deposition shield plate |
09/23/2003 | US6624462 Dielectric film and method of fabricating the same |
09/23/2003 | US6624353 Electromagnetic interference shield for electronic devices |
09/23/2003 | US6623862 Functional film having optical and electrical properties |
09/23/2003 | US6623850 Tool of a surface-coated boron nitride sintered compact |
09/23/2003 | US6623800 Method for forming composite vapor-deposited film having varied film composition at initial and final stages of vapor deposition, composite vapor-deposition material for producing the same, and method for producing the composite vapor-deposition material |
09/23/2003 | US6623794 Glass substrate; stabilizing layer of Si, Ti, Zr, Ta, Cr, Nb, Si alloys, Ni-Cr alloys or AlN; metal compound film with metallic properties; oxidation resistant protective overlayer, e.g., silicon nitride, oxide or oxynitride |
09/23/2003 | US6623607 Substrate coated with an MGO-layer |
09/23/2003 | US6623606 Method and apparatus for sputter coating with variable target to substrate spacing |
09/23/2003 | US6623605 Method and apparatus for fabricating a wafer spacing mask on a substrate support chuck |
09/19/2003 | CA2377315A1 Method for the synthesis and characterization of supported metal nanoclusters of controlled size, surface distribution, shape and interfacial adhesion |
09/18/2003 | WO2003077244A1 Disk-like substrate sputtering device, substrate chucking method in the device, method of producing disk-like recording medium using the device |
09/18/2003 | WO2003076684A1 System for vacuum metallization of objects treated in batches |
09/18/2003 | WO2003076683A1 Unitary removable shield assembly |
09/18/2003 | WO2003076682A2 Improvements to electrical contacts in systems for vacuum metallization of objects treated in batches |
09/18/2003 | WO2003012855A8 Method and apparatus for fabricating mercuric iodide polycrystalline films for digital radiography |
09/18/2003 | WO2002059689A3 Liquid crystal device and manufacturing method |
09/18/2003 | US20030176012 Integrated circuit structure including electrodes with PGO ferroelectric thin film thereon |
09/18/2003 | US20030175558 MoSi2-Si3N4 composite coating and manufacturing method thereof |
09/18/2003 | US20030175546 Alternating iron, platinum layers |
09/18/2003 | US20030175545 Metallized film, method for the production thereof, and use thereof |
09/18/2003 | US20030175536 Nanolayered coated cutting tool and method for making the same |
09/18/2003 | US20030175519 Rod for a coating device, and process for producing the same |
09/18/2003 | US20030175472 Photostable retroreflection sheets comprising fluorescent dyes in blends of polycarbonates, polyesters and/or polycarbonateester copolymers, having toughness, impact strength, durability and chemical resistance |
09/18/2003 | US20030175444 Doped titanium oxide with hydrogen, tantalum or niobium; medcal equipment; biocompatibility, durability |