Patents
Sitemap › C23 - Coating metallic material; Coating material with metallic material; Chemical surface treatment; Diffusion treatment of metallic material; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general; Inhibiting corrosion of metallic material or incrustation in general › C23C - Coating metallic material; Coating material with metallic material; Surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general › C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
10/2003
10/14/2003US6632483 Ion gun deposition and alignment for liquid-crystal applications
10/14/2003US6632482 Very short high voltage, low duty cycle ionization pulses, in conjunction with a synchronously produced electron flow to neutralize positively charged semiconductor wafer surfaces; shallow junction devices
10/14/2003US6632285 Programmable flux gradient apparatus for co-deposition of materials onto a substrate
10/14/2003US6632282 Planetary multi-substrate holder system for material deposition
10/14/2003US6631907 Nitride-plated piston ring for internal combustion engines
10/09/2003WO2003083945A1 Method of forming ferroelectric film, ferroelectric memory, process for producing ferroelectric memory, semiconductor device and process for producing semiconductor device
10/09/2003WO2003083169A1 Apparatus and method for depositing organic matter of vapor phase
10/09/2003WO2003083166A1 Methods and apparatus for deposition of thin films
10/09/2003WO2003083164A1 Surface treatment system, surface treatment method and product produced by surface treatment method
10/09/2003WO2003083162A1 Vacuum deposition apparatus and method for depositing thin optical films on high curvature substrates
10/09/2003WO2003083161A1 Sputtering apparatus comprising a concave cathode body
10/09/2003WO2003083160A2 Evaluation of chamber components having textured coatings chamber components
10/09/2003WO2003083159A2 Security element and method for production thereof
10/09/2003WO2003082769A1 Silicon monoxide sintered product and sputtering target comprising the same
10/09/2003WO2003082482A1 Method for producing boride thin films
10/09/2003WO2003063243B1 Thin films, structures having thin films, and methods of forming thin films
10/09/2003WO2003056057A3 Method for coating a substrate and coated substrates obtained according to said method
10/09/2003WO2003053843A3 Metal alloy elements in micromachined devices
10/09/2003US20030191354 System having a carrier substrate and a ti/p or. a1/p coating
10/09/2003US20030190801 Method for forming a metal extrusion free via
10/09/2003US20030190476 Vehicle window with ice removal structure thereon
10/09/2003US20030190449 Optical information recording medium
10/09/2003US20030190421 Method for a tray exchange during continuous production of disks
10/09/2003US20030190412 Method of forming deposited film
10/09/2003US20030188964 Sputtering target and method for fabricating the same
10/09/2003US20030188687 Gas driven planetary rotation apparatus and methods for forming silicon carbide layers
10/09/2003CA2518421A1 Methods and apparatus for deposition of thin films
10/08/2003EP1351273A1 Band gap plasma mass filter
10/08/2003EP1350864A2 Method for forming a thin film of a composite metal compound and apparatus for carrying out the method
10/08/2003EP1350863A1 Process and apparatus for depositing on a substrate a flux of coating material of prefered orientation
10/08/2003EP1350861A1 Process for fabrication and regeneration of sputtering targets
10/08/2003EP1350860A1 Process of masking cooling holes of a gas turbine component
10/08/2003EP1349967A1 Process for the preparation of printed and partially metalized plastic films
10/08/2003EP1349966A1 A method of coating insulative substrates
10/08/2003EP1349698A1 Friction fit target assembly for high power sputtering operation
10/08/2003EP1349682A1 Low temperature sputter target/backing plate joining technique and assemblies made thereby
10/08/2003CN1447865A Double scanning thin film processing system
10/08/2003CN1447864A 溅射靶 Sputtering target
10/08/2003CN1447475A Method for preparing lithium ion solid electrolyte film with high deposition rate
10/08/2003CN1447473A Method for preparing lithium ion solid electrolyte film with large area
10/08/2003CN1447133A Anti-reflection coating layer with transparent electric surface layer
10/08/2003CN1446942A Connection base sheet for double discs and operation method
10/08/2003CN1446941A Ag alloyed memberane and sputtering target for forming Ag alloyed membrane
10/08/2003CN1446940A Transparent conducting film, its mfg. method and intered body target for mfg. and transparent conductive substrate or organic electroluminescent component
10/08/2003CN1123655C Super-lattice BaTiO3 material with new structure and multiple performance
10/07/2003US6630364 System for automatic control of the wall bombardment to control wall deposition
10/07/2003US6630255 Alternating cobalt and palladium layers having chromium, platinum, boron, tantalum and/or niobium grain boundary forming additives
10/07/2003US6630058 Method and apparatus for manufacturing film with conductive sheet, for touch-panel, and film manufactured thereby
10/07/2003US6629833 Transparent conductive film and touch panel
10/07/2003US6629769 Article comprising molded polyester resin composition article with light-reflecting metal layer having, after being molded, specified average surface roughness and deflection temperature under load
10/02/2003WO2003081216A2 Process monitoring using infrared optical diagnostics
10/02/2003WO2003080893A1 Method for coating a substrate and device for carrying out the method
10/02/2003WO2003080892A1 Low contamination components for semiconductor processing apparatus and methods for making components
10/02/2003WO2003080891A1 Rotating tubular cathode
10/02/2003WO2003080890A1 Production metod and production device for thin film
10/02/2003WO2003080889A1 Band gap engineering of amorphous al-ga-n alloys
10/02/2003WO2003080887A2 Methods and apparatus for annealing in physical vapor deposition systems
10/02/2003WO2003080325A1 Thin-film laminated body, thin-film cell, capacitor, and method and equipment for manufacturing thin-film laminated body
10/02/2003US20030187248 Using an aromatic isothiocyanate; forming adduct
10/02/2003US20030186541 Gradient barrier layer for copper back-end-of-line technology
10/02/2003US20030186512 In a two-dimensional or three-dimensional lattice; coulomb blocking devices using quantum dots.
10/02/2003US20030186504 Integrated circuit device and fabrication using metal-doped chalcogenide materials
10/02/2003US20030186467 Josephson device and fabrication process thereof
10/02/2003US20030186128 Lithium-based rechargeable batteries
10/02/2003US20030186087 Gradient barrier layer for copper back-end-of-line technology
10/02/2003US20030186084 High density and good storage stability
10/02/2003US20030186062 Thermal stability
10/02/2003US20030186023 Process for preparing radiation image storage panel by gas phase deposition
10/02/2003US20030185986 Method for making zone-bonded lubricant layer for magnetic hard discs
10/02/2003US20030185978 Carrier for use in thin film coating of disks
10/02/2003US20030185977 Providing a vapor including at least one selected vapor phase component into evacuated chamber; condensing vapor onto a heated substrate to form a liquid phase deposit, cooling liquid deposit to form a solid phase film
10/02/2003US20030185976 Providing a shadow mask material; forming a shadow mask from the shadow mask material; using the shadow mask to deposit a thin film material on the substrate using the thin film deposition
10/02/2003US20030185970 Organic electroluminescent display panel and method of manufacturing the same
10/02/2003US20030185969 Method of manufacturing organic electroluminescent device
10/02/2003US20030185965 Evaluating textured coating on structure by: directing a beam of electrons onto surface grains of textured coating causing electrons to be backscattered, detecting backscattered electrons and generating a signal image, evaluating signal
10/02/2003US20030185478 Full complement antifriction bearing
10/02/2003US20030184893 Multi-layer mirror and fabricating method thereof
10/02/2003US20030183780 Ion beam charge neutralizer and method therefor
10/02/2003US20030183567 For tuning an a.c. voltage component of the electric field, in crossed electric and magnetic fields
10/02/2003US20030183518 Concave sputtering apparatus
10/02/2003US20030183512 Optical thin film on a surface of a bulb of a light source such as an electric lamp or a discharge lamp, a thin film whose interface/surface is less rough is formed on a base having a spheroid shape. When forming a thin film on a base 2
10/02/2003US20030183509 Method for forming a sputtered layer and apparatus therefor
10/02/2003US20030183508 Sputtering target for depositing silicon layers in their nitride or oxide form and process for its preparation
10/02/2003US20030183507 Method of forming a non-volatile resistance variable device and method of forming a metal layer comprising silver and tungsten
10/02/2003US20030183506 Target and method of optimizing target profile
10/02/2003US20030183306 Selected processing for non-equilibrium light alloys and products
10/02/2003US20030183243 Cleaning residues from surfaces in a chamber by sputtering sacrificial substrates
10/02/2003US20030183172 Vaporiser for generating feed gas for an arc chamber
10/01/2003EP1349219A2 Josephson device and fabrication process thereof
10/01/2003EP1348777A2 Vacuum deposition apparatus
10/01/2003EP1348776A1 Target for arc ion plating and method of manufacturing the same
10/01/2003EP1348229A2 Consecutive deposition system
10/01/2003EP1348228A1 Ion source
10/01/2003EP1348226A2 Method and apparatus for improved ion acceleration in an ion implantation system
10/01/2003EP1129232B1 Apparatus for coating objects through pvd
10/01/2003EP1100750B1 Method for forming an oxide film with non-uniform thickness at a silicon substrate surface
10/01/2003EP0724652B1 Method and apparatus for sputtering magnetic target materials
10/01/2003CN2577437Y Apparatus for injecting plasma onto innerwall of tubular workpiece
10/01/2003CN2577436Y Apparatus for injecting ions onto inner surface of tubular workpiece using high-voltage glow-discharge
10/01/2003CN1446268A Method and device for producing organic EL elements
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