Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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10/23/2003 | CA2505014A1 Hermetic encapsulation of organic electro-optical elements |
10/23/2003 | CA2485022A1 Method for connecting substrates and composite element |
10/23/2003 | CA2480854A1 Method for producing a product having a structured surface |
10/23/2003 | CA2480797A1 Method for producing a copy protection for an electronic circuit and corresponding component |
10/23/2003 | CA2480737A1 Method for coating metal surfaces and substrate having a coated metal surface |
10/23/2003 | CA2480691A1 Method for forming housings for electronic components and electronic components that are hermetically encapsulated thereby |
10/23/2003 | CA2479823A1 Method for the production of structured layers on substrates |
10/23/2003 | CA2478624A1 Gas driven planetary rotation apparatus and methods for forming silicon carbide layers |
10/22/2003 | EP1355359A1 Self-adjusting series connection of thin and thick films and method of fabrication |
10/22/2003 | EP1355343A2 Ion sputtering magnetron |
10/22/2003 | EP1355322A2 Process for preparing radiation image storage panel by gas phase deposition |
10/22/2003 | EP1354984A2 Wear resistant layer for chip cutting tools, specially rotating chip cutting tools, |
10/22/2003 | EP1354979A1 Method and device for producing organic el elements |
10/22/2003 | EP1354181A1 Sensor for determining the state of parameters on mechanical components while using amorphous carbon layers having piezoresistive properties |
10/22/2003 | EP0841853B1 Synergistic fungicidal composition including a strobilurine analogue compound |
10/22/2003 | CN1451171A Configurable vacuum system and method |
10/22/2003 | CN1451057A Silicon monoxide vapor deposition material process for producing the same raw material for producing the same, and production apparatus |
10/22/2003 | CN1451029A Color shifting carbon-containing interference pigments |
10/22/2003 | CN1450954A Freestanding reactive multilayer foils |
10/22/2003 | CN1450718A Method for making electronic part, electronic part and elastic surface wave filter |
10/22/2003 | CN1450610A Method of depositing vapor phase organic matter and apparatus of depositing vapor phose organic matter using same |
10/22/2003 | CN1450197A Deposition method and method for mfg display device |
10/22/2003 | CN1450196A Mask plate for line shape mask of vacuum vapour plating |
10/22/2003 | CN1125477C Magnetrons |
10/22/2003 | CN1125189C Method and apparatus for thin film coating an article |
10/21/2003 | US6635889 Ion implantation apparatus suited for low energy ion implantation and tuning method for ion source system thereof |
10/21/2003 | US6635589 In a vacuum chamber, radiating an ultraviolet light onto the silicon oxide film heated to 300-700 degrees C. in a hydrogen nitride atmosphere; low temperature; nitriding |
10/21/2003 | US6635330 Thin films with a uniform thickness can be formed on substrates as objects such as spheroids, even when the films are formed by conventional film-formation methods using an incident particle beam coming from a specific direction |
10/21/2003 | US6635307 Anti-reflection layer, light- absorbing and charge-generating active layer, window or buffer layer, and/or electrode layer in a thin-film solar cell. |
10/21/2003 | US6635220 Method for forming composite vapor-deposited films with varied compositions formed in the initial and final stages of deposition, composite vapor-deposition material for the film and method for manufacture thereof |
10/21/2003 | US6635219 Method of regenerating a phase-change sputtering target for optical storage media |
10/21/2003 | US6635155 Having multiple optical layers made of a dielectric material, by magnetron sputtering method, using an inert gas and a reactive gas, and forming optical layers under discharge specified low pressure |
10/21/2003 | US6635154 Controlling uniformity and thickness of multilayer substrate coatings in housings having gas discharges |
10/21/2003 | US6635124 Generating metal vapor from target using microwave-stimulated oxygen-containing sputtering technique; oxidation, condensation, vaporization |
10/21/2003 | US6635115 Tandem process chamber |
10/21/2003 | US6634619 Pressure control valve having enhanced durability |
10/21/2003 | US6634116 Vacuum processing apparatus |
10/16/2003 | WO2003085758A1 Improved lithium-based rechargeable batteries |
10/16/2003 | WO2003085659A1 Method of delivering substrates to a film forming device for disk-like substrates, substrate delivering mechanism and mask used in such method, and disk-like recording medium producing method using such method |
10/16/2003 | WO2003085301A1 Rotary barrel gate valve |
10/16/2003 | WO2003085276A2 Full complement antifriction bearing |
10/16/2003 | WO2003085162A1 Method for coating a component |
10/16/2003 | WO2003085160A1 Device and method for forming thin-film, and method of manufacturing electronic component using the device |
10/16/2003 | WO2003085159A1 Replacement unit and replacement method for substrate in thin-film forming device |
10/16/2003 | WO2003085158A1 Spattering device, method of forming thin film by spattering, and method of manufacturing disk-like recording medium using the device |
10/16/2003 | WO2003085157A1 Method and apparatus for preparing thin resin film |
10/16/2003 | WO2003085156A1 Gravity-fed in-line continuous processing system and method |
10/16/2003 | WO2003085153A1 Thermal insulation layer system |
10/16/2003 | WO2003085152A2 Coated bodies and a method for coating a body |
10/16/2003 | WO2003084969A1 Silicon source reagent compositions, and method of making and using same for microelectronic device structure |
10/16/2003 | WO2003058679A3 System and method of processing composite substrate within a high throughput reactor |
10/16/2003 | WO2003027350A9 Amorphous hydrogenated carbon film |
10/16/2003 | WO2002103782A3 Barrier enhancement process for copper interconnects |
10/16/2003 | WO2002097850A3 Uniform broad ion beam deposition |
10/16/2003 | US20030194863 Integrated deposition process for copper metallization |
10/16/2003 | US20030194616 Ion-beam deposition process for manufacture of binary photomask blanks |
10/16/2003 | US20030194570 Infrared reflecting layer contacting and sandwiched between first and second layers, said second layer comprising NiCrOx oxidation graded |
10/16/2003 | US20030194569 Phase shifting layer on etch stop layer and capable of producing a photomask with 180 degrees phase shift and an optical transmission of at least 0.001% at a selected wavelength of less-than 500 nm. |
10/16/2003 | US20030194568 Attenuated embedded phase shift photomask blanks |
10/16/2003 | US20030194567 Heat treatable low-E coated articles and methods of making same |
10/16/2003 | US20030194551 Transparent conductive laminate and process of producing the same |
10/16/2003 | US20030194509 Reacting a doped surface layer to form a dielectric film, a metal film or a silicide film having a thickness of 50 angstroms or less. |
10/16/2003 | US20030194484 Improved using efficiency of an EL material; excels in uniformity and throughput. |
10/16/2003 | US20030194482 Apparatus and method for processing a substrate |
10/16/2003 | US20030193719 Optical element having antireflection film |
10/16/2003 | US20030193286 Hermetic encapsulation of organic, electro-optical elements |
10/16/2003 | US20030193285 Shadow mask and flat display fabricated by using the same and method for fabricating the same |
10/16/2003 | US20030193061 Electronic component and method for producing an electronic component |
10/16/2003 | US20030192778 Method of forming deposited film |
10/16/2003 | US20030192628 Shape memory alloy with ductility and a process of making the same |
10/16/2003 | US20030192471 Method and device for depositing in particular organic layers using organic vapor phase deposition |
10/16/2003 | DE20220335U1 Evaporation station for producing complex layers made from different materials and/or mixtures in a single evaporation process comprises a continuous evaporation device, and storage and feeding devices |
10/16/2003 | CA2480823A1 Rotary barrel gate valve |
10/16/2003 | CA2480820A1 Gravity-fed in-line continuous processing system and method |
10/15/2003 | EP1353379A2 Shadow mask and flat display fabricated by using the same and method for fabricating flat display |
10/15/2003 | EP1352988A1 Method for coating an object |
10/15/2003 | EP1352987A2 Transparent conductive laminate and process of producing the same |
10/15/2003 | EP1352985A1 Thermal barrier coating system |
10/15/2003 | EP1352434A1 System for the conversion of water into non-oxidizing gases and electronic devices containing said systems |
10/15/2003 | EP1352106A2 Tantalum and niobium billets and methods of producing the same |
10/15/2003 | EP1352105A2 Photocatalytic sputtering targets and methods for the production and use thereof |
10/15/2003 | EP1352104A2 Target/backing plate assemblies |
10/15/2003 | EP1352103A1 A surface coating of a carbide or a nitride |
10/15/2003 | CN1449457A Method and apparatus for processing metals, and the metals so produced |
10/15/2003 | CN1449455A Differentially-pumped material processing system |
10/15/2003 | CN1449452A High purity niobium and products containing the same, and methods of making the same |
10/15/2003 | CN1449334A Method for providing a semitransparent metallic aspect to cosmetic case or compact components and resulting components |
10/15/2003 | CN1448532A Evaporation method and manufacturing method of display device |
10/15/2003 | CN1448368A Prep. of strontium titanate barium ceramic target |
10/15/2003 | CN1124363C Base sheet rack of vacuum coating equipment |
10/15/2003 | CN1124203C Adhesiveless flexible laminate and process for making adhesiveless flexible laminate |
10/14/2003 | US6633131 Magnetron |
10/14/2003 | US6633123 Organic electroluminescence device with an improved heat radiation structure |
10/14/2003 | US6632749 Method for manufacturing silicon oxide film, method for manufacturing semiconductor device, semiconductor device, display device and infrared light irradiating device |
10/14/2003 | US6632689 Method for processing semiconductor wafers in an enclosure with a treated interior surface |
10/14/2003 | US6632583 Optical recording medium and production method of the same |
10/14/2003 | US6632563 Thin film battery and method of manufacture |
10/14/2003 | US6632539 Polycrystalline thin film and method for preparing thereof, and superconducting oxide and method for preparation thereof |
10/14/2003 | US6632520 Magnetic film |
10/14/2003 | US6632519 Composite material comprising a substrate and a barrier layer applied to the substrate |