| Patents for B81B 7 - Micro-structural systems (8,983) |
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| 02/02/2011 | CN101962166A Packaging structure and packaging method |
| 01/27/2011 | WO2010039453A3 Inertial sensor with dual cavity package and method of fabrication |
| 01/27/2011 | DE102010000448A1 Halbleiteranordnung mit einem leitfähigen Element A semiconductor device comprising a conductive element |
| 01/27/2011 | DE102009027995A1 Vorrichtung mit einem Halbleiterbauelement und einem Gehäuse und Verfahren zur Herstellung der Vorrichtung An apparatus with a semiconductor device and a housing, and method for manufacturing the device |
| 01/27/2011 | DE102009027893A1 Chip e.g. actuator chip, for use in e.g. angular velocity sensor, has recess that is formed in outer side of substrate area, where side walls of recess are partially coated with metal |
| 01/27/2011 | DE102009027873A1 Micromechanical system has substrate and two conductive elements which are electrically isolated from each other and are mechanically rigidly connected with each other |
| 01/27/2011 | DE102009022182A1 Adjustable throttle passage for fluid of implantable infusion pump and for microsystem, particularly in medical field, has open-cell, incompressible throttle body having inflow surface and outflow surface |
| 01/26/2011 | CN101959109A Micro-electro-mechanical-system microphone |
| 01/26/2011 | CN101959108A Miniature microphone |
| 01/26/2011 | CN101959106A Packaging structure of microphone of micro electromechanical system and packaging method thereof |
| 01/26/2011 | CN101957532A Display device and micro electro mechanical system (MEMS) array substrate thereof |
| 01/26/2011 | CN101957200A Monocrystalline silicon MEMS gyro decoupled by symmetrically folded beam springs |
| 01/26/2011 | CN101955151A Two-dimensional comb tooth electrostatic driver based on silicon plastic deformation principle and manufacturing method thereof |
| 01/26/2011 | CN101634662B Micro-accelerometer and preparation method thereof |
| 01/26/2011 | CN101587130B Crossed and encapsulated type wind speed and direction sensor of minitype wind measuring units |
| 01/26/2011 | CN101486438B Flexible MEMS resistance reducing covering and method of manufacturing the same |
| 01/26/2011 | CN101363731B Rock quartz micro mechanical gyroscope based on shear stress detection and method for making same |
| 01/25/2011 | US7875941 Thin film encapsulation of MEMS devices |
| 01/25/2011 | CA2378190C Microfabricated elastomeric valve and pump systems |
| 01/20/2011 | WO2010118154A3 Mass sensing device for liquid environment |
| 01/20/2011 | WO2010091334A3 Analyte sensor and fabrication methods |
| 01/20/2011 | US20110014094 Disk type microfluidic device and blood testing apparatus using the same |
| 01/20/2011 | DE102009033511A1 Micro mirror arrangement for forming pupil in lighting system utilized for microlithography, has anti-reflex coating with absorbing layer made of non-metallic material whose absorption coefficient and wavelength are set as specific value |
| 01/20/2011 | DE102009027712A1 Digital/analog converter, has sensor detecting physical and/or chemical condition of conveying unit, signal for data bit is formed by signal conductors, and output signal determined and/or formed based on condition of conveying unit |
| 01/19/2011 | EP2275793A1 A pressure sensor having a chamber and a method for fabricating the same |
| 01/19/2011 | EP1858796B1 Methods and apparatus for actuating displays |
| 01/19/2011 | CN1994861B All-optical micromachine non-frigorific infrared thermal imaging chip structure and its production method |
| 01/19/2011 | CN101952193A Microfluidic device and methods of operation and making |
| 01/19/2011 | CN101614604B Silicon resonation type pressure sensor based on synovial membrane differential structure and manufacturing method thereof |
| 01/19/2011 | CN101279709B Multi-layer type encapsulation structure of minisize acoustic sensor |
| 01/19/2011 | CN101256105B Monocrystaline silicon transverse miniature MEMS pirani meter and preparation method thereof |
| 01/18/2011 | US7872338 Microelectromechanical device packages with integral heaters |
| 01/13/2011 | WO2010124229A3 Method and system for providing resonant frequency change compensation in a drive signal for a mems scanner |
| 01/13/2011 | WO2010117615A3 Sensor device with reduced parasitic-induced error |
| 01/13/2011 | WO2010117593A3 Bridge sensor with collocated electronics and two-wire interface |
| 01/13/2011 | WO2010110989A3 Vertically integrated mems acceleration transducer |
| 01/13/2011 | DE102010029284A1 MEMS-Bauelement MEMS device |
| 01/13/2011 | DE102009033191A1 Reduzierung der dynamischen Deformation von Translationsspiegeln mit Hilfe von trägen Massen Reduction of the dynamic deformation of translational levels using inert masses |
| 01/13/2011 | DE102009010096B4 Rastersonden-Antriebseinheit Scanning probe drive unit |
| 01/12/2011 | EP2272794A1 Semiconductor package substrate, in particular for MEMS devices |
| 01/12/2011 | CN201708084U Bistable inductive micro-switch |
| 01/12/2011 | CN201707349U Micro-electromagnetic acceleration displacement inclination vibrating sensor |
| 01/12/2011 | CN101941671A Electrostatic type vibration energy collector construction member and manufacturing method thereof |
| 01/12/2011 | CN101547529B Miniature inductive heater |
| 01/12/2011 | CN101498580B Oscillation type silicon micro-gyroscope |
| 01/12/2011 | CN101482441B Dual-spindle surface shearing stress sensor |
| 01/12/2011 | CN101397121B Silicon nanowire pressure sensor, cantilever beam, production method and pressure measurement method thereof |
| 01/12/2011 | CN101308051B Three-dimensional micro- force silicon micro- sensor |
| 01/11/2011 | US7866210 Semiconductor mechanical sensor |
| 01/06/2011 | WO2011002443A1 Individually addressable nano-scale mechanical actuators |
| 01/05/2011 | EP2269725A1 Micropump device |
| 01/05/2011 | DE102009042191A1 Wafer-Level-gekapselte integrierte MEMS-Schaltung Wafer-level MEMS encapsulated integrated circuit |
| 01/05/2011 | DE102009027382A1 Electronic component for use with electromagnetic vulnerability protection, has guide element and micro-component which is electrically connected to guide element |
| 01/05/2011 | DE102009027330A1 Sensor arrangement i.e. electronic stability program sensor arrangement, for navigation function and/or safety function at automobile area, has two sensor elements, which are directly attached to evaluating chip |
| 01/05/2011 | DE102009027321A1 Method for producing electrical interlayer connection in substrate of micro-component or sensor, involves opening mask layer over substrate area provided for electrical interlayer connection, where mask layer is applied on substrate |
| 01/05/2011 | CN201699924U Microelectromechanical microphone bearing module |
| 01/05/2011 | CN201694830U Micro inertial sensor with embedded transversely movable electrodes |
| 01/05/2011 | CN201694829U Encapsulating structure of MEMS micro sensor |
| 01/05/2011 | CN1950291B Reduction of etching charge damage in manufacture of microelectromechanical devices |
| 01/05/2011 | CN101939252A Micromechanical component and method for producing the same |
| 01/05/2011 | CN101935007A Acoustic sensor packaging structure for micro electro mechanical system |
| 01/05/2011 | CN101510486B Micro actuation switch |
| 01/05/2011 | CN101504426B Comb condenser type dual-spindle accelerometer |
| 01/05/2011 | CN101403615B Direct frequency-output vibration gyroscope structure |
| 12/30/2010 | US20100330332 Cover for microsystems and method for producing a cover |
| 12/30/2010 | DE102009027284A1 Method for manufacturing micromechanical structure, involves forming substrate with main extension level and manufacturing two caverns within substrate |
| 12/29/2010 | WO2010150224A1 Mems devices |
| 12/29/2010 | WO2010006849A3 Process for manufacturing a component, process for manufacturing a component arrangement, component and component arrangement |
| 12/29/2010 | WO2009131346A9 Mems probe card and manufacturing method thereof |
| 12/29/2010 | EP2266920A2 Interface lid for hermetic MEMS package |
| 12/29/2010 | EP2266919A1 Mems devices |
| 12/29/2010 | EP2265895A1 Contour sensor incorporating mems mirrors |
| 12/29/2010 | CN201688847U Micro-machined gyroscope with zero calibration by moving base |
| 12/29/2010 | CN101929980A Electrocatalytic chemical oxygen demand (COD) compound sensor with three-dimensional microstructure |
| 12/29/2010 | CN101927977A Fabrication method of cmos microelectromechanical system (mems) device |
| 12/29/2010 | CN101927976A Infrared detector with micro-bridge structure and manufacturing method thereof |
| 12/29/2010 | CN101561274B Micro gyro driven by static suspension corona to rotate |
| 12/29/2010 | CN101261963B Miniature electronic part and making method |
| 12/28/2010 | US7859093 Method for protecting encapsulated sensor structures using stack packaging |
| 12/28/2010 | US7858048 Microfluidic system |
| 12/23/2010 | WO2010148398A2 A thin-film device and method of fabricating the same |
| 12/23/2010 | WO2010126448A3 Novel bonding process and bonded structures |
| 12/22/2010 | EP2264415A2 Integrated spectroscopy system |
| 12/22/2010 | EP2262720A2 Cover for microsystems and method for producing a cover |
| 12/22/2010 | CN201682615U Capacitive microphone |
| 12/22/2010 | CN201680856U Goods damage detecting device based on vibration acceleration |
| 12/22/2010 | CN201678441U Magnetorheological and giant magnetostrictive inchworm type of micro-feed device |
| 12/22/2010 | CN101925530A MEMS package having formed metal lid |
| 12/22/2010 | CN101924542A Capacitive mems switch and method of fabricating the same |
| 12/22/2010 | CN101923052A Infrared spectrum type MEMES gas sensitive sensor based on filter structure light splitting |
| 12/22/2010 | CN101923051A Array waveguide light-splitting based infrared spectrum MEMS (Micro-electromechanical System) gas sensitive transducer |
| 12/22/2010 | CN101920928A Composite micromechanical part and method for manufacturing same |
| 12/22/2010 | CN101920927A Microelectromechanical gyroscope with rotary driving motion and improved electrical properties |
| 12/22/2010 | CN101920926A Unmatched seal stress release structure |
| 12/22/2010 | CN101368825B Angle vibration silicon micro-gyroscope and preparation thereof |
| 12/21/2010 | US7855429 Electronic circuit device having silicon substrate |
| 12/15/2010 | EP2259995A1 Microelectromechanical systems component and method of making same |
| 12/15/2010 | CN201673168U Low stress micro-silicon resonance accelerometer |
| 12/15/2010 | CN101913551A Vacuum and airtight system integration and packaging structure |
| 12/15/2010 | CN101348232B Bubble type micropump and indirect type bubble generating apparatus thereof |