| Patents for B81B 7 - Micro-structural systems (8,983) |
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| 03/31/2011 | WO2010083919A3 Integrated circuit and production method therefor |
| 03/31/2011 | US20110076754 Device and method for filtering one or more particles to be detected from a fluid |
| 03/31/2011 | DE102009045164A1 Sensoranordnung und Verfahren zu deren Herstellung Sensor arrangement and method for their preparation |
| 03/31/2011 | DE102007059977B4 Vorrichtung zum Betrieb eines mikromechanischen Federbalkens und Messanordnung mit einem solchen Federbalken Apparatus for operating a micromechanical cantilever and measuring arrangement with such cantilevers |
| 03/31/2011 | DE102006059091B4 Mikrooptisches reflektierendes Bauelement und dessen Verwendung Microoptical reflective component and its use |
| 03/31/2011 | DE102006049004B4 Sensor mit Halbleiterchip und Schaltkreischip Sensor with semiconductor chip and the circuit chip |
| 03/31/2011 | DE102005002967B4 Verfahren zum Herstellen eines Bauelementes mit einem beweglichen Abschnitt A method for manufacturing a component having a movable portion |
| 03/30/2011 | EP2300355A1 Bonded microfluidics system comprising cmos-controllable microfluidic devices |
| 03/30/2011 | CN201780110U Mems gyroscope |
| 03/30/2011 | CN101999080A Spring member for use in a microelectromechanical systems sensor |
| 03/30/2011 | CN101998213A 一种mems麦克风的封装结构及晶圆级封装方法 Package structure for a mems microphones and wafer level packaging method |
| 03/30/2011 | CN101997187A Micro electro mechanical system plug and socket connectors, manufacturing method thereof and connector assembly |
| 03/30/2011 | CN101995655A Display apparatus having microshutter |
| 03/30/2011 | CN101995295A Non-refrigerating infrared focal plane array as well as preparation method and application thereof |
| 03/30/2011 | CN101993033A Micro electro mechanical system structure and manufacturing method |
| 03/30/2011 | CN101993031A Protection structure and semiconductor structure of contact pad |
| 03/30/2011 | CN101993030A Micro movable device and method for manufacturing the same |
| 03/29/2011 | US7915539 Electric part |
| 03/29/2011 | CA2479301C Micro light modulator arrangement |
| 03/24/2011 | WO2010140792A9 Method for manufacturing 3-dimensional structures using thin film with columnar nano pores and manufacture thereof |
| 03/24/2011 | DE102009019318A1 Verfahren zum präzisen Messbetrieb eines mikromechanischen Drehratensensors Method for precisely measuring operation of a micromechanical rotation rate sensor |
| 03/23/2011 | CN101990516A Universal sample preparation system and use in an integrated analysis system |
| 03/23/2011 | CN101987719A Sensing element structure and manufacturing method |
| 03/23/2011 | CN101576569B Vacuum micro-electronics acceleration transducer |
| 03/23/2011 | CN101216308B Circular and multi-ring shaped axial magnetizing permanent magnetism antimagnetic rotor induced rotating micro gyroscope |
| 03/18/2011 | CA2714910A1 Microreactor array |
| 03/17/2011 | WO2011030002A1 Wireless mems sensor and method of reading the same |
| 03/17/2011 | DE102010040011A1 Package-on-Package (POP)-optischer-Näherungssensor Package-on-Package (POP) -optischer proximity sensor |
| 03/17/2011 | DE102009029248A1 Mikromechanisches System zum Erfassen einer Beschleunigung A micromechanical system for detecting an acceleration |
| 03/17/2011 | DE102009029180A1 Mikrosystem Microsystems |
| 03/17/2011 | DE10022398B4 Gaspolster-Mikrodosiersystem Gas cushion proportioning microsystem |
| 03/16/2011 | CN101986410A Shunt switch, semiconductor device, module, and electronic device |
| 03/16/2011 | CN101985348A Micron-scale grid structure made of monocrystalline silicon material and manufacturing method thereof |
| 03/16/2011 | CN101666646B Inclined double-end tuning-fork type silica micromechanical gyroscope and making method thereof |
| 03/16/2011 | CN101538003B Micromechanical transformer and manufacturing method thereof |
| 03/16/2011 | CN101306793B Micro-actuating fluid supply machine |
| 03/16/2011 | CN101276807B Semiconductor device and method of manufacturing the same |
| 03/15/2011 | US7906359 Method of forming a surface micromachined MEMS device |
| 03/15/2011 | CA2412992C Integrated microarray devices |
| 03/15/2011 | CA2392006C Microfabricated devices for the delivery of molecules into a carrier fluid |
| 03/10/2011 | WO2011028595A2 Mems-based optical image scanning apparatus, methods, and systems |
| 03/10/2011 | WO2011028484A2 System with recessed sensing or processing elements |
| 03/10/2011 | WO2011028359A2 Mems device with stress isolation and method of fabrication |
| 03/10/2011 | WO2011026427A1 A mems stress concentrating structure for mems sensors |
| 03/10/2011 | WO2010141338A3 Microdischarge-based pressure sensor and method |
| 03/10/2011 | US20110058246 Laminated Micromirror Package |
| 03/10/2011 | DE102010040516A1 Doppelaxialer, schockrobuster Drehratensensor mit ineinanderliegenden, linear schwingenden seismischen Elementen Doppelaxialer, shock robust rotation rate sensor with nested linear vibrating seismic elements |
| 03/10/2011 | DE102009029237A1 Micro-electromechanical component for component system, has micro-electromechanical structure, buffer capacity for smoothing external supply voltage and two inlets |
| 03/10/2011 | DE102009029217A1 Inertialsensor mit einem Feldeffekttransistor Inertial sensor with a field effect transistor |
| 03/10/2011 | DE102009029202A1 Mikromechanisches System Micromechanical System |
| 03/10/2011 | DE102009029201A1 Method for manufacturing semiconductor component in pressure sensor, involves separating connection of encapsulating compound, micro or nano-structured element and resin-coated-copper-foil from carrier connection layer |
| 03/10/2011 | DE102009029199A1 Component parts manufacturing method for e.g. pressure sensors, involves selecting temperature for heating microstructured or nanostructured components such that materials of components are not converted into gaseous component parts |
| 03/10/2011 | DE102009029184A1 Herstellungsverfahren für ein verkapptes mikromechanisches Bauelement, entsprechendes mikromechanisches Bauelement und Kappe für ein mikromechanisches Bauelement Manufacturing method for a micromechanical component capped, micromechanical component and corresponding cap for a micromechanical component |
| 03/09/2011 | EP2292553A1 Component and process for reversibly sealing a microcapsule package |
| 03/09/2011 | EP2291323A2 Fabrication of microscale tooling |
| 03/03/2011 | WO2010141942A3 Mems switch with latch mechanism |
| 03/03/2011 | WO2010141351A3 Wafer bonding technique in nitride semiconductors |
| 03/03/2011 | WO2010138968A3 Method and apparatus for providing high-fill-factor micromirror/micromirror arrays with surface mounting capability |
| 03/03/2011 | US20110048951 Digital microfluidics based apparatus for heat-exchanging chemical processes |
| 03/03/2011 | DE102009029114A1 Mikromechanisches System Micromechanical System |
| 03/03/2011 | DE102009029095A1 Mikromechanisches Bauelement Micromechanical component |
| 03/03/2011 | DE102009029073A1 Verfahren zur Durchführung eines Selbsttests für eine mikromechanische Sensorvorrichtung und entsprechende mikromechanische Sensorvorrichtung A method of performing a self-test for a micromechanical sensor device and corresponding micro-mechanical sensor device |
| 03/02/2011 | EP2289844A2 Thermally enhanced microcircuit package and method of forming same |
| 03/02/2011 | CN101382564B Micromachined sensors |
| 03/01/2011 | US7897435 Re-assembly process for MEMS structures |
| 02/24/2011 | WO2010121176A3 Microtensiometer |
| 02/24/2011 | WO2010057878A3 Method for forming a micro-surface structure and for producing a micro-electromechanical component, micro-surface structure and micro-electromechanical component having said micro-surface structure |
| 02/24/2011 | WO2010049837A3 An integrated component and a method of manufacturing an integrated component |
| 02/24/2011 | DE102009037802A1 Mikrostruktur und Verfahren zum Montieren einer solchen Microstructure and method of mounting such a |
| 02/24/2011 | DE102004004539B4 Waferverbindung unter Verwendung von Reaktivfolien zum Häusen mikro-elektromechhanischer Systeme Wafer bonding using reactive foils for housing micro-elektromechhanischer systems |
| 02/23/2011 | EP2287110A2 Methods and apparatus for actuating displays |
| 02/22/2011 | US7892839 Method of checking the hermeticity of a closed cavity of a micrometric component and micrometric component for the implementation of the same |
| 02/17/2011 | WO2010096786A3 Optical tomography system with high-speed scanner |
| 02/17/2011 | US20110036431 Activatable nanoparticle composite valve |
| 02/17/2011 | DE102009043218A1 Piezoelektrischer Energiewandler zum Umwandeln von mechanischer Energie in elektrische Energie mit erhöhter Effizienz der Umwandlung, Verfahren zum Umwandeln von mechanischer Energie in elektrische Energie und Verwendung des Verfahrens The piezoelectric energy converter for converting mechanical energy into electrical energy with increased efficiency of transformation by a process for converting mechanical energy into electrical energy and using the method |
| 02/17/2011 | DE102009043217A1 Piezoelektrischer Energiewandler zum Umwandeln von mechanischer Energie in elektrische Energie mit Hilfe eines Fluidsstroms, Verfahren zum Umwandeln von mechanischer Energie in elektrische Energie unter Verwendung des Energiewandlers und Verwendung des Verfahrens The piezoelectric energy converter for converting mechanical energy into electrical energy by means of a fluid stream, A method of converting mechanical energy into electrical energy using the energy converter and using the method |
| 02/17/2011 | DE102009043214A1 Piezoelektrischer Energiewandler zum Umwandeln mechanischer Energie in elektrische Energie mit Hilfe von Druckschwankungen, Verfahren zum Umwandeln von mechanischer Energie in elektrische Energie unter Verwendung des Energiewandlers und Verwendung des Verfahrens The piezoelectric energy converter for converting mechanical energy into electrical energy by means of pressure fluctuations, process for converting mechanical energy into electrical energy using the energy converter and using the method |
| 02/17/2011 | DE102009037083A1 Photovoltaic device for use in solar system utilized for converting solar energy into electrical energy, has mirrors provided with reflected surfaces, respectively, and control unit controlling rotation of mirrors about rotational axis |
| 02/17/2011 | DE102009036951A1 Multilayer circuit, particularly three-dimensional ceramic substrate system, is made of sintered ceramic material, where active electronic component is arranged in cavity |
| 02/17/2011 | DE102009028371A1 Micromechanical component for use as acceleration sensor in motor vehicle i.e. automobile, has electrode elements for providing parasitic capacitance to contrary cause capacitance change between electrodes and compensator structures |
| 02/17/2011 | DE10153319B4 Mikrosensor Microsensor |
| 02/16/2011 | EP1648038B1 Actuator element and device having actuator element |
| 02/15/2011 | US7887233 Thermal bend actuator material selection |
| 02/10/2011 | WO2011016859A2 Micromachined inertial sensor devices |
| 02/10/2011 | DE102010038988A1 Sensoranordnung und Chip mit zusätzlichen Befestigungsbeinen Sensor array and chip with additional mounting legs |
| 02/10/2011 | DE102009028177A1 Bauelement mit einer mikromechanischen Mikrofonstruktur und Verfahren zur Herstellung eines solchen Bauelements Component having a micromechanical microphone structure and method for producing such a component |
| 02/09/2011 | EP2280906A1 Mems device with independent rotation in two axes of rotation |
| 02/09/2011 | CN201742550U Capacitance minitype silicon microphone |
| 02/09/2011 | CN201740623U Micromechanical air pressure sensor chip encapsulating structure |
| 02/09/2011 | CN101970339A Device for measuring pressure, variation in acoustic pressure, a magnetic field, acceleration, vibration, or the composition of a gas |
| 02/09/2011 | CN101970338A Microfluidic device and method of operation |
| 02/09/2011 | CN101970098A Micropump device |
| 02/09/2011 | CN101713688B MEMS non-refrigerated two-band infrared detector and preparation method thereof |
| 02/09/2011 | CN101592489B Micromechanical tuning fork gyroscope |
| 02/09/2011 | CN101483189B Semiconductor structures and fabricating method thereof |
| 02/03/2011 | WO2011012036A1 Micro-scale grid made of single-crystal silicon and method of manufancturing the same |
| 02/03/2011 | DE102009058414A1 Hearing aid for treatment of hearing-impaired patients, has signal processing device receiving sensor signals from acoustic sensors as input signals and processing sensor signals depending on spatial arrangement of acoustic sensors |
| 02/03/2011 | DE102009035292A1 Vorrichtung zum Steuern des Durchflusses von Fluiden durch mikrofluidische Kanäle, Verfahren zu ihrem Betrieb und ihre Verwendung An apparatus for controlling the flow of fluids through microfluidic channels, processes for their operation, and their use |
| 02/03/2011 | DE102009028037A1 Bauelement mit einer elektrischen Durchkontaktierung, Verfahren zur Herstellung eines Bauelementes und Bauelementsystem Device with an electrical through-contact, methods for producing a component and device system |
| 02/02/2011 | EP2197780B1 Structure comprising a getter layer and an adjustment sublayer, and fabrication process |