| Patents for B24B 53 - Devices or means for dressing or conditioning abrasive surfaces (5,132) |
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| 03/13/2003 | US20030049993 Semiconductor polishing apparatus and method of detecting end point of polishing semiconductor |
| 03/12/2003 | EP1140425B1 An abrasive machine for machining a surface of a cylindrical work piece |
| 03/11/2003 | US6531399 Polishing method |
| 03/11/2003 | US6531037 Removable electrode |
| 03/11/2003 | US6530827 Apparatus for polishing wafer and method of doing the same |
| 03/11/2003 | US6530825 Method for the production of glass substrates for magnetic recording mediums |
| 03/06/2003 | WO2003019638A1 Constant ph polish and scrub |
| 03/06/2003 | US20030045222 Metal-less bond grinding stone, and electrolytic dressing grinding method and apparatus using the grinding stone |
| 03/06/2003 | US20030045207 Apparatus and method for enhanced processing of microelectronic workpieces |
| 03/06/2003 | US20030045206 Chemical mechanical polishing system and process |
| 03/05/2003 | EP1287949A2 Metal-less bond grinding stone, and electrolytic dressing grinding method and apparatus using the grinding stone |
| 02/26/2003 | EP1285726A2 Centerless grinding method for barshape work centerless grinder |
| 02/25/2003 | US6524523 Method for forming dresser of chemical mechanical polishing pad |
| 02/20/2003 | US20030036343 Machining strain removal apparatus |
| 02/20/2003 | US20030036341 Conditioner for polishing pad and method for manufacturing the same |
| 02/19/2003 | EP1283761A1 Method for grinding metallic workpieces containing, in particular, nickel |
| 02/18/2003 | US6520843 High planarity chemical mechanical planarization |
| 02/13/2003 | US20030032374 Apparatus and method for transferring a torque from a rotating hub frame to a one-piece hub shaft |
| 02/13/2003 | US20030032372 Substrate polishing apparatus |
| 02/13/2003 | DE20216054U1 Grinding machine control rotates brush wheel to contact grinding wheel to clean it |
| 02/11/2003 | US6517424 Chromium and amorphous diamond or chromium nitride, bonding strength |
| 02/11/2003 | US6517419 Shaping polishing pad for small head chemical mechanical planarization |
| 02/11/2003 | US6517416 Chemical mechanical polisher including a pad conditioner and a method of manufacturing an integrated circuit using the chemical mechanical polisher |
| 02/11/2003 | US6517414 Method and apparatus for controlling a pad conditioning process of a chemical-mechanical polishing apparatus |
| 02/06/2003 | WO2003009966A1 Ultrasonic conditioning device cleaner for chemical mechanical polishing systems |
| 02/06/2003 | US20030027507 Dressing of grinding tools for gear grinding |
| 02/06/2003 | US20030027504 Chemical mechanical polish pad conditioning device |
| 02/06/2003 | US20030027424 Feedforward and feedback control for conditioning of chemical mechanical polishing pad |
| 02/05/2003 | CN1394718A Method for repairing and maintaining grinding board by using double-board grinding machine |
| 02/04/2003 | US6514129 Multi-action chemical mechanical planarization device and method |
| 02/04/2003 | US6514127 Conditioner set for chemical-mechanical polishing station |
| 02/04/2003 | US6514126 Pad conditioner coupling and end effector for a chemical mechanical planarization system and method therefor |
| 02/04/2003 | US6514121 Polishing chemical delivery for small head chemical mechanical planarization |
| 01/30/2003 | WO2003008151A1 Fixed abrasive articles with wear indicators |
| 01/30/2003 | US20030022606 Ultrasonic conditioning device cleaner for chemical mechanical polishing systems |
| 01/28/2003 | US6511368 Spherical drive assembly for chemical mechanical planarization |
| 01/28/2003 | US6511365 Lapping machine |
| 01/28/2003 | US6511362 Polishing apparatus and polishing method |
| 01/23/2003 | US20030017789 Working method for curved surface of a work and an apparatus thereof |
| 01/23/2003 | US20030017706 Method and apparatus for cleaning a web-based chemical mechanical planarization system |
| 01/23/2003 | US20030015289 Method and apparatus for cleaning a web-based chemical mechanical planarization system |
| 01/23/2003 | US20030015215 Polishing pad conditioner and application thereof |
| 01/21/2003 | US6509269 Elimination of pad glazing for Al CMP |
| 01/21/2003 | US6508697 Polishing pad conditioning system |
| 01/16/2003 | US20030013394 Polishing pad conditioner for semiconductor polishing apparatus and method of monitoring the same |
| 01/16/2003 | US20030013389 Process for the abrasive machining of surfaces, in particular of semiconductor wafers |
| 01/16/2003 | US20030013381 Polishing pad conditioning system |
| 01/15/2003 | EP1275473A2 Tool dressing apparatus and method |
| 01/15/2003 | CN1391506A Conditioner for polishing pad and method for manufacturing the same |
| 01/15/2003 | CN1099127C Method of modifying exposed surface of semiconductor wafer |
| 01/14/2003 | US6506103 ELID centerless grinding apparatus |
| 01/09/2003 | WO2003002299A2 Carrier head with porose retainer ring |
| 01/08/2003 | CN2529732Y Angle crushing device |
| 01/07/2003 | US6503129 Activated slurry CMP system and methods for implementing the same |
| 01/03/2003 | WO2003000462A1 Arrangement and method for conditioning a polishing pad |
| 01/02/2003 | US20030004085 Comprises a component for rendering a water-insoluble compound containing a metal atom or its ion separated from a surface to be polished water-soluble |
| 01/02/2003 | US20030003846 Material for use in carrier and polishing pads |
| 01/02/2003 | US20030003743 Method and apparatus for cleaning a web-based chemical mechanical planarization system |
| 01/02/2003 | EP1270148A1 Arrangement and method for conditioning a polishing pad |
| 12/31/2002 | US6500054 Chemical-mechanical polishing pad conditioner |
| 12/27/2002 | WO2002103778A2 Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processing |
| 12/27/2002 | WO2002102549A1 Feedforward and feedback control for conditioning of chemical mechanical polishing pad |
| 12/27/2002 | WO2002102548A1 Control of chemical mechanical polishing pad conditioner directional velocity to improve pad life |
| 12/26/2002 | US20020199082 Method, system and medium for process control for the matching of tools, chambers and/or other semiconductor-related entities |
| 12/26/2002 | US20020197947 Super abrasive tool and process for producing the same |
| 12/26/2002 | US20020197944 Method and apparatus for cleaning polishing surface of polisher |
| 12/26/2002 | US20020197934 Control of chemical mechanical polishing pad conditioner directional velocity to improve pad life |
| 12/26/2002 | US20020197871 Method of polishing a film |
| 12/26/2002 | US20020195093 Forming device for bevelling |
| 12/26/2002 | US20020195086 Cylinder pressure based optimization control for compression ignition engines |
| 12/26/2002 | US20020194790 Method for fabricating diamond conditioning disc and disc fabricated |
| 12/25/2002 | CN1096915C Workpiece inspection and handling |
| 12/24/2002 | US6497611 Method of polishing a magnetic head slider |
| 12/24/2002 | US6497610 Process for dressing an internal or external gear tool for fine machining of tooth profiles |
| 12/19/2002 | WO2002087823A3 Apparatus for machining the surface of guide wheels of grinding machines |
| 12/19/2002 | US20020193902 Integrating tool, module, and fab level control |
| 12/19/2002 | US20020193899 Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processing |
| 12/18/2002 | EP1266956A1 Composition for washing a polishing pad and method for washing a polishing pad |
| 12/18/2002 | EP1137514B1 Modular machine for polishing and planing substrates |
| 12/17/2002 | US6494927 Conditioner and conditioning disk for a CMP pad, and method of fabricating, reworking, and cleaning conditioning disk |
| 12/12/2002 | US20020188370 Chemical mechanical polishing apparatus and methods with central control of polishing pressure applied by polishing head |
| 12/12/2002 | US20020187731 In-situ pad and wafer cleaning during chemical mechanical polishing |
| 12/12/2002 | US20020185223 Apparatus and method for conditioning polishing pad in a chemical mechanical planarization process |
| 12/11/2002 | CN1095726C 改进的磨削和抛光机床 Improved grinding and polishing machine |
| 12/10/2002 | US6491568 Profiling methods and apparatus for generation of modified grinding worms |
| 12/05/2002 | WO2002096600A1 A cmp polisher substrate removal control mechanism and method |
| 12/05/2002 | US20020183887 Method of machining a female screw and dressing a grinding wheel for female screw machining |
| 12/05/2002 | US20020182018 Abrasive and boring method using the same |
| 12/04/2002 | EP1261454A1 Dressing apparatus and polishing apparatus |
| 12/03/2002 | US6488573 Polishing apparatus, polishing method and method of conditioning polishing pad |
| 11/28/2002 | US20020177320 Method and apparatus for polishing a substrate while washing a polishing pad of the apparatus with at least one free-flowing vertical stream of liquid |
| 11/27/2002 | EP1260312A1 Improvement in and relating to edge grinding |
| 11/21/2002 | US20020173254 Chemical Mechanical polishing apparatus |
| 11/21/2002 | US20020173235 Methods for break-in and conditioning a fixed abrasive polishing pad |
| 11/21/2002 | US20020173234 Diamond grid CMP pad dresser |
| 11/21/2002 | US20020173233 Modular controlled platen preparation system and method |
| 11/21/2002 | US20020173228 Grinder and method of and apparatus for non-contact conditioning of tool |
| 11/20/2002 | EP1035945A4 Manufacturing a memory disk or semiconductor device using an abrasive polishing system, and polishing pad |
| 11/20/2002 | CN1380483A Abrasive material and drilling method using said abrasive material |
| 11/19/2002 | US6482074 Apparatus and method for transferring a torque from a rotating hub frame to a hub shaft |