Patents
Sitemap › B24 - Grinding; Polishing › B24B - Machines, devices, or processes for grinding or polishing; Dressing or conditioning of abrading surfaces; Feeding of grinding, polishing, or lapping agents › B24B 53 - Devices or means for dressing or conditioning abrasive surfaces
Patents for B24B 53 - Devices or means for dressing or conditioning abrasive surfaces (5,132)
02/2000
02/10/2000WO2000006340A1 Rotary dressing tool containing brazed diamond layer
02/08/2000US6022807 Method for fabricating an integrated circuit
02/08/2000US6022400 Polishing abrasive grains, polishing agent and polishing method
02/08/2000US6022266 In-situ pad conditioning process for CMP
02/08/2000US6022265 Complementary material conditioning system for a chemical mechanical polishing machine
02/01/2000US6019670 Method and apparatus for conditioning a polishing pad in a chemical mechanical polishing system
01/2000
01/18/2000US6015335 Apparatus for dressing inside diameter saws
01/11/2000US6012972 Method for flexible profiling of grinding worms
01/11/2000US6012968 Apparatus for and method of conditioning chemical mechanical polishing pad during workpiece polishing cycle
12/1999
12/29/1999WO1999067054A1 Wafer edge polishing method and apparatus
12/29/1999WO1999067052A2 Grinding machine, computer software to operate such a machine, and their uses therefor
12/29/1999EP0967049A1 Polishing apparatus
12/29/1999CA2335806A1 Grinding machine, computer software to operate such a machine, and their uses therefor
12/21/1999US6004196 Polishing pad refurbisher for in situ, real-time conditioning and cleaning of a polishing pad used in chemical-mechanical polishing of microelectronic substrates
12/21/1999US6004193 Dual purpose retaining ring and polishing pad conditioner
12/14/1999US6001008 Abrasive dresser for polishing disc of chemical-mechanical polisher
12/09/1999WO1999062671A1 Apparatus for polishing silicon wafers
12/08/1999CN1237497A Glass product machining apparatus
12/01/1999EP0960691A2 Glass product machining apparatus
11/1999
11/24/1999CN1046649C Method of dressing a threaded grinding wheel
11/23/1999US5990010 Pre-conditioning polishing pads for chemical-mechanical polishing
11/23/1999US5989405 Process for producing a dresser
11/16/1999US5985093 Chemical-mechanical polish (CMP) pad conditioner
11/16/1999US5984764 Method of dressing an abrasive cloth and apparatus therefor
11/10/1999EP0954407A2 Polishing apparatus
11/10/1999CN1234318A 改进的磨削和抛光机床 Improved grinding and polishing machine
11/10/1999CN1234317A 改进的磨削和抛光机床 Improved grinding and polishing machine
11/09/1999US5981301 Regeneration method and apparatus of wafer and substrate
11/09/1999US5980365 Tool grinding machine having at least two spindles
11/04/1999WO1999055493A1 Polishing grinding wheel and substrate polishing method with this grinding wheel
11/04/1999DE19818788A1 Device for subsequent machining of work pieces, particularly for deburring gearwheels
11/02/1999US5975994 Method and apparatus for selectively conditioning a polished pad used in planarizng substrates
10/1999
10/27/1999EP0777766B1 Method for obtaining well-defined edge radii on cutting tool inserts by electropolishing technique
10/21/1999WO1999052677A1 Corrosion resistant abrasive article and method of making
10/21/1999CA2327448A1 Corrosion resistant abrasive article and method of making
10/19/1999US5967250 Modified superhard cutting element having reduced surface roughness and method of modifying
10/12/1999CA2009521C Grinding tooling process involving a forming grinder, and machine used therefor
10/07/1999WO1999050024A1 Polishing apparatus
10/07/1999WO1999050023A1 Modular machine for polishing and planing substrates
10/07/1999WO1999050022A2 Chemical mechanical polishing conditioner
10/05/1999US5961377 Chemical mechanical polishing systems including brushes and related methods
10/05/1999US5961376 Method of increasing the service life of grinding wheels
10/05/1999US5961373 Process for forming a semiconductor device
10/05/1999US5961372 Substrate belt polisher
09/1999
09/28/1999US5958794 Method of modifying an exposed surface of a semiconductor wafer
09/28/1999US5957762 Internally toothed tool for the precision machining of gear wheels
09/28/1999US5957757 Conditioning CMP polishing pad using a high pressure fluid
09/28/1999US5957754 Cavitational polishing pad conditioner
09/28/1999US5957752 Grinding wheel dressing method and device
09/28/1999US5957750 Method and apparatus for controlling a temperature of a polishing pad used in planarizing substrates
09/22/1999EP0943399A1 Optical dressing method, machining device based on this method, grindstone and polishing cloth
09/21/1999US5954570 Conditioner for a polishing tool
09/21/1999US5954568 Method, tool and device for the profiling of grinding worms for continuous gear grinding
09/16/1999WO1999046083A1 Cleaning device for surface plate correcting dresser
09/14/1999US5951387 Trimming device for a grinding wheel of a grinding machine
09/14/1999US5951370 Method and apparatus for monitoring and controlling the flatness of a polishing pad
09/07/1999CA2038753C Electrolytic cleaning and refurbishing of grinding wheel
09/02/1999WO1999026763A3 Polishing apparatus
09/01/1999EP0938949A1 Electrodeless electrolytic dressing grinding method and apparatus
09/01/1999EP0938948A1 Method and apparatus for profile mirror surface grinding
09/01/1999CN1227518A Workpiece inspection and handling
08/1999
08/31/1999US5945346 Chemical mechanical planarization system and method therefor
08/31/1999US5944585 Use of abrasive tape conveying assemblies for conditioning polishing pads
08/31/1999US5944582 Chemical mechanical polishing with a small polishing pad
08/25/1999EP0937544A2 Surface treatment
08/25/1999CN2334537Y Polishing wheel loss regulation and wax bar automatic compensation device for polishing machine
08/24/1999US5941762 Method and apparatus for improved conditioning of polishing pads
08/24/1999US5941761 Shaping polishing pad to control material removal rate selectively
08/24/1999US5941138 Apparatus for the continuous path-controlled sharpening of saw toothings
08/19/1999WO1999041039A1 Improved end effector for pad conditioning
08/19/1999WO1999041038A1 Groove cleaning device for chemical-mechanical polishing
08/17/1999US5938506 Methods and apparatus for conditioning grinding stones
08/17/1999US5938504 Substrate polishing apparatus
08/10/1999US5934979 Chemical mechanical polishing apparatus using multiple polishing pads
08/10/1999US5934566 Washing apparatus and washing method
08/04/1999EP0879115A4 Lapping and polishing method and apparatus for planarizing photoresist and metal microstructure layers
08/03/1999US5931725 Wafer polishing machine
07/1999
07/29/1999DE19802976A1 Rod-form micro-optic production process, e.g. for micro-lenses and micro-arrays
07/27/1999US5928065 Centerless grinding machine with optimal regulating wheel truing and dressing
07/22/1999WO1999036227A1 Device for dressing a grindstone to polish the running surface structure of a ski
07/22/1999DE19800032A1 Corrective grinding process for round, flat and profile grinding of workpieces
07/16/1999CA2257747A1 Device for dressing a grinding wheel for sharpening elongated objects
07/13/1999US5922135 Method of removing residual wax from silicon wafer polishing plate
07/13/1999US5921856 CVD diamond coated substrate for polishing pad conditioning head and method for making same
07/08/1999WO1999033616A1 Device and method for machining in which cool air cooling is used
07/07/1999EP0724501B1 Improvements in or relating to grinding machines
07/07/1999CN1222107A Grinding machine spindle flexibly attached to platform
06/1999
06/29/1999US5916010 CMP pad maintenance apparatus and method
06/24/1999WO1999030871A1 Apparatus for dressing inside diameter saws
06/24/1999DE19754887A1 Verfahren und Vorrichtung zum funkenerosiven Abrichten einer Schleifscheibe Method and apparatus for electrical discharge truing a grinding wheel
06/22/1999US5913715 Use of hydrofluoric acid for effective pad conditioning
06/22/1999US5913714 Method for dressing a polishing pad during polishing of a semiconductor wafer
06/17/1999WO1999029469A1 Method and device for electro-erosive dressing of a grinding wheel
06/16/1999EP0922533A2 Dressing roll for grinding wheels
06/16/1999EP0921904A1 Apparatus and method for polishing semiconductor devices
06/16/1999EP0921886A1 Apparatus and method for improved precision grinding of face gears
06/10/1999WO1999028084A1 Method and apparatus for conditioning polishing pads utilizing brazed diamond technology and titanium nitride
06/09/1999EP0920958A2 Electrode generating hydro-dynamic pressure
06/09/1999CA2254189A1 A dressing roll for grinding wheels
06/08/1999US5910040 Method of controlling shape and NC processing apparatus utilizing the method
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