| Patents for B24B 53 - Devices or means for dressing or conditioning abrasive surfaces (5,132) |
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| 09/14/2000 | WO2000053370A2 Method and apparatus for non-abrasive conditioning of polishing pads |
| 09/14/2000 | DE19910747A1 Adjusting dressing tool in pitch gaps in grinding worm involves pre-centering step and fine centering step in which exact center position is derived from contact positions |
| 09/14/2000 | DE19910746A1 Method for profiling worm drives for gear cutting machines has a composite grinding wheel on a turntable to shape the entire profile |
| 09/13/2000 | EP1034886A2 Polishing apparatus including attitude controller for dressing apparatus |
| 09/13/2000 | CN2395847Y Washing and blowing-drying device of rotary disc for grinding metal and surface paint |
| 09/13/2000 | CN1056329C Grinding weel avoiding-method of trimmer for automatic internal surface grinding machine |
| 09/12/2000 | US6117001 Electrolytic in-process dressing method, electrolytic in-process dressing apparatus and grindstone |
| 09/12/2000 | US6116997 Single side work polishing apparatus |
| 09/12/2000 | US6116989 Apparatus for dressing a grinding disc |
| 09/08/2000 | WO2000051783A1 Method for conditioning a pad used for polishing a for copper-based semiconductor wafer |
| 09/06/2000 | EP1033908A2 Plasma discharge truing apparatus and fine-machining methods using the apparatus |
| 09/06/2000 | EP1033202A2 Grinding machine with continuous dressing |
| 09/05/2000 | US6114706 Method and apparatus for predicting process characteristics of polyurethane pads |
| 09/05/2000 | US6113464 Method for mirror surface grinding and grinding wheel therefore |
| 08/30/2000 | CN1055885C Dressing method of super-hard abrasive partical concave and convas grinding wheel |
| 08/29/2000 | US6110019 Electrode generating hydro-dynamic pressure in combination with grinding wheel |
| 08/24/2000 | DE19907363A1 Topological profiling process for continuous tooth grinding worms, involving using tool with required topology in distorted form on simple basic geometry |
| 08/22/2000 | US6106382 Abrasive product for dressing |
| 08/22/2000 | US6106371 Effective pad conditioning |
| 08/22/2000 | US6106364 Process for torque free outer circumference grinding of a cylindrical journal |
| 08/15/2000 | US6102778 Wafer lapping method capable of achieving a stable abrasion rate |
| 08/10/2000 | DE19905136A1 Correction process for grinding screw, with servo motor serving as second motor and angle of correcting grindstone measured by second angle setter |
| 08/08/2000 | US6099393 Polishing method for semiconductors and apparatus therefor |
| 08/02/2000 | CN1261838A Internal abrasive machine |
| 08/02/2000 | CN1261837A External abrasive machine |
| 08/01/2000 | US6095908 Polishing apparatus having a material for adjusting a surface of a polishing pad and method for adjusting the surface of the polishing pad |
| 08/01/2000 | US6095897 Grinding and polishing machines |
| 07/27/2000 | WO2000043154A1 Process and apparatus for manufacturing endodontic instruments |
| 07/27/2000 | DE19913163C1 Double surface grinding machine has two concentric grinding discs and independent adjustment of discs in axial direction, and includes tool holder with alignment tools for both discs |
| 07/27/2000 | DE10001848A1 Grinding device to produce grooves in workpiece, with rod-form grindstone, spindle mechanism, support device, and drive mechanism to move grindstone at constant angle |
| 07/27/2000 | CA2359927A1 Process and apparatus for manufacturing endodontic instruments |
| 07/26/2000 | EP1022094A2 Diamond dressing disc |
| 07/25/2000 | US6093280 Chemical-mechanical polishing pad conditioning systems |
| 07/25/2000 | US6093080 Polishing apparatus and method |
| 07/13/2000 | WO2000040369A1 An abrasive machine for machining a surface of a cylindrical work piece |
| 07/12/2000 | EP1018400A2 Planarization apparatus and method |
| 07/12/2000 | EP1017540A1 An abrasive means and a grinding process |
| 07/12/2000 | CN2386919Y Polisher |
| 07/11/2000 | US6086460 Method and apparatus for conditioning a polishing pad used in chemical mechanical planarization |
| 07/11/2000 | US6086457 Washing transfer station in a system for chemical mechanical polishing |
| 07/06/2000 | DE19849259C1 Diamond leveling disk comprises rotation-symmetrical body and has irregularly formed diamond granules on its peripheral surface and-or its one face side |
| 07/05/2000 | EP1015177A1 Polishing media magazine for improved polishing |
| 07/04/2000 | US6083085 Method and apparatus for planarizing microelectronic substrates and conditioning planarizing media |
| 06/29/2000 | WO2000037217A1 Method for cleaning an abrasive surface |
| 06/27/2000 | US6080046 Underwater wafer storage and wafer picking for chemical mechanical polishing |
| 06/21/2000 | EP1009585A1 External abrasive machine |
| 06/20/2000 | US6077385 Polishing apparatus |
| 06/20/2000 | US6077155 Polishing device and correcting method therefor |
| 06/20/2000 | US6077150 Profiling methods for generation of modified grinding worms |
| 06/14/2000 | EP1007278A1 Device and method for treating polishing pads, especially polishing cloths |
| 06/14/2000 | EP1007275A1 Cavitational polishing pad conditioner |
| 06/07/2000 | EP1005956A2 Grinding machine spindle flexibly attached to platform |
| 06/07/2000 | EP1005955A2 Grinding machine spindle flexibly attached to platform |
| 05/30/2000 | US6069080 Fixed abrasive polishing system for the manufacture of semiconductor devices, memory disks and the like |
| 05/30/2000 | US6068549 Structure and method for three chamber CMP polishing head |
| 05/24/2000 | EP1002626A2 A linear CMP tool design using in-situ slurry distribution and concurrent pad conditionning |
| 05/24/2000 | EP1002625A1 Cleaning device for surface plate correcting dresser |
| 05/18/2000 | WO2000027585A1 Method and apparatus for conditioning a polishing pad used in chemical mechanical planarization |
| 05/18/2000 | DE19852304A1 Cooling process for grindstone correcting tool, involving cooling with directed coolant jet at pressure of several bars |
| 05/17/2000 | EP1000706A2 Grinding machine spindle flexibly attached to platform |
| 05/16/2000 | US6062955 Installation for improving chemical-mechanical polishing operation |
| 05/10/2000 | EP0999013A1 Polishing grinding wheel and substrate polishing method with this grinding wheel |
| 05/10/2000 | CN2377044Y Abrasive dresser tool holder lateral moving structure |
| 05/10/2000 | CN2377043Y Abrasive dresser pin joint structure for grinding machine |
| 05/09/2000 | US6059921 Chemical mechanical polishing apparatus and a polishing cloth for a chemical mechanical polishing apparatus |
| 05/04/2000 | WO2000024548A1 Polishing apparatus and a semiconductor manufacturing method using the same |
| 05/03/2000 | CN1251791A Chemically mechanical polishing apparatus |
| 05/02/2000 | US6056629 Free form machining tool |
| 04/27/2000 | DE19847723A1 Abrichtwerkzeug für ein Zahnrad-Honwerkzeug, Zahnrad-Honwerkzeug und Honmaschine für ein solches Abrichtwerkzeug bzw. Honwerkzeug Dressing for a gear-honing, gear honing tool and honing machine for such a dresser or honing tool |
| 04/26/2000 | CN2375414Y Tool apron slideway for grinding wheel arc angle dressing device |
| 04/25/2000 | US6053801 Substrate polishing with reduced contamination |
| 04/19/2000 | EP0993908A2 Dressing tool for a gearwheel honing tool, gearwheel honing tool and honing machine for such a dressing tool resp. honing tool |
| 04/19/2000 | EP0993350A1 Internal abrasive machine |
| 04/19/2000 | EP0809557A4 Determining the coefficient of friction of a polishing pad |
| 04/19/2000 | EP0706434B1 Method of dressing a threaded grinding wheel |
| 04/18/2000 | US6051495 Comprising a supports and a seasoning layer attached to the first surface of the support device, for seasoning a polishing pad with tungsten polishing by-product to polish tungsten |
| 04/18/2000 | US6050885 Device for the chemical-mechanical polishing of an object, in particular a semiconductor wafer |
| 04/18/2000 | US6050879 Process for lapping air bearing surfaces |
| 04/18/2000 | US6050756 Method of cooling and lubricating a tool and/or workpiece and a working spindle for carrying out the method |
| 04/11/2000 | US6048409 Washing apparatus and washing method |
| 04/06/2000 | WO2000018543A1 Method of post cmp defect stability improvement |
| 04/06/2000 | WO2000018542A1 Chemical mechanical polishing conditioner |
| 03/28/2000 | US6043961 Magnetic recording medium and method for producing the same |
| 03/28/2000 | US6042688 Carrier for double-side polishing |
| 03/28/2000 | US6042457 Conditioner assembly for a chemical mechanical polishing apparatus |
| 03/28/2000 | US6042455 Polishing apparatus |
| 03/23/2000 | WO1999067052A3 Grinding machine, computer software to operate such a machine, and their uses therefor |
| 03/21/2000 | US6040244 Polishing pad control method and apparatus |
| 03/21/2000 | US6039635 Surface polishing apparatus including a dresser |
| 03/16/2000 | WO2000013870A1 Method and device for cutting and mirror finishing single crystal silicon carbide |
| 03/14/2000 | US6036589 Cleaner for a belt sander |
| 03/14/2000 | US6036583 Conditioner head in a substrate polisher and method |
| 03/09/2000 | WO2000012264A1 Polishing pad having open area which varies with distance from initial pad surface |
| 03/09/2000 | WO1999050022A3 Chemical mechanical polishing conditioner |
| 03/07/2000 | US6033290 Chemical mechanical polishing conditioner |
| 03/02/2000 | DE19901338C1 Procedure for profiling grinding worm for continuous roller grinding process has grinding worm profiled corresponding to requirements of workpiece, working profile measured exactly, then measured values converted into control data |
| 02/29/2000 | US6030487 Wafer carrier assembly |
| 02/24/2000 | WO2000009291A1 Dressing of grinding wheels |
| 02/23/2000 | EP0980735A2 Micro-discharge truing device and fine machining method using the device |
| 02/22/2000 | US6027659 Polishing pad conditioning surface having integral conditioning points |