Patents for B24B 53 - Devices or means for dressing or conditioning abrasive surfaces (5,132)
01/2007
01/11/2007US20070010172 Enhanced end effector arm arrangement for CMP pad conditioning
01/11/2007US20070010170 Methods and systems for conditioning planarizing pads used in planarizing substrates
01/11/2007DE102006029936A1 System for dressing grinding tools mounted on a rotating support and with an adjustable guide and support to reduce vibration
01/10/2007EP1171256A4 Process and apparatus for manufacturing endodontic instruments
01/10/2007EP1128932A4 Method and apparatus for conditioning a polishing pad used in chemical mechanical planarization
01/10/2007CN1894073A Dressing method in vertical duplex-head surface grinding machine
01/09/2007US7160178 In situ activation of a three-dimensional fixed abrasive article
01/04/2007WO2007000831A1 Diamond rotary dresser for gear and method for truing and dressing gear processing grinding wheel using the rotary dresser
01/04/2007US20070005177 Detection-signal transmitting apparatus
01/04/2007US20070004325 Method for manufacturing diamond film
01/04/2007DE202006010365U1 Grinding wheel dressing device, is fastened on workpiece support by clamp and screwing mechanism, when wheel has imbalance or eccentric impact, where device is manufactured using steel
01/03/2007CN1887522A Grinding process for making thread forming tool
01/02/2007CA2378872C Improved burr for preparing a homogeneous pulpstone surface
12/2006
12/28/2006US20060292969 Dressing tool, dressing device, dressing method, processing device and semiconductor device producing method
12/21/2006US20060286911 Non-glazing dressing wheel
12/20/2006CN1882414A Surface cleaning and modifying method and surface cleaning and modifying apparatus
12/19/2006US7150675 Method and system for controlling the chemical mechanical polishing by using a sensor signal of a pad conditioner
12/19/2006CA2285778C Metal-resin bond grindstone and method for manufacturing the same
12/14/2006WO2006132725A1 Conditioning element for electrochemical mechanical processing
12/13/2006CN2846018Y Swing arm emery wheel repair device
12/07/2006WO2006129328A1 Tool for reconditioning gear grinding wheels
12/07/2006US20060276115 Apparatus and method for conditioning polishing surface, and polishing apparatus and method of operation
12/06/2006CN1874874A Pad assembly for electrochemical mechanical processing
11/2006
11/30/2006WO2006127054A1 Smart conditioner rinse station
11/30/2006US20060270323 Polishing apparatus
11/30/2006US20060270237 Apparatus and method for pre-conditioning CMP polishing pad
11/29/2006CN2841249Y Universal angle sand-wheel finishing apparatus
11/28/2006US7141501 Polishing method, polishing apparatus, and method of manufacturing semiconductor device
11/23/2006WO2006124637A1 Ultraschallanalysator fur chemisch-mechanisches polierkissen
11/23/2006US20060260745 Polishing pad surface shape measuring instrument, method of using polishing pad surface shape measuring instrument, method of measuring apex angle of cone of polishing pad, method of measuring depth of groove of polishing pad, CMP polisher, and method of manufacturing semiconductor device
11/22/2006EP1722926A1 Undulated pad conditioner and method of using same
11/22/2006EP1722925A1 Insulated pad conditioner and method of using same
11/22/2006EP1722922A1 Centerless grinder
11/21/2006US7137868 Pad assembly for electrochemical mechanical processing
11/21/2006US7137866 Polishing apparatus and method for producing semiconductors using the apparatus
11/16/2006US20060258264 CMP Pad Analyzer
11/15/2006EP1721704A1 Dressing tool, method for dressing grinding wheels and machine for carrying out the method
11/15/2006CN1861323A Numerical control formation teeth-grinding abrasion wheel trimmer
11/15/2006CN1284651C Center-less grinding apparatus and center-less grinding process
11/14/2006US7134944 Apparatus and method for conditioning a contact surface of a processing pad used in processing microelectronic workpieces
11/14/2006US7134939 Method for reducing wear of mechanically interacting surfaces
11/09/2006US20060252350 Chemical mechanical polishing system and process
11/08/2006EP1719583A1 Surface cleaning/modifying method and surface cleaning/modifying device
11/08/2006EP1719579A1 Detection signal transmitting apparatus
11/08/2006EP1346797B1 Cmp conditioner and method for arranging hard abrasive grains used for cmp conditioner
11/08/2006CN1860019A Working surface and system for production thereof
11/08/2006CN1859998A Method and system for controlling the chemical mechanical polishing by using a sensor signal of a pad conditioner
11/07/2006US7131185 Method of manufacturing magnetic recording medium
11/02/2006EP1716973A1 Double end face truing device, double end face truing tool, and double end face truing method
11/02/2006EP1715979A2 Multi-step, in-situ pad conditioning system and method for chemical mechanical planarization
10/2006
10/31/2006US7128637 System and method detecting malfunction of pad conditioner in polishing apparatus
10/26/2006US20060237395 Truing method for grinding wheel, its truing device and grinding machine
10/25/2006CN1850410A Saw blade tooth profile grinding-shaping method
10/24/2006US7125477 Contacts for electrochemical processing
10/24/2006US7125324 Insulated pad conditioner and method of using same
10/24/2006US7125316 Method and device for producing molds for toothed belts
10/24/2006US7124753 Brazed diamond tools and methods for making the same
10/19/2006US20060234610 Apparatus for conditioning chemical-mechanical polishing pads
10/19/2006US20060231414 Electropolishing by having a conductive rotating contact element extending from a polishing surface of a pad body which rotates while in contact with the substrate and is in a fluid channel formed in the pad through which an electrolyte is flowing to activate the conductive rotating contact element
10/18/2006CN2827638Y Formed sand wheel dressing device for gear grinding of bevel gear
10/18/2006CN2827637Y Formed knife disc dressing device for milling of bevel gear
10/18/2006CN1280517C Abrasive material and drilling method using said abrasive material
10/17/2006US7121930 Process and dressing tool for the dressing of cylindrical grinding worms for the continuous generation grinding of gears
10/17/2006US7121928 High smoothness grinding process and apparatus for metal material
10/17/2006US7121919 Chemical mechanical polishing system and process
10/12/2006WO2006106790A1 Polishing apparatus, semiconductor device manufacturing method using such polishing apparatus and semiconductor device manufactured by such semiconductor device manufacturing method
10/12/2006US20060228995 Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces
10/12/2006US20060225720 Rotary dressing tool containing brazed diamond layer
10/12/2006DE102005036382A1 Integral surface correction device for polishing wheel has automatic control switching to control radial feed of polishing wheel and radial feed of corrector
10/11/2006EP1710048A1 Polishing pad surface shape measuring instrument, method of using polishing pad surface shape measuring instrument, method of measuring apex angle of cone of polishing pad, method of measuring depth of groove of polishing pad, cmp polisher, and method of manufacturing semiconductor device
10/10/2006US7118461 Smooth pads for CMP and polishing substrates
10/10/2006US7118459 Dressing tool for profiling the tip area of a threaded grinding wheel
10/10/2006US7118448 Truing method for grinding wheel, its truing device and grinding machine
10/04/2006EP1707316A2 Abrasive grain and grindstone
10/04/2006CN1841671A Fabrication process of semiconductor device and polishing method and polishing device
09/2006
09/28/2006WO2006073924A3 Chemical mechanical polishing pad dresser
09/21/2006WO2006098150A1 Polishing head for semiconductor wafer, polishing apparatus and polishing method
09/20/2006CN2818072Y Trimmer of polishing wheel
09/20/2006CN1275751C Dry processing method for ceramic brick and a dry edging and bevelling machine
09/19/2006US7108581 Polishing apparatus
09/19/2006US7108579 Method and device for polishing
09/13/2006CN2815606Y Grinding wheel side-dressing pen
09/13/2006CN1832829A In situ activation of a three-dimensional fixed abrasive article
09/13/2006CN1274465C Sander for polishing cloth and polishing cloth sanding method using said sander
09/12/2006US7105446 Apparatus for pre-conditioning CMP polishing pad
09/07/2006US20060199482 Pad conditioner for chemical mechanical polishing apparatus
09/07/2006US20060199472 Apparatus and method for conditioning a polishing pad used for mechanical and/or chemical-mechanical planarization
09/06/2006EP1306164B1 Contact-discharge truing/dressing method and device therefor
09/05/2006US7101799 Feedforward and feedback control for conditioning of chemical mechanical polishing pad
09/05/2006US7101264 Dressing wheel system
09/05/2006US7101255 Polishing apparatus
08/2006
08/31/2006US20060194525 Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion
08/31/2006US20060194521 Polishing apparatus
08/31/2006US20060194515 Methods and systems for conditioning planarizing pads used in planarizing substrates
08/29/2006US7097545 Polishing pad conditioner and chemical mechanical polishing apparatus having the same
08/29/2006US7097544 Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion
08/29/2006US7097542 Method and apparatus for conditioning a polishing pad
08/29/2006US7097535 Method and configuration for conditioning a polishing pad surface
08/24/2006US20060189264 Apparatus and method for conditioning polishing surface, and polishing apparatus and method of operation
08/24/2006US20060189140 Insulated pad conditioner and method of using same
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