Patents for B24B 53 - Devices or means for dressing or conditioning abrasive surfaces (5,132) |
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01/06/2005 | US20050000801 Method and apparatus for electrochemical mechanical processing |
01/05/2005 | EP1493533A1 Centerless grinding machine |
01/05/2005 | EP1222056A4 Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization |
01/05/2005 | CN2668326Y Grinding wheel thickness dressing device |
01/05/2005 | CN1561280A Method and apparatus for avoiding particle accumulation in electrodeposition |
01/05/2005 | CN1182940C Small diameter chemical machinery polishing system |
01/04/2005 | US6837773 Method and apparatus for controlling a temperature of a polishing pad used in planarizing substrates |
12/30/2004 | US20040266327 Conductive polishing article for electrochemical mechanical polishing |
12/30/2004 | US20040266322 Polishing pad, polishing apparatus and method for polishing wafer |
12/30/2004 | DE10324429A1 Verfahren und System zum Steuern des chemisch-mechanischen Polierens mittels eines Sensorsignals eines Polierkissenkonditionierers A method and system for controlling the chemical mechanical polishing by means of a sensor signal of a Polierkissenkonditionierers |
12/30/2004 | DE10322496A1 Device for automatic cleaning and conditioning of polishing cloths comprises a body with bristle tufts and means for attaching it to a polishing machine |
12/29/2004 | CN1557608A Method for assisting on-line trimming diamond grinding wheel based on discharging in air |
12/28/2004 | US6835116 Polishing apparatus |
12/23/2004 | WO2004112091A2 Vacuum-assisted pad conditioning system and method utilizing an apertured conditioning disk |
12/23/2004 | US20040259487 Chemical mechanical polish (CMP) conditioning-disk holder |
12/23/2004 | US20040259486 Polishing apparatus |
12/23/2004 | US20040259477 Pad conditioner control using feedback from a measured polishing pad roughness level |
12/23/2004 | DE10322181A1 Abrichtwerkzeug zum Abrichten einer Schleifschnecke Dressing tool for dressing a grinding worm |
12/22/2004 | EP1489652A2 Method of modifying a surface of a semiconductor wafer |
12/16/2004 | DE10322991A1 Work-piece grinding method e.g. using rotary grinding disc, involves angularly displacing spraying medium to contact point on grinding surface relative to axis of rotation of grinding disc |
12/09/2004 | WO2004106000A1 A method and system for controlling the chemical mechanical polishing by using a sensor signal of a pad conditioner |
12/09/2004 | WO2004087375A8 Chip customized polish pads for chemical mechanical planarization (cmp) |
12/09/2004 | US20040248415 Polishing method and polishing liquid |
12/09/2004 | DE19640416B4 Schleifvorrichtung für das Messer von Entschleif- oder Spaltmaschinen Grinder for the diameter of Entschleif- or splitting machines |
12/08/2004 | CN1553842A Dressing tool, dressing device, dressing method, processing device, and semiconductor device producing method |
12/07/2004 | US6827633 Polishing method |
12/07/2004 | US6827072 Dressing wheel and method of making same |
12/07/2004 | US6827071 Wheel dresser for grinding wheel |
12/02/2004 | US20040242130 Grinding apparatus and method for manufacturing magnetic recording medium using the same |
12/02/2004 | US20040242122 Method and system for controlling the chemical mechanical polishing by using a sensor signal of a pad conditioner |
12/02/2004 | US20040241989 Method of using multiple, different slurries in a CMP polishing process via a pad conditioning system |
12/01/2004 | CN1550289A Method for cleaning a grinding body coated with cubi boron nitride and apparatus for performing said method |
11/30/2004 | US6824454 Polishing apparatus |
11/30/2004 | US6824451 Process for the abrasive machining of surfaces, in particular of semiconductor wafers |
11/30/2004 | US6824448 CMP polisher substrate removal control mechanism and method |
11/25/2004 | WO2004069478A3 Grinding machine |
11/25/2004 | US20040235404 Embedding tool designed to embed grains into faceplate for lapping apparatus |
11/25/2004 | US20040235401 Truing tool for truing a grinding worm |
11/25/2004 | US20040235390 Reclaiming virgin test wafers |
11/25/2004 | US20040235301 Method and device for polishing |
11/24/2004 | EP1479478A2 Method for cleaning a grinding body coated with cubi boron nitride inside an apparatus for separating tobacco from a bale and apparatus for performing said method |
11/24/2004 | CN1550034A Constant pH polish and scrub |
11/24/2004 | CN1548271A Trimming disc with grinding grains capable of being regulated individually and its making process |
11/23/2004 | US6821190 Static pad conditioner |
11/17/2004 | EP1478012A1 Polishing method and polishing fluid |
11/17/2004 | EP1478011A1 Method and device for polishing |
11/17/2004 | EP1477256A1 Dressing tool for a grinding worm |
11/16/2004 | US6818029 Forming geometrical protrusions of uniform height and coating with diamond layer |
11/16/2004 | US6817924 Chemical mechanical polishing apparatus, profile control system and conditioning method thereof |
11/11/2004 | US20040224617 Static pad conditioner |
11/11/2004 | US20040224142 Method of polishing a semiconductor device |
11/11/2004 | US20040221874 Cleaning method and polishing apparatus employing such cleaning method |
11/04/2004 | WO2004094106A1 Diamond conditioning of soft chemical mechanical planarization/polishing (cmp) polishing pads |
11/04/2004 | US20040219866 Method and apparatus for forming grooves on a workpiece and for dressing a grindstone used in the groove formation |
11/03/2004 | EP1472018A1 Copper polishing cleaning solution |
11/03/2004 | CN1173804C Grinding bed dresser |
10/28/2004 | US20040214511 Visual wear confirmation polishing pad |
10/27/2004 | EP1470894A1 Apparatus for dressing a cup-shaped grinding wheel |
10/26/2004 | US6807960 Tool for dressing pulpstones |
10/26/2004 | US6807701 Method of cleaning abrasive plates of abrasive machine and cleaning device |
10/21/2004 | US20040209552 Centerless grinding apparatus and centerless grinding method |
10/21/2004 | US20040206454 Inline monitoring of pad loading for CuCMP and developing an endpoint technique for cleaning |
10/21/2004 | US20040206453 CMP machine dresser and method for detecting the dislodgement of diamonds from the same |
10/21/2004 | US20040206374 Inline monitoring of pad loading for CuCMP and developing an endpoint technique for cleaning |
10/19/2004 | US6806193 Reducing particle deposits on scouring pads used for chemical mechanical polishing (cmp) of semiconductor wafers, using cleaners comprising mixtures of water, ammonium citrate, surfactants and benzotriazole |
10/14/2004 | WO2004087375A1 Chip customized polish pads for chemical mechanical planarization (cmp) |
10/14/2004 | WO2004077520A3 Wafer polishing and pad conditioning methods |
10/14/2004 | US20040203326 Conditioning mechanism for chemical mechanical polishing |
10/14/2004 | US20040203325 Conditioner disk for use in chemical mechanical polishing |
10/14/2004 | CA2519942A1 Chip customized polish pads for chemical mechanical planarization (cmp) |
10/13/2004 | CN1537324A Polising method and device |
10/13/2004 | CN1170656C Method for grinding non-axial-symmetry and non-ball-surface mirror |
10/07/2004 | WO2004086477A1 Pad conditioners and fabrication methods thereof |
10/07/2004 | US20040198206 Grinding wheel |
10/07/2004 | US20040198200 Pad conditioner of CMP equipment |
10/06/2004 | CN1535197A Fixed abrasive articles with wear indicators |
10/06/2004 | CN1535196A Feed and feedback control of chemical mechanical polishing pad conditioning |
10/05/2004 | US6800020 Web-style pad conditioning system and methods for implementing the same |
09/30/2004 | US20040192178 Diamond conditioning of soft chemical mechanical planarization/polishing (CMP) polishing pads |
09/30/2004 | US20040192175 Polishing pad, method of manufacturing glass substrate for use in data recording medium using the pad, and glass substrate for use in data recording medium obtained by using the method |
09/30/2004 | US20040192168 Arrangement and method for conditioning a polishing pad |
09/29/2004 | EP1462217A1 Grinding wheel |
09/29/2004 | CN2644099Y Automatic powered regulating mechanism of grinder for outer race of bearing groove |
09/29/2004 | CN2644098Y Interpolation dresser micromotion device |
09/29/2004 | CN1533595A Polishing method and grinding fluid |
09/29/2004 | CN1532026A Grinding pad finishing device and its producing method |
09/29/2004 | CN1168575C Method for repairing and maintaining grinding board by using double-board grinding machine |
09/29/2004 | CN1168574C Multifunctional grinding wheel truing device and utilizing method thereof |
09/23/2004 | US20040185763 Vitrified bond tool and method of manufacturing the same |
09/23/2004 | DE102004011985A1 Verfahren und Vorrichtung zur Konditionierung einer Oberflächenform eines Schleifsteins sowie eine Schleifmaschine Method and apparatus for conditioning a surface shape of a grindstone and a grinding |
09/22/2004 | EP1459847A2 Corrosion resistant abrasive article and method of making |
09/22/2004 | EP1459844A1 Method and device for truing grinding wheel and grinding device |
09/22/2004 | EP1459358A1 Methods and apparatus for conditioning and temperature control of a processing surface |
09/21/2004 | US6794206 Method of polishing a film |
09/21/2004 | US6793562 Grinder and method of and apparatus for non-contact conditioning of tool |
09/16/2004 | US20040180617 Conditioning disk |
09/10/2004 | WO2004077520A2 Wafer polishing and pad conditioning methods |
09/10/2004 | WO2004028746A3 Brazed diamond tools and methods for making the same |
09/09/2004 | US20040176018 Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces |
09/09/2004 | DE19938781B4 Konditionierscheibe zum Konditionieren von CMP-Pads Conditioning disk for conditioning CMP pads |