| Patents for B24B 53 - Devices or means for dressing or conditioning abrasive surfaces (5,132) |
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| 06/03/1999 | WO1999026763A2 Polishing apparatus |
| 05/26/1999 | EP0917931A1 Combined cutting and grinding tool |
| 05/25/1999 | US5906754 Apparatus integrating pad conditioner with a wafer carrier for chemical-mechanical polishing applications |
| 05/20/1999 | WO1999024218A1 Manufacturing a memory disk or semiconductor device using an abrasive polishing system, and polishing pad |
| 05/18/1999 | US5904615 Pad conditioner for chemical mechanical polishing apparatus |
| 05/12/1999 | EP0855946B1 Method of cooling and lubricating a tool and/or workpiece and a working spindle for carrying out the method |
| 05/11/1999 | US5902173 Polishing machine with efficient polishing and dressing |
| 05/05/1999 | CN1216015A Abrasive body |
| 05/04/1999 | US5900164 Sliding a planarizing pad made of a polymeric matrix impregnated with hollow flexible polymeric microelements on a semiconductor work surface; work surface of the pad may be continuously regenerated |
| 04/22/1999 | WO1999019113A1 Centerless grinder |
| 04/21/1999 | EP0909611A1 Method for grinding the surfaces of workpieces and apparatus for carrying out the method |
| 04/14/1999 | EP0907461A1 Grinding machine spindle flexibly attached to platform |
| 04/13/1999 | US5893753 Vibrating polishing pad conditioning system and method |
| 04/07/1999 | EP0906174A1 Workpiece inspection and handling |
| 04/07/1999 | EP0906171A1 Apparatus for precision grinding face gears |
| 04/06/1999 | US5890951 Utility wafer for chemical-mechanical planarization |
| 04/06/1999 | US5890401 Apparatus for the continuous path-controlled sharpening of saw toothings |
| 03/31/1999 | EP0904893A2 Inspection of wafer edge after grinding |
| 03/23/1999 | US5885147 Apparatus for conditioning polishing pads |
| 03/23/1999 | US5885140 Single-side abrasion apparatus with dresser |
| 03/23/1999 | US5885137 Chemical mechanical polishing pad conditioner |
| 03/23/1999 | US5885132 Method and apparatus for machining an annular layer of boron nitride or diamonds of grinding discs |
| 03/18/1999 | WO1999012705A1 Optical dressing method, machining device based on this method, grindstone and polishing cloth |
| 03/18/1999 | DE19740926A1 External grinding method for cylindrical pin |
| 03/18/1999 | DE19737854A1 Vorrichtung und Verfahren zum Reinigen von Polierpads, beispielsweise Poliertüchern, insbesondere für das Polieren von Wafern Apparatus and method for cleaning the polishing pad, for example, polishing cloths, particularly for polishing wafers |
| 03/11/1999 | WO1999011433A1 Device and method for cleaning polishing pads, such as polishing cloths, especially for polishing wafers |
| 03/11/1999 | WO1999011431A1 Device and method for treating polishing pads, especially polishing cloths |
| 03/11/1999 | WO1999011427A1 Cavitational polishing pad conditioner |
| 03/09/1999 | US5879226 Method for conditioning a polishing pad used in chemical-mechanical planarization of semiconductor wafers |
| 03/04/1999 | DE19737216A1 Method of truing polishing tools for polishing optical lenses |
| 03/04/1999 | DE19737215A1 Combination tool for polishing glass blanks e.g. optical lenses |
| 03/03/1999 | EP0898504A1 Abrasive body |
| 03/03/1999 | CN1209471A Abrasive-cloth surface finishing tool and production method therefor |
| 03/02/1999 | US5876508 Method of cleaning slurry remnants after the completion of a chemical-mechanical polish process |
| 02/25/1999 | WO1999008837A1 An abrasive means and a grinding process |
| 02/24/1999 | EP0897328A1 Abrasive body |
| 02/10/1999 | CN1042007C Method for grinding tooth back of worm hob with secondary enveloping ring surface |
| 02/09/1999 | US5868608 Subsonic to supersonic and ultrasonic conditioning of a polishing pad in a chemical mechanical polishing apparatus |
| 02/09/1999 | US5868607 Electrolytic in-process dressing method, electrolytic in process dressing apparatus and grindstone |
| 02/09/1999 | US5868124 Quick set radius dresser |
| 01/28/1999 | WO1999003639A1 Methods and apparatus for conditioning polishing pads utilizing brazed diamond technology |
| 01/21/1999 | WO1999002309A1 Cvd diamond coated substrate for polishing pad conditioning head and method for making same |
| 01/21/1999 | WO1999002305A1 Substrate polishing |
| 01/19/1999 | US5860181 Method of and apparatus for cleaning workpiece |
| 01/14/1999 | WO1999001254A1 Internal abrasive machine |
| 01/14/1999 | WO1999001253A1 External abrasive machine |
| 01/14/1999 | CA2294743A1 External abrasive machine |
| 01/14/1999 | CA2294723A1 Internal abrasive machine |
| 01/12/1999 | US5857899 For polishing a semiconductor wafer |
| 01/12/1999 | US5857898 Method of and apparatus for dressing polishing cloth |
| 01/12/1999 | US5857896 Method and device for the fine machining of spur or helical gear wheels |
| 01/12/1999 | US5857894 Grinding machine for the grinding of spur or helica gear--wheels |
| 01/12/1999 | CA2161782C Method of dressing a threaded grinding wheel |
| 01/07/1999 | EP0888846A2 Method for wafer polishing and method for polishing-pad dressing |
| 12/30/1998 | EP0887153A2 Combined slurry dispenser and rinse arm and method of operation |
| 12/30/1998 | EP0887152A2 Carrier for double-side polishing |
| 12/30/1998 | EP0887151A2 Improved chemical mechanical polishing pad conditioner |
| 12/24/1998 | DE19725543A1 Reinigungsverfahren für Schleifscheiben Cleaning method for grinding wheels |
| 12/23/1998 | WO1998057779A1 Cleaning method for abrasive disks |
| 12/23/1998 | EP0885692A1 Method and apparatus for cleaning and abrasive belt |
| 12/22/1998 | US5851138 In a chemical mechanical polishing process |
| 12/16/1998 | CN2300479Y Roll shaving machine for abrasive machine |
| 12/10/1998 | WO1998055265A1 Combined cutting and grinding tool |
| 12/10/1998 | WO1998055264A1 Semiconductor wafer cmp process monitoring and endpoint |
| 12/10/1998 | WO1998055262A1 Methods and apparatus for conditioning grinding stones |
| 12/08/1998 | US5846336 Apparatus and method for conditioning a planarizing substrate used in mechanical and chemical-mechanical planarization of semiconductor wafers |
| 12/01/1998 | US5842912 Apparatus for conditioning polishing pads utilizing brazed diamond technology |
| 11/25/1998 | EP0879115A1 Lapping and polishing method and apparatus for planarizing photoresist and metal microstructure layers |
| 11/24/1998 | US5840202 Apparatus and method for shaping polishing pads |
| 11/24/1998 | US5839947 Polishing apparatus |
| 11/18/1998 | EP0878269A2 Apparatus for conditioning polishing pads |
| 11/12/1998 | DE19719503A1 Semiconductor wafer chemical and mechanical polishing device |
| 11/11/1998 | EP0876875A1 Dressing grinding wheels |
| 11/10/1998 | US5833520 Mirror polishing device |
| 11/10/1998 | US5833519 Method and apparatus for mechanical polishing |
| 11/03/1998 | US5830045 Polishing apparatus |
| 11/03/1998 | US5830043 Chemical-mechanical polishing apparatus with in-situ pad conditioner |
| 10/29/1998 | DE19806591A1 Method for trimming grinding wheels with profiled operating surface |
| 10/29/1998 | DE19717795A1 Method of trimming profiled grinding wheels with hard implement |
| 10/28/1998 | CN1197543A Method of modifying an exposed surface of semiconductor wafer |
| 10/20/1998 | US5823857 Apparatus and method for precision grinding of face gears |
| 10/20/1998 | US5823854 Chemical-mechanical polish (CMP) pad conditioner |
| 10/15/1998 | WO1998045090A1 Polishing media magazine for improved polishing |
| 10/14/1998 | EP0870578A1 Superabrasive tool and method of its manufacture |
| 10/14/1998 | EP0870577A2 Method for dressing a polishing pad, polishing apparatus, and method for manufacturing a semiconductor apparatus |
| 10/14/1998 | EP0870576A2 Polishing Apparatus |
| 10/14/1998 | CN1195597A Automatic lapping method and lapping apparatus using the same |
| 10/13/1998 | US5820449 For polishing planar faces of a structure |
| 10/07/1998 | EP0868258A1 Substrate belt polisher |
| 09/30/1998 | EP0827435B1 Device for the contoured sharpening of saw teeth |
| 09/23/1998 | EP0865342A1 Improvements in and relating to grinding machines |
| 09/22/1998 | US5810964 Chemical mechanical polishing device for a semiconductor wafer |
| 09/16/1998 | EP0827436B1 Device for the contoured sharpening of saw teeth |
| 09/09/1998 | CN2290447Y Glassed profiling edge grinder |
| 09/01/1998 | US5801066 Method and apparatus for measuring a change in the thickness of polishing pads used in chemical-mechanical planarization of semiconductor wafers |
| 08/27/1998 | DE19706867A1 Method for profiling grinding screw |
| 08/19/1998 | EP0858865A2 Method and device for dressing profiled grinding wheels |
| 08/19/1998 | CN1190791A Method and apparatus for controlling flatness of polished semiconductor wafer |
| 08/06/1998 | DE19800250A1 Grinding disc for optical lenses, fine stones, marble, wood, metal, plastics etc. |
| 08/05/1998 | EP0855946A1 Method of cooling and lubricating a tool and/or workpiece and a working spindle for carrying out the method |