Patents for B24B 53 - Devices or means for dressing or conditioning abrasive surfaces (5,132) |
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09/08/2004 | EP0852063B1 Method of modifying an exposed surface of a semiconductor wafer |
09/07/2004 | US6786808 Sharpening device for rotating cutting tools and machine employing said device |
09/02/2004 | DE202004010726U1 Werkzeugmaschine zum Schleifen und/oder Hartdrehen von Futterteilen Machine tool for grinding and / or hard turning of chuck parts |
09/01/2004 | CN1164397C Method for grinding metallic workpieces containing, in particular, nickel |
08/31/2004 | US6783445 Polishing apparatus |
08/31/2004 | US6783441 Apparatus and method for transferring a torque from a rotating hub frame to a one-piece hub shaft |
08/31/2004 | US6783428 Method for forming grooves on workpiece and for dressing a grindstone used in the groove formation |
08/26/2004 | US20040166785 Polishing pad conditioning |
08/26/2004 | US20040166782 System and method for polishing and planarizing semiconductor wafers using reduced surface area polishing pads and variable partial pad-wafer overlapping techniques |
08/26/2004 | US20040166780 Polishing pad apparatus and methods |
08/26/2004 | US20040163946 Pad assembly for electrochemical mechanical processing |
08/25/2004 | CN1524027A Control of chemical mechanical polishing pad conditioner directional velocity to improve pad life |
08/24/2004 | US6780091 Machining strain removal apparatus |
08/24/2004 | US6780088 Chemical mechanical polishing apparatus and a method of chemical mechanical polishing using the same |
08/19/2004 | WO2004069478A2 Grinding machine |
08/19/2004 | US20040162007 Chemical mechanical polishing atomizing rinse system |
08/18/2004 | EP1447172A1 Surface finishing apparatus and method |
08/18/2004 | CN1520961A Lapping apparatus and lapping method |
08/12/2004 | WO2004067226A2 Apparatus and methods for refinishing a surface in-situ |
08/12/2004 | US20040157530 Lapping apparatus and lapping method |
08/10/2004 | US6773337 Method and apparatus to recondition an ion exchange polish pad |
08/10/2004 | US6773332 Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization |
08/05/2004 | DE10261306A1 Haltering mit reduzierter Abnutzungs- und Kontaminationsrate für einen Polierkopf einer CMP-Anlage Retaining ring for minimal wear and contamination rate for a polishing head of a CMP tool |
08/03/2004 | US6769975 Super abrasive tool and process for producing the same |
08/03/2004 | US6769972 CMP polishing unit with gear-driven conditioning disk drive transmission |
08/03/2004 | US6769968 Interchangeable conditioning disk apparatus |
08/03/2004 | US6769967 Apparatus and method for refurbishing polishing pads used in chemical-mechanical planarization of semiconductor wafers |
08/03/2004 | US6769964 Abrasive tool having a unitary arbor |
07/29/2004 | WO2004062851A1 Cutting tool for soft material |
07/29/2004 | WO2004062850A1 Polishing pad conditioning |
07/29/2004 | US20040147208 Apparatus and methods for refinishing a surface in-situ |
07/29/2004 | US20040147205 Surface planarization |
07/29/2004 | US20040144160 Pad conditioning head offline testing kit |
07/29/2004 | DE19800032B4 Abricht-Schleifverfahren zum Rund-, Plan- und Profilschleifen von Werkstücken und Schleifmaschine hierfür Dressing grinding method for cylindrical, surface and profile grinding of workpieces and grinding this |
07/28/2004 | EP1440758A1 Methods and apparatus for machining a coupling |
07/27/2004 | US6767427 Apparatus and method for conditioning polishing pad in a chemical mechanical planarization process |
07/22/2004 | WO2004060609A1 Modular method for chemical mechanical planarization |
07/22/2004 | US20040142644 Grinder and method of and apparatus for non-contact conditioning of tool |
07/22/2004 | US20040140127 Sharpening means for drilling tools |
07/22/2004 | US20040139956 Wheel dresser for grinding wheel |
07/22/2004 | DE10261465A1 Anordnung zum chemisch-mechanischen Polieren mit einem verbesserten Konditionierwerkzeug An arrangement for chemical mechanical polishing with an improved dressing tool |
07/21/2004 | EP1439031A1 Method and apparatus for dressing polishing cloth |
07/21/2004 | EP0954407B1 Polishing apparatus |
07/20/2004 | US6764389 Conditioning bar assembly having an abrasion member supported on a polycarbonate member |
07/20/2004 | US6764388 High-pressure pad cleaning system |
07/15/2004 | WO2004058451A1 Glass substrate for information recording medium and method for producing same |
07/15/2004 | US20040137739 CMP in-situ conditioning with pad and retaining ring clean |
07/15/2004 | US20040134792 electroplating; ball assemblies comprises interior housing, annular seat, conductive adapter, and coupled conductive contact |
07/14/2004 | CN2625108Y Digital controlled trimming tool for profile of involute and special-shaped abrasive wheel |
07/13/2004 | US6762135 Method of cleaning a polishing pad conditioner |
07/13/2004 | US6761625 Reclaiming virgin test wafers |
07/08/2004 | US20040132390 Methods and apparatus for machining a coupling |
07/08/2004 | US20040132388 System for chemical mechanical polishing comprising an improved pad conditioner |
07/08/2004 | US20040132309 Wafer polishing method and wafer polishing apparatus in semiconductor fabrication equipment |
07/06/2004 | US6758728 Method and apparatus for cleaning polishing surface of polisher |
07/01/2004 | US20040127144 Method and apparatus for controlling CMP pad surface finish |
07/01/2004 | US20040123951 Retaining ring having reduced wear and contamination rate for a polishing head of a CMP tool |
06/29/2004 | US6755720 Vitrified bond tool and method of manufacturing the same |
06/29/2004 | US6755718 Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization |
06/24/2004 | US20040121710 Method and apparatus for conditioning a polishing pad |
06/24/2004 | US20040121708 Pad assembly for electrochemical mechanical processing |
06/22/2004 | US6752708 Pad conditioner for semiconductor substrates |
06/22/2004 | US6752699 Working method for curved surface of a work and an apparatus thereof |
06/22/2004 | US6752698 Method and apparatus for conditioning fixed-abrasive polishing pads |
06/22/2004 | US6752697 Apparatus and method for chemical mechanical polishing of a substrate |
06/22/2004 | US6752692 Cleaning method and polishing apparatus employing such cleaning method |
06/22/2004 | US6752687 Method of polishing disks |
06/22/2004 | CA2255407C V-ribbed belt and grinding wheel for forming the belt |
06/17/2004 | US20040116051 Method and apparatus for conditioning a chemical-mechanical polishing pad |
06/17/2004 | US20040112359 Brazed diamond tools and methods for making the same |
06/17/2004 | DE10255423A1 System und Verfahren zum Schleifen von Glas und zum Abrichten einer Glasschleifscheibe System and method for grinding of glass and glass for dressing a grinding wheel |
06/16/2004 | EP1428623A1 Sharpening means for core drills |
06/16/2004 | CN1505110A Chemical mechanical polishing method and apparatus |
06/15/2004 | US6749494 Conditioning tool |
06/10/2004 | WO2004012904A3 Abrasive tool having a unitary arbor |
06/10/2004 | US20040110453 Polishing pad conditioning method and apparatus |
06/10/2004 | US20040110451 Apparatuses for conditioning surfaces of polishing pads |
06/10/2004 | US20040110448 Size adjustment of corrugated boards in a box making machine |
06/10/2004 | US20040110381 Chemical mechanical polishing method and apparatus |
06/09/2004 | EP1426140A1 DRESSING TOOL, DRESSING DEVICE, DRESSING METHOD, PROCESSING DEVICE, AND SEMICONDUCTOR DEVICE PRODUCING METHOD |
06/09/2004 | EP1425786A1 Constant ph polish and scrub |
06/09/2004 | CN2619755Y Grinding wheel pair trimmer |
06/02/2004 | EP1424165A1 System and method for grinding glass and for the dressing of a glass grinding wheel |
06/02/2004 | CN2618725Y On-line repairing device for formed grinding emery wheel |
06/02/2004 | CN1501851A Method and device for producing molds for toothed belts |
06/01/2004 | US6743080 Method for seasoning a polishing pad |
06/01/2004 | US6743074 Method and system for manufacturing a photocathode |
05/27/2004 | US20040102045 Polishing apparatus |
05/27/2004 | DE10252742A1 Sharpening device used for sharpening the abrasive segments of a drill bit is filled with abrasive material and formed as a strand |
05/25/2004 | US6740629 Comprises a component for rendering a water-insoluble compound containing a metal atom or its ion separated from a surface to be polished water-soluble |
05/25/2004 | US6740169 Immersing the conditioning disk which has been used in a cmp process in sulfuric acid in order to dissolve adhesive film and remove abrasive grains; new adhesive layers and abrasive grains are then applied |
05/25/2004 | US6739955 Apparatus and methods for conditioning polishing pads in mechanical and/or chemical-mechanical planarization of microelectronic-device substrate assemblies |
05/20/2004 | US20040097176 Methods for conditioning surfaces of polishing pads after chemical-mechanical polishing, and apparatuses for conditioning surfaces of polishing pads |
05/20/2004 | US20040097169 Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization |
05/20/2004 | US20040097167 Method and device for truing grinding wheel, and grinding device |
05/18/2004 | US6736926 Inline monitoring of pad loading for CuCMP and developing an endpoint technique for cleaning |
05/13/2004 | DE10249358A1 Positioning method for rotary tool, e.g. grinding disc, using measuring probe which comes into contact with positioning disc when tool is correctly positioned |
05/13/2004 | DE10232670B4 Verfahren und Vorrichtung zur Reinigung von Läppscheiben Method and apparatus for cleaning lapping |
05/12/2004 | CN1494984A Sander for polishing cloth and polishing cloth sanding method using said sander |
05/11/2004 | US6734103 Method of polishing a semiconductor device |