Patents for B24B 53 - Devices or means for dressing or conditioning abrasive surfaces (5,132) |
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05/26/2005 | US20050112999 Method of truing chamfering grindstone and chamfering device |
05/25/2005 | EP0917931B1 Combined cutting and grinding tool |
05/25/2005 | DE10322181B4 Abrichtwerkzeug zum Abrichten einer Schleifschnecke Dressing tool for dressing a grinding worm |
05/24/2005 | US6897079 Method of detecting and measuring endpoint of polishing processing and its apparatus and method of manufacturing semiconductor device using the same |
05/24/2005 | US6896596 Polishing pad ironing system |
05/24/2005 | US6896583 Method and apparatus for conditioning a polishing pad |
05/19/2005 | US20050107012 Method and apparatus for polishing a substrate while washing a polishing pad of the apparatus with at least one free-flowing vertical stream of liquid |
05/18/2005 | EP1322449B1 Web-style pad conditioning system and methods for implementing the same |
05/17/2005 | US6893336 Polishing pad conditioner and chemical-mechanical polishing apparatus having the same |
05/12/2005 | US20050101227 Materials and methods for low pressure chemical-mechanical planarization |
05/12/2005 | US20050097690 Cleaning apparatus for rotary and orbitally mounted buffing pads |
05/11/2005 | CN2698521Y Cabinet leg arrangement for wheel dresser |
05/10/2005 | US6890245 Byproduct control in linear chemical mechanical planarization system |
05/05/2005 | US20050095960 Polishing apparatus and method for producing semiconductors using the apparatus |
05/05/2005 | US20050095959 Contoured CMP pad dresser and associated methods |
05/04/2005 | CN1611336A Dry processing method for ceramic brick and a dry edging and bevelling machine |
05/03/2005 | US6887138 Chemical mechanical polish (CMP) conditioning-disk holder |
04/28/2005 | US20050090185 Method of dressing polishing pad and polishing apparatus |
04/27/2005 | CN1610960A Methods and apparatus for conditioning and temperature control of a processing surface |
04/26/2005 | US6884155 Diamond grid CMP pad dresser |
04/26/2005 | US6884153 Apparatus for electrochemical processing |
04/26/2005 | US6884151 Method and apparatus for forming grooves on a workpiece and for dressing a grindstone used in the groove formation |
04/21/2005 | WO2005035174A1 Diamond tool, synthetic single crystal diamond and method for synthesizing single crystal diamond, and diamond jewelry |
04/20/2005 | EP1524076A1 Apparatus for grinding pieces for chucks. |
04/20/2005 | CN2693414Y Grinding wheel dressing mechanism |
04/20/2005 | CN1607069A Method of dressing polishing pad and polishing apparatus |
04/19/2005 | US6881130 Edge grinding |
04/19/2005 | US6881124 Method of manufacturing magnetic head |
04/14/2005 | WO2005032766A1 Dressing method in vertical duplex-head surface grinding machine |
04/14/2005 | WO2005000523A3 Non glazing dressing wheel |
04/14/2005 | US20050079811 Defect reduction using pad conditioner cleaning |
04/14/2005 | US20050079800 Cleaning tool and method |
04/14/2005 | DE10345335A1 Planar grinding machine has optical device for determining position of its upper part relative to a base frame so that an evaluation unit can calculate a set position prior to commencement of machining |
04/13/2005 | EP1522378A1 Five axis machine tool with continuous grinding wheel dressing device |
04/12/2005 | US6878045 Ultrasonic conditioning device cleaner for chemical mechanical polishing systems |
04/07/2005 | DE10342137A1 Vorrichtung und Verfahren zur Finishbearbeitung von Wellen, insbesondere von Kurbel- und Nockenwellen Apparatus and method for finish machining of shafts, particularly crankshafts and camshafts |
04/06/2005 | CN1196107C Method for polishing magnetic-head floating block |
04/05/2005 | US6875091 Method and apparatus for conditioning a polishing pad with sonic energy |
04/05/2005 | US6875089 Constant pH polish and scrub |
04/05/2005 | US6875086 Surface planarization |
03/31/2005 | WO2005002794A3 Cell, system and article for electrochemical mechanical processing (ecmp) |
03/31/2005 | US20050070215 Chemical mechanical polishing apparatus having conditioning cleaning device |
03/31/2005 | US20050070209 Method and system for controlling the chemical mechanical polishing by using a sensor signal of a pad conditioner |
03/30/2005 | CN1602547A Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processing |
03/29/2005 | US6872132 Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces |
03/29/2005 | US6872127 Polishing pad conditioning disks for chemical mechanical polisher |
03/29/2005 | US6871378 Automated lap washer |
03/24/2005 | WO2004112091A3 Vacuum-assisted pad conditioning system and method utilizing an apertured conditioning disk |
03/24/2005 | US20050064792 Pad conditioner setup |
03/23/2005 | EP1516700A2 Method of dressing polishing pad and polishing apparatus |
03/23/2005 | CN1193863C Conditioner for polishing pad and method for manufacturing the same |
03/22/2005 | US6869342 Dressing of grinding tools for gear grinding |
03/22/2005 | US6869337 System and method for polishing and planarizing semiconductor wafers using reduced surface area polishing pads and variable partial pad-wafer overlapping techniques |
03/17/2005 | WO2005024287A2 Working surface and system for production thereof |
03/16/2005 | EP1514642A2 Apparatus and method for finishing shafts, especially crank- and camshafts |
03/16/2005 | CN1192857C Contact-discharge truing/dressing method and device therefor |
03/15/2005 | US6866567 Activated slurry CMP system and methods for implementing the same |
03/15/2005 | US6866566 Apparatus and method for conditioning a contact surface of a processing pad used in processing microelectronic workpieces |
03/10/2005 | US20050054276 Method for reducing wear of mechanically interacting surfaces |
03/10/2005 | US20050054267 Polishing method |
03/10/2005 | US20050051266 Rotating pad on support surfaces; for semiconductor |
03/09/2005 | CN2683319Y Pneumatic type dresser for grinding mill |
03/09/2005 | CN1590027A Diamond abrasion wheel reconditioner grinding method |
03/09/2005 | CN1590024A Apparatus and method for preheating |
03/08/2005 | US6863770 Method and apparatus for polishing a substrate while washing a polishing pad of the apparatus with at least one free-flowing vertical stream of liquid |
03/03/2005 | US20050048880 Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion |
03/02/2005 | EP1472018A4 Copper polishing cleaning solution |
03/02/2005 | CN1586817A Multifunction diamond grinding wheel dresser based on auxiliary discharging in gas |
03/02/2005 | CN1586816A Device and method for continuous laser sharpening resin binder grinding wheel |
02/24/2005 | WO2005016596A1 In situ activation of a three-dimensional fixed abrasive article |
02/22/2005 | US6857942 Apparatus and method for pre-conditioning a conditioning disc |
02/17/2005 | US20050034746 Method of cleaning abrasive plates of abrasive machine and cleaning device |
02/15/2005 | US6855044 Burr for preparing a homogeneous pulpstone surface |
02/15/2005 | US6855030 Modular method for chemical mechanical planarization |
02/10/2005 | WO2005012592A2 Cvd diamond-coated composite substrate for making same |
02/10/2005 | US20050032467 Dressing tool, dressing device, dressing method, processing device and semiconductor device producing method |
02/10/2005 | US20050032462 In situ activation of a three-dimensional fixed abrasive article |
02/10/2005 | US20050032461 Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces |
02/10/2005 | US20050028843 Cleaning apparatus; rotating nozzle for jetting water toward face of abrasive plates; brushes to confing spray |
02/09/2005 | CN1577758A Polishing pad, polishing apparatus and method for polishing wafer |
02/08/2005 | US6852016 End effectors and methods for manufacturing end effectors with contact elements to condition polishing pads used in polishing micro-device workpieces |
02/08/2005 | US6852015 Method and apparatus for grinding workpiece surfaces to super-finish surface with micro oil pockets |
02/08/2005 | US6852004 CMP machine dresser and method for detecting the dislodgement of diamonds from the same |
02/03/2005 | US20050026546 Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces |
02/03/2005 | US20050026545 Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces |
02/03/2005 | US20050025973 CVD diamond-coated composite substrate containing a carbide-forming material and ceramic phases and method for making same |
01/27/2005 | US20050020194 Method and apparatus for polishing a workpiece |
01/27/2005 | DE10329724A1 Machine grinding tool to cut teeth during the manufacture of large gears wheels has co-adjustable dressing tool and grinding wheel |
01/26/2005 | EP1500469A1 Abrasive tool |
01/26/2005 | CN1186170C On-line trimming method for formed grinding wheel |
01/20/2005 | US20050014457 Apparatus and method for conditioning a contact surface of a processing pad used in processing microelectronic workpieces |
01/13/2005 | WO2005002794A2 Cell, system and article for electrochemical mechanical processing (ecmp) |
01/13/2005 | WO2004067226A3 Apparatus and methods for refinishing a surface in-situ |
01/13/2005 | US20050009448 Customized polish pads for chemical mechanical planarization |
01/12/2005 | EP1495838A1 Wafer polishing apparatus and method for manufacturing wafer |
01/12/2005 | CN1562567A Method for finishing grinding wheel based on involute of arc and dresser |
01/12/2005 | CN1562566A Online electrolytic grinding and trimming method by using grinding wheel in metal binding agent type, and equipment |
01/11/2005 | US6840840 Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization |
01/06/2005 | WO2005000523A2 Non glazing dressing wheel |
01/06/2005 | US20050003739 Grinding machine, in particular centerless cylindrical grinding machine |