Patents for B24B 53 - Devices or means for dressing or conditioning abrasive surfaces (5,132) |
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02/28/2006 | US7004822 Chemical mechanical polishing and pad dressing method |
02/23/2006 | WO2006019839A1 A method and apparatus for conditioning a polishing pad |
02/23/2006 | WO2006019062A1 Rotary diamond dresser |
02/23/2006 | US20060040595 Method and system for chemical mechanical polishing pad cleaning |
02/22/2006 | EP1626839A1 A method and system for controlling the chemical mechanical polishing by using a sensor signal of a pad conditioner |
02/21/2006 | US7001254 Apparatus and method for conditioning a contact surface of a processing pad used in processing microelectronic workpieces |
02/15/2006 | CN1735479A Polishing pad conditioning |
02/09/2006 | US20060030244 Substrate polishing apparatus |
02/09/2006 | DE102005030846A1 Verzahnungsschleifmaschine Gear Grinding Machine |
02/08/2006 | CN2756387Y Sand wheel repair device for sharpening pencil sharpener |
02/08/2006 | CN1730240A Regulating method for grinding curvature radius of bearing ring channel by cutting in |
02/07/2006 | US6994612 Methods for conditioning surfaces of polishing pads after chemical-mechanical polishing |
02/07/2006 | US6994611 (CMP); polishing head for holding and applying first or second a wafer to the CMP pad surface; and a chemical dispenser for uniformly applying pad cleaning chemicals appropriate for either copper or oxide wafer surface across the CMP pad surface |
02/02/2006 | US20060025056 End effectors and methods for manufacturing end effectors with contact elements to condition polishing pads used in polishing micro-device workpieces |
02/02/2006 | US20060025050 Gear grinding machine |
02/02/2006 | US20060021857 Conveyer belt-adjusting device for a conveyer unit |
02/02/2006 | US20060021610 Dressing tool for profiling the tip area of a threaded grinding wheel |
02/01/2006 | EP1621277A1 Dressing tool for the tip of a grinding worm |
02/01/2006 | CN1727102A 齿轮磨床 Gear Grinder |
02/01/2006 | CN1240111C Device for eliminating stress by machining |
01/31/2006 | US6991528 Polishing article for processing a substrate comprises a fabric layer having a conductive layer disposed thereover. The conductive layer has an exposed surface adapted to polish a substrate. The fabric layer may be woven or non-woven. The |
01/26/2006 | US20060019584 Method and apparatus for conditioning a polishing pad |
01/26/2006 | US20060019583 Method and apparatus for conditioning a polishing pad |
01/24/2006 | US6988942 Conductive polishing article for electrochemical mechanical polishing |
01/24/2006 | US6988933 Truing method and apparatus |
01/19/2006 | WO2006006843A1 Belt cleaning system for a portable belt sander |
01/19/2006 | US20060014474 Gear grinding machine |
01/18/2006 | CN1721114A 齿轮磨床 Gear Grinder |
01/17/2006 | US6986702 Centerless grinding apparatus and centerless grinding method |
01/12/2006 | US20060009129 Feedforward and feedback control for conditioning of chemical mechanical polishing pad |
01/12/2006 | DE19818788B4 Vorrichtung zum nachbearbeitenden Entgraten von Werkstücken, insbesondere von Zahnrädern, mittels Entgraträdern Apparatus for nachbearbeitenden deburring workpieces, in particular of gear wheels, by means of Entgraträdern |
01/11/2006 | CN1720119A Cutting tool for soft material |
01/11/2006 | CN1718371A Polishing pad conditioner and methods of manufacture and recycling |
01/05/2006 | US20060003673 Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization |
01/04/2006 | EP1610929A1 Chip customized polish pads for chemical mechanical planarization (cmp) |
01/03/2006 | US6982009 Method and device for cleaning abrasive plates on an abrasive machine |
01/03/2006 | US6981909 Method for conditioning superabrasive tools |
12/29/2005 | US20050284770 A multilayer pad having a ring-shaped upper polish layer and replaceable conductive layer; attaching to exterior power source; controlling the rate of copper material removal from printed circuits, determining each polishing time in each zone; tools for making semiconductors |
12/22/2005 | US20050282477 Apparatus for conditioning processing pads |
12/22/2005 | US20050282476 Off-line tool for breaking in multiple pad conditioning disks used in a chemical mechanical polishing system |
12/22/2005 | US20050282475 Apparatus and method for breaking in multiple pad conditioning disks for use in a chemical mechanical polishing system |
12/21/2005 | CN2747019Y Grinder correcting pen for electric knife-grinder |
12/21/2005 | CN1711152A Glass substrate for information recording medium and method for producing same |
12/20/2005 | US6976907 Polishing pad conditioning |
12/20/2005 | US6976903 Apparatus for controlling retaining ring and wafer head tilt for chemical mechanical polishing |
12/15/2005 | US20050276979 CVD diamond-coated composite substrate containing a carbide-forming material and ceramic phases and method for making same |
12/08/2005 | WO2005117084A1 Reactive fluid systems for removing deposition materials and methods for using same |
12/08/2005 | US20050272349 Method for conditioning superabrasive tools |
12/01/2005 | US20050266688 Semiconductor device fabrication method |
11/29/2005 | US6969307 Polishing pad conditioning and polishing liquid dispersal system |
11/29/2005 | US6969305 Polishing apparatus |
11/29/2005 | US6969298 Grinding machine, in particular centerless cylindrical grinding machine |
11/29/2005 | US6969297 Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization |
11/24/2005 | US20050261150 Reactive fluid systems for removing deposition materials and methods for using same |
11/24/2005 | US20050260936 Dynamic atomizer on conditioner assemblies using high velocity water |
11/24/2005 | US20050260925 Polishing apparatus |
11/24/2005 | US20050260924 Pad break-in method for chemical mechanical polishing tool which polishes with ceria-based slurry |
11/24/2005 | DE102004020947A1 Verfahren zum Abrichten zylindrischer Schleifschnecken für das kontinuierliche Wälzschleifen von Zahnrädern und Abrichtwerkzeug A method of dressing cylindrical grinding worms for continuous generating grinding of gears and dressing |
11/23/2005 | EP1330336B1 Centreless cylindrical grinding machine |
11/23/2005 | CN2741720Y Mixed grinding wheel finishing tool |
11/23/2005 | CN2741719Y Grinding wheel finishing device for digital control inner ball surface grinder |
11/17/2005 | US20050252501 Sharpening apparatus |
11/16/2005 | EP1594657A2 Grinding machine |
11/10/2005 | WO2005105373A1 Diamond tools |
11/10/2005 | US20050250425 Chemical mechanical polishing equipment and conditioning thereof |
11/10/2005 | US20050250424 Polishing pad, method of manufacturing glass substrate for use in data recording medium using the pad, and glass substrate for use in data recording medium obtained by using the method |
11/10/2005 | DE102004057596A1 Schleifschnecke, Profilierzahnrad und Verfahren zum Profilieren der Schleifschnecke Grinding worm profiling gear and method for profiling the grinding worm |
11/09/2005 | CN1694788A Brazed diamond tools and methods for making the same |
11/09/2005 | CN1694783A Diamond conditioning of soft chemical mechanical planarization/polishing (CMP) polishing pads |
11/08/2005 | US6962524 Conductive polishing article for electrochemical mechanical polishing |
11/03/2005 | US20050245176 Process and dressing tool for the dressing of cylindrical grinding worms for the continuous generation grinding of gears |
11/02/2005 | CN1689760A Shaving technique and shaving tool of cylinder grinding worm for continuous tumbling gear |
11/02/2005 | CN1689742A Worm abrasion wheel, forming gear and forming method of worm abrasion wheel |
11/01/2005 | US6960114 Pad conditioner of CMP equipment |
11/01/2005 | US6959771 Abrasive and boring method using the same |
10/27/2005 | US20050239385 Grinding worm, profiling gear and process for the profiling of the grinding worm |
10/27/2005 | US20050239283 Polishing method, polishing apparatus, and method of manufacturing semiconductor device |
10/27/2005 | US20050236368 Method for manufacturing semiconductor device |
10/26/2005 | EP1311368B1 Polishing apparatus and methods controlling the polishing pressure as a function of the overlapping area between the polishing head and the semiconductor substrate |
10/25/2005 | US6958005 Polishing pad conditioning system |
10/25/2005 | US6957998 Polishing apparatus |
10/25/2005 | US6957997 Method and system for controlling the chemical mechanical polishing by using a sensor signal of a pad conditioner |
10/19/2005 | CN1684794A Abrasive tool having a unitary arbor |
10/13/2005 | WO2005095059A1 Undulated pad conditioner and method of using same |
10/13/2005 | WO2005095056A1 Cmp conditioner |
10/13/2005 | WO2005095055A1 Insulated pad conditioner and method of using same |
10/13/2005 | US20050227596 Polishing apparatus |
10/13/2005 | US20050224368 Polishing system and polishing method |
10/12/2005 | EP1584393A1 Method of dressing a substantially cylindrical grinding worm |
10/12/2005 | EP1583638A1 Polishing pad conditioning |
10/11/2005 | US6953390 Polishing apparatus |
10/11/2005 | US6953382 Methods and apparatuses for conditioning polishing surfaces utilized during CMP processing |
10/06/2005 | US20050221741 Polymeric polishing pad having continuously regenerated work surface |
10/06/2005 | US20050221732 Method for dressing a grinding worm |
10/06/2005 | US20050221731 Polishing pad conditioning system |
10/06/2005 | US20050221730 Polishing pad conditioning and polishing liquid dispersal system |
10/06/2005 | US20050221720 Polishing apparatus |
10/05/2005 | CN2730554Y Polishing-part for polishing substrate |
10/05/2005 | CN2730553Y Polishing-part for electrochemical mechanical polishing |
10/04/2005 | US6951509 Undulated pad conditioner and method of using same |