| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 05/12/2004 | EP1418157A2 Manufacturing apparatus and method for carbon nanotube |
| 05/12/2004 | EP1417697A1 Plasma reactor with adjustable dual frequency voltage division |
| 05/12/2004 | EP1417129A1 Method and device for sterilizing containers |
| 05/12/2004 | CN1496577A Method of fabricating coated process chamber component |
| 05/12/2004 | CN1496334A Microwave power cell, chemical reactor and power converter |
| 05/12/2004 | CN1495283A Matching box, vacuum device using the same and vacuum processing method |
| 05/12/2004 | CN1494942A Method for cleaning harmfel gas by using gas laser and electron-beam irradiation and its equipment |
| 05/12/2004 | CN1149636C Method and ap0paratus for processing wafers and substrates, and apparatus for transferring the wafers and substrates |
| 05/11/2004 | US6734385 Microwave plasma burner |
| 05/11/2004 | US6733618 Disturbance-free, recipe-controlled plasma processing system and method |
| 05/11/2004 | US6733617 Direct detection of dielectric etch system magnet driver and coil malfunctions |
| 05/11/2004 | US6733616 Surface isolation device |
| 05/06/2004 | WO2004039132A2 Method for surface processing by means of a microwave vacuum-plasma associated with electron-cyclotron resonance |
| 05/06/2004 | WO2004017685A9 Method and device for compressing a substance by impact and plasma cathode thereto |
| 05/06/2004 | WO2004010458A3 Plasma implantation system and method with target movement |
| 05/06/2004 | WO2003072290A3 Thermal projection device |
| 05/06/2004 | WO2003057996A3 Method and apparatus for a plasma-hydraulic continuous excavation system |
| 05/06/2004 | US20040086660 Method for the preparation of a substrate for immobilising chemical compounds and the substrate and the use thereof |
| 05/06/2004 | US20040086080 Erosion reduction for EUV laser produced plasma target sources |
| 05/06/2004 | US20040085246 Method and apparatus for producing uniform processing rates |
| 05/06/2004 | US20040084423 Method of repairing a stationary shroud of a gas turbine engine using plasma transferred arc welding |
| 05/06/2004 | US20040084422 Plasma source |
| 05/06/2004 | US20040084297 Using plurality of magnets to generate discharge plasma; cooling; purity |
| 05/06/2004 | US20040084151 Magnetron plasma etching apparatus |
| 05/06/2004 | US20040084148 Low pressure plasma processing apparatus and method |
| 05/06/2004 | US20040084146 Plasma treatment apparatus, upper electrode cover, and upper electrode cover window member |
| 05/06/2004 | US20040083967 Plasma CVD apparatus for large area CVD film |
| 05/06/2004 | EP1416063A1 Method of repairing a stationary shroud of a gas turbine engine using plasma transferred arc welding |
| 05/06/2004 | EP1415954A1 Method for producing fullerene-containing carbon and device for carrying out said method |
| 05/06/2004 | EP1415741A2 Plasma arc reactor for the production of fine powders |
| 05/06/2004 | EP1415321A1 Device for the coating of objects |
| 05/06/2004 | EP1414549A2 Device and method for purifying exhaust gas |
| 05/06/2004 | EP1332511B1 Device for treating gas with plasma |
| 05/06/2004 | EP1305133B1 Method and device for hardening a metal component by plasma pulse technology |
| 05/05/2004 | CN1494737A Plasma processor and plasma processing method |
| 05/04/2004 | US6730369 Using electron cyclotron resonance; bent waveguide maintaining constant relative positioning |
| 05/04/2004 | US6729850 Applied plasma duct system |
| 05/04/2004 | US6729261 Plasma processing apparatus |
| 04/29/2004 | WO2004036634A1 Thin film forming apparatus and thin film forming method and thin film forming system |
| 04/29/2004 | WO2004036619A1 Ultraviolet irradiation device |
| 04/29/2004 | WO2004036612A2 A dense plasma focus radiation source |
| 04/29/2004 | WO2004036282A1 Optical imaging device designs for solar-powered flight and powergeneration |
| 04/29/2004 | WO2003095058A3 Plasma-assisted multi-part processing |
| 04/29/2004 | WO2003081965A8 Plasma electron-emitting source |
| 04/29/2004 | US20040082186 Method for cleaning plasma etching apparatus, method for plasma etching, and method for manufacturing semiconductor device |
| 04/29/2004 | US20040081862 Fuel cells using plasma |
| 04/29/2004 | US20040081272 Synchrotron radiation measurement apparatus, X-ray exposure apparatus, and device manufacturing method |
| 04/29/2004 | US20040079736 Plasma arc torch continuity device and methods of use therefor |
| 04/29/2004 | US20040079735 Plasma arc torch head connections |
| 04/29/2004 | US20040079485 Inductively coupled plasma generating apparatus incorporating serpentine coil antenna |
| 04/29/2004 | US20040079288 Apparatus and process for forming a deposited film |
| 04/29/2004 | US20040079287 Toroidal low-field reactive gas source |
| 04/29/2004 | DE19509284B4 Vorrichtung zur Erzeugung eines ebenen Plasmas unter Verwendung variierender Magnetpole A device for generating a planar plasma using varying magnetic poles |
| 04/29/2004 | CA2499181A1 A dense plasma focus radiation source |
| 04/28/2004 | EP1413354A1 Thermal synthesis apparatus and method |
| 04/28/2004 | EP1412963A2 Method and apparatus for producing uniform process rates |
| 04/28/2004 | EP1412126A1 Laser-plasma hybrid welding method |
| 04/28/2004 | EP1412080A1 Over-unity production of clean new energies by recycling contaminated liquid waste |
| 04/28/2004 | EP1038306B1 Method and device for improving surfaces |
| 04/28/2004 | EP0995342A4 Method for improved cleaning of substrate processing systems |
| 04/28/2004 | CN2613966Y Wire-board type pulse discharge plasma generator |
| 04/28/2004 | CN1491753A Method for forming nano TiO2 light catalystic active agenbt coating on substrate |
| 04/27/2004 | US6728337 Star pinch plasma source of photons or neutrons |
| 04/27/2004 | US6727657 Electrostatic fluid accelerator for and a method of controlling fluid flow |
| 04/27/2004 | US6727656 Power splitter for plasma device |
| 04/27/2004 | US6727654 Plasma processing apparatus |
| 04/27/2004 | US6726803 Multi-sectional plasma generator with discharge gaps between multiple elements forming a plasma discharge cavity |
| 04/27/2004 | US6726802 Plasma processing apparatus |
| 04/27/2004 | US6726800 Ashing apparatus, ashing methods, and methods for manufacturing semiconductor devices |
| 04/22/2004 | WO2004034752A1 Multi-coil induction plasma torch for solid state power supply |
| 04/22/2004 | WO2004034455A1 Plasma processing apparatus, processing vessel used in plasma processing apparatus, dielectric plate used in plasma processing apparatus |
| 04/22/2004 | WO2003093173A8 Diamond synthesis |
| 04/22/2004 | US20040076762 Plasma processor and plasma processing method |
| 04/22/2004 | US20040075396 Plasma processing method and apparatus |
| 04/22/2004 | US20040074880 Plasma torch used for heating molten steel |
| 04/22/2004 | US20040074609 Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a multi-part electrode |
| 04/22/2004 | US20040074605 Focus ring for semiconductor treatment and plasma treatment device |
| 04/22/2004 | US20040074604 Neutral particle beam processing apparatus |
| 04/22/2004 | US20040074572 Method and device for hardening a metal component by plasma pulse technology |
| 04/22/2004 | US20040074425 System and method for removing blockages in a waste coverting apparatus |
| 04/22/2004 | DE10247888A1 Einrichtung zur Erzeugung von Plasmen durch Hochfrequenzentladungen Means for generating plasma by high frequency discharge |
| 04/21/2004 | EP1411540A2 Fluorine generation |
| 04/21/2004 | EP1411539A2 High frequency discharge plasma generating device |
| 04/21/2004 | EP1410809A1 Sterilization system with a plasma generator controlled by a digital signal processor |
| 04/21/2004 | EP1410699A2 Systems and methods for ignition and reignition of unstable electrical discharges |
| 04/21/2004 | EP1410698A1 High-frequency matching network |
| 04/21/2004 | EP1410697A1 Axial feedstock injector with single splitting arm |
| 04/21/2004 | EP1410691A2 Microwave desorber |
| 04/21/2004 | EP1410418A2 Method and apparatus for micro-jet enabled, low energy ion generation and transport in plasma processing |
| 04/21/2004 | EP1409189A2 Contact start plasma torch |
| 04/21/2004 | EP1409129A1 Magnegas, a novel, highly efficient, nonpollutant, oxygen rich and cost competitive combustible gas and associated method |
| 04/21/2004 | EP1259975B1 An atmospheric pressure plasma system |
| 04/21/2004 | CN1491527A Apparatus for generating low temperature plasma at atmospheric pressure |
| 04/21/2004 | CN1491430A Plasma apparatus and production method thereof |
| 04/21/2004 | CN1491429A Work treating method and treating device |
| 04/15/2004 | WO2004032219A1 Plasma processing system |
| 04/15/2004 | WO2004032213A1 High frequency plasma generator and high frequency plasma generating method |
| 04/15/2004 | WO2004032178A2 Plasma processing system and method |
| 04/15/2004 | WO2004032177A2 Apparatus and method for use of optical system with plasma proc essing system |
| 04/15/2004 | WO2004031442A1 Plasma processing system and its substrate processing process, plasma enhanced chemical vapor deposition system and its film deposition process |