Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
07/2004
07/15/2004US20040134613 Device and method for plasma processing, and slow-wave plate
07/15/2004US20040134426 Observation window of plasma processing apparatus and plasma processing apparatus using the same
07/15/2004US20040134126 method and device for plasmacatalytic conversion of liquid hydrocarbons, such as engine fuels, into a synthesis gas by employing a pulse-periodic pseudocorona streamer microwave discharge in the presence of of air, and in certain cases, water
07/15/2004DE10300558A1 Altering plasma conditions in arc with e.g. manufacturing objectives, involves blowing in various substances to alter their form and composition
07/14/2004EP1437035A1 Antenna structure for inductively coupled plasma generator
07/14/2004CN1513197A Apparatus and method for improving plasma distribution and performance in inductively coupled plasma
07/14/2004CN1512963A Method for producing fullerene-containing carbon and its device
07/14/2004CN1511972A Plasma treating device with protective tube
07/14/2004CN1158003C Capillary plasma generator
07/13/2004US6762424 Plasma generation
07/13/2004US6762393 Inductively coupled plasma source with conductive layer and process of plasma generation
07/13/2004US6761796 Method and apparatus for micro-jet enabled, low-energy ion generation transport in plasma processing
07/13/2004US6761416 Method and apparatus for a plasma-hydraulic continuous excavation system
07/13/2004US6761128 Plasma treatment apparatus
07/08/2004WO2004057935A1 Microwave plasma generating device
07/08/2004WO2004057625A1 Method for generating high-speed particle and system for generating high-speed particle
07/08/2004WO2004056523A2 Nozzle for a device for electron-beam welding
07/08/2004WO2003096381A3 Plasma-assisted processing in a manufacturing line
07/08/2004WO2003096380A3 Plasma-assisted nitrogen surface-treatment
07/08/2004US20040130277 Controlled fusion in a field reversed configuration and direct energy conversion
07/08/2004US20040130073 Manufacturing method and method for operating treatment apparatus
07/08/2004US20040129385 Pre-loaded plasma reactor apparatus and application thereof
07/08/2004US20040129222 Thermal spraying device
07/08/2004DE10358909A1 Plasma-CVD-Vorrichtung sowie Filmherstellverfahren und Verfahren zur Herstellung eines Halbleiterbauteils unter Verwendung derselben Plasma CVD apparatus and Filmherstellverfahren and method for producing a semiconductor device using the same
07/08/2004DE10259831A1 Miniaturized plasma generator for atom spectroscopy has electrodes at least partly embedded in electrically insulating body with volume for generating plasma by coupling in electromagnetic energy
07/08/2004DE10145131B4 Vorrichtung zum Erzeugen eines Aktivgasstrahls An apparatus for generating an active gas jet
07/07/2004EP1435274A1 Plasma powder welding device and its welding method
07/07/2004EP1435108A1 Plasma reactor for manufacturing electronic components
07/07/2004EP1435106A2 Lifting and supporting device
07/07/2004EP1435105A1 High performance magnetron for dc sputtering systems
07/07/2004CN1511335A Inductive plasma processor including current sensor for plasma excitation coil
07/07/2004CN1511334A Apparatus and method for controlling voltage applied to electrostatic shield used in plasma generator
07/07/2004CN1511333A Plasma surface treatment method and device for carrying out said method
07/07/2004CN1157103C Composite probe for plasma diagnosis
07/07/2004CN1156868C Stabilized oscillator circuit for plasma density measurement
07/07/2004CN1156603C Large area plasma source
07/06/2004US6759808 Microwave stripline applicators
07/06/2004US6759100 Layer formation method, and substrate with a layer formed by the method
07/06/2004US6758941 Plasma processing unit, window member for plasma processing unit and electrode plate for plasma processing unit
07/06/2004CA2240316C Torch for inductively coupled plasma spectrometry
07/01/2004WO2004054703A1 Plasma reactor and electrode plate used in the same
07/01/2004WO2004039132A3 Method for surface processing by means of a microwave vacuum-plasma associated with electron-cyclotron resonance
07/01/2004WO2004012221A3 Method for adjusting voltage on a powered faraday shield
07/01/2004US20040126502 spraying a powder including AlN grains covered with a layer of an oxide precursor onto a support at a high temperature and at a high speed, yielding an oxide forming a liquid phase around the AlN grains during spraying
07/01/2004US20040126493 a conductive member is between the electrode and the substrate holder to cover the entire space between them, and electrically connected to both
07/01/2004US20040126492 using a nickel-aluminum family cathode having a tapered outer surface comprising a body tapered along a longitudinal axis thereof and a ring having a tapered inner surface at which the tapered outer surface of the body is received.
07/01/2004US20040124793 Electromagnetic induced accelerator
06/2004
06/30/2004EP1433366A1 Multi-coil induction plasma torch for solid state power supply
06/30/2004EP1433194A2 Method and apparatus to produce ions and nanodrops from taylor cones of volatile liquids at reduced pressures
06/30/2004EP1433192A1 Method and device for producing a plasma
06/30/2004CN1509496A 等离子体处理装置 The plasma processing apparatus
06/30/2004CN1509493A Stacked RF excitation coil for inductive plasma processor
06/30/2004CN1509131A Magnetic inductive accelerator
06/29/2004US6756311 Using gas excited by electromagnetic waves; process control
06/29/2004US6755935 Plasma processing apparatus
06/24/2004WO2004054330A1 Method for generating an off-balance plasma with controlled characteristics and device therefor
06/24/2004WO2004012235A3 Atmospheric pressure plasma processing reactor
06/24/2004WO2004012220A3 Methods and apparatus for monitoring plasma parameters in plasma doping systems
06/24/2004US20040119025 Boron ion delivery system
06/24/2004US20040119006 Neutral particle beam processing apparatus
06/24/2004US20040118834 Microwave plasma process device, plasma ignition method, plasma forming method, and plasma process method
06/24/2004US20040118816 Plasma catalyst
06/24/2004US20040118521 Coil and coil support for generating a plasma
06/24/2004DE10256257A1 Vorrichtung und Verfahren zum Beschichten eines Substrates und Beschichtung auf einem Substrat Apparatus and method for coating a substrate and coating on a substrate
06/23/2004EP1430754A1 Microwave power cell, chemical reactor, and power converter
06/23/2004EP1430521A2 Method for etching structures in an etching body by means of a plasma
06/23/2004EP1430501A2 A novel electrode for use with atmospheric pressure plasma emitter apparatus and method for using the same
06/23/2004EP0986939B1 Plasma processing device for surfaces
06/23/2004CN1506186A Plasma cutting method and apparatus thereof
06/22/2004US6753499 Method and apparatus for detecting anomalous discharge in plasma processing equipment using weakly-ionized thermal non-equilibrium plasma
06/22/2004US6753496 Plasma processing apparatus
06/22/2004US6752972 Plasma processing method and apparatus
06/17/2004WO2004052060A1 Method and device for microwave plasma deposition of a coating on a thermoplastic container surface
06/17/2004WO2004051689A1 An electrostatic fluid accelerator for and method of controlling a fluid flow
06/17/2004WO2004050939A2 Plasma-assisted melting
06/17/2004US20040116752 Plasma microjet arrays for selective oxidation of methane to methanol
06/17/2004US20040115936 Remote ICP torch for semiconductor processing
06/17/2004US20040115872 Method and device for generating an activated gas curtain for surface treatment
06/17/2004US20040115364 Method for the production of a functional coating by means of high-frequency plasma beam source
06/17/2004US20040114300 Assembled cathode and plasma igniter with such cathode
06/17/2004US20040112875 Plasma cutting process and machine
06/17/2004US20040112864 Plasma treatment method and plasma treatment apparatus
06/17/2004US20040112541 Plasma processor and plasma processing method
06/17/2004US20040112536 Plasma processing apparatus and method
06/17/2004US20040112292 Plasma apparatus and production method thereof
06/17/2004CA2489983A1 An electrostatic fluid accelerator for and method of controlling a fluid flow
06/16/2004EP1428416A1 Discharge source with gas curtain for protecting optics from particles
06/16/2004EP1427522A1 Electrode discharge, non thermal plasma device (reactor) for the pre-treatment of combustion air
06/16/2004EP1057207B1 Rf powered plasma enhanced chemical vapor deposition reactor and methods
06/16/2004EP1036308B1 Method and apparatus for characterizing a combustion flame
06/16/2004CN1505113A Method and apparatus for treating plasma
06/16/2004CN1505112A Inductive coupling plasma etching machine platform and electrode arrangement thereof
06/16/2004CN1154161C Plasma processing apparatus
06/15/2004US6749764 Plasma processing comprising three rotational motions of an article being processed
06/10/2004WO2004049769A1 A commercial unit for generating random streamer discharge plasma and its use
06/10/2004WO2004049420A1 Plasma processing apparatus and method
06/10/2004WO2004049419A1 Plasma processing method and apparatus
06/10/2004WO2004049418A1 Plasma processing system and method and electrode plate of plasma processing system
06/10/2004WO2003102724A3 Method and system for data handling, storage and manipulation
06/10/2004US20040108473 Extreme ultraviolet light source