| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 06/10/2004 | US20040108470 Neutral particle beam processing apparatus |
| 06/10/2004 | US20040108469 Beam processing apparatus |
| 06/10/2004 | US20040108301 Linear drive system for use in a plasma processing system |
| 06/10/2004 | US20040108067 Method and apparatus for preparing specimens for microscopy |
| 06/10/2004 | US20040108066 Temperature measuring method and plasma processing apparatus |
| 06/10/2004 | US20040107910 Plasma processing apparatus and plasma processing method |
| 06/10/2004 | US20040107896 Plasma-assisted decrystallization |
| 06/10/2004 | US20040107796 Plasma-assisted melting |
| 06/09/2004 | EP1427265A2 Device and method for coating a substrate and substrate coating |
| 06/09/2004 | EP1425777A2 Plasma processor coil |
| 06/09/2004 | EP1387876A4 The new chemical species of a magnecule |
| 06/09/2004 | DE10254135B3 Plasma discharge device, for gas sterilizing, odor neutralizing and particle removal, has liquid metal and hardener mass between inner core electrode and glass barrier |
| 06/09/2004 | CN1503614A 大功率微波等离子体炬 High-power microwave plasma torch |
| 06/09/2004 | CN1502402A Industrial apparatus for plasma capable of generating random streamer discharge and application thereof |
| 06/08/2004 | US6747239 Plasma processing apparatus and method |
| 06/03/2004 | WO2004025118A3 Ion thruster grids and methods for making |
| 06/03/2004 | US20040105082 Radiation source, lithographic apparatus and device manufacturing method |
| 06/03/2004 | US20040104683 Negative ion source with external RF antenna |
| 06/03/2004 | DE19842074B4 Anode für Plasmaauftragsbrenner Anode plasma deposition burner |
| 06/03/2004 | DE10305602A1 Verfahren und Vorrichtung zum Erzeugen eines Gasplasmas, Gaszusammensetzung zum Erzeugen von Plasma und Verfahren zum Erzeugen einer Halbleitervorrichtung, das dieses verwendet Method and device for generating a gas plasma, the gas composition for generating plasma and methods for producing a semiconductor device that uses this |
| 06/02/2004 | EP1423227A1 Riser(s) size reduction and/or metal quality improving in gravity casting of shaped products by moving electric arc |
| 06/02/2004 | CN1502121A Microwave plasma process device, plasma ignition method, plasma forming method, and plasma process method |
| 06/02/2004 | CN1501763A Plasma processing apparatus |
| 06/02/2004 | CN1501762A Plasma processing apparatus |
| 06/02/2004 | CN1501761A Laminar flow arc plasma jet material surface processing method |
| 06/02/2004 | CN1501452A Plasma machining apparatus |
| 06/02/2004 | CN1500658A Bank note modified under plasma condition |
| 06/01/2004 | US6745096 Maintenance method and system for plasma processing apparatus etching and apparatus |
| 06/01/2004 | US6744851 Linear filament array sheet for EUV production |
| 06/01/2004 | US6744212 Plasma processing apparatus and method for confining an RF plasma under very high gas flow and RF power density conditions |
| 06/01/2004 | US6744211 Plasma density information measuring method, probe used for measuring plasma density information, and plasma density information measuring apparatus |
| 06/01/2004 | US6744060 Pulse power system for extreme ultraviolet and x-ray sources |
| 06/01/2004 | US6744006 Twin plasma torch apparatus |
| 06/01/2004 | CA2303546C Tapered electrode for plasma arc cutting torches |
| 05/27/2004 | WO2004044941A2 Method and apparatus for stabilizing of the glow plasma discharges |
| 05/27/2004 | WO2004043639A1 Mig-plasma welding |
| 05/27/2004 | WO2004043637A2 Apparatus and methods for connecting a plasma arc torch lead to a power supply |
| 05/27/2004 | WO2004029325A9 High velocity method for deposing diamond films from a gaseous phase in shf discharge plasma and a plasma reactor for carrying out said method |
| 05/27/2004 | WO2004008816A8 Method and device for substrate etching with very high power inductively coupled plasma |
| 05/27/2004 | WO2002101784B1 Plasma processor |
| 05/27/2004 | US20040101635 Method and device for curing a coating |
| 05/27/2004 | US20040099635 photoreactive alignment layer is made from polyamic acid obtained by reacting a diamine with an acid anhydride, selected from1,2,3,4-cyclopentanetetracarboxylic acid dianhydride,1,2,3,4-butanetetracarboxylic acid dianhydride, and 1,2,3,4-cyclobutanetetracarboxylic acid dianhydride; free of nonuniformity |
| 05/27/2004 | CA2505267A1 Method and apparatus for stabilizing of the glow plasma discharges |
| 05/27/2004 | CA2504202A1 Apparatus and methods for connecting a plasma arc torch lead to a power supply |
| 05/26/2004 | EP1422778A1 Fuel cells using plasma on the cathode side |
| 05/26/2004 | EP1421832A1 Plasma burner with microwave stimulation |
| 05/26/2004 | EP1421599A2 Suspended gas distribution manifold for plasma chamber |
| 05/26/2004 | EP1421596A1 Capacitive discharge plasma ion source |
| 05/26/2004 | EP1420876A2 Method of producing powder with composite grains and the device for carrying out said method |
| 05/26/2004 | EP1023771A4 Electrical impedance matching system and method |
| 05/26/2004 | CN1500371A Magnetic and electrostatic confinement of plasma in field reversed configuration |
| 05/26/2004 | CN1500370A Device and control method for micro wave plasma processing |
| 05/26/2004 | CN1500369A Metod and device for generation of far ultraviolet or soft X-ray radiation |
| 05/26/2004 | CN1500024A Contact start plasma torch |
| 05/26/2004 | CN1499584A Method and appts. for generating gas plasma and method of mfg. semiconductor |
| 05/26/2004 | CN1151313C Ion plating apparatus that prevents wasteful consumption of evaporation material |
| 05/25/2004 | US6740843 Method and apparatus for automatically re-igniting vacuum arc plasma source |
| 05/25/2004 | US6740842 Radio frequency power source for generating an inductively coupled plasma |
| 05/25/2004 | US6740841 Plasma torch incorporating electrodes separated by an air gap and squib incorporating such a torch |
| 05/25/2004 | US6740207 Plasma discharge is at least conjointly supplied by means of high frequency (hf) energy, wherein the hf supply of the plasma discharge is briefly deactivated. |
| 05/25/2004 | CA2142307C Methods and apparati for producing fullerenes |
| 05/21/2004 | WO2004041974A1 Method for gasifying substances containing carbon by using a plasma |
| 05/20/2004 | US20040097089 Device and control method for micro wave plasma processing |
| 05/20/2004 | US20040097087 Chamber structure in inductive coupling plasma etching apparatus |
| 05/20/2004 | US20040096375 Device for producing a plasma, ionisation method, use of said method and production processes using said device |
| 05/20/2004 | US20040095074 Plasma device and plasma generating method |
| 05/20/2004 | US20040094520 Plasma arc torch and method of operation |
| 05/20/2004 | US20040094519 Plasma arc torch electrode |
| 05/20/2004 | US20040094400 Method of processing a surface of a workpiece |
| 05/20/2004 | US20040094094 Plasma processing device |
| 05/19/2004 | EP1420619A2 Plasma arc torch and method of operation |
| 05/19/2004 | EP1420296A2 Low vapor pressure, low debris solid target for euv production |
| 05/19/2004 | EP1419676A2 Ultraviolet radiation generation with flame and electrical discharge |
| 05/19/2004 | CN1498518A Controlled fusion in field reversed configuration and direct energy conversion |
| 05/19/2004 | CN1498057A Induction coupling plasma generating equipment containing zigzag coil antenna |
| 05/19/2004 | CN1498056A Radiation source, photoetching equipment and device manufacturing method |
| 05/19/2004 | CN1497686A Method for producing aluminium nitride chip |
| 05/19/2004 | CN1497677A 半导体器件及其制造方法以及等离子加工装置 Semiconductor device and manufacturing method, and a plasma processing apparatus |
| 05/19/2004 | CN1497655A Ion source, ion injection equipment, manufacturing method of semiconductor device |
| 05/19/2004 | CN1497349A Radiation source, photoetching device and manufacturing method of device |
| 05/19/2004 | CN1150607C System for controlling plasma generator |
| 05/18/2004 | US6738452 Gasdynamically-controlled droplets as the target in a laser-plasma extreme ultraviolet light source |
| 05/18/2004 | US6737812 Having exhaust opening for exhausting residual gas generated at time of processing positioned close to periphery of gas spray opening, air jet opening generating airflow surrounding exhaust opening to prevent residual gas from flowing out |
| 05/18/2004 | US6736931 Inductively coupled RF plasma reactor and plasma chamber enclosure structure therefor |
| 05/18/2004 | US6736930 Microwave plasma processing apparatus for controlling a temperature of a wavelength reducing member |
| 05/18/2004 | US6735935 Pulsed hall thruster system |
| 05/18/2004 | CA2242862C Electrode for plasma generator the generator comprising same and process for treatment of solidifying liquid metal |
| 05/13/2004 | WO2004022238A3 Apparatus for manipulating magnetic fields |
| 05/13/2004 | WO2004019381A3 Barrier coatings produced by atmospheric glow discharge |
| 05/13/2004 | WO2004019368A3 Reduced volume plasma reactor |
| 05/13/2004 | WO2004006298A3 Method and apparatus for non-invasive measurement and analysis of semiconductor process parameters |
| 05/13/2004 | WO2003103004A3 A cathode pedestal for a plasma etch reactor |
| 05/13/2004 | WO2003063914A9 Sterilization and decontamination system using a plasma discharge and a filter |
| 05/13/2004 | US20040092119 Method and apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same |
| 05/13/2004 | US20040090185 Waveguide and microwave ion source equipped with the waveguide |
| 05/13/2004 | US20040089819 Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 05/13/2004 | US20040089639 Apparatus and methods for connecting a plasma arc torch lead to a power supply |
| 05/13/2004 | US20040089632 Method for etching an object using a plasma and an object etched by a plasma |
| 05/12/2004 | EP1418796A2 Erosion reduction for EUV laser produced plasma target sources |
| 05/12/2004 | EP1418161A2 Method for the production of an aluminium nitride substrate |