Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
08/2004
08/10/2004US6774335 Plasma reactor and gas modification method
08/10/2004US6774018 Barrier coatings produced by atmospheric glow discharge
08/10/2004US6773558 Fluorine generator
08/10/2004US6773544 Magnetic barrier for plasma in chamber exhaust
08/10/2004US6773304 Tamper resistant pin connection
08/10/2004US6772961 Methods and apparatus for spray forming, atomization and heat transfer
08/10/2004US6772827 Suspended gas distribution manifold for plasma chamber
08/05/2004WO2003098019A3 Fuel vaporization systems for vaporizing liquid fuel
08/05/2004WO2002068144A8 Contact start plasma torch
08/05/2004US20040151841 Forming mixed oxide interface; heating spraying
08/05/2004US20040151595 Closed-drift hall effect plasma vacuum pump for process reactors
08/05/2004US20040149937 Extreme UV light source and semiconductor exposure device
08/05/2004US20040149741 Plasma processing apparatus
08/05/2004US20040149704 Dual mode plasma arc torch
08/05/2004US20040149703 Torch handle gas control
08/05/2004US20040149702 Contact start plasma torch
08/05/2004US20040149701 Reaction enhancing gas feed for injecting gas into a plasma chamber
08/05/2004US20040149700 Method for plasma welding
08/05/2004US20040149699 Plasma reactor with overhead RF source power electrode with low loss, low arcing tendency and low contamination
08/05/2004US20040149680 Device having a silicon oxide film containing krypton
08/05/2004US20040149574 Penning discharge plasma source
08/05/2004US20040149388 Device and method for etching a substrate by using an inductively coupled plasma
08/05/2004US20040149387 Inductively coupled antenna and plasma processing apparatus using the same
08/05/2004US20040149386 Plasma processing device and method of cleaning the same
08/05/2004US20040149224 Gas tube end cap for a microwave plasma generator
08/05/2004US20040149221 Plasma processor
08/05/2004US20040149216 Plasma processing apparatus
08/05/2004US20040148860 Two concentric elongated electrodes with dielectric barrier between; high voltage pulser is connected electrodes; decomposition
08/05/2004DE10154229B4 Einrichtung für die Regelung einer Plasmaimpedanz Means for controlling a plasma impedance
08/04/2004EP1443334A1 HIGH−FREQUENCY DETECTION METHOD AND HIGH−FREQUENCY DETECTION CIRCUIT
08/04/2004EP1442640A1 Plasma accelerator system
08/04/2004EP1441774A2 Sterilization and decontamination system using a plasma discharge and a filter
08/04/2004EP0792462B1 Probe card assembly and method of using the same
08/04/2004CN1518401A Plasma generation system
08/04/2004CN1518073A 等离子体处理装置及聚焦环 The plasma processing apparatus and the focus ring
08/04/2004CN1517168A Powder plasma welding device and welding method
08/03/2004US6772040 Centralized control architecture for a plasma arc system
08/03/2004US6771481 Plasma processing apparatus for processing semiconductor wafer using plasma
08/03/2004US6771026 Plasma generation by mode-conversion of RF-electromagnetic wave to electron cyclotron wave
08/03/2004US6770896 Method for generating extreme ultraviolet radiation based on a radiation-emitting plasma
08/03/2004US6770836 Impedance matching circuit for inductively coupled plasma source
08/03/2004US6770166 Apparatus and method for radio frequency de-coupling and bias voltage control in a plasma reactor
08/03/2004US6770165 Apparatus for plasma treatment
08/03/2004US6769241 Description of methods to increase propellant throughput in a micro pulsed plasma thruster
07/2004
07/29/2004WO2004064461A1 Ion accelerator arrangement
07/29/2004WO2004064460A1 High frequency power supply device and plasma generator
07/29/2004WO2004064459A2 Ion accelerator arrangement
07/29/2004WO2004036612A8 A dense plasma focus radiation source
07/29/2004WO2004032177A3 Apparatus and method for use of optical system with plasma proc essing system
07/29/2004WO2003097891A3 High-power microwave window
07/29/2004DE19828633B4 Lichtbogenschweiß- oder -schneidbrenner sowie Kühlsystem, Plasmadüsen bzw. WIG-Elektrodenspannzangen, Spannsystem für Plasmaelektrodennadeln u. verfahrensübergreifendes Konstruktionsprinzip hierfür Arc welding or cutting torch and cooling system, plasma nozzles or TIG electrodes chucks, clamping system for plasma electrode needles u. The procedure overarching design principle of this
07/28/2004EP1441578A2 Device for generating a large stream of active gas based on a gas discharge plasma
07/28/2004EP1441577A1 Plasma processing device and plasma processing method
07/28/2004EP1440456A1 Merie plasma reactor with showerhead rf electrode tuned to the plasma with arcing suppression
07/28/2004EP1439932A2 Device for plasma incision of matter with a specifically tuned radiofrequency electromagnetic field generator
07/28/2004CN1516994A Method for plasma-catalytic conversion of fuels that can be used in internal combustion engine or gas turbine into synthetic gas and plasma-catalytic converter used for same
07/28/2004CN1516750A 等离子cvd装置 Plasma cvd means
07/28/2004CN1516536A Inductive coupled antenna and plasma processor using the same
07/28/2004CN1516233A Preloaded plasma reactor device and its use
07/27/2004US6768119 Method and apparatus to produce ions and nanodrops from Taylor cones at reduced pressure
07/27/2004US6768079 Susceptor with built-in plasma generation electrode and manufacturing method therefor
07/27/2004US6767593 Reaction chamber capable of being evacuated in which glow discharge is caused by means of a high frequency power supplied by a high frequency power introduction means to form a deposited film on a substrate
07/22/2004WO2004062326A2 Low power plasma generator
07/22/2004WO2004062050A2 Method and apparatus for generating a membrane target for laser produced plasma
07/22/2004WO2004061929A1 Plasma generator, ozone generator, substrate processing apparatus, and method for manufacturing semiconductor device
07/22/2004WO2004061928A1 Method and device for plasma-etching organic material film
07/22/2004WO2004003963A3 Plasma processor with electrode simultaneously responsive to plural frequencies
07/22/2004WO2003096383A3 Cavity shapes for plasma-assisted processing
07/22/2004WO2003049141A3 Device for applying an electromagnetic microwave to a plasma container
07/22/2004US20040141165 Radiation source, lithographic apparatus, and device manufacturing method
07/22/2004US20040140778 Plasma generation system
07/22/2004US20040140205 Rotational and reciprocal radial movement of a sputtering magnetron
07/22/2004US20040140053 Method and apparatus for micro-jet enabled, low-energy ion generation and transport in plasma processing
07/22/2004US20040140036 Plasma processing method and apparatus
07/22/2004US20040139916 Applying the particles to be separated on a substrate supported membrane, such that the particles are mobile across the surface of the substrate supported membrane; providing an electrical field; temporarily modifying the electrical field and/or adding a substrate supported membrane
07/22/2004DE19955671B4 Vorrichtung zur Erzeugung von Plasma A device for generating plasma
07/22/2004DE10261253A1 Düse für eine Vorrichtung zum Elektronenstrahlschweißen Nozzle for a device for electron beam welding,
07/21/2004EP1439571A1 DEVICE AND METHOD FOR MICROWAVE PLASMA PROCESSING, AND MICROWAVE POWER SUPPLY DEVICE
07/21/2004EP1438735A2 Methods and apparatus for plasma doping by anode pulsing
07/21/2004EP0885455B1 Device for generating powerful microwave plasmas
07/21/2004CN2627790Y Corona discharge plasma apparatus with high discharge energy density
07/21/2004CN1515018A Plasma processor
07/21/2004CN1514305A Manufacturing method of photoctching equipment having residue inhibiting device and device
07/21/2004CN1158908C Adaptive 2-hoop fibre array load and its preparing process
07/21/2004CN1158404C Plasma processing system and method
07/20/2004US6765466 Magnetic field generator for magnetron plasma
07/20/2004US6764606 Method and apparatus for plasma processing
07/20/2004US6764575 Magnetron plasma processing apparatus
07/20/2004US6764550 Apparatus for evaluating plasma polymerized polymer layer using UV spectrometer
07/20/2004US6763772 Apparatus for processing waste
07/15/2004WO2004059654A1 Plasma electricity generator
07/15/2004WO2004059653A1 Plasma hydrogen generator
07/15/2004WO2003096382A3 Methods and apparatus for plasma processing control
07/15/2004WO2003084688A3 Method and system for providing a thin film
07/15/2004WO1999041766A9 Reactor for chemical vapor deposition of titanium
07/15/2004US20040135590 Impedance monitoring system and method
07/15/2004US20040135485 Dipole ion source
07/15/2004US20040134890 Elimination of airborne chemical and biological warfare agents
07/15/2004US20040134618 Plasma processing apparatus and focus ring
07/15/2004US20040134616 High-frequency plasma processing apparatus