| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 09/07/2004 | US6787445 Method for fabricating semiconductor device |
| 09/07/2004 | US6787200 Method and device for electronic cyclotronic resonance plasma deposit of carbon nanofibre layers in fabric form and resulting fabric layers |
| 09/07/2004 | US6787044 Launching electromagnetic wave into cylindrical chamber to create ionization zone; creating radially oriented electric field |
| 09/07/2004 | US6787002 For purifying an exhaust gas |
| 09/07/2004 | US6786176 Diamond film depositing apparatus and method thereof |
| 09/02/2004 | WO2003093526A3 Method and device for treating the outer surface of a metal wire, particularly for carrying out a coating pretreatment. |
| 09/02/2004 | US20040170252 EUV, XUV, and X-Ray wavelength sources created from laser plasma produced from liquid metal solutions, and nano-size particles in solutions |
| 09/02/2004 | US20040169018 Vented shield system for a plasma arc torch |
| 09/02/2004 | US20040169010 Using water vapor to removal impurities; etching titanium nitride film using photoresist as masking; using oxygen, nitrogen as ashing gases; then water |
| 09/02/2004 | US20040168906 suppresses an influence on a magnetic field due to heat generated from discharge plasma, and can stably manufacture a high-purity carbon nanotube with excellent industrial efficiency |
| 09/02/2004 | US20040168788 Riser(s) size reduction and/or metal quality improving in gravity casting of shaped products by moving electric arc |
| 09/02/2004 | US20040168771 Layout of electromagnets positioning on edges of plasma enclosure; impacting particles; controlling distribution of current signals |
| 09/02/2004 | US20040168769 Plasma processing equipment and plasma processing method |
| 09/02/2004 | US20040168766 Monitoring, controlling gas supply ; evacuated enclosure; controlling circulation ratio |
| 09/02/2004 | US20040168631 Plasma processing apparatus having protection members |
| 09/02/2004 | DE202004008285U1 Treatment of surfaces of any materials of any width with an open plasma at amospheric pressure useful for increasing wettability and adhesion, e.g. of printing inks or adhesives |
| 09/02/2004 | DE10300776B3 Ionenbeschleuniger-Anordnung Ion accelerator arrangement |
| 09/02/2004 | DE10300728B3 Ionenbeschleuniger-Anordnung Ion accelerator arrangement |
| 09/01/2004 | EP1452486A2 Manufacturing apparatus for carbon nanotube |
| 09/01/2004 | EP1451892A1 Plasma production device and method and rf driver circuit |
| 09/01/2004 | EP1451861A1 Apparatus and method for reactive atom plasma processing for material deposition |
| 09/01/2004 | EP1451850A2 Non-thermal plasma slit discharge apparatus |
| 09/01/2004 | EP1451846A2 Electron source |
| 09/01/2004 | CN1525803A Normal pressure radio frequency and DC mixed type cold plasma system and spray gun thereof |
| 09/01/2004 | CN1165208C Plasma processing apparatus and method |
| 08/31/2004 | US6783628 Plasma processing apparatus |
| 08/31/2004 | US6782843 Actively-cooled distribution plate for reducing reactive gas temperature in a plasma processing system |
| 08/26/2004 | WO2004073363A1 Plasma generating apparatus, plasma generating method, and remote plasma processing apparatus |
| 08/26/2004 | WO2004073362A1 Plasma generating apparatus and plasma etching apparatus |
| 08/26/2004 | WO2004026520A3 Torch head for welding torches and gas nozzle, contact nozzle, and insulation nozzle for such a torch head |
| 08/26/2004 | US20040166598 processing method |
| 08/26/2004 | US20040164682 Low power plasma generator |
| 08/26/2004 | US20040163767 Plasma producing device |
| 08/26/2004 | US20040163764 Inductively coupled RF plasma reactor and plasma chamber enclosure structure therefor |
| 08/26/2004 | US20040163594 Method and assembly for providing impedance matching network and network assembly |
| 08/26/2004 | DE10312549B3 Power supply for direct current gas discharge equipment has three-phase supply with full-wave rectifier followed by inverter, transformer, second rectifier and second voltage reduction stage |
| 08/26/2004 | DE10306668A1 Anordnung zur Erzeugung von intensiver kurzwelliger Strahlung auf Basis eines Plasmas Arrangement for the generation of intense short-wave radiation based on a plasma |
| 08/25/2004 | EP1449233A1 Microwave plasma generator |
| 08/25/2004 | EP0632847B2 Process for coating a substrate with a material giving a polished effect |
| 08/25/2004 | CN1524283A High performance magnetron for DC sputtering systems |
| 08/25/2004 | CN1523949A Switch type charge amplifier plasma lightning-protection system |
| 08/25/2004 | CN1163942C Large workpiece plasma processor |
| 08/24/2004 | US6781087 Three-phase plasma generator having adjustable electrodes |
| 08/24/2004 | US6781085 Method and apparatus of coordinating operating modes of a plasma cutter and a power supply |
| 08/24/2004 | US6780494 Ceramic electronic device and method of production of same |
| 08/24/2004 | US6780342 Exposing layer of copper by etching layer of silicon nitride on copper layer with etching gas constituted of trifluoromethane and oxygen, oxygen suppressing oxidation of copper layer during etching |
| 08/24/2004 | US6780278 Plasma processing apparatus with reduced parasitic capacity and loss in RF power |
| 08/24/2004 | US6780184 Quantum energy surgical device and method |
| 08/24/2004 | US6779483 Plasma CVD apparatus for large area CVD film |
| 08/19/2004 | WO2004071138A1 Device for injection of a pulsed supersonic gas stream |
| 08/19/2004 | WO2004070815A1 Method of plasma oxidation and semiconductor substrate |
| 08/19/2004 | WO2004070813A1 Plasma processing apparatus and method |
| 08/19/2004 | WO2004070808A1 Plasma treating device, and plasma treating device electrode plate, and electrode plate producing method |
| 08/19/2004 | WO2004070744A2 Reaction enhancing gas feed for injecting gas into a plasma chamber |
| 08/19/2004 | WO2004070743A2 Transformer ignition circuit for a transformer coupled plasma source |
| 08/19/2004 | WO2004070175A1 Exhaust gas reactor |
| 08/19/2004 | WO2004069403A1 Apparatus for manufacturing particles using corona discharge and method thereof |
| 08/19/2004 | WO2004056523A3 Nozzle for a device for electron-beam welding |
| 08/19/2004 | US20040160190 Transformer ignition circuit for a transformer coupled plasma source |
| 08/19/2004 | US20040160155 Discharge produced plasma EUV light source |
| 08/19/2004 | US20040159802 Arrangement for the generation of intensive short-wave radiation based on a plasma |
| 08/19/2004 | US20040159640 Plasma powder welding device and its welding method |
| 08/19/2004 | US20040159286 Plasma treatment device |
| 08/18/2004 | EP1448030A1 Plasma processing system |
| 08/18/2004 | EP1446633A1 Method and apparatus for wall film monitoring |
| 08/18/2004 | EP1218975B1 Gas laser |
| 08/18/2004 | EP1090159A4 Deposition of coatings using an atmospheric pressure plasma jet |
| 08/18/2004 | CN1522556A Plasma torch |
| 08/18/2004 | CN1522457A Chamber components having textured surfaces and method of manufacture |
| 08/18/2004 | CN1522102A An active gas generating method and apparatus thereof |
| 08/18/2004 | CN1162712C Electron density measurement and control system using plasma-induced changes in the frequency of a microwave oscillator |
| 08/17/2004 | US6777881 Dircect current power source configured to supply high-frequency output from conversion circuit; load impedance converts to delayed load |
| 08/17/2004 | US6777880 Particles are exposed in location-selective manner to external adjustment forces and/or plasma conditions are subjected to location-selective change to apply particles onto a substrate surface mask-free and/ or subject it to plasma treatment |
| 08/17/2004 | US6777862 Segmented electrode hall thruster with reduced plume |
| 08/17/2004 | US6777639 Radial pulsed arc discharge gun for synthesizing nanopowders |
| 08/17/2004 | US6777638 Plasma arc torch and method of operation for reduced erosion of electrode and nozzle |
| 08/17/2004 | US6777045 Chamber components having textured surfaces and method of manufacture |
| 08/12/2004 | WO2004068917A1 Plasma processor and plasma processing method |
| 08/12/2004 | WO2004068916A1 Plasma generating electrode assembly |
| 08/12/2004 | WO2004044941A3 Method and apparatus for stabilizing of the glow plasma discharges |
| 08/12/2004 | WO2004032178A3 Plasma processing system and method |
| 08/12/2004 | US20040155829 Slot aray antenna and plasma processing apparatus |
| 08/12/2004 | US20040155612 Electrostatic fluid accelerator for and method of controlling a fluid flow |
| 08/12/2004 | US20040155592 Magnetic mirror plasma source |
| 08/12/2004 | US20040154541 Method and apparatus for sequential plasma treatment |
| 08/12/2004 | US20040154540 Plasma processing unit and high-frequency electric power supplying unit |
| 08/12/2004 | DE10303402A1 Vorrichtung zum Erzeugen eines breiten Aktivgasstrahls auf Basis eines Gasentladungsplasmas An apparatus for generating a wide beam on the basis of the active gas of a gas discharge plasma |
| 08/12/2004 | CA2513327A1 Plasma generating electrode assembly |
| 08/11/2004 | EP1445993A2 Extreme uv light source and semiconductor exposure device |
| 08/11/2004 | EP1444874A2 System for generating a local electron-cyclotron microwave low-pressure plasma at a predetermined location within the processing chamber of said system |
| 08/11/2004 | EP1444717A2 Tunable multi-zone gas injection system |
| 08/11/2004 | EP1042783B1 Focus rings |
| 08/11/2004 | CN1520604A Electrode member for plasma treating appts., plasma treating appts. and plasma treating method |
| 08/11/2004 | CN1520347A Device for plasma incision of matter with specifically tuned radiofrequency electromagnetic generator |
| 08/11/2004 | CN1519392A Plasma processing method and appts. thereof |
| 08/11/2004 | CN1519073A Plasma working implement |
| 08/11/2004 | CN1161824C PLasma etch reactor and method |
| 08/10/2004 | US6774570 Applying radio frequency wave of first frequency to discharge space to ignite radio frequency discharge of process gas, applying another radio frequency wave of different frequency to discharge space with time lag after igniting discharge |
| 08/10/2004 | US6774569 Apparatus for producing and sustaining a glow discharge plasma under atmospheric conditions |
| 08/10/2004 | US6774336 Tip gas distributor |