Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/1987
05/20/1987EP0222668A1 Method of producing by stepwise etching a thin-film transistor with a self-aligned gate in regard to source and drain, and transistor so obtained
05/20/1987EP0222618A2 Multilayer hybrid integrated circuit and process for producing
05/20/1987EP0222521A2 An automatic edge grinder
05/20/1987EP0222506A1 Semiconductor memory
05/20/1987EP0222496A1 Method of producing an electrically conductive pattern on a substrate
05/20/1987EP0222467A1 A semiconductor resistance element used in a semiconductor integrated circuit
05/20/1987EP0222438A1 Vessel for the liquid-phase epitaxy of semiconductor films with a controlled composition
05/20/1987EP0222404A1 Gallium arsenide crystals and process for growing same
05/20/1987EP0222401A2 IC sheet cutting press
05/20/1987EP0222400A2 Process for protecting polished silicon surfaces
05/20/1987EP0222396A1 Field-effect transistor device
05/20/1987EP0222320A2 Photopolymerizable composition, registration material prepared thereof, and process for the production of relief images
05/20/1987EP0222318A2 Short arc lamp image transformer
05/20/1987EP0222225A2 Dielectrically isolated integrated circuit device and method of making
05/20/1987EP0222215A2 Polysilicon MOS transistor and method of manufacturing the same
05/20/1987EP0222203A1 Semiconductor power module
05/20/1987EP0222154A2 Semiconductor memory device and array
05/20/1987EP0222144A1 A wafer-scale semiconductor device
05/20/1987EP0222075A2 Process for manufacturing thick-film electrical components
05/20/1987EP0221965A1 Bridge for absolute measurement of the capacity and conductance of semi-conductor test-pieces
05/20/1987EP0221897A1 Ion implant using alkali or alkaline earth metal tetrafluoroborate as boron ion source
05/20/1987EP0097146B1 Improvements in or relating to wafer-scale integrated circuits
05/20/1987CN86107683A Method and system for mfg. semiconductor devices
05/20/1987CN86104365A Improved electric arc vapor deposition method and apparatus
05/19/1987US4667218 NPN transistor with base double doped with arsenic and boron
05/19/1987US4667217 Two bit vertically/horizontally integrated memory cell
05/19/1987US4667216 Electric resistor consisting of at least two monolithically combined mis-field effect transistors for integrated semiconductor circuits
05/19/1987US4667111 Accelerator for ion implantation
05/19/1987US4667110 Apparatus for holding an object by use of electrostatic attracting force
05/19/1987US4667076 Method and apparatus for microwave heat-treatment of a semiconductor water
05/19/1987US4667058 Method of fabricating electrically isolated photovoltaic modules arrayed on a substrate and product obtained thereby
05/19/1987US4666796 Plated parts and their production
05/19/1987US4666744 Process for avoiding blister formation in electroless metallization of ceramic substrates
05/19/1987US4666737 Via metallization using metal fillets
05/19/1987US4666735 Process for producing product having patterned metal layer
05/19/1987US4666569 Method of making multilayer ohmic contact to thin film p-type II-VI semiconductor
05/19/1987US4666557 Method for forming channel stops in vertical semiconductor surfaces
05/19/1987US4666556 Trench sidewall isolation by polysilicon oxidation
05/19/1987US4666555 Plasma etching of silicon using fluorinated gas mixtures
05/19/1987US4666553 Method for planarizing multilayer semiconductor devices
05/19/1987US4666545 Method of making a mounting base pad for semiconductor devices
05/19/1987US4666532 Denuding silicon substrates with oxygen and halogen
05/19/1987US4666479 For air transport, pollution-free
05/19/1987US4666366 Articulated arm transfer device
05/19/1987US4665608 Method of manufacturing semiconductor devices
05/19/1987CA1222071A1 Conductive die attach tape
05/19/1987CA1222070A1 Proximity doping of multilayered amorphous semiconductors
05/19/1987CA1222069A1 Semiconductor device
05/19/1987CA1222067A1 Integrated circuit having a pre-attached conductive mounting media and method of making the same
05/19/1987CA1222065A1 Semiconductor material and substrate
05/19/1987CA1222064A1 Three-dimensional dynamic ram cell
05/19/1987CA1222050A1 Memory system
05/19/1987CA1221864A1 High contrast, high resolution deep ultraviolet lithographic resists
05/19/1987CA1221827A1 External isolation module
05/14/1987DE3540250A1 Halbleiterschalter fuer hohe sperrspannungen Semiconductor switches for high blocking voltages
05/13/1987EP0221812A2 Apparatus and method for producing thin films with the aid of a plasma
05/13/1987EP0221798A1 Method for making a metallic interconnection pattern of the components of a very dense integrated circuit
05/13/1987EP0221742A2 Integrated circuit fabrication process for forming a bipolar transistor having extrinsic base regions
05/13/1987EP0221657A1 Charged-particle-beam lithography
05/13/1987EP0221624A1 MOS transistor and method of fabrication
05/13/1987EP0221593A1 Method of manufacturing a semiconductor device using an implantation mask
05/13/1987EP0221531A2 High heat conductive insulated substrate and method of manufacturing the same
05/13/1987EP0221496A2 Integrated circuit package
05/13/1987EP0221457A2 Method of defect detection in step-and-repeat projection systems
05/13/1987EP0221431A2 Aligned interconnections between logic stages
05/13/1987EP0221429A2 Chemical vapour deposition reactor
05/13/1987EP0221394A2 Method of making an integrated circuit structure
05/13/1987EP0221380A2 High density memory
05/13/1987EP0221351A1 Integrated circuit with an electroconductive flat element
05/13/1987EP0221327A1 A process for etching via holes in an alumina layer
05/13/1987EP0221326A2 Fluxless soldering process using a silane atmosphere
05/13/1987EP0221172A1 A coplanar waveguide probe
05/13/1987EP0221156A1 Method of making a device comprising a patterned aluminum layer.
05/13/1987EP0221093A1 Double layer photoresist technique for side-wall profile control in plasma etching processes.
05/13/1987EP0221057A1 Disposable chemical container
05/13/1987CN86101350A Process for forming mos transistor with buried oxide regions for insulation
05/12/1987US4665525 Means for a self-aligned multilayer laser epitaxy structure device
05/12/1987US4665504 Fast switching
05/12/1987US4665463 Electrostatic chuck
05/12/1987US4665428 Semiconductor device
05/12/1987US4665426 EPROM with ultraviolet radiation transparent silicon nitride passivation layer
05/12/1987US4665425 Fabrication of vertical NPN and PNP bipolar transistors in monolithic substrate
05/12/1987US4665424 Intergrated circuits
05/12/1987US4665423 MIS variable resistor
05/12/1987US4665419 Semiconductor device
05/12/1987US4665418 Semiconductor memory device
05/12/1987US4665416 Semiconductor device having a protection breakdown diode on a semi-insulative substrate
05/12/1987US4665415 Field-effect transistor
05/12/1987US4665414 Integrated circuits
05/12/1987US4665313 Apparatus and method for displaying hole-electron pair distributions induced by electron bombardment
05/12/1987US4665295 Laser make-link programming of semiconductor devices
05/12/1987US4665010 Filling with dielectrics
05/12/1987US4665007 Silicon semiconductors
05/12/1987US4665006 Positive resist system having high resistance to oxygen reactive ion etching
05/12/1987US4664951 Method provided for corrective lateral displacement of a longitudinally moving web held in a planar configuration
05/12/1987US4664946 Silicon carbide substrates and a method of producing the same
05/12/1987US4664945 Method of forming thick film circuits
05/12/1987US4664944 Deposition method for producing silicon carbide high-temperature semiconductors
05/12/1987US4664942 Packless cementation
05/12/1987US4664940 Process for the formation of a flux of atoms and its use in an atomic beam epitaxy process
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