Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/1987
09/01/1987US4690693 High purity silicon nitride polishing compound
09/01/1987US4690591 Method and apparatus for transporting an article in vacuum
09/01/1987US4690529 Optical exposer
09/01/1987US4690391 Method and apparatus for fabricating full width scanning arrays
09/01/1987US4690275 Carrier member for integrated modules
09/01/1987US4690098 Vacuum vapor-deposition system
09/01/1987US4690066 Electromagnetically floated carrier system with stopping unit
09/01/1987US4689875 Integrated circuit packaging process
09/01/1987US4689872 Masking, oxidizing, anisotropic etching and doping give bipolar and field effect transistors
09/01/1987US4689871 Trenching in substrate allows minimization of silicon area in semiconductors
09/01/1987US4689869 Fabrication of insulated gate gallium arsenide FET with self-aligned source/drain and submicron channel length
09/01/1987US4689866 Methods for transferring spring clips
09/01/1987CA1226376A1 Electron beam enhanced surface modification for making highly resolved structures
09/01/1987CA1226375A1 Semiconductor device and method of producing the same
09/01/1987CA1226348A1 Inspection system utilizing dark-field illumination
08/1987
08/27/1987WO1987005153A1 Lead frame having non-conductive tie-bar for use in integrated circuit packages
08/27/1987WO1987005152A1 Fabrication of solid-state devices having thin dielectric layers
08/27/1987WO1987005054A1 Apparatus for thermal treatments of thin parts such as silicon wafers
08/27/1987WO1987003139A3 Process for trench oxide isolation of integrated devices
08/27/1987DE3705147A1 Schaltung zum erzeugen eines inneren potentials Circuit for generating an inner potential
08/27/1987DE3640363A1 Dynamic MOS random-access memory
08/27/1987DE3604798A1 Method of producing thin semiconductor films
08/26/1987EP0233824A2 Microcircuit package
08/26/1987EP0233823A2 Method for manufacturing a metal insulator semiconductor field effect transistor
08/26/1987EP0233791A2 Insulated gate field effect transistor and method of manufacture thereof
08/26/1987EP0233747A2 Vapor deposited photoresists of anionically polymerizable monomers
08/26/1987EP0233725A2 Opto-Electronic Device and Method for its Manufacture
08/26/1987EP0233613A2 Deposition feedstock and dopant materials useful in the fabrication of hydrogenated amorphous silicon alloys for photovoltaic devices and other semiconductor devices
08/26/1987EP0233584A1 Susceptor for vapor-growth deposition
08/26/1987EP0233333A2 Method of treating photoresists
08/26/1987EP0233248A1 Dielectric isolation structure for integrated circuits
08/26/1987EP0233184A1 Semiconductor wafer flow treatment.
08/26/1987CN87100572A Ceramic wiring substrate and process for producing same
08/26/1987CN87100294A Polysilicon self-aligned bipolar device and process of manufacturing same
08/26/1987CN86100381A Solar cell array
08/25/1987US4689808 Low noise signal detection for a charge transfer device by quadrature phasing of information and reset noise signals
08/25/1987US4689770 Semiconductor memory device
08/25/1987US4689667 Method of controlling dopant diffusion and dopant electrical activation by implanted inert gas atoms
08/25/1987US4689657 IC interconnect system using metal as a mask
08/25/1987US4689656 Method for forming a void free isolation pattern and resulting structure
08/25/1987US4689655 Semiconductor device having a bipolar transistor with emitter series resistances
08/25/1987US4689654 Logic array chip
08/25/1987US4689653 Complementary MOS integrated circuit including lock-up prevention parasitic transistors
08/25/1987US4689651 Low voltage clamp
08/25/1987US4689650 Infrared epitaxial detector structure and method of making same
08/25/1987US4689646 Depletion mode two-dimensional electron gas field effect transistor and the method for manufacturing the same
08/25/1987US4689645 Current control device
08/25/1987US4689555 Method for the determination of points on a specimen carrying a specific signal frequency by use of a scanning microscope
08/25/1987US4689502 Gate array LSI device using PNP input transistors to increase the switching speed of TTL buffers
08/25/1987US4689491 Semiconductor wafer scanning system
08/25/1987US4689262 Alternate layers of porcelain green sheet material and copper screens
08/25/1987US4689246 Method of fabricating a PbS-PbSe IR detector array
08/25/1987US4689125 Electrochemically photoetching slots with deep, narrow cross-sections
08/25/1987US4689116 Process for fabricating electronic circuits based on thin-film transistors and capacitors
08/25/1987US4689115 Gaseous etching process
08/25/1987US4689113 Process for forming planar chip-level wiring
08/25/1987US4689112 Stripping or etching photoresist; supplying plasma gases uniformly
08/25/1987US4689094 Compensation doping of group III-V materials
08/25/1987US4689093 Process for the preparation of photoelectromotive force member
08/25/1987US4688939 Method and apparatus for inspecting articles
08/25/1987US4688918 Negative type photoresist developing apparatus
08/25/1987US4688540 Semiconductor wafer dicing machine
08/25/1987US4688314 Method of making a planar MOS device in polysilicon
08/25/1987CA1226075A1 Method and apparatus for exposing photoresist by using an electron beam and controlling its voltage and charge
08/25/1987CA1226074A1 Method of manufacturing a glass passivation type semiconductor device
08/25/1987CA1226073A1 Semiconductor integrated circuits gettered with phosphorus
08/24/1987EP0154629A4 Dustfree packaging container and method.
08/24/1987EP0146613A4 Process for fabricating semiconductor structures.
08/24/1987EP0136350A4 Inverted polycide sandwich structure and method.
08/20/1987DE3604799A1 Process for producing semiconductor heterojunctions
08/19/1987EP0233089A2 Method for aligning first and second objects relative to each other, and apparatus for practicing this method
08/19/1987EP0233085A2 Ceramic wiring substrate and method of forming it
08/19/1987EP0233056A2 Light absorbing coating
08/19/1987EP0233029A2 An improved interconnect tape for use in tape automated bonding
08/19/1987EP0232973A2 Microplastic structures, process for forming such structures, and photomask suitable for use in such process
08/19/1987EP0232972A2 Negative photoresist compositions and processes for preparing thermally stable, negative images using them
08/19/1987EP0232935A1 Method of manufacturing a semiconductor device
08/19/1987EP0232920A2 Internal hole saw with a plurality of blades for sawing of crystal bars as well as methods executed by that saw
08/19/1987EP0232894A2 Multi layer photopolymeric structure for the manufacturing of MESFET devices with submicrometric gate and variable length recessed channel
08/19/1987EP0232837A2 Plastic molded chip carrier package and method of fabricating the same
08/19/1987EP0232790A1 Process and arrangement for measuring time-dependent signals with a corpuscular beam probe
08/19/1987EP0232748A1 Process for filling isolation trenches in integrated circuits
08/19/1987EP0232619A2 Method of manufacturing a thin-film transistor
08/19/1987EP0232601A1 Method of coating
08/19/1987EP0232589A2 Zener diode
08/19/1987EP0232565A2 Field-programmable device with buffer between programmable circuits
08/19/1987EP0232564A1 Testing device for a high-frequency integrated circuit chip
08/19/1987EP0232533A2 Method for producing an integrated circuit product having a polyimide film interconnection structure and product fabricated thereby
08/19/1987EP0232516A1 Structured semiconductor bodies
08/19/1987EP0232515A1 Structured semiconductor body
08/19/1987EP0232510A2 Semiconductor device having a plane junction with autopassivating termination
08/19/1987EP0232508A2 Dual glass reflow process for forming contacts
08/19/1987EP0232497A2 Process for simultaneous manufacturing of bipolar and complementary MOS-transistors on a common silicon substrate
08/19/1987EP0232436A1 Generator of molecular beams by thermal decomposition for the production of semiconductors by epitaxial deposition
08/19/1987EP0232361A1 High-performance dram arrays including trench capacitors.
08/19/1987EP0232322A1 Selectively doping isolation trenches utilized in cmos devices.
08/19/1987CN87100180A Microplastic structures and methods of manufacture
08/19/1987CN86107855A Method of making submicron mask wicket by utilization of side-board and removing technics
08/18/1987US4688075 Semiconductor body
08/18/1987US4688073 Lateral device structures using self-aligned fabrication techniques
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