| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 07/14/1987 | US4680611 Multilayer ohmic contact for p-type semiconductor and method of making same |
| 07/14/1987 | US4680610 Semiconductor component comprising bump-like, metallic lead contacts and multilayer wiring |
| 07/14/1987 | US4680608 Semiconductor device |
| 07/14/1987 | US4680603 Graded extended drain concept for reduced hot electron effect |
| 07/14/1987 | US4680600 Semiconductor device |
| 07/14/1987 | US4680474 Method and apparatus for improved ion dose accuracy |
| 07/14/1987 | US4680243 Method for producing a mask for use in X-ray photolithography and resulting structure |
| 07/14/1987 | US4680087 Etching of dielectric layers with electrons in the presence of sulfur hexafluoride |
| 07/14/1987 | US4680086 Dry etching of multi-layer structures |
| 07/14/1987 | US4680085 Method of forming thin film semiconductor devices |
| 07/14/1987 | US4680084 Interferometric methods and apparatus for device fabrication |
| 07/14/1987 | US4680061 Method of thermal treatment of a wafer in an evacuated environment |
| 07/14/1987 | US4679689 Processing, shipping and/or storage container for photomasks and/or wafers |
| 07/14/1987 | US4679359 Method for preparation of silicon wafer |
| 07/14/1987 | US4679320 Process for producing multilayer ceramic circuit board with copper |
| 07/14/1987 | US4679311 Metal-semiconductor field effect transistor |
| 07/14/1987 | US4679309 Process for manufacturing isolated semi conductor components in a semi conductor wafer |
| 07/14/1987 | US4679308 Implanting a gettering agent, ashing |
| 07/14/1987 | US4679307 Method of manufacturing a recessed gate of a semiconductor device |
| 07/14/1987 | US4679306 Self-aligned process for forming dielectrically isolating regions formed in semiconductor device |
| 07/14/1987 | US4679305 Method of manufacturing a heterojunction bipolar transistor having self-aligned emitter and base and selective isolation regions |
| 07/14/1987 | US4679304 Process for producing zones for the electrical isolation of the components of an integrated circuit |
| 07/14/1987 | US4679303 Method of fabricating high density MOSFETs with field aligned channel stops |
| 07/14/1987 | US4679302 Dram memory cells |
| 07/14/1987 | US4679301 Process for producing silicide or silicon gates for an integrated circuit having elements of the gate-insulator-semiconductor type |
| 07/14/1987 | US4679300 Integrated circuits |
| 07/14/1987 | US4679299 Formation of self-aligned stacked CMOS structures by lift-off |
| 07/14/1987 | US4679298 Gallium arsenide |
| 07/14/1987 | CA1224280A1 Ion implantation to increase emitter energy gap in bipolar transistors |
| 07/14/1987 | CA1224279A1 Semiconductor device |
| 07/14/1987 | CA1224277A1 Chip to board bus connection |
| 07/14/1987 | CA1224271A1 Very large scale integrated circuit subdivided into isochronous regions, method for the machine-aided design of such a circuit, and method for the machine- aided testing of such a circuit |
| 07/14/1987 | CA1224262A1 Manufacture of an imaging screen based on thin film transistors and on capacitors |
| 07/14/1987 | CA1224120A1 Method of and apparatus for producing a controlled unsaturated vapour pressure of a volatile liquid in a heat treatment chamber, a method of growing a layer of a substance on a substrate by a liquid epitaxy growth process, and to a method of annealing a |
| 07/08/1987 | EP0228320A1 Gate array |
| 07/08/1987 | EP0228316A1 Method of producing a thin-film transistor, and transistor so manufactured |
| 07/08/1987 | EP0228295A2 Method for producing an electronic device having a multi-layer structure |
| 07/08/1987 | EP0228283A2 Semiconductor memory circuit having inspection circuit |
| 07/08/1987 | EP0228206A2 Method of making an integrated circuit structure having gate electrode and underlying oxide |
| 07/08/1987 | EP0228183A2 Method for manufacturing semiconductor device |
| 07/08/1987 | EP0228146A1 CMOS output drive circuit |
| 07/08/1987 | EP0227971A1 MOS transistor with a short gate for highly integrated circuits, and method for its production |
| 07/08/1987 | EP0227970A1 Method of simultaneous fabrication of self-aligned bipolar transistors and complementary MOS transistors on a common silicon substrate |
| 07/08/1987 | EP0227968A2 High speed integrated circuit handler |
| 07/08/1987 | EP0227965A2 Method for ion implant programming NMOS read-only memories and NMOS read-only memory obtained thereby |
| 07/08/1987 | EP0227926A1 Physical parameter balancing of circuit islands in integrated circuit wafers |
| 07/08/1987 | EP0227903A2 A method of etching through a metal layer in a metal/polymer layered structure |
| 07/08/1987 | EP0227894A2 High density vertical DMOS transistor |
| 07/08/1987 | EP0227851A1 Process for obtaining photoresist patterns |
| 07/08/1987 | EP0227839A1 Method of forming a thin film |
| 07/08/1987 | EP0227783A1 A method of manufacturing optical semiconductor structures. |
| 07/08/1987 | EP0227696A1 On chip test system for configurable gate arrays |
| 07/08/1987 | EP0227692A1 Thin layer consisting essentially of ruthenium salt. |
| 07/07/1987 | US4679170 Resistor with low thermal activation energy |
| 07/07/1987 | US4679137 Process control interface system for designer and operator |
| 07/07/1987 | US4679062 Semiconductor |
| 07/07/1987 | US4678989 Optical absorption spectroscopy for semiconductors |
| 07/07/1987 | US4678988 Method and apparatus for spectral analysis of a signal at a measuring point |
| 07/07/1987 | US4678935 Inner bias circuit for generating ECL bias voltages from a single common bias voltage reference |
| 07/07/1987 | US4678919 Electron beam exposure method and apparatus |
| 07/07/1987 | US4678889 Method of laser trimming in semiconductor wafer |
| 07/07/1987 | US4678714 Metal silicide film of continuously gradated composition on glass substrate |
| 07/07/1987 | US4678683 Process for cofiring structure comprised of ceramic substrate and refractory metal metallization |
| 07/07/1987 | US4678679 Continuous deposition of activated process gases |
| 07/07/1987 | US4678542 Self-alignment process for thin film diode array fabrication |
| 07/07/1987 | US4678540 Plasma etch process |
| 07/07/1987 | US4678539 Silicon nitride |
| 07/07/1987 | US4678538 Process for the production of an insulating support on an oriented monocrystalline silicon film with localized defects |
| 07/07/1987 | US4678537 Method of manufacturing semiconductor devices |
| 07/07/1987 | US4678536 Method of photochemical surface treatment |
| 07/07/1987 | US4678534 Method for growing a single crystal |
| 07/07/1987 | US4678531 Method and apparatus for screen printing solder paste onto a substrate with device premounted thereon |
| 07/07/1987 | US4678432 Heat treatment method |
| 07/07/1987 | US4678266 Use of pnictide films for wave-guiding in opto-electronic devices |
| 07/07/1987 | US4678114 Semiconductors |
| 07/07/1987 | US4677759 Rotary drier apparatus for semiconductor wafers |
| 07/07/1987 | US4677758 Spin drier for semiconductor material |
| 07/07/1987 | US4677742 Electronic matrix arrays and method for making the same |
| 07/07/1987 | US4677741 Method of manufacturing package for high power integrated circuit |
| 07/07/1987 | US4677740 Forming monolithic planar opto-isolators by selective implantation and proton bombardment |
| 07/07/1987 | US4677739 Semiconductors |
| 07/07/1987 | US4677737 Integrated circuits |
| 07/07/1987 | US4677736 Self-aligned inlay transistor with or without source and drain self-aligned metallization extensions |
| 07/07/1987 | US4677735 Method of providing buried contacts for N and P channel devices in an SOI-CMOS process using a single N+polycrystalline silicon layer |
| 07/07/1987 | CA1223976A1 Method of transferring impurities from region to region of a semiconductor device |
| 07/07/1987 | CA1223975A1 Process for making a semiconductor device |
| 07/07/1987 | CA1223800A1 Method of fabricating integrated circuit structures using replica patterning |
| 07/07/1987 | CA1223798A1 Process for solidification of materials |
| 07/02/1987 | WO1987004043A1 Box door actuated retainer |
| 07/02/1987 | WO1987004010A1 Chip interface mesa |
| 07/02/1987 | WO1987004009A1 Compressive pedestal for microminiature connections |
| 07/02/1987 | WO1987004007A1 A method of improving the electrical characteristics of a thin film |
| 07/02/1987 | WO1987004006A1 Proximity diffusion method for group iii-v semiconductors |
| 07/02/1987 | WO1987003979A1 Intelligent wafer carrier |
| 07/02/1987 | WO1987003916A1 Method of forming single crystal silicon using spe seed and laser crystallization |
| 07/02/1987 | DE3643994A1 Voltage multiplier circuit |
| 07/02/1987 | DE3641688A1 Method of quality testing an electrode layer on a semiconductor component |
| 07/02/1987 | DE3638644A1 Substrate-potential generating device |
| 07/02/1987 | DE3545383A1 Process for diffusing hydrogen into semiconductor wafers, especially silicon wafers |
| 07/01/1987 | EP0227561A1 Process for plasma etching organic materials |