Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
02/1987
02/04/1987EP0210397A1 LSI circuits adaptable for custom design methods
02/04/1987EP0210380A1 Electronic circuit interconnection system
02/04/1987EP0210379A1 Picosecond photoresponsive element
02/04/1987EP0210376A1 Low Voltage clamp
02/04/1987EP0210371A1 Semiconductor device having a plurality of leads
02/04/1987CN86105600A Vacuum chemical reaction apparatus
02/03/1987USH204 Method for implanting the sidewalls of isolation trenches
02/03/1987US4641353 Inspection method and apparatus for a mask pattern used in semiconductor device fabrication
02/03/1987US4641280 High-density semiconductor memory device with charge-coupling memory cells
02/03/1987US4641279 Semiconductor memory device having a dummy cell and a memory cell which is twice the size of the dummy cell
02/03/1987US4641176 Semiconductor package with contact springs
02/03/1987US4641173 Integrated circuit load device
02/03/1987US4641172 Buried PN junction isolation regions for high power semiconductor devices
02/03/1987US4641171 Monolithically integrated semiconductor power device
02/03/1987US4641170 Self-aligned lateral bipolar transistors
02/03/1987US4641166 Semiconductor memory device having stacked capacitor-type memory cells
02/03/1987US4641164 Bidirectional vertical power MOS device and fabrication method
02/03/1987US4641163 MIS-field effect transistor with charge carrier injection
02/03/1987US4641161 Heterojunction device
02/03/1987US4641108 Configurable analog integrated circuit
02/03/1987US4641035 Apparatus and a method for position detection of an object stepped portion
02/03/1987US4641034 Ion implantation apparatus and method for maskless processing
02/03/1987US4641033 Apparatus and method preventing radiation induced degradation of optical elements
02/03/1987US4640900 Low expansion glass
02/03/1987US4640888 Etching a slit reflecting light as one peak
02/03/1987US4640845 Semiconductor photoelectric conversion devices; solar cells
02/03/1987US4640844 Method for the manufacture of gate electrodes formed of double layers of metal silicides having a high melting point and doped polycrystalline silicon
02/03/1987US4640749 Electrically conductive pyrrole copolymers and their preparation
02/03/1987US4640738 Protective layer is applied to etched via hole prior to metal deposition step
02/03/1987US4640737 Using plasma generated by a mixture of boron trichloride and chlorine
02/03/1987US4640721 Oxidizing the end part of polycrystalline silicon
02/03/1987US4640720 Method of manufacturing a semiconductor device
02/03/1987US4640223 Chemical vapor deposition reactor
02/03/1987US4640010 Method of making a package utilizing a self-aligning photoexposure process
02/03/1987US4640004 Method and structure for inhibiting dopant out-diffusion
02/03/1987US4640003 Method of making planar geometry Schottky diode using oblique evaporation and normal incidence proton bombardment
02/03/1987US4640000 Method of manufacturing semiconductor device
02/03/1987CA1217576A1 Method of producing a semiconductor device
02/03/1987CA1217575A1 Mobility-modulation field-effect transistor
02/03/1987CA1217574A1 Integrated semiconductor circuit having an external contacting track level consisting of aluminum or of an aluminum alloy
02/03/1987CA1217532A1 Ion beam machining device
02/03/1987CA1217410A1 Process for the liquid phase epitaxial deposition of a monocrystalline ternary compound
01/1987
01/29/1987WO1987000694A1 Method for producing a heterostructure device
01/29/1987WO1987000690A2 High-performance dram arrays including trench capacitors
01/29/1987WO1987000688A1 Methods of producing layered structures
01/29/1987WO1987000687A1 Selectively doping isolation trenches utilized in cmos devices
01/29/1987WO1987000686A1 Connection terminals between substrates and method of producing the same
01/29/1987WO1987000685A1 Photochemical vapor deposition process for depositing oxide layers
01/29/1987WO1987000684A1 Forming thick dielectric at the bottoms of trenches utilized in integrated-circuit devices
01/29/1987WO1987000644A1 Soft x-ray lithographic system
01/29/1987WO1987000617A1 Method and apparatus for nondestructively determining the characteristics of a multilayer thin film structure
01/29/1987DE3624384A1 Device for removing a photoresist layer from a substrate
01/29/1987DE3541911A1 Process for coating micro-indentations
01/29/1987DE3527098A1 Method for increasing the emitter efficiency of bipolar transistors in complementary MOS circuits comprising bipolar transistors
01/28/1987EP0209986A2 Thyristors protected against overvoltage
01/28/1987EP0209985A1 Method for forming a fast bipolar transistor for integrated circuit structure
01/28/1987EP0209969A2 Ion-implanting method and apparatus with improved ion-dose accuracy
01/28/1987EP0209950A2 Process for making a mask used in x-ray photolithography
01/28/1987EP0209949A2 Method for forming a transistor, and transistor
01/28/1987EP0209939A1 Method of manufacturing a semiconductor device
01/28/1987EP0209816A1 Method for the production of plane electric circuits
01/28/1987EP0209794A2 Method for producing a contact for a semiconductor device
01/28/1987EP0209767A1 Method of making semiconductor devices
01/28/1987EP0209670A2 A process for planarizing a substrate
01/28/1987EP0209660A2 Apparatus and method for automated cassette handling
01/28/1987EP0209648A1 Wafer base for silicon carbide semiconductor device
01/28/1987EP0209523A1 Growth of lattice-graded epilayers
01/28/1987EP0105347B1 Temperature gradient zone melting process and apparatus
01/28/1987EP0086816B1 Plasma etching apparatus and method including end point detection
01/27/1987US4639919 Distributed pattern generator
01/27/1987US4639893 Self-aligned split gate EPROM
01/27/1987US4639892 Semiconductor read-only memory device
01/27/1987US4639830 Packaged electronic device
01/27/1987US4639761 Combined bipolar-field effect transistor resurf devices
01/27/1987US4639757 Power transistor structure having an emitter ballast resistance
01/27/1987US4639755 Thermosensitive semiconductor device using Darlington circuit
01/27/1987US4639754 Vertical MOSFET with diminished bipolar effects
01/27/1987US4639678 Absolute charge difference detection method and structure for a charge coupled device
01/27/1987US4639621 Gallium arsenide gate array integrated circuit including DCFL NAND gate
01/27/1987US4639377 Thin film formation technique and equipment
01/27/1987US4639301 Focused ion beam processing
01/27/1987US4639288 Process for formation of trench in integrated circuit structure using isotropic and anisotropic etching
01/27/1987US4639277 Semiconductor material on a substrate, said substrate comprising, in order, a layer of organic polymer, a layer of metal or metal alloy and a layer of dielectric material
01/27/1987US4639276 Method of making thyristor with a high tolerable bias voltage
01/27/1987US4639275 Forming disordered layer by controlled diffusion in heterojunction III-V semiconductor
01/27/1987US4639274 Method of making precision high-value MOS capacitors
01/27/1987US4639142 Dimension monitoring technique for semiconductor fabrication
01/27/1987US4639060 Heat recoverable connector
01/27/1987US4638937 Beam lead bonding apparatus
01/27/1987US4638601 Automatic edge grinder
01/27/1987US4638553 Metallization, vacuum alloying, etching, passivation
01/27/1987US4638552 Method of manufacturing semiconductor substrate
01/27/1987CA1217257A2 X-y addressable workpiece positioner having an improved x-y address indicia sensor
01/27/1987CA1217224A1 Electro-magnetic alignment apparatus
01/27/1987CA1217223A1 Electro-magnetic alignment assemblies
01/27/1987CA1217119A1 Method of etching refractory metal film on semiconductor structures
01/27/1987CA1217116A1 Semiconductor device and method of manufacturing the semiconductor device
01/27/1987CA1217095A1 Method of making oxide films
01/27/1987CA1217088A1 Displacement device, particularly for the photolithographic treatment of a substrate
01/24/1987CN85101868A Image sensor which is insensitive to blurry phenomena and the process of it