Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/1987
06/02/1987US4670668 Substrate bias generator with power supply control means to sequence application of bias and power to prevent CMOS SCR latch-up
06/02/1987US4670650 Method of measuring resist pattern
06/02/1987US4670372 Process of developing radiation imaged photoresist with alkaline developer solution including a carboxylated surfactant
06/02/1987US4670365 Photomask and method of fabrication thereof
06/02/1987US4670299 Preparation of lower alkyl polysilsesquioxane and formation of insulating layer of silylated polymer on electronic circuit board
06/02/1987US4670297 Evaporated thick metal and airbridge interconnects and method of manufacture
06/02/1987US4670293 Plasma deposition on non-flat furface
06/02/1987US4670292 Method for injecting exotic atoms into a solid with electron beams
06/02/1987US4670291 Method of controlling supersaturated injection and concentration of exotic atoms into deep portions of a solid with a high energy electron beam
06/02/1987US4670176 Single crystal of compound semiconductor of groups III-V with low dislocation density
06/02/1987US4670126 Semiconductors; isolatable for cleaning
06/02/1987US4670096 Process and apparatus for producing semi-conductor foils
06/02/1987US4670093 Method for manufacturing a surface grating of a defined grating constant on regions of a mesa structure
06/02/1987US4670092 Integrated circuits
06/02/1987US4670091 Process for forming vias on integrated circuits
06/02/1987US4670090 Method for producing a field effect transistor
06/02/1987US4670088 Lateral epitaxial growth by seeded solidification
06/02/1987US4670063 Photolysis
06/02/1987US4669938 Apparatus for automatically loading a furnace with semiconductor wafers
06/02/1987US4669885 Apparatus for inspecting negatives
06/02/1987US4669883 Method and apparatus for alignment
06/02/1987US4669866 Step-and-repeat alignment and exposure system and method therefore
06/02/1987US4669603 Apparatus for singling filled wafer slices
06/02/1987US4669180 Protecting against latch-up
06/02/1987US4669179 Integrated circuit fabrication process for forming a bipolar transistor having extrinsic base regions
06/02/1987US4669178 Process for forming a self-aligned low resistance path in semiconductor devices
06/02/1987US4669177 Complimentary metal oxide semiconductor self-aligned gate
06/02/1987US4669176 Doping, heating silicide layer
06/02/1987CA1222575A1 Semiconductor wafer fabrication
06/02/1987CA1222436A1 Process for growing crystalline material
06/01/1987EP0179802A4 Integrated circuits with contact pads in a standard array.
05/1987
05/27/1987EP0223770A2 Means for avoiding plastic deformation of a maskfoil
05/27/1987EP0223721A1 Method for plasma etching of a material
05/27/1987EP0223699A2 Signal ground planes for tape bonded devices
05/27/1987EP0223698A2 Hillock immunization mask
05/27/1987EP0223694A2 Submerged wall isolation of silicon islands
05/27/1987EP0223637A1 Method for making a metallic multilayer interconnection pattern of the components of a very dense integrated circuit
05/27/1987EP0223616A2 Semiconductor memory device and manufacturing method
05/27/1987EP0223527A2 Contact vias in semiconductor devices
05/27/1987EP0223526A2 Integrated circuit and optimization method therefore
05/27/1987EP0223505A2 Method and apparatus for taking electronic component out of carrier tape
05/27/1987EP0223414A1 Mounting a component to a substrate
05/27/1987EP0223294A1 Charge-coupled device
05/27/1987EP0223249A2 Mounting beam for preparing wafers
05/27/1987EP0223220A2 Multilayer ceramic circuit board fired at a low temperature
05/27/1987EP0223114A2 Compositions reticulated by photopolymerization
05/27/1987EP0223032A2 Method for making submicron mask openings using sidewalls and lift-off techniques
05/27/1987EP0223013A2 Planar 3D epitaxial semiconductor structures and method for making
05/27/1987EP0222908A1 Wafer base for silicon carbide semiconductor device
05/27/1987EP0222877A1 IN-lINE DISK SPUTTERING SYSTEM
05/27/1987EP0222795A1 Polycide process in semiconductor fabrication.
05/27/1987EP0222787A1 Method and device for aligning, controlling and/or measuring bidimensional objects.
05/27/1987EP0222777A1 Unit intended to restore the initial cleanness conditions in a quartz tube used as reaction chamber for fabricating integrated circuits.
05/27/1987DE3625742A1 Integrated CMOS circuit and method of producing the circuit
05/27/1987CN86107224A Integrated circuit device having slanted peripheral circuits
05/27/1987CN86105432A Charged-particle-beam lithography
05/26/1987US4669100 Charge-coupled device having a buffer electrode
05/26/1987US4669062 Two-tiered dynamic random access memory (DRAM) cell
05/26/1987US4668973 Semiconductor device passivated with phosphosilicate glass over silicon nitride
05/26/1987US4668972 Masterslice semiconductor device
05/26/1987US4668970 Semiconductor device
05/26/1987US4668755 Dielectrics for printed circuits
05/26/1987US4668581 Bonding electrical conductors and bonded products
05/26/1987US4668530 Titanium silicide
05/26/1987US4668527 Gold into silicon substrates
05/26/1987US4668484 Gas pressurization, inert gases
05/26/1987US4668480 Crucibles, vacuum housings
05/26/1987US4668365 Apparatus and method for magnetron-enhanced plasma-assisted chemical vapor deposition
05/26/1987US4668338 Magnetron-enhanced plasma etching process
05/26/1987US4668337 Dry-etching method and apparatus therefor
05/26/1987US4668335 Anti-corrosion treatment for patterning of metallic layers
05/26/1987US4668334 Method and apparatus for applying a layer of photosensitive material to a semiconductor wafer
05/26/1987US4668333 Image sensor array for assembly with like arrays to form a longer array
05/26/1987US4668330 Determination of oxygen induced stacking faults defects in semiconductor wafers
05/26/1987US4668314 Liquid crystal display, solar cell, printed circuit board of calculator
05/26/1987US4668306 Dioces, tubes, heat treatment, dielectrics, vapor deposition, plasma/gases/, apertures, photolithography
05/26/1987US4668304 Dopant gettering semiconductor processing by excimer laser
05/26/1987US4668089 Exposure apparatus and method of aligning exposure mask with workpiece
05/26/1987US4668077 Projection optical apparatus
05/26/1987US4667944 Means for handling semiconductor die and the like
05/26/1987US4667870 Registering articles to sites with recessed ultrasonic bonding tool head
05/26/1987US4667650 Mounting beam for preparing wafers
05/26/1987US4667415 Microlithographic reticle positioning system
05/26/1987US4667404 Method of interconnecting wiring planes
05/26/1987US4667402 Method for micro-pack production
05/26/1987US4667395 Method for passivating an undercut in semiconductor device preparation
05/26/1987US4667393 Method for the manufacture of semiconductor devices with planar junctions having a variable charge concentration and a very high breakdown voltage
05/26/1987CA1222331A1 Integrated circuit package
05/26/1987CA1222330A1 Compound semiconductor integrated circuit device
05/26/1987CA1222329A1 Test system for vlsi digital circuit and method of testing
05/26/1987CA1222218A1 Reactive ion etching process
05/26/1987CA1222124A1 Process and apparatus for obtaining silicon from fluosilicic acid
05/21/1987WO1987003142A1 Fill and spill for charge input to a ccd
05/21/1987WO1987003141A1 Semiconductor switch for high inverse voltages
05/21/1987WO1987003139A2 Process for trench oxide isolation of integrated devices
05/21/1987WO1987003013A1 Sputtering method for reducing hillocking in aluminum layers formed on substrates
05/21/1987DE3537544C1 Gaseinlassvorrichtung fuer Reaktionsgefaesse The gas inlet for Reaktionsgefaesse
05/20/1987EP0222739A2 Process for the production of a transmission mask
05/20/1987EP0222738A2 Process for the production of a transmission mask
05/20/1987EP0222737A2 Stabilization of mask membranes, and supporting frame
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