Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/1987
05/05/1987CA1221475A1 High-purity molybdenum target and high-purity molybdenum silicide target for lsi electrodes and process for producing the same
04/1987
04/30/1987DE3639835A1 Method of fabricating high-speed semiconductors
04/29/1987EP0220120A1 Method for producing a charge transport device, and charge transport device manufactured thereby
04/29/1987EP0220109A2 Improved trench capacitor and DRAM memory cell
04/29/1987EP0220108A2 Side-wall doping for trench isolation
04/29/1987EP0220020A2 Multiple-value logic circuitry
04/29/1987EP0219966A2 Process for pulling a crystal
04/29/1987EP0219872A2 Mask assembly having mask stress relieving feature
04/29/1987EP0219831A2 Method of producing semiconductor integrated circuit device including bipolar transistor and insulated gate field effect transistor
04/29/1987EP0219827A2 Improved process for forming low sheet resistance metal silicide layers on semiconductor substrates
04/29/1987EP0219826A2 Vacuum processing system
04/29/1987EP0219812A2 Packaged semiconductor device having solderable external leads and process for its production
04/29/1987EP0219789A2 Stripping solvent for photoresists
04/29/1987EP0219776A1 Crucible recovering method and apparatus therefor
04/29/1987EP0219668A1 Logic-circuit layout for large-scale integrated circuits
04/29/1987EP0219659A1 Method for making an adhesion contact
04/29/1987EP0219641A1 Integrated circuit comprising bipolar and complementary MOS transistors on a common substrate, and method of making the same
04/29/1987EP0219512A1 Installation for the handling of fragile objects in controlled dusting atmosphere.
04/29/1987EP0034166B1 Semiconductor embedded layer technology
04/29/1987CN86105419A Gaseous process and apparatus for removing films from substrates
04/29/1987CN86103644A Method of adding the protective layer
04/28/1987US4661961 Buried heterostructure devices with unique contact-facilitating layers
04/28/1987US4661837 Resin-sealed radiation shield for a semiconductor device
04/28/1987US4661836 Fabricating integrated circuits
04/28/1987US4661835 Semiconductor structure and method of its manufacture
04/28/1987US4661834 Semiconductor structures and manufacturing methods
04/28/1987US4661833 Electrically erasable and programmable read only memory
04/28/1987US4661832 Total dielectric isolation for integrated circuits
04/28/1987US4661831 Integrated RS flip-flop circuit
04/28/1987US4661788 Tapped CCD delay line with non-destructive charge sensing using floating diffusions
04/28/1987US4661771 Method of screening resin-sealed semiconductor devices
04/28/1987US4661725 Elementary logic circuit obtained by means of field effect transistors of gallium arsenide and compatible with the ECL 100 K technology
04/28/1987US4661712 Apparatus for scanning a high current ion beam with a constant angle of incidence
04/28/1987US4661679 Semiconductor laser processing with mirror mask
04/28/1987US4661431 Method of imaging resist patterns of high resolution on the surface of a conductor
04/28/1987US4661426 Process for manufacturing metal silicide photomask
04/28/1987US4661374 Method of making MOS VLSI semiconductor device with metal gate and clad source/drain
04/28/1987US4661370 Forming electroconductive path
04/28/1987US4661324 Apparatus for replenishing a melt
04/28/1987US4661214 Method and apparatus for electrically disconnecting conductors
04/28/1987US4661204 Method for forming vertical interconnects in polyimide insulating layers
04/28/1987US4661203 Low defect etching of patterns using plasma-stencil mask
04/28/1987US4661202 Reduction of chip area
04/28/1987US4661200 Solar cell substrates
04/28/1987US4661193 Adhesive compositions for arylcyclobutene monomeric compositions
04/28/1987US4661192 Low cost integrated circuit bonding process
04/28/1987US4661181 Method of assembly of at least two components of ceramic material each having at least one flat surface
04/28/1987US4661177 Method for doping semiconductor wafers by rapid thermal processing of solid planar diffusion sources
04/28/1987US4661176 Process for improving the quality of epitaxial silicon films grown on insulating substrates utilizing oxygen ion conductor substrates
04/28/1987US4661168 Method of integrating infrared sensitive image recording element with CCD on same substrate
04/28/1987US4661167 Using energy beam irradiation
04/28/1987US4661166 Precipitation of oxygen on silicon single crystal, annealing to form oxide film
04/28/1987US4661033 Apparatus for unloading wafers from a hot boat
04/28/1987US4660983 Apparatus for measuring reflectivities of resonator facets of semiconductor laser
04/28/1987US4660966 Optical alignment apparatus
04/28/1987US4660278 Process of making IC isolation structure
04/28/1987US4660277 Method for forming large area amorphous semiconductor layer and contact type image sensor
04/28/1987US4660276 Forming tungsten silicide contactors
04/28/1987CA1221007A1 Diethylberyllium dopant source for mocvd grown epitaxial semiconductor layers
04/23/1987WO1987002544A1 Transparent, electrostatic protective container with readily accessible identification means
04/23/1987WO1987002518A1 Mounting a component to a substrate
04/23/1987WO1987002511A1 Protection of igfet integrated circuits from electrostatic discharge
04/23/1987WO1987002510A1 Subcollector for bipolar transistors
04/23/1987WO1987002509A1 Lattice-graded epilayers
04/23/1987WO1987002504A1 Current metering apparatus
04/23/1987WO1987002476A1 Wavelength selection device and method
04/23/1987WO1987002475A1 Radiation deflector assembly
04/23/1987WO1987002474A1 Positioning optical components and waveguides
04/23/1987WO1987002472A1 Movable member-mounting
04/23/1987WO1987002470A1 Fabry-perot interferometer
04/23/1987DE3634850A1 Method of producing a VLSI semiconductor circuit device of the standard wafer type
04/23/1987DE3537699A1 Device for chamfering the edges of elements in the shape of circular discs
04/22/1987EP0219465A2 Improved (RIE) plasma etch process for making metal-semiconductor ohmic type contacts
04/22/1987EP0219430A2 Self-healing MOS capacitor
04/22/1987EP0219413A2 An array reconfiguration apparatus and method particularly adapted for use with very large scale integrated circuits
04/22/1987EP0219408A1 Process and device for welding elements on the corresponding spots of a substrate, such as a high-density integrated-circuit substrate
04/22/1987EP0219374A1 Device for thermocompression welding
04/22/1987EP0219359A1 Fabry-perot interferometer
04/22/1987EP0219358A1 Radiation deflector assembly
04/22/1987EP0219357A1 Wavelength selection device and method
04/22/1987EP0219356A1 Movable member mounting
04/22/1987EP0219346A2 Method for producing a poly emitter logic array, and device produced thereby
04/22/1987EP0219266A1 Method for evaluating the breakdown time of an insulating film
04/22/1987EP0219254A1 Joined ceramic-metal composite
04/22/1987EP0219243A2 Process of manufacturing a bipolar transistor
04/22/1987EP0219241A2 Non-volatile semiconductor memory
04/22/1987EP0219221A2 Semi-conductor integrated circuits
04/22/1987EP0219100A2 Method of forming a fine pattern
04/22/1987EP0218849A1 Support tape for a film-mounted circuit
04/22/1987EP0218832A1 Surface-mounted component and method of affixing a surface-mounted component
04/22/1987EP0218796A2 Semiconductor device comprising a plug-in-type package
04/22/1987EP0218710A1 Cmos circuit.
04/22/1987EP0218697A1 Memory cell for use in a read only memory
04/22/1987EP0218623A1 METHOD FOR DEPOSITING AT LEAST ONE LAYER OF AN HOMOGENEOUS COMPOUND III-V OR II-VI, PARTICULARLY Ga As, AND SUBSTRATE COATED WITH SUCH A DEPOSITION
04/22/1987EP0218613A1 Device for the alignment, testing and/or measurement of two-dimensional objects.
04/22/1987EP0113983B1 Fabricating a semiconductor device by means of molecular beam epitaxy
04/22/1987CN86105632A 数据处理方法 Data processing method
04/21/1987US4660208 Semiconductor devices employing Fe-doped MOCVD InP-based layer for current confinement
04/21/1987US4660179 Semiconductor memory device with switching for redundant cells
04/21/1987US4660174 Semiconductor memory device having divided regular circuits