Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/1987
01/21/1987EP0209432A1 Electron beam tester for integrated circuits
01/21/1987EP0209425A1 Method for producing a semiconductor device with several levels of gates
01/21/1987EP0209419A1 Process for producing at least two metallizations provided with a dielectric layer on a semiconductor body, and semiconductor device provided with this dielectric layer
01/21/1987EP0209300A2 Method and apparatus for reliable integrated circuit package construction
01/21/1987EP0209288A1 Etching method
01/21/1987EP0209257A1 Ion implantation
01/21/1987EP0209236A1 Electron beam testing of integrated circuits
01/21/1987EP0209196A2 Method of controlling forward voltage across schottky diode
01/21/1987EP0209194A1 Method of manufacturing a semiconductor device, in which a layer of gallium arsenide is etched in a basic solution of hydrogen peroxide
01/21/1987EP0209173A1 Method of manufacturing semiconductor devices comprising the mechanical connection of two bodies
01/21/1987EP0209166A1 N channel MOS transistor with limitation of punch-through effect and formation process thereof
01/21/1987EP0209150A2 Apparatus of metal organic chemical vapor deposition for growing epitaxial layer of compound semiconductor
01/21/1987EP0209144A2 Device for testing and/or treating microcomponents
01/21/1987EP0209109A2 Method of and apparatus for forming film by utilizing low-temperature plasma
01/21/1987EP0209065A2 Method for supplying an oxygen gas containing steam for the surface treatment of semiconductor wafers
01/21/1987EP0208977A1 Testing integrated circuits
01/21/1987EP0208970A1 MOFSET having a thermal protection
01/21/1987EP0208966A1 Apparatus for, and methods of, depositing a substance on a substrate
01/21/1987EP0208935A1 Narrow channel width fet
01/21/1987EP0208934A1 Narrow channel width fet
01/21/1987EP0208916A2 Inner-lead bonding apparatus
01/21/1987EP0208877A2 Method of manufacturing semiconductor devices having connecting areas
01/21/1987EP0208851A1 Fabricating a semiconductor device by means of molecular beam epitaxy
01/21/1987EP0208795A1 Method of fabricating a self-aligned metal-semiconductor FET
01/21/1987EP0032510B1 Silicon on sapphire laser process
01/20/1987US4638464 Charge pump system for non-volatile ram
01/20/1987US4638458 Semiconductor memory address lines with varied interval contact holes
01/20/1987US4638400 Refractory metal capacitor structures, particularly for analog integrated circuit devices
01/20/1987US4638347 Gate electrode sidewall isolation spacer for field effect transistors
01/20/1987US4638342 Space charge modulation device
01/20/1987US4638191 Amplitude insensitive delay line
01/20/1987US4638184 CMOS bias voltage generating circuit
01/20/1987US4638144 Indexing laser marker
01/20/1987US4638110 Methods and apparatus relating to photovoltaic semiconductor devices
01/20/1987US4637895 Glow discharge decomposition, thin film semiconductor alloy
01/20/1987US4637869 Dual ion beam deposition of amorphous semiconductor films
01/20/1987US4637853 Hollow cathode enhanced plasma for high rate reactive ion etching and deposition
01/20/1987US4637836 Profile control of boron implant
01/20/1987US4637714 Inspection system for pellicalized reticles
01/20/1987US4637146 Spin dryer
01/20/1987US4637130 Method for manufacturing a plastic encapsulated semiconductor device and a lead frame therefor
01/20/1987US4637129 Vacuum deposition
01/20/1987US4637128 Method of producing semiconductor device
01/20/1987US4637127 Method for manufacturing a semiconductor device
01/20/1987US4637125 Method for making a semiconductor integrated device including bipolar transistor and CMOS transistor
01/20/1987US4637124 Process for fabricating semiconductor integrated circuit device
01/20/1987US4637123 Method of standardizing and stabilizing semiconductor wafers
01/20/1987CA1216969A1 Method of manufacturing a semiconductor device and semiconductor device manufactured by means of the method
01/20/1987CA1216968A1 Insulated-gate semiconductor device with improved base-to-source electrode short and method of fabricating said short
01/20/1987CA1216967A1 Semiconductor device
01/20/1987CA1216966A1 Method of manufacturing a semiconductor device and semiconductor device manufactured by the method
01/20/1987CA1216965A1 Method of manufacturing accurately contact windows in a semiconductor device and device made by such method
01/20/1987CA1216964A1 Method for manufacturing an integrated semiconductor circuit having multi-layer aluminum or aluminum alloy wiring
01/20/1987CA1216963A1 Interconnection device between the cells of a pre- implanted hyperfrequency integrated circuit
01/20/1987CA1216962A1 Mos device processing
01/20/1987CA1216876A1 Electro-magnetic alignment device
01/17/1987CN85102326A Method of mfg. semiconductor devices in which material is deposited from a reaction gas
01/17/1987CN85101284A 半导体基片 A semiconductor substrate
01/17/1987CN85101150A Fluorine-containing polyamide-acid derivative and polyimide
01/15/1987WO1987000348A1 Semiconductor structures and a method of manufacturing semiconductor structures
01/15/1987WO1987000346A1 Method of forming a thin film
01/15/1987WO1987000345A1 Procedure for fabricating devices involving dry etching
01/15/1987WO1987000292A1 On chip test system for configurable gate arrays
01/15/1987WO1987000094A1 Semiconductor wafer flow treatment
01/15/1987DE3623233A1 Basin for treating semiconductor materials
01/15/1987DE3524832A1 Fabrication of thin-film circuits
01/15/1987DE3524807A1 Fabrication of thin-film circuits
01/14/1987EP0208577A1 Method of controlling dopant diffusion and dopant electrical activation
01/14/1987EP0208552A2 Acousto-optic system for testing high speed circuits
01/14/1987EP0208516A2 Method and apparatus for determining surface profiles
01/14/1987EP0208494A2 Method of fabricating a semiconductor apparatus comprising two semiconductor devices
01/14/1987EP0208463A1 Planarization of metal films for multilevel interconnects
01/14/1987EP0208459A2 Process for the chemical vapour deposition of a thin film of oxide on a silicon wafer
01/14/1987EP0208444A2 Apparatus for obtaining derivative of characteristic curve, and method of controlling operation, of electronic devices
01/14/1987EP0208356A1 Method of manufacturing a semiconductor device, in which a silicon slice is locally provided with field oxide with a channel stopper
01/14/1987EP0208308A2 A method for forming patterns by using a high-current-density electron beam
01/14/1987EP0208294A1 Three-dimensional integrated circuit
01/14/1987EP0208267A1 Method of producing cross-couplings between N and P channel CMOS field effect transistors of read-and-write memories, particularly with 6-transistor memory devices
01/14/1987EP0078323B1 Apparatus for projecting a series of images onto dies of a semiconductor wafer
01/14/1987CN85105699A Preparation method for ohmic contact of compound semiconductor planar junction device
01/13/1987US4636984 Semiconductor device having non-volatile storage transistors
01/13/1987US4636968 Method of positioning a beam to a specific portion of a semiconductor wafer
01/13/1987US4636966 Method of arranging logic circuit devices on logic circuit board
01/13/1987US4636834 Submicron FET structure and method of making
01/13/1987US4636833 Semiconductor device
01/13/1987US4636832 Semiconductor device with an improved bonding section
01/13/1987US4636831 Semiconductor device
01/13/1987US4636829 Photodetector integrated circuit
01/13/1987US4636826 Charge coupled devices having narrow coplanar silicon electrodes
01/13/1987US4636825 Distributed field effect transistor structure
01/13/1987US4636822 GaAs short channel lightly doped drain MESFET structure and fabrication
01/13/1987US4636724 Method and apparatus for examining electrostatic discharge damage to semiconductor devices
01/13/1987US4636658 Voltage detecting device
01/13/1987US4636454 Method for the preparation of a patterned photoresist layer and a photoresist composition therefor
01/13/1987US4636401 Chemical reactors, heating, light, electricity, exhaustion, pumps
01/13/1987US4636400 Method of treating silicon nitride film formed by plasma deposition
01/13/1987US4636281 Process for the autopositioning of a local field oxide with respect to an insulating trench
01/13/1987US4636280 Method for the pretreatment of a substrate for ion implantation
01/13/1987US4636275 Prevents adhesive from flowing onto bonding pads
01/13/1987US4636269 Epitaxially isolated semiconductor device process utilizing etch and refill technique