Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/1987
03/31/1987US4653177 Method of making and selectively doping isolation trenches utilized in CMOS devices
03/31/1987US4653176 Method of simultaneously manufacturing semiconductor regions having different dopings
03/31/1987US4653174 Method of making packaged IC chip
03/31/1987US4653173 Semiconductors
03/31/1987CA1219975A1 Plasma etching reactor with reduced plasma potential
03/31/1987CA1219968A1 Apparatus for and method of depositing a highly conductive, highly transmissive film
03/31/1987CA1219967A1 Preventing lateral oxide growth by first forming nitride layer followed by a composite masking layer
03/31/1987CA1219965A1 Self repair large scale integrated circuit
03/31/1987CA1219893A1 Electro-magnetic apparatus
03/31/1987CA1219835A1 Metal/semiconductor deposition
03/30/1987EP0108807A4 Wafer transfer apparatus.
03/26/1987WO1987001868A1 Monolithically-integrated semiconductor devices
03/26/1987WO1987001867A1 Multi-cell transistor
03/26/1987WO1987001866A1 Semiconductor device
03/26/1987WO1987001865A1 Ion beam apparatus and method of modifying substrates
03/26/1987WO1987001859A2 Nonvolatile memory cell
03/26/1987WO1987001806A1 Method for the automatic optical control of objects such as integrated circuits
03/26/1987WO1987001738A1 Method and device for chemical treatment, particularly thermochemical treatment and chemical deposition in a large volume homogeneous plasma
03/26/1987WO1987001614A1 Vacuum vapor transport control
03/26/1987DE3533663A1 Method for improving the adhesive strength in micropack internal soldering, and application of the method
03/26/1987DE3533146A1 Colour sensor element, colour-sensitive sensor arrangement having such colour-sensor elements, an application of the element or of the arrangement, and a method for producing a semi-conductor material for the colour-sensor element
03/25/1987EP0215679A2 Semiconductor etching apparatus with magnetic array and vertical shield
03/25/1987EP0215626A2 Systems and methods for ion source control in ion implanters
03/25/1987EP0215583A2 Bipolar and/or MOS devices fabricated on integrated circuit substrates
03/25/1987EP0215557A2 Copper-chromium-polyimide composite
03/25/1987EP0215542A2 Method of manufacturing a semiconductor device including forming a multi-level interconnection layer
03/25/1987EP0215532A2 An electron emissive mask for an electron beam image projector, its manufacture, and the manufacture of a solid state device using such a mask
03/25/1987EP0215502A1 Method of forming a semiconductor component with attached component bonding adhesive
03/25/1987EP0215462A2 Paste for bonding semi-conductors to ceramic underlayers
03/25/1987EP0215436A2 Method of growth of thin film layer for use in a composite semiconductor
03/25/1987EP0215429A1 Self substrate bias generator
03/25/1987EP0215289A1 Method of manufacturing an a-Si:H blocking diode structure for linear image sensors
03/25/1987EP0215218A2 A method of forming recessed oxide isolation with reduced steepness of the birds' neck
03/25/1987EP0215213A1 Method of fabricating high voltage and low voltage transistors using an epitaxial layer of uniform thickness
03/25/1987EP0215069A1 Polysiloxane resist for ion beam and electron beam lithography.
03/25/1987EP0215055A1 Laser-based wafer measuring system
03/25/1987EP0112894B1 Power bus routing for gate arrays
03/25/1987CN85106561A Single crystal growing device
03/25/1987CN85106463A Method of manufacturing semiconductor device
03/24/1987US4653025 Random access memory with high density and low power
03/24/1987US4652974 Method and structure for effecting engineering changes in a multiple device module package
03/24/1987US4652902 Power semiconductor device
03/24/1987US4652900 NPN transistor with P/N closed loop in contact with collector electrode
03/24/1987US4652897 Semiconductor memory device
03/24/1987US4652795 External plasma gun
03/24/1987US4652762 Electron lithography mask manufacture
03/24/1987US4652757 Method and apparatus for optically determining defects in a semiconductor material
03/24/1987US4652467 Preaging a solution of hydrolyzable metal and/or silicon alkoxide, water, solvent and acid or base to control porosity
03/24/1987US4652398 Rapid curing, thermally stable adhesive composition comprising epoxy resin, polyimide, reactive solvent, and crosslinker
03/24/1987US4652339 CCD gate definition process
03/24/1987US4652336 Sputtering, multilayer, aluminum, titanium
03/24/1987US4652334 Method for patterning silicon dioxide with high resolution in three dimensions
03/24/1987US4652333 Etch process monitors for buried heterostructures
03/24/1987US4652135 Article holding apparatus and its use
03/24/1987US4652134 Mask alignment system
03/24/1987US4652077 Semiconductor device comprising a light wave guide
03/24/1987US4651440 Spin drying apparatus
03/24/1987US4651415 Leaded chip carrier
03/24/1987US4651411 Method of manufacturing a MOS device wherein an insulating film is deposited in a field region
03/24/1987US4651410 Method of fabricating regions of a bipolar microwave integratable transistor
03/24/1987US4651408 Fabrication of stacked MOS devices utilizing lateral seeding and a plurality of separate implants at different energies
03/24/1987US4651407 Method of fabricating a junction field effect transistor utilizing epitaxial overgrowth and vertical junction formation
03/24/1987US4651406 Forming memory transistors with varying gate oxide thicknesses
03/24/1987CA1219687A1 Method and structure for inhibiting dopant out- diffusion
03/24/1987CA1219686A1 Process for making semiconductor devices using photosensitive bodies
03/24/1987CA1219685A1 Integrated circuit contact method
03/24/1987CA1219684A1 Semiconductor package
03/24/1987CA1219683A1 Method for fabricating improved oxide defined transistors and resulting structures
03/19/1987DE3630368A1 Vibration transducer and method for manufacturing it
03/18/1987EP0214916A1 Process for making an interconnection substrate for electronic components
03/18/1987EP0214899A1 Semiconductor device having means for regulating power supply voltage applied thereto
03/18/1987EP0214702A1 Method of manufacturing a semiconductor device with mutually insulated strip-shaped silicon electrodes overlapping each other
03/18/1987EP0214690A2 A method of manufacturing a semiconductor device
03/18/1987EP0214610A2 Epitaxial gallium arsenide semiconductor wafer and method of producing the same
03/18/1987EP0214515A2 Method and apparatus for forming metal silicide
03/18/1987EP0214514A2 Mask removal tool
03/18/1987EP0214512A2 Expitaxially grown isolation device
03/18/1987EP0214465A1 Plating process for an electronic part
03/18/1987EP0214421A1 Production of thin oxide layers on melt grown silicon substrates
03/18/1987EP0214229A1 Logic circuit having improved testability for defective via contacts.
03/18/1987EP0214207A1 Method and device for depositing a doped material by epitaxial growth.
03/18/1987CN86105085A Method to make electric contact in the contact zone of semiconductor substrate
03/17/1987US4651341 Pattern recognition apparatus and a pattern recognition method
03/17/1987US4651191 Semiconductor device and fabrication method thereof
03/17/1987US4651190 Semiconductor integrated circuit
03/17/1987US4651184 Dram cell and array
03/17/1987US4651183 High density one device memory cell arrays
03/17/1987US4651179 Low resistance gallium arsenide field effect transistor
03/17/1987US4651090 Device for receiving components, particularly integrated chips, in an input and/or output magazine of a component testing machine
03/17/1987US4651088 Device for testing semiconductor devices
03/17/1987US4651009 Contact exposure apparatus
03/17/1987US4650984 Photosensor array for treating image information
03/17/1987US4650923 Resistors, circuits
03/17/1987US4650921 Thin film cadmium telluride solar cell
03/17/1987US4650849 Photosensitive curable resin composition
03/17/1987US4650744 Method of manufacturing semiconductor device
03/17/1987US4650698 Method of forming a thin film of a metal or metal compound on a substrate
03/17/1987US4650696 Process using tungsten for multilevel metallization
03/17/1987US4650695 Method of fabricating solar cells
03/17/1987US4650544 Sublithographic dimensions, integrated circuits
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