Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/1987
03/04/1987EP0212477A1 Power transistor device
03/04/1987EP0212295A2 Monocrystalline semiconductor superlattice structures
03/04/1987EP0212267A1 Improved differential input attenuator circuit
03/04/1987EP0212266A2 Selective titanium silicide formation
03/04/1987EP0212251A2 Process using dry etchant to avoid mask-and-etch cycle
03/04/1987EP0212219A2 Visibility enhancement of first order alignment marks
03/04/1987EP0212208A1 Circuit arrangement for testing integrated-circuit units
03/04/1987EP0212207A1 Fast switching bipolar transistor structure for integrated circuits, and method of making it
03/04/1987EP0212149A2 Planarization process for semiconductor structures
03/04/1987EP0212124A1 Method of fabricating a multilayer ceramic substrate
03/04/1987EP0212098A2 Method of forming a passivation film
03/04/1987EP0212054A2 Process for the production of X-ray masks
03/04/1987EP0211938A1 System and method for depositing plural thin film layers on a substrate.
03/03/1987US4648106 Gas control for X-ray lithographic system
03/03/1987US4648072 High speed data acquisition utilizing multiplex charge transfer devices
03/03/1987US4647959 Integrated circuit package, and method of forming an integrated circuit package
03/03/1987US4647958 Bipolar transistor construction
03/03/1987US4647957 Latchup-preventing CMOS device
03/03/1987US4647953 Semiconductor laser device and method for manufacturing the same
03/03/1987US4647798 Negative input voltage CMOS circuit
03/03/1987US4647782 Charged particle beam exposure apparatus
03/03/1987US4647523 Production of a resist image
03/03/1987US4647517 Very large scale integration semiconductor components
03/03/1987US4647477 Surface preparation of ceramic substrates for metallization
03/03/1987US4647472 Process of producing a semiconductor device
03/03/1987US4647361 Plates, electrodes, semiconductors, heaters
03/03/1987US4647340 Programmable read only memory using a tungsten fuse
03/03/1987US4647339 Production of semiconductor devices
03/03/1987US4647338 Method of manufacturing a semiconductor device, in which a semiconductor substrate is subjected to a treatment in a reaction gas
03/03/1987US4647266 Wafer coating system
03/03/1987US4647096 Device for gripping electronic parts
03/03/1987US4646958 Fluxless soldering process using a silane atmosphere
03/03/1987US4646678 Thin film deposition
03/03/1987US4646435 Chip carrier alignment device and alignment method
03/03/1987US4646432 Placement mechanism
03/03/1987US4646427 Method of electrically adjusting the zener knee of a lateral polysilicon zener diode
03/03/1987US4646426 Method of producing MOS FET type semiconductor device
03/03/1987US4646425 Method for making a self-aligned CMOS EPROM wherein the EPROM floating gate and CMOS gates are made from one polysilicon layer
03/03/1987US4646424 Liquid crystal display devices
03/03/1987US4646418 Carrier for photomask substrate
03/03/1987CA1218767A1 Head and method for orienting electrical components
03/03/1987CA1218766A1 Self-aligning, self-loading semiconductor clamp
03/03/1987CA1218765A1 Contact material for compression bonded semiconductor devices
03/03/1987CA1218764A2 Semiconductor die-attach technique and composition therefor
03/03/1987CA1218763A1 Focal plane adjusted photomask and methods of projecting images onto photosensitized workpiece surfaces
03/03/1987CA1218762A1 Method of producing a thin silicon-on-insulator layer
03/03/1987CA1218761A1 Method and apparatus for tape automated bonding of integrated circuits
03/03/1987CA1218760A1 Method of fabricating vlsi cmos devices
03/03/1987CA1218567A1 Sensitizing bath for chalcogenide resists
03/03/1987CA1218553A1 Cross-linked polyalkenyl phenol based photoresist compositions
02/1987
02/26/1987WO1987001239A1 Dielectric isolation structure for integrated circuits
02/26/1987WO1987001238A1 Fabricating a semiconductor device with buried oxide
02/26/1987DE3628233A1 Integrated circuit and method of producing the circuit
02/25/1987EP0211716A1 Method for continuously producing micromodules for cards comprising components, continuous strip of micromodules, and micromodule realized by such a method
02/25/1987EP0211667A2 Radiation-sensitive resin composition
02/25/1987EP0211634A2 Method and apparatus for manufacturing semiconductor devices
02/25/1987EP0211632A2 Self-aligned split gate EPROM
02/25/1987EP0211622A1 Mos integrated circuit having a protection circuit which includes divided protection resistors
02/25/1987EP0211620A2 Process and apparatus for sealing semiconductor packages
02/25/1987EP0211609A2 Chemically sensitive semiconductor devices and their production
02/25/1987EP0211590A2 Method and apparatus for optically determining defects in a semiconductor material
02/25/1987EP0211529A1 Method for forming CuInSe2 films
02/25/1987EP0211468A2 Device for producing alternating monomolecular layers
02/25/1987EP0211441A2 Charge coupled device delay line
02/25/1987EP0211412A2 Planar magnetron sputtering apparatus and its magnetic source
02/25/1987EP0211402A2 Process and structure for thin film transistor matrix addressed liquid crystal displays
02/25/1987EP0211401A2 N+ Amorphous silicon thin film transistors for matrix addressed liquid crystal displays
02/25/1987EP0211370A2 Deposition and hardening of titanium gate electrode material for use in inverted thin film field effect transistors
02/25/1987EP0211353A2 Method for the manufacture of a field effect transistor
02/25/1987EP0211318A1 Process for selectively filling contact holes made by etching in insulating layers with electrically conductive materials for the manufacture of high-density integrated semiconductor circuits, and apparatus used for this process
02/25/1987EP0211292A2 Molecular beam epitaxy apparatus
02/25/1987EP0211190A1 CVD plasma reactor
02/25/1987EP0211002A1 Method and apparatus for spot shaping and blanking a focused beam.
02/25/1987CN86105660A Method of manufacturing semiconductor device
02/25/1987CN86105621A Process and apparatus for production od clad sheets
02/25/1987CN86102300A Buried interconnect for silicon
02/24/1987US4646268 Semiconductor bipolar memory device operating in high speed
02/24/1987US4646267 Semiconductor memory
02/24/1987US4646266 Programmable semiconductor structures and methods for using the same
02/24/1987US4646253 Method for imaging electrical barrier layers such as pn-junctions in semiconductors by means of processing particle-beam-induced signals in a scanning corpuscular microscope
02/24/1987US4646130 Semiconductor device for current rectification
02/24/1987US4646128 High-density electronic processing package--structure and fabrication
02/24/1987US4646127 Scrap-less taping system for IC lead-frames
02/24/1987US4646123 Latchup-preventing CMOS device
02/24/1987US4646121 Thyristor with a self-protection function for breakover turn-on failure
02/24/1987US4646119 Charge coupled circuits
02/24/1987US4646118 Semiconductor memory device
02/24/1987US4646116 Boron impurities at layer interface
02/24/1987US4645924 Observation apparatus with selective light diffusion
02/24/1987US4645687 Deposition of III-V semiconductor materials
02/24/1987US4645684 Method for forming deposited film
02/24/1987US4645683 Silicon nitride coating gallium arsenide
02/24/1987US4645564 Method of manufacturing semiconductor device with MIS capacitor
02/24/1987US4645563 Isotropic deposition, anisotropic etching
02/24/1987US4645562 Double layer photoresist technique for side-wall profile control in plasma etching processes
02/24/1987US4645560 Liquid encapsulation method for growing single semiconductor crystals
02/24/1987US4645552 Process for fabricating dimensionally stable interconnect boards
02/24/1987US4645546 With gettering layer on back side
02/24/1987US4645402 Integrated circuit handler automatic unload apparatus
02/24/1987US4645338 Optical system for focus correction for a lithographic tool