Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/1987
09/09/1987EP0235785A2 Semiconductor device
09/09/1987EP0235770A2 Device for the plasma processing of substrates in a high frequency excited plasma discharge
09/09/1987EP0235731A1 Device for supporting work pieces on substrate holders
09/09/1987EP0235706A2 Thyristor having a resistance element coupled to its gate, and method of making the same
09/09/1987EP0235705A2 Self-aligned ultra high-frequency field-effect transistor, and method for manufacturing the same
09/09/1987EP0235682A2 Aluminium nitride sintered body having conductive metallized layer
09/09/1987EP0235570A1 Susceptor
09/09/1987EP0235522A2 Apparatus and method for photochemical vapor deposition
09/09/1987EP0235502A2 Embedded type semiconductor laser and manufacturing method therefor
09/09/1987EP0235428A2 Mounting preparation for optical membrane
09/09/1987EP0235256A1 Gaseous process and apparatus for removing films from substrates.
09/09/1987EP0042420B1 Method for fabricating igfet integrated circuits
09/09/1987CN87100971A Photonuclear doping of semiconductors
09/09/1987CN86108874A Method for forming deposited film
09/08/1987US4692934 X-ray lithography system
09/08/1987US4692904 Semiconductor integrated circuit device
09/08/1987US4692839 Multiple chip interconnection system and package
09/08/1987US4692836 Electrostatic chucks
09/08/1987US4692791 Monolithic IMPATT with stripline leads
09/08/1987US4692789 For controlling large current at high speed
09/08/1987US4692788 Semiconductor device with solder overflow prevention geometry
09/08/1987US4692786 Three layers instead of two reduce defects and short-circuiting; very thin silica, nitride then thicker silica layers
09/08/1987US4692784 Dielectric insulation type semiconductor integrated circuit having low withstand voltage devices and high withstand voltage devices
09/08/1987US4692783 Gate array
09/08/1987US4692781 Semiconductor device with electrostatic discharge protection
09/08/1987US4692780 Junction field effect transistor and method of fabricating
09/08/1987US4692559 Thin GaAs solar cell structures
09/08/1987US4692558 Counteraction of semiconductor impurity effects
09/08/1987US4692349 Selective electroless plating of vias in VLSI devices
09/08/1987US4692348 Low temperature shallow doping technique
09/08/1987US4692345 Method for gettering heavy metal from a silicon plate
09/08/1987US4692344 Method of forming a dielectric film and semiconductor device including said film
09/08/1987US4692223 Forming protective film of silicon dioxide
09/08/1987US4692205 Silicon-containing polyimides as oxygen etch stop and dual dielectric coatings
09/08/1987US4692204 Method of planarizing the surface of a semiconductor device, in which silicon nitride is used as isolating material
09/08/1987US4692194 Method of performing solution growth of a GaAs compound semiconductor crystal layer under control of conductivity type thereof
09/08/1987US4692190 Trimming of metal interconnection layer by selective migration of metal atoms by energy beams
09/08/1987US4692115 Semiconductor wafer furnace door
09/08/1987US4691854 Coatings for ceramic bonding capillaries
09/08/1987US4691831 IC test equipment
09/08/1987US4691722 Bowl for liquid spray processing machine
09/08/1987US4691436 Multilayer; oxides, silicides, nitrides; doping, etching, masking, emitter
09/08/1987US4691434 Method of making electrically conductive regions in monolithic semiconductor devices as applied to a semiconductor device
09/08/1987EP0155942A4 Method of producing contamination-free pellicles.
09/08/1987CA1226681A1 Method of forming recessed oxide isolation with reduced steepness of the bird's neck
09/08/1987CA1226680A1 Process for forming vias on integrated circuits
09/08/1987CA1226674A1 Semiconductor memory cell
09/08/1987CA1226658A1 Fluorinated p-doped microcrystalline semiconductor alloys and method of preparation
09/08/1987CA1226657A1 Photovoltaic device having long term energy conversion stability and method of producing same
09/07/1987EP0155965A4 Wafer.
09/03/1987DE3706278A1 Semiconductor device and method of fabricating it
09/03/1987DE3706274A1 Semiconductor component and method of fabricating it
09/03/1987DE3606471A1 Monolithically integrated input stage of an optical receiver
09/02/1987EP0235047A2 Chip mounter
09/02/1987EP0234984A1 Process for making a crystalline Hg1-xo Cdxo Te ingot
09/02/1987EP0234896A2 Improved micro-electronics devices and methods of manufacturing same
09/02/1987EP0234815A2 Interlayer dielectric process
09/02/1987EP0234772A2 Apparatus for aligning objects
09/02/1987EP0234741A2 Semiconductor memory device
09/02/1987EP0234593A2 Silicon-containing coatings and a method for their preparation
09/02/1987EP0234487A2 Thin film circuit and method for manufacturing the same
09/02/1987EP0234407A1 Method filling interlevel dielectric via or contact holes in multilevel VLSI metallization structures
09/02/1987EP0234387A2 Method of removing photoresist on a semiconductor wafer
09/02/1987EP0234384A1 Three-dimensional single-transistor cell arrangement for dynamic semi-conductor memory and method for manufacturing the same
09/02/1987EP0234327A2 High resolution photoresist of imide containing polymers
09/02/1987EP0234269A2 High voltage semiconductor integrated circuit
09/02/1987EP0234244A2 Method for doping vertical sides and bottoms of recesses
09/02/1987EP0234212A1 Electroplating cell
09/02/1987EP0234152A2 Field-effect transistor and logic-integrated circuit including such a transistor
09/02/1987EP0234094A1 Method for forming deposited film
09/02/1987EP0234054A1 Method of manufacturing a bipolar transistor
09/02/1987EP0233862A1 Gate alignment procedure in fabricating semiconductor devices
09/02/1987EP0035561B1 Improved method of crystallizing amorphous material with a moving energy beam
09/02/1987CN87100973A Process for preparing semiconductor device
09/01/1987US4691287 IC device and a system for testing the same
09/01/1987US4691224 Planar semiconductor device with dual conductivity insulating layers over guard rings
09/01/1987US4691223 Semiconductor device having high breakdown voltage
09/01/1987US4691222 Polishing, grinding of local oxidation areas
09/01/1987US4691221 Monolithically integrated bipolar Darlington circuit
09/01/1987US4691219 Bipolar transistor
09/01/1987US4691218 Charge transfer device
09/01/1987US4691217 Semiconductor integrated circuit device
09/01/1987US4691216 Semiconductor memory device
09/01/1987US4691161 Configurable logic gate array
09/01/1987US4691123 Semiconductor integrated circuit with an internal voltage converter circuit
09/01/1987US4691122 CMOS D-type flip-flop circuits
09/01/1987US4691078 Aluminum circuit to be disconnected and method of cutting the same
09/01/1987US4690999 Molecularly-oriented polyimides based on para-aromatic diamines; films; protective coatings; integrated circuits
09/01/1987US4690962 Blend of acetylenic oligomer with plasticizer and toughness agents
09/01/1987US4690882 Positive acting resist material comprised of novoloc resin derived from phenylphenol
09/01/1987US4690841 Pyrolytic boron nitride article
09/01/1987US4690838 React photoresis polymer with the alkyl metal compound
09/01/1987US4690830 Activation by dehydrogenation or dehalogenation of deposition feedstock and dopant materials useful in the fabrication of hydrogenated amorphous silicon alloys for photovoltaic devices and other semiconductor devices
09/01/1987US4690797 Method for the manufacture of large area silicon crystal bodies for solar cells
09/01/1987US4690746 Interlayer dielectric process
09/01/1987US4690730 Oxide-capped titanium silicide formation
09/01/1987US4690729 Etching silicon; forward sputtering of silica mask for sloped sidewall; preventing grooves
09/01/1987US4690728 Pattern delineation of vertical load resistor
09/01/1987US4690715 Disulfides and phosphines bonding with substrate and noble metals, silver, aluminum
09/01/1987US4690714 Method of making active solid state devices