| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) | 
|---|
| 09/09/1987 | EP0235785A2 Semiconductor device | 
| 09/09/1987 | EP0235770A2 Device for the plasma processing of substrates in a high frequency excited plasma discharge | 
| 09/09/1987 | EP0235731A1 Device for supporting work pieces on substrate holders | 
| 09/09/1987 | EP0235706A2 Thyristor having a resistance element coupled to its gate, and method of making the same | 
| 09/09/1987 | EP0235705A2 Self-aligned ultra high-frequency field-effect transistor, and method for manufacturing the same | 
| 09/09/1987 | EP0235682A2 Aluminium nitride sintered body having conductive metallized layer | 
| 09/09/1987 | EP0235570A1 Susceptor | 
| 09/09/1987 | EP0235522A2 Apparatus and method for photochemical vapor deposition | 
| 09/09/1987 | EP0235502A2 Embedded type semiconductor laser and manufacturing method therefor | 
| 09/09/1987 | EP0235428A2 Mounting preparation for optical membrane | 
| 09/09/1987 | EP0235256A1 Gaseous process and apparatus for removing films from substrates. | 
| 09/09/1987 | EP0042420B1 Method for fabricating igfet integrated circuits | 
| 09/09/1987 | CN87100971A Photonuclear doping of semiconductors | 
| 09/09/1987 | CN86108874A Method for forming deposited film | 
| 09/08/1987 | US4692934 X-ray lithography system | 
| 09/08/1987 | US4692904 Semiconductor integrated circuit device | 
| 09/08/1987 | US4692839 Multiple chip interconnection system and package | 
| 09/08/1987 | US4692836 Electrostatic chucks | 
| 09/08/1987 | US4692791 Monolithic IMPATT with stripline leads | 
| 09/08/1987 | US4692789 For controlling large current at high speed | 
| 09/08/1987 | US4692788 Semiconductor device with solder overflow prevention geometry | 
| 09/08/1987 | US4692786 Three layers instead of two reduce defects and short-circuiting; very thin silica, nitride then thicker silica layers | 
| 09/08/1987 | US4692784 Dielectric insulation type semiconductor integrated circuit having low withstand voltage devices and high withstand voltage devices | 
| 09/08/1987 | US4692783 Gate array | 
| 09/08/1987 | US4692781 Semiconductor device with electrostatic discharge protection | 
| 09/08/1987 | US4692780 Junction field effect transistor and method of fabricating | 
| 09/08/1987 | US4692559 Thin GaAs solar cell structures | 
| 09/08/1987 | US4692558 Counteraction of semiconductor impurity effects | 
| 09/08/1987 | US4692349 Selective electroless plating of vias in VLSI devices | 
| 09/08/1987 | US4692348 Low temperature shallow doping technique | 
| 09/08/1987 | US4692345 Method for gettering heavy metal from a silicon plate | 
| 09/08/1987 | US4692344 Method of forming a dielectric film and semiconductor device including said film | 
| 09/08/1987 | US4692223 Forming protective film of silicon dioxide | 
| 09/08/1987 | US4692205 Silicon-containing polyimides as oxygen etch stop and dual dielectric coatings | 
| 09/08/1987 | US4692204 Method of planarizing the surface of a semiconductor device, in which silicon nitride is used as isolating material | 
| 09/08/1987 | US4692194 Method of performing solution growth of a GaAs compound semiconductor crystal layer under control of conductivity type thereof | 
| 09/08/1987 | US4692190 Trimming of metal interconnection layer by selective migration of metal atoms by energy beams | 
| 09/08/1987 | US4692115 Semiconductor wafer furnace door | 
| 09/08/1987 | US4691854 Coatings for ceramic bonding capillaries | 
| 09/08/1987 | US4691831 IC test equipment | 
| 09/08/1987 | US4691722 Bowl for liquid spray processing machine | 
| 09/08/1987 | US4691436 Multilayer; oxides, silicides, nitrides; doping, etching, masking, emitter | 
| 09/08/1987 | US4691434 Method of making electrically conductive regions in monolithic semiconductor devices as applied to a semiconductor device | 
| 09/08/1987 | EP0155942A4 Method of producing contamination-free pellicles. | 
| 09/08/1987 | CA1226681A1 Method of forming recessed oxide isolation with reduced steepness of the bird's neck | 
| 09/08/1987 | CA1226680A1 Process for forming vias on integrated circuits | 
| 09/08/1987 | CA1226674A1 Semiconductor memory cell | 
| 09/08/1987 | CA1226658A1 Fluorinated p-doped microcrystalline semiconductor alloys and method of preparation | 
| 09/08/1987 | CA1226657A1 Photovoltaic device having long term energy conversion stability and method of producing same | 
| 09/07/1987 | EP0155965A4 Wafer. | 
| 09/03/1987 | DE3706278A1 Semiconductor device and method of fabricating it | 
| 09/03/1987 | DE3706274A1 Semiconductor component and method of fabricating it | 
| 09/03/1987 | DE3606471A1 Monolithically integrated input stage of an optical receiver | 
| 09/02/1987 | EP0235047A2 Chip mounter | 
| 09/02/1987 | EP0234984A1 Process for making a crystalline Hg1-xo Cdxo Te ingot | 
| 09/02/1987 | EP0234896A2 Improved micro-electronics devices and methods of manufacturing same | 
| 09/02/1987 | EP0234815A2 Interlayer dielectric process | 
| 09/02/1987 | EP0234772A2 Apparatus for aligning objects | 
| 09/02/1987 | EP0234741A2 Semiconductor memory device | 
| 09/02/1987 | EP0234593A2 Silicon-containing coatings and a method for their preparation | 
| 09/02/1987 | EP0234487A2 Thin film circuit and method for manufacturing the same | 
| 09/02/1987 | EP0234407A1 Method filling interlevel dielectric via or contact holes in multilevel VLSI metallization structures | 
| 09/02/1987 | EP0234387A2 Method of removing photoresist on a semiconductor wafer | 
| 09/02/1987 | EP0234384A1 Three-dimensional single-transistor cell arrangement for dynamic semi-conductor memory and method for manufacturing the same | 
| 09/02/1987 | EP0234327A2 High resolution photoresist of imide containing polymers | 
| 09/02/1987 | EP0234269A2 High voltage semiconductor integrated circuit | 
| 09/02/1987 | EP0234244A2 Method for doping vertical sides and bottoms of recesses | 
| 09/02/1987 | EP0234212A1 Electroplating cell | 
| 09/02/1987 | EP0234152A2 Field-effect transistor and logic-integrated circuit including such a transistor | 
| 09/02/1987 | EP0234094A1 Method for forming deposited film | 
| 09/02/1987 | EP0234054A1 Method of manufacturing a bipolar transistor | 
| 09/02/1987 | EP0233862A1 Gate alignment procedure in fabricating semiconductor devices | 
| 09/02/1987 | EP0035561B1 Improved method of crystallizing amorphous material with a moving energy beam | 
| 09/02/1987 | CN87100973A Process for preparing semiconductor device | 
| 09/01/1987 | US4691287 IC device and a system for testing the same | 
| 09/01/1987 | US4691224 Planar semiconductor device with dual conductivity insulating layers over guard rings | 
| 09/01/1987 | US4691223 Semiconductor device having high breakdown voltage | 
| 09/01/1987 | US4691222 Polishing, grinding of local oxidation areas | 
| 09/01/1987 | US4691221 Monolithically integrated bipolar Darlington circuit | 
| 09/01/1987 | US4691219 Bipolar transistor | 
| 09/01/1987 | US4691218 Charge transfer device | 
| 09/01/1987 | US4691217 Semiconductor integrated circuit device | 
| 09/01/1987 | US4691216 Semiconductor memory device | 
| 09/01/1987 | US4691161 Configurable logic gate array | 
| 09/01/1987 | US4691123 Semiconductor integrated circuit with an internal voltage converter circuit | 
| 09/01/1987 | US4691122 CMOS D-type flip-flop circuits | 
| 09/01/1987 | US4691078 Aluminum circuit to be disconnected and method of cutting the same | 
| 09/01/1987 | US4690999 Molecularly-oriented polyimides based on para-aromatic diamines; films; protective coatings; integrated circuits | 
| 09/01/1987 | US4690962 Blend of acetylenic oligomer with plasticizer and toughness agents | 
| 09/01/1987 | US4690882 Positive acting resist material comprised of novoloc resin derived from phenylphenol | 
| 09/01/1987 | US4690841 Pyrolytic boron nitride article | 
| 09/01/1987 | US4690838 React photoresis polymer with the alkyl metal compound | 
| 09/01/1987 | US4690830 Activation by dehydrogenation or dehalogenation of deposition feedstock and dopant materials useful in the fabrication of hydrogenated amorphous silicon alloys for photovoltaic devices and other semiconductor devices | 
| 09/01/1987 | US4690797 Method for the manufacture of large area silicon crystal bodies for solar cells | 
| 09/01/1987 | US4690746 Interlayer dielectric process | 
| 09/01/1987 | US4690730 Oxide-capped titanium silicide formation | 
| 09/01/1987 | US4690729 Etching silicon; forward sputtering of silica mask for sloped sidewall; preventing grooves | 
| 09/01/1987 | US4690728 Pattern delineation of vertical load resistor | 
| 09/01/1987 | US4690715 Disulfides and phosphines bonding with substrate and noble metals, silver, aluminum | 
| 09/01/1987 | US4690714 Method of making active solid state devices |