| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 04/21/1987 | US4660068 Substrate structure of semiconductor device and method of manufacturing the same |
| 04/21/1987 | US4660067 Complementary MOS integrated circuit having means for preventing latch-up phenomenon |
| 04/21/1987 | US4660064 Charge coupled device having a floating diffusion region and a precharge diffusion region which are aligned so as to increase the output gain |
| 04/21/1987 | US4660062 Insulated gate transistor having reduced channel length |
| 04/21/1987 | US4659650 Temperature resistance |
| 04/21/1987 | US4659449 Apparatus for carrying out dry etching |
| 04/21/1987 | US4659428 Method of manufacturing a semiconductor device and semiconductor device manufactured by means of the method |
| 04/21/1987 | US4659427 Heating tungsten alloy, coating with dielectric, then etching |
| 04/21/1987 | US4659426 Plasma etching of refractory metals and their silicides |
| 04/21/1987 | US4659423 Uniform axial oxygen concentration in crystal |
| 04/21/1987 | US4659422 Process for producing monocrystalline layer on insulator |
| 04/21/1987 | US4659401 Multilayer |
| 04/21/1987 | US4659400 Treating silicon substrate under controlled oxygen atmosphere |
| 04/21/1987 | US4659392 Successive amorphizing and annealing |
| 04/21/1987 | US4659378 Thin layer alloy of cobalt, iron, and germanium |
| 04/21/1987 | US4659281 Loading and unloading system for piece part carrier |
| 04/21/1987 | US4659228 Aligning apparatus |
| 04/21/1987 | US4659227 Alignment apparatus |
| 04/21/1987 | US4659225 Pattern exposure apparatus with distance measuring system |
| 04/21/1987 | US4659220 Optical inspection system for semiconductor wafers |
| 04/21/1987 | US4659094 Centering/positioning apparatus for wafer and vacuum chuck |
| 04/21/1987 | US4659006 Method of bonding a die to a substrate |
| 04/21/1987 | US4658960 Color coding cassette |
| 04/21/1987 | US4658513 Continuous vapor phase processing machine |
| 04/21/1987 | US4658496 Method for manufacturing VLSI MOS-transistor circuits |
| 04/21/1987 | US4658495 Method of forming a semiconductor structure |
| 04/21/1987 | CA1220879A1 Method and apparatus for surface diagnostics |
| 04/21/1987 | CA1220877A1 Method of making contact to semiconductor device |
| 04/21/1987 | CA1220876A1 High electron mobility semiconductor device employing selectively doped heterojunction |
| 04/21/1987 | CA1220875A1 Semiconductor device comprising a combined bipolar- field effect transistor |
| 04/21/1987 | CA1220874A1 Integrated circuit with stress isolated hall element |
| 04/21/1987 | CA1220861A1 Semiconductor memory cell |
| 04/21/1987 | CA1220634A1 Aqueous silica compositions for polishing silicon wafers |
| 04/16/1987 | DE3624566A1 Mask for X-ray lithography |
| 04/16/1987 | DE3536432A1 Contactless holding device for semiconductor discs |
| 04/15/1987 | EP0218529A2 Distributed field effect transistor structure |
| 04/15/1987 | EP0218518A1 Method of producing a strip-buried semiconductor laser with or without diffraction gratings, and a laser obtained by this method |
| 04/15/1987 | EP0218438A2 Apparatus for mounting a semiconductor chip and making electrical connections thereto |
| 04/15/1987 | EP0218437A2 A microelectronics apparatus and method of interconnecting wiring planes |
| 04/15/1987 | EP0218408A2 Process for forming lightly-doped-grain (LDD) structure in integrated circuits |
| 04/15/1987 | EP0218342A2 Memory cells for integrated circuits |
| 04/15/1987 | EP0218319A1 Heterojunction bipolar integrated circuit |
| 04/15/1987 | EP0218177A2 A process for producing a high purity oxide layer on a semiconductor substrate |
| 04/15/1987 | EP0218117A2 Cyclosilazane polymers as dielectric films in integrated circuit fabrication technology |
| 04/15/1987 | EP0218114A2 A film and a process for its production |
| 04/15/1987 | EP0218084A2 Semiconductor device having a MOS transistor and method of manufacturing the same |
| 04/15/1987 | EP0218069A1 Laser light welding process |
| 04/15/1987 | EP0218039A1 Method for transferring the finest photoresist structures |
| 04/15/1987 | EP0188432A4 Conveyorized microwave heating system. |
| 04/14/1987 | US4658378 Polysilicon resistor with low thermal activation energy |
| 04/14/1987 | US4658377 Dynamic memory array with segmented bit lines |
| 04/14/1987 | US4658330 Mounting a hybrid circuit to a circuit board |
| 04/14/1987 | US4658283 Semiconductor integrated circuit device having a carrier trapping trench arrangement |
| 04/14/1987 | US4658160 Common gate MOS differential sense amplifier |
| 04/14/1987 | US4657845 Positive tone oxygen plasma developable photoresist |
| 04/14/1987 | US4657805 Dust cover superior in transparency for photomask reticle use and process for producing the same |
| 04/14/1987 | US4657778 Electroless deposition of a copper seed layer, resist layer, copper electroplated, screen printed then air fired dielectric |
| 04/14/1987 | US4657777 Vapor phase decomposition of a silicon halide with silane compound |
| 04/14/1987 | US4657775 Method for production of silicon thin film piezoresistive devices |
| 04/14/1987 | US4657630 Method for manufacturing semiconductor device having isolating groove |
| 04/14/1987 | US4657628 Forming titanium nitride over the field oxide area while forming titanium silicide by heating in nitrogen |
| 04/14/1987 | US4657627 Carbon fiber substrate pretreatment for manufacturing crack-free, large-surface silicon crystal bodies for solar cells |
| 04/14/1987 | US4657621 Semiconductor processing |
| 04/14/1987 | US4657620 Automated single slice powered load lock plasma reactor |
| 04/14/1987 | US4657619 Semiconductor production |
| 04/14/1987 | US4657618 Powered load lock electrode/substrate assembly including robot arm, optimized for plasma process uniformity and rate |
| 04/14/1987 | US4657603 Multilayer-substrate, doped amorphous germanium, then gallium arsenide |
| 04/14/1987 | US4657602 Integrated complementary transistor circuit at an intermediate stage of manufacturing |
| 04/14/1987 | US4657470 Robotic end effector |
| 04/14/1987 | US4657379 Photomask and exposure apparatus using the same |
| 04/14/1987 | US4657170 Process for bonding an electric component to a block of connecting tags and a machine and tape for carrying out this process |
| 04/14/1987 | US4656963 Method and apparatus for forming an extremely thin film on the surface of an object |
| 04/14/1987 | US4656732 Integrated circuit fabrication process |
| 04/14/1987 | US4656731 Method for fabricating stacked CMOS transistors with a self-aligned silicide process |
| 04/14/1987 | US4656730 Reduce the size of transition zones |
| 04/14/1987 | US4656729 Plasma-enhanced or low-pressure chemical vapor deposition |
| 04/14/1987 | CA1220562A1 Pattern recessed by anisotropic reactive ion etching and dense multilayer metallization integrated circuits produced thereby |
| 04/14/1987 | CA1220561A1 Semiconductor device |
| 04/14/1987 | CA1220560A1 Semiconductor device |
| 04/14/1987 | CA1220559A1 Noncontact dynamic tester for integrated circuits |
| 04/14/1987 | CA1220382A1 Single vapor system for soldering, fusing or brazing |
| 04/09/1987 | WO1987002180A1 A method of producing isolated silicon structures |
| 04/09/1987 | WO1987002179A1 Method of fabricating a tapered via hole in polyimide |
| 04/09/1987 | WO1987002178A1 Optical exposure apparatus |
| 04/08/1987 | EP0217780A2 Anisotropic rectifier and method for fabricating same |
| 04/08/1987 | EP0217678A2 Chip carrier alignment device and alignment method |
| 04/08/1987 | EP0217584A2 Highly thermoconductive ceramic substrate |
| 04/08/1987 | EP0217525A1 Electrostatic discharge protection devices for integrated circuits |
| 04/08/1987 | EP0217463A1 Method of determining an exposure dose of a photosensitive lacquer layer |
| 04/08/1987 | EP0217406A2 Thin-film transistor and method of fabricating the same |
| 04/08/1987 | EP0217326A2 Semiconductor device with a high breakdown voltage |
| 04/08/1987 | EP0217288A2 Substrate structure for a composite semiconductor device |
| 04/08/1987 | EP0217179A2 A method for laser crystallization of semiconductor islands on transparent substrates |
| 04/08/1987 | EP0217171A2 Field-effect transistor having a barrier layer |
| 04/08/1987 | EP0217158A2 Process and apparatus for making silicon bars |
| 04/08/1987 | EP0217118A2 Method for automatically separating useful and disturbing information into microscopic images, especially of wafer surfaces, for the automatic recognition of wafer identification marks |
| 04/08/1987 | EP0217082A1 Lead frame and method for producing an electronic element having such a lead frame |
| 04/08/1987 | EP0217071A1 Process for producing micromechanical structures |
| 04/08/1987 | EP0217065A1 Integrated circuit of the complementary technique having a substrate bias generator |
| 04/08/1987 | EP0216954A1 Method of aluminium doping a semiconductor device |