Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/1987
08/18/1987US4688069 Isolation for high density integrated circuits
08/18/1987US4688065 MOS type semiconductor device
08/18/1987US4688064 Dynamic memory cell and method for manufacturing the same
08/18/1987US4688061 Mobility-modulation field-effect transistor
08/18/1987US4687949 Signal transmission circuit in a semiconductor integrated circuit
08/18/1987US4687895 Conveyorized microwave heating system
08/18/1987US4687693 Bonding to dicing frame for semiconductor wafers
08/18/1987US4687682 Integrated circuits; semiconductors
08/18/1987US4687552 Rhodium capped gold IC metallization
08/18/1987US4687544 Method and apparatus for dry processing of substrates
08/18/1987US4687543 Selective plasma etching during formation of integrated circuitry
08/18/1987US4687542 Sealed load lock and wafer carrier
08/18/1987US4687541 Dual deposition single level lift-off process
08/18/1987US4687539 Dye lasers
08/18/1987US4687537 Thin metal layer deposited between substrate and silicide forming layer
08/18/1987US4687322 Projection optical apparatus
08/18/1987US4687242 Apparatus for handling semiconductor wafers during fabrication of integrated circuits
08/18/1987US4687097 Wafer processing cassette
08/18/1987US4686763 Method of making a planar polysilicon bipolar device
08/18/1987US4686762 Arsenic, phosphorus, boron doping
08/18/1987US4686759 Method of manufacturing a semiconductor device
08/18/1987US4686758 Three-dimensional CMOS using selective epitaxial growth
08/18/1987CA1225571A1 Growth of oriented single crystal semiconductor on insulator
08/13/1987WO1987004860A1 Partially dielectrically isolated semiconductor devices
08/13/1987WO1987004858A1 Method for producing integrated circuit interconnects
08/13/1987WO1987004857A1 Double layer photoresist process for well self-align and ion implantation masking
08/13/1987WO1987004856A1 Process for forming isolation trenches in a semiconductor substrate
08/13/1987WO1987004854A2 Liquid epitaxial process for producing three-dimensional semiconductor structures
08/13/1987WO1987004853A1 Installation for floating transport and processing of wafers
08/13/1987WO1987004810A1 Method for developing poly(methacrylic anhydride) resists
08/13/1987WO1987004791A1 Automatic printed circuit board imaging system
08/13/1987DE3604260A1 Fluessigkeitsepitaxieverfahren Fluessigkeitsepitaxieverfahren
08/12/1987EP0232117A2 Semiconductor variable capacitance element
08/12/1987EP0232108A2 Process for manufacturing bumped tape for tape automated bonding and the product produced thereby.
08/12/1987EP0232082A2 Semiconductor deposition method and device
08/12/1987EP0232044A2 Integrated circuit chip having a plurality of integrated circuit cells
08/12/1987EP0231977A1 Optical imaging arrangement comprising an opto-electric focussing-error detection system
08/12/1987EP0231937A2 An arrangement of a semiconductor device for use in a card
08/12/1987EP0231922A2 Electron beam and X-ray resists
08/12/1987EP0231916A2 X-ray exposure masks
08/12/1987EP0231821A2 A semiconductor integrated circuit having wirings for power supply
08/12/1987EP0231811A2 Method for manufacturing integrated electronic devices, in particular high voltage P-channel MOS transistors
08/12/1987EP0231794A2 Method and apparatus for forming metal silicide/silicon structures
08/12/1987EP0231791A2 Resonant stylus support
08/12/1987EP0231740A2 A polysilicon self-aligned bipolar device and process of manufacturing same
08/12/1987EP0231738A2 Thermally stable low resistance contact
08/12/1987EP0231703A1 Process for manufacturing an electrical resistance by means of doping a semiconductive material.
08/12/1987EP0231688A1 Method of realizing a charge transfer device, and device manufactured thereby
08/12/1987EP0231660A2 Method for producing an electronic device having a multi-layer structure
08/12/1987EP0231658A1 Molecular beam epitaxial apparatus
08/12/1987EP0231656A2 Silicon semiconductor device
08/12/1987EP0231583A2 CMOS programmable logic array
08/12/1987EP0231544A1 Reactor chamber for epitaxial growth in the gaseous phase of semiconductor materials
08/12/1987EP0231543A1 Anti-pollution device for eliminating toxic gases used in the manufacture of semi-conductor materials of group III-V
08/12/1987EP0231531A2 Method and apparatus for tuning microwave transmission windows
08/12/1987EP0231507A2 An electrically alterable non-volatile memory device
08/12/1987EP0231434A1 Integrated circuit unit for the production of integrated circuits
08/12/1987EP0231326A1 Non-volatile semiconductor memories.
08/12/1987EP0231271A1 Three-level interconnection scheme for integrated circuits
08/12/1987EP0231264A1 Method and apparatus for nondestructively determining the characteristics of a multilayer thin film structure.
08/12/1987EP0231262A1 Photochemical vapor deposition process for depositing oxide layers.
08/12/1987EP0231242A1 Methods of producing layered structures
08/12/1987EP0231241A1 Method for producing a heterostructure device
08/12/1987EP0231207A1 Contrast enhancement layer
08/12/1987EP0231206A1 Dielectric breakdown prevention technique
08/12/1987EP0231204A1 Back bias generator.
08/12/1987EP0177563A4 Robot gripper for integrated circuit leadframes.
08/12/1987EP0137819B1 Articulated arm transfer device
08/12/1987EP0077825B1 Method of forming wide bandgap region within multilayer semiconductors
08/12/1987EP0067840B1 Method of fabricating a solid state electrooptical device having a transparent metal oxide electrode
08/12/1987CN86108693A Thin-film transistor
08/12/1987CN86107982A Plasma enhanced chemical vapor deposited vertical resistor
08/11/1987US4686637 Apparatus and method for lead integrity determination for dip devices
08/11/1987US4686606 Device for cooling integrated circuit chip
08/11/1987US4686602 Protective circuit arrangement for protecting semiconductor components
08/11/1987US4686559 Topside sealing of integrated circuit device
08/11/1987US4686558 CMOS memory cell having an electrically floating storage gate
08/11/1987US4686553 Low capacitance amorphous silicon field effect transistor structure
08/11/1987US4686373 Infrared imager
08/11/1987US4686280 Positive type resist material with trimethylsilylnitrile
08/11/1987US4686173 Etching method employing positive photoresist film
08/11/1987US4686162 For electromagnetic radiation
08/11/1987US4686091 Apparatus for manufacturing compound semiconductor single crystal
08/11/1987US4686002 Stabilized choline base solutions
08/11/1987US4686001 Selective etching
08/11/1987US4686000 Integrated circuits
08/11/1987US4685999 Apparatus for plasma assisted etching
08/11/1987US4685998 Conductive bonds top of dielectric layer; microcomputer chip
08/11/1987US4685996 Ionizers, microscopes, electron guns, integrated circuits
08/11/1987US4685979 Method of manufacturing a group II-VI compound semiconductor device having a pn junction
08/11/1987US4685976 Multi-layer semiconductor processing with scavenging between layers by excimer laser
08/11/1987US4685853 Device for loading components into a centrifuge to be tested
08/11/1987US4685852 Process apparatus and method and elevator mechanism for use in connection therewith
08/11/1987US4685807 Optical microlithography apparatus with a local alignment system
08/11/1987US4685777 Reflection and refraction optical system
08/11/1987US4685775 Light beam positioning apparatus
08/11/1987US4685631 Apparatus for feeding bonding wire
08/11/1987US4685551 Delivery apparatus
08/11/1987US4685206 Positioning apparatus for a circular substrate
08/11/1987US4685203 Hybrid integrated circuit substrate and method of manufacturing the same