Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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03/17/1987 | US4650543 Multilayer, bonding strength, reactive etching, ion milling |
03/17/1987 | US4650335 Comparison type dimension measuring method and apparatus using a laser beam in a microscope system |
03/17/1987 | US4650107 Method for the bubble-free joining of a large-area semiconductor component by means of soldering to a component part serving as substrate |
03/17/1987 | US4650064 Substrate rotation method and apparatus |
03/17/1987 | US4649857 Thin-film forming device |
03/17/1987 | US4649830 Clean tunnel conveying structure |
03/17/1987 | US4649638 Construction of short-length electrode in semiconductor device |
03/17/1987 | US4649630 Process for dielectrically isolated semiconductor structure |
03/17/1987 | US4649629 Method of late programming a read only memory |
03/17/1987 | US4649627 Method of fabricating silicon-on-insulator transistors with a shared element |
03/17/1987 | US4649626 Semiconductor on insulator edge doping process using an expanded mask |
03/17/1987 | US4649625 Silicon substrate with oxide and nitride layers |
03/17/1987 | US4649624 Fabrication of semiconductor devices in recrystallized semiconductor films on electrooptic substrates |
03/17/1987 | CA1219383A1 Method of burnishing malleable films on semiconductor substrates |
03/17/1987 | CA1219382A1 Power semiconductor device with main current section and emulation current section |
03/17/1987 | CA1219380A1 Semiconductor integrated circuit and a method for designing circuit pattern therefor |
03/17/1987 | CA1219379A1 Fabrication process- for a dielectric isolated complementary ic |
03/17/1987 | CA1219240A1 Method of making amorphous semiconductor alloys and devices using microwave energy |
03/17/1987 | CA1219180A1 Method of providing a metal layer on a substrate |
03/17/1987 | CA1219104A1 Copper alloys for suppressing growth of cu-al intermetallic compounds |
03/12/1987 | WO1987001514A1 Thin semiconductor stuctures |
03/12/1987 | WO1987001511A1 Non-volatile semiconductor memories |
03/12/1987 | WO1987001509A1 Manufacture of a hybrid electronic or optical device |
03/12/1987 | WO1987001508A1 Gaseous process and apparatus for removing films from substrates |
03/12/1987 | WO1987001507A1 Gate alignment procedure in fabricating semiconductor devices |
03/12/1987 | WO1987001383A1 A method of bonding two substrates using arylcyclobutene monomeric compositions |
03/12/1987 | WO1987001361A1 Manipulator for standard mechanical interface apparatus |
03/11/1987 | EP0214049A1 Semiconductor chip power supply monitor circuit arrangement |
03/11/1987 | EP0213983A2 Method of late programming a read only memory |
03/11/1987 | EP0213974A1 Micromodule with embedded contacts and a card containing circuits comprising such a micromodule |
03/11/1987 | EP0213972A1 Method for shifting the threshold voltage of DMOS transistors |
03/11/1987 | EP0213951A2 Continuous vapour phase processing machine |
03/11/1987 | EP0213922A2 Planar magnetron sputtering device with combined circumferential and radial movement of magnetic fields |
03/11/1987 | EP0213920A2 Method of drawing a pattern on wafer with charged beam |
03/11/1987 | EP0213919A2 Semiconductor devices and method of manufacturing same by ion implantation |
03/11/1987 | EP0213871A1 Strobo electron beam apparatus |
03/11/1987 | EP0213835A2 Semiconductor memory device |
03/11/1987 | EP0213774A1 Anisotropically electrically conductive article |
03/11/1987 | EP0213764A2 Preparation of fragile sheet-like devices, such as lead frames |
03/11/1987 | EP0213664A1 Beam of charged particles divided up into thin component beams |
03/11/1987 | EP0213608A2 Semiconductor switching device |
03/11/1987 | EP0213575A2 Method of manufacturing a semiconductor device employing a film carrier tape |
03/11/1987 | EP0213488A2 Process for manufacturing gallium arsenide monolithic microwave integrated circuits |
03/11/1987 | EP0213453A2 Noise reduction during testing of integrated circuit chips |
03/11/1987 | EP0213438A2 Method and arrangement for operating a scanning microscope |
03/11/1987 | EP0213425A2 Complementary integrated circuit with a substrate bias voltage generator and a Schottky diode |
03/11/1987 | EP0213409A1 Structure for the quality testing of a semiconductor substrate |
03/11/1987 | EP0213352A2 Method of manufacturing a lateral transistor |
03/11/1987 | EP0213299A2 Method for manufacturing a semiconductor device having an element isolation area |
03/11/1987 | EP0213197A1 A method in the manufacture of integrated circuits. |
03/11/1987 | EP0213155A1 Eprom with ultraviolet radiation transparent silicon nitride passivation layer |
03/11/1987 | EP0119225B1 Photoluminescence method of testing double heterostructure wafers |
03/11/1987 | EP0096027B1 Branched labyrinth wafer scale integrated circuit |
03/11/1987 | EP0079931B1 Focused ion beam microfabrication column |
03/11/1987 | EP0063578B1 Process for forming a polysilicon gate integrated circuit device |
03/10/1987 | US4649554 Charge transfer device having a subdivided channel output region |
03/10/1987 | US4649460 Single-in-line integrated electronic component |
03/10/1987 | US4649418 Data card and method of manufacturing same |
03/10/1987 | US4649412 Read only semiconductor memory device with polysilicon drain extensions |
03/10/1987 | US4649408 Charge storage type semiconductor device and method for producing same |
03/10/1987 | US4649407 Charge coupled device for transferring electric charge |
03/10/1987 | US4649316 Ion beam species filter and blanker |
03/10/1987 | US4649289 Circuit for maintaining the potential of a node of a MOS dynamic circuit |
03/10/1987 | US4649261 Apparatus for heating semiconductor wafers in order to achieve annealing, silicide formation, reflow of glass passivation layers, etc. |
03/10/1987 | US4649125 Peroxide |
03/10/1987 | US4649099 Acetalized polyvinyl alcohol |
03/10/1987 | US4649083 Aluminum alloy and oxide layer |
03/10/1987 | US4649070 Ceramic with conductive thin film |
03/10/1987 | US4649059 Photoionization technique for growth of metallic films |
03/10/1987 | US4648941 Process for forming two MOS structures with different juxtaposed dielectrics and different dopings |
03/10/1987 | US4648940 Epitaxial, dopes, multilayer, photolithography, etching |
03/10/1987 | US4648939 Anisotropic etching |
03/10/1987 | US4648938 Composition/bandgap selective dry photochemical etching of semiconductor materials |
03/10/1987 | US4648937 Semiconductors |
03/10/1987 | US4648936 Dopant type and/or concentration selective dry photochemical etching of semiconductor materials |
03/10/1987 | US4648917 Mercury cadmium, tellurium intermetallic semiconductor |
03/10/1987 | US4648909 Semiconductors |
03/10/1987 | US4648725 Guide mechanism |
03/10/1987 | US4648708 Pattern transfer apparatus |
03/10/1987 | US4648348 Plasma CVD apparatus |
03/10/1987 | US4648179 Process of making interconnection structure for semiconductor device |
03/10/1987 | US4648175 Use of selectively deposited tungsten for contact formation and shunting metallization |
03/10/1987 | US4648174 Method of making high breakdown voltage semiconductor device |
03/10/1987 | US4648173 Fabrication of stud-defined integrated circuit structure |
03/10/1987 | CA1218956A1 Process for plasma etching polysilicon to produce rounded profile islands |
03/05/1987 | DE3624096A1 Method for producing a semiconductor element to which contact is made on both sides |
03/05/1987 | DE3530999A1 Process for fabricating semiconductor arrangements |
03/04/1987 | EP0213010A1 Method of the preparation of a ceramic cordierite powder sinterable at low temperatures, powder obtainable by the method and ceramic composition obtained by sintering the powder |
03/04/1987 | EP0212997A2 Semiconductor integrated circuit adapted to carry out a test operation |
03/04/1987 | EP0212994A2 Method and apparatus for packaging semiconductor device and the like |
03/04/1987 | EP0212924A2 Plasma processing apparatus |
03/04/1987 | EP0212910A2 Method and apparatus for the chemical vapour deposition of III-V semiconductors utilizing organometallic and elemental pnictide sources |
03/04/1987 | EP0212890A2 Preparation of fragile sheet-like devices, such as lead frames |
03/04/1987 | EP0212766A2 High speed data acquisition utilizing multiplex charge transfer devices |
03/04/1987 | EP0212762A1 Device for the production of alternating monomolecular layers |
03/04/1987 | EP0212713A2 Process for manufacturing a mask for use in X-ray photolithography using a monolithic support and resulting structure |
03/04/1987 | EP0212691A1 Low temperature chemical vapor deposition of silicon dioxide films |
03/04/1987 | EP0212585A2 Selective and anisotropic dry etching |
03/04/1987 | EP0212520A2 Data processing method |
03/04/1987 | EP0212482A2 Process for obtaining negative images from positive photoresists |