Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/1987
03/17/1987US4650543 Multilayer, bonding strength, reactive etching, ion milling
03/17/1987US4650335 Comparison type dimension measuring method and apparatus using a laser beam in a microscope system
03/17/1987US4650107 Method for the bubble-free joining of a large-area semiconductor component by means of soldering to a component part serving as substrate
03/17/1987US4650064 Substrate rotation method and apparatus
03/17/1987US4649857 Thin-film forming device
03/17/1987US4649830 Clean tunnel conveying structure
03/17/1987US4649638 Construction of short-length electrode in semiconductor device
03/17/1987US4649630 Process for dielectrically isolated semiconductor structure
03/17/1987US4649629 Method of late programming a read only memory
03/17/1987US4649627 Method of fabricating silicon-on-insulator transistors with a shared element
03/17/1987US4649626 Semiconductor on insulator edge doping process using an expanded mask
03/17/1987US4649625 Silicon substrate with oxide and nitride layers
03/17/1987US4649624 Fabrication of semiconductor devices in recrystallized semiconductor films on electrooptic substrates
03/17/1987CA1219383A1 Method of burnishing malleable films on semiconductor substrates
03/17/1987CA1219382A1 Power semiconductor device with main current section and emulation current section
03/17/1987CA1219380A1 Semiconductor integrated circuit and a method for designing circuit pattern therefor
03/17/1987CA1219379A1 Fabrication process- for a dielectric isolated complementary ic
03/17/1987CA1219240A1 Method of making amorphous semiconductor alloys and devices using microwave energy
03/17/1987CA1219180A1 Method of providing a metal layer on a substrate
03/17/1987CA1219104A1 Copper alloys for suppressing growth of cu-al intermetallic compounds
03/12/1987WO1987001514A1 Thin semiconductor stuctures
03/12/1987WO1987001511A1 Non-volatile semiconductor memories
03/12/1987WO1987001509A1 Manufacture of a hybrid electronic or optical device
03/12/1987WO1987001508A1 Gaseous process and apparatus for removing films from substrates
03/12/1987WO1987001507A1 Gate alignment procedure in fabricating semiconductor devices
03/12/1987WO1987001383A1 A method of bonding two substrates using arylcyclobutene monomeric compositions
03/12/1987WO1987001361A1 Manipulator for standard mechanical interface apparatus
03/11/1987EP0214049A1 Semiconductor chip power supply monitor circuit arrangement
03/11/1987EP0213983A2 Method of late programming a read only memory
03/11/1987EP0213974A1 Micromodule with embedded contacts and a card containing circuits comprising such a micromodule
03/11/1987EP0213972A1 Method for shifting the threshold voltage of DMOS transistors
03/11/1987EP0213951A2 Continuous vapour phase processing machine
03/11/1987EP0213922A2 Planar magnetron sputtering device with combined circumferential and radial movement of magnetic fields
03/11/1987EP0213920A2 Method of drawing a pattern on wafer with charged beam
03/11/1987EP0213919A2 Semiconductor devices and method of manufacturing same by ion implantation
03/11/1987EP0213871A1 Strobo electron beam apparatus
03/11/1987EP0213835A2 Semiconductor memory device
03/11/1987EP0213774A1 Anisotropically electrically conductive article
03/11/1987EP0213764A2 Preparation of fragile sheet-like devices, such as lead frames
03/11/1987EP0213664A1 Beam of charged particles divided up into thin component beams
03/11/1987EP0213608A2 Semiconductor switching device
03/11/1987EP0213575A2 Method of manufacturing a semiconductor device employing a film carrier tape
03/11/1987EP0213488A2 Process for manufacturing gallium arsenide monolithic microwave integrated circuits
03/11/1987EP0213453A2 Noise reduction during testing of integrated circuit chips
03/11/1987EP0213438A2 Method and arrangement for operating a scanning microscope
03/11/1987EP0213425A2 Complementary integrated circuit with a substrate bias voltage generator and a Schottky diode
03/11/1987EP0213409A1 Structure for the quality testing of a semiconductor substrate
03/11/1987EP0213352A2 Method of manufacturing a lateral transistor
03/11/1987EP0213299A2 Method for manufacturing a semiconductor device having an element isolation area
03/11/1987EP0213197A1 A method in the manufacture of integrated circuits.
03/11/1987EP0213155A1 Eprom with ultraviolet radiation transparent silicon nitride passivation layer
03/11/1987EP0119225B1 Photoluminescence method of testing double heterostructure wafers
03/11/1987EP0096027B1 Branched labyrinth wafer scale integrated circuit
03/11/1987EP0079931B1 Focused ion beam microfabrication column
03/11/1987EP0063578B1 Process for forming a polysilicon gate integrated circuit device
03/10/1987US4649554 Charge transfer device having a subdivided channel output region
03/10/1987US4649460 Single-in-line integrated electronic component
03/10/1987US4649418 Data card and method of manufacturing same
03/10/1987US4649412 Read only semiconductor memory device with polysilicon drain extensions
03/10/1987US4649408 Charge storage type semiconductor device and method for producing same
03/10/1987US4649407 Charge coupled device for transferring electric charge
03/10/1987US4649316 Ion beam species filter and blanker
03/10/1987US4649289 Circuit for maintaining the potential of a node of a MOS dynamic circuit
03/10/1987US4649261 Apparatus for heating semiconductor wafers in order to achieve annealing, silicide formation, reflow of glass passivation layers, etc.
03/10/1987US4649125 Peroxide
03/10/1987US4649099 Acetalized polyvinyl alcohol
03/10/1987US4649083 Aluminum alloy and oxide layer
03/10/1987US4649070 Ceramic with conductive thin film
03/10/1987US4649059 Photoionization technique for growth of metallic films
03/10/1987US4648941 Process for forming two MOS structures with different juxtaposed dielectrics and different dopings
03/10/1987US4648940 Epitaxial, dopes, multilayer, photolithography, etching
03/10/1987US4648939 Anisotropic etching
03/10/1987US4648938 Composition/bandgap selective dry photochemical etching of semiconductor materials
03/10/1987US4648937 Semiconductors
03/10/1987US4648936 Dopant type and/or concentration selective dry photochemical etching of semiconductor materials
03/10/1987US4648917 Mercury cadmium, tellurium intermetallic semiconductor
03/10/1987US4648909 Semiconductors
03/10/1987US4648725 Guide mechanism
03/10/1987US4648708 Pattern transfer apparatus
03/10/1987US4648348 Plasma CVD apparatus
03/10/1987US4648179 Process of making interconnection structure for semiconductor device
03/10/1987US4648175 Use of selectively deposited tungsten for contact formation and shunting metallization
03/10/1987US4648174 Method of making high breakdown voltage semiconductor device
03/10/1987US4648173 Fabrication of stud-defined integrated circuit structure
03/10/1987CA1218956A1 Process for plasma etching polysilicon to produce rounded profile islands
03/05/1987DE3624096A1 Method for producing a semiconductor element to which contact is made on both sides
03/05/1987DE3530999A1 Process for fabricating semiconductor arrangements
03/04/1987EP0213010A1 Method of the preparation of a ceramic cordierite powder sinterable at low temperatures, powder obtainable by the method and ceramic composition obtained by sintering the powder
03/04/1987EP0212997A2 Semiconductor integrated circuit adapted to carry out a test operation
03/04/1987EP0212994A2 Method and apparatus for packaging semiconductor device and the like
03/04/1987EP0212924A2 Plasma processing apparatus
03/04/1987EP0212910A2 Method and apparatus for the chemical vapour deposition of III-V semiconductors utilizing organometallic and elemental pnictide sources
03/04/1987EP0212890A2 Preparation of fragile sheet-like devices, such as lead frames
03/04/1987EP0212766A2 High speed data acquisition utilizing multiplex charge transfer devices
03/04/1987EP0212762A1 Device for the production of alternating monomolecular layers
03/04/1987EP0212713A2 Process for manufacturing a mask for use in X-ray photolithography using a monolithic support and resulting structure
03/04/1987EP0212691A1 Low temperature chemical vapor deposition of silicon dioxide films
03/04/1987EP0212585A2 Selective and anisotropic dry etching
03/04/1987EP0212520A2 Data processing method
03/04/1987EP0212482A2 Process for obtaining negative images from positive photoresists