| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 05/12/1987 | US4664937 Method of depositing semiconductor films by free radical generation |
| 05/12/1987 | US4664935 Thin film deposition apparatus and method |
| 05/12/1987 | US4664890 Glow-discharge decomposition apparatus |
| 05/12/1987 | US4664793 Pure water manufacturing apparatus |
| 05/12/1987 | US4664773 Air-to-fuel ratio sensor for an automobile |
| 05/12/1987 | US4664769 Photoelectric enhanced plasma glow discharge system and method including radiation means |
| 05/12/1987 | US4664762 Method for etching a silicon substrate |
| 05/12/1987 | US4664748 Photoresists incorporating microparticle masks |
| 05/12/1987 | US4664747 Surface processing apparatus utilizing local thermal equilibrium plasma and method of using same |
| 05/12/1987 | US4664746 Creating or removing a conductive layer on an insulator over a semiconductor |
| 05/12/1987 | US4664742 Method for growing single crystals of dissociative compounds |
| 05/12/1987 | US4664739 Removal of semiconductor wafers from dicing film |
| 05/12/1987 | US4664679 Aqueous dispersion of silicic anhydride and abrasive composition comprising the dispersion |
| 05/12/1987 | US4664578 Semiconductor substrate transport system |
| 05/12/1987 | US4664133 Wafer processing machine |
| 05/12/1987 | US4664063 Molecular beam epitaxial growth apparatus |
| 05/12/1987 | US4664062 Apparatus for manufacturing semiconductors |
| 05/12/1987 | US4663832 Method for improving the planarity and passivation in a semiconductor isolation trench arrangement |
| 05/12/1987 | US4663831 Method of forming transistors with poly-sidewall contacts utilizing deposition of polycrystalline and insulating layers combined with selective etching and oxidation of said layers |
| 05/12/1987 | US4663830 Forming deep buried grids of implanted zones being vertically and laterally offset by mask MEV implant |
| 05/12/1987 | US4663827 Forming polycrystalline silicon layer, masking, implanting nitrogen, annealing |
| 05/12/1987 | US4663826 Laser radiation |
| 05/12/1987 | US4663825 Mechanically breaking oxide film at interface between source and drain regions |
| 05/12/1987 | US4663820 Removal of thickness of silicon surface before depositing nickel and silver |
| 05/12/1987 | CA1221606A1 Method of producing single-crystal silicon film |
| 05/07/1987 | WO1987002825A1 A method for mos transistor manufacture |
| 05/07/1987 | WO1987002791A1 Photoimaging processes and compositions |
| 05/07/1987 | WO1987002626A1 Method for forming vertical interconnects in polyimide insulating layers |
| 05/07/1987 | WO1987002598A1 Gas inlet device for reactors |
| 05/07/1987 | DE3625183A1 Method for forming an image |
| 05/06/1987 | EP0221010A1 Photo-initiator systems for free-radical polymerisations |
| 05/06/1987 | EP0220989A1 Charge transport device and method for its production |
| 05/06/1987 | EP0220974A1 Power semiconductor component and associated control logic |
| 05/06/1987 | EP0220959A2 Ceramic electronic device and method of manufacturing the same |
| 05/06/1987 | EP0220901A2 Apparatus for plasma assisted etching |
| 05/06/1987 | EP0220856A2 Source follower CMOS input buffer |
| 05/06/1987 | EP0220830A2 Wafer probe head, and method of assembling a wafer probe head |
| 05/06/1987 | EP0220789A2 CMOS voltage reference |
| 05/06/1987 | EP0220685A2 Apparatus and method for registration of shadow masked thin-film patterns |
| 05/06/1987 | EP0220668A2 Charged particle beam lithography system |
| 05/06/1987 | EP0220645A2 Photosensitive positive composition and photoresist material prepared therewith |
| 05/06/1987 | EP0220605A2 Method of making self-aligned GaAs digital integrated circuits |
| 05/06/1987 | EP0220578A2 A photoresist composition and a process using that photoresist composition |
| 05/06/1987 | EP0220571A1 Method and apparatus for alignment |
| 05/06/1987 | EP0220554A1 X-Y-theta Stage assembly |
| 05/06/1987 | EP0220544A2 Non-precipitating photoresist composition |
| 05/06/1987 | EP0220542A2 Dielectric-filled-groove isolation structures for semiconductor devices |
| 05/06/1987 | EP0220517A2 Semiconductor device having a contact area |
| 05/06/1987 | EP0220503A2 Method and structure for effecting engineering changes in a multiple device module package |
| 05/06/1987 | EP0220500A1 Semiconductor device with reduced capacitive load and manufacturing process thereof |
| 05/06/1987 | EP0220493A2 Method for improving wirability of master-image DCVS chips |
| 05/06/1987 | EP0220481A2 Photoelectric enhanced plasma glow discharge system |
| 05/06/1987 | EP0220444A2 Logic-circuit layout for large-scale integrated circuits |
| 05/06/1987 | EP0220410A2 A dynamic random access memory device having a single-crystal transistor on a trench capacitor structure and a fabrication method therefor |
| 05/06/1987 | EP0220404A1 Method of limiting chippage during the sawing of a semiconductor disc |
| 05/06/1987 | EP0220392A2 A trench-incorporated monolithic semiconductor capacitor and high density dynamic memory cells including the capacitor |
| 05/06/1987 | EP0220233A1 Target keys for wafer probe alignment. |
| 05/06/1987 | EP0220174A1 Continuously pulled single crystal silicon ingots |
| 05/06/1987 | EP0137790B1 Self-compensating hydrostatic flattening of semiconductor substrates |
| 05/06/1987 | EP0040251B1 Semiconductor memory device |
| 05/06/1987 | CN85107886A Screening method of mosfet by gate-voltage and temp. |
| 05/05/1987 | USH274 Method of manufacturing an integrated circuit chip and integrated circuit chip produced thereby |
| 05/05/1987 | US4663739 Semiconductor memories |
| 05/05/1987 | US4663732 Apparatus for storing and retrieving data in predetermined multi-bit quantities containing fewer bits of data than word length quantities |
| 05/05/1987 | US4663649 SiC sintered body having metallized layer and production method thereof |
| 05/05/1987 | US4663648 Three dimensional structures of active and passive semiconductor components |
| 05/05/1987 | US4663647 Buried-resistance semiconductor device and fabrication process |
| 05/05/1987 | US4663646 Gate array integrated circuit using Schottky-barrier FETs |
| 05/05/1987 | US4663645 Semiconductor device of an LDD structure having a floating gate |
| 05/05/1987 | US4663644 Semiconductor device and method of manufacturing the same |
| 05/05/1987 | US4663643 Semiconductor device and process for producing the same |
| 05/05/1987 | US4663414 Phospho-boro-silanol interlayer dielectric films and preparation |
| 05/05/1987 | US4663275 Photoresists, multilayer, stripping |
| 05/05/1987 | US4663197 Method and apparatus for coating a substrate |
| 05/05/1987 | US4663191 Salicide process for forming low sheet resistance doped silicon junctions |
| 05/05/1987 | US4663186 Screenable paste for use as a barrier layer on a substrate during maskless cladding |
| 05/05/1987 | US4663183 Glow discharge method of applying a carbon coating onto a substrate |
| 05/05/1987 | US4663128 Seed lift and rotation mechanism |
| 05/05/1987 | US4663009 System and method for depositing plural thin film layers on a substrate |
| 05/05/1987 | US4662989 High efficiency metal lift-off process |
| 05/05/1987 | US4662988 Etching a multilayer semiconductor |
| 05/05/1987 | US4662987 Method of double floating transport and processing of wafers within a confined passageway |
| 05/05/1987 | US4662986 Planarization method and technique for isolating semiconductor islands |
| 05/05/1987 | US4662985 Method of smoothing out an irregular surface of an electronic device |
| 05/05/1987 | US4662983 Multiple meltback procedure for LPE growth on InP |
| 05/05/1987 | US4662981 Method and apparatus for forming crystalline films of compounds |
| 05/05/1987 | US4662980 Process for preparing crystals of Hg1-x Cdx Te |
| 05/05/1987 | US4662956 Method for prevention of autodoping of epitaxial layers |
| 05/05/1987 | US4662949 Oscillation, deflection |
| 05/05/1987 | US4662811 Method and apparatus for orienting semiconductor wafers |
| 05/05/1987 | US4662753 Apparatus and method for aligning objects |
| 05/05/1987 | US4662124 Method of grinding a sapphire wafer |
| 05/05/1987 | US4662064 Method of forming multi-level metallization |
| 05/05/1987 | US4662063 Generation of ohmic contacts on indium phosphide |
| 05/05/1987 | US4662062 Method for making bipolar transistor having a graft-base configuration |
| 05/05/1987 | US4662061 Complementary metal oxide semiconductor, doubly charged boron ion dope |
| 05/05/1987 | US4662060 Method of fabricating semiconductor device having low resistance non-alloyed contact layer |
| 05/05/1987 | US4662059 Semiconductors |
| 05/05/1987 | US4662058 Integrated circuits, aluminum, gallium, arsenic field effect transistor |
| 05/05/1987 | US4662057 Method of manufacturing a semiconductor integrated circuit device |