Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/1987
09/22/1987US4694565 Method of making hardened CMOS sub-micron field effect transistors
09/22/1987US4694564 Source, drain, and active zone on semiconductor substrate
09/22/1987US4694563 Process for making Schottky-barrier gate FET
09/22/1987US4694562 Method for manufacturing a semiconductor integrated device including bipolar and CMOS transistors
09/22/1987US4694561 Method of making high-performance trench capacitors for DRAM cells
09/22/1987US4694527 Mask washing apparatus for production of integrated circuit
09/22/1987CA1227288A1 Process for preparing semiconductor layer
09/22/1987CA1227271A1 Apparatus for making photovoltaic modules
09/17/1987DE3608604A1 Patternable photoelectrochemical removal
09/17/1987DE3608410A1 Production of fine structures for semiconductor contacts
09/17/1987DE3608081A1 Process for applying a plastic layer to very finely structured metallised layers
09/17/1987DE3608009A1 Method for producing miniaturised connections (microconnections) by means of solid-state welding
09/16/1987EP0237425A1 Integrated circuit with a modified architecture, and its production process
09/16/1987EP0237413A1 Semiconductor element epitaxially grown on a substrate of different grating constants and its use in several semiconductor components
09/16/1987EP0237406A2 Electron beam testing of semiconductor wafers
09/16/1987EP0237361A2 Semiconductor memory device
09/16/1987EP0237346A1 Process for forming contact regions in an integrated-circuit substrate
09/16/1987EP0237342A1 Charge-coupled device
09/16/1987EP0237220A2 Method and apparatus for forming a film
09/16/1987EP0237165A2 Treating work pieces with electro-magnetically scanned ion beams
09/16/1987EP0237114A2 Process for making an electrically conductive adhesive connection
09/16/1987EP0237109A1 Method of aligning a mask and a substrate relative to each other and arrangementfor carrying out the method
09/16/1987EP0237102A1 Arrangement for aligning a mask and a substrate relative to each other
09/16/1987EP0237078A2 Downstream microwave plasma processing apparatus having an improved coupling structure between microwave and plasma
09/16/1987EP0237047A2 Cermet substrate with glass adhesion component
09/16/1987EP0237017A2 Electric-electronic device including polyimide thin film
09/16/1987EP0236953A2 Method of manufacturing semiconductor crystalline layer
09/16/1987EP0236914A2 Fabrication of electronic devices utilizing lithographic techniques
09/16/1987EP0236811A2 Method of manufacturing semiconductor device
09/16/1987EP0236807A2 Spectrometer objective for the corpuscular beam measuring technique
09/16/1987EP0236737A2 Process for making ultrathin polyheteroaromatic films
09/16/1987EP0236696A2 Non-volatile electronic memory
09/16/1987EP0236687A2 Self-aligned P contact diffusion
09/16/1987EP0236676A2 Erasable programmable read only memory using floating gate field effect transistors
09/16/1987EP0236632A2 Formation of diffused buried layers
09/16/1987EP0236559A2 Method and apparatus of treating photoresists
09/16/1987EP0236496A1 Thin semiconductor structures.
09/16/1987EP0236410A1 Manufacture of a hybrid electronic or optical device
09/16/1987EP0236352A1 Multi-cell transistor.
09/16/1987EP0236308A1 Vacuum vapor transport control
09/16/1987EP0144401B1 Process for fabricating complementary and nonvolatile type devices on a common substrate
09/16/1987EP0143792B1 Method for forming a stream of atoms and utilization thereof in an atomic jet epitaxy process and device (e.j.a.)
09/16/1987CN86108395A Semiconductor isolation using trenches and oxidation of anodized silicon sublayer
09/15/1987US4694477 Flexure stage alignment apparatus
09/15/1987US4694476 Buried channel charge coupled device
09/15/1987US4694428 Semiconductor memory
09/15/1987US4694321 Semiconductor device having bipolar transistor and integrated injection logic
09/15/1987US4694320 Semiconductor integrated circuit having multiple-layered connection
09/15/1987US4694316 Imaging system
09/15/1987US4694314 Semiconductor device
09/15/1987US4694312 Non-single-crystal semiconductor light emitting device
09/15/1987US4694308 Barrier layer and orifice plate for thermal ink jet printhead assembly
09/15/1987US4694178 Multiple channel electron beam optical column lithography system and method of operation
09/15/1987US4694143 Zone melting apparatus for monocrystallizing semiconductor layer on insulator layer
09/15/1987US4694138 Applying polymer and metal to substrate, then heating to decompose polymer and weld metal
09/15/1987US4693925 Improved step coverage
09/15/1987US4693783 Method of producing interconnections in a semiconductor integrated circuit structure
09/15/1987US4693782 Fabrication method of semiconductor device
09/15/1987US4693781 Trench formation process
09/15/1987US4693780 Electrical isolation and leveling of patterned surfaces
09/15/1987US4693779 Manufacturing apparatus for semiconductor devices
09/15/1987US4693777 Apparatus for producing semiconductor devices
09/15/1987US4693770 Method of bonding semiconductor devices together
09/15/1987US4693759 Method of forming a thin semiconductor film
09/15/1987US4693758 Method of making devices in silicon, on insulator regrown by laser beam
09/15/1987US4693409 Method for directly bonding ceramic and metal members and laminated body of the same
09/15/1987US4693211 For processing a wafer substrate
09/15/1987US4693208 Feeder of oxygen gas containing steam
09/15/1987US4693207 Apparatus for the growth of semiconductor crystals
09/15/1987US4693036 Semiconductor wafer surface grinding apparatus
09/15/1987US4692998 Controlled spacing of etched channels
09/15/1987US4692996 Method of fabricating semiconductor devices in dielectrically isolated silicon islands
09/15/1987US4692995 Method of obtaining a diode whose contact tapping is self aligned with a gate
09/15/1987US4692994 Process for manufacturing semiconductor devices containing microbridges
09/15/1987US4692993 Schottky barrier charge coupled device (CCD) manufacture
09/15/1987US4692992 Method of forming isolation regions in a semiconductor device
09/15/1987US4692991 Method of controlling forward voltage across Schottky diode
09/15/1987CA1226969A1 Electron image projector
09/15/1987CA1226968A1 Power semiconductor with buried grid structure
09/15/1987CA1226967A1 Tape bonding material and structure for electronic circuit fabrication
09/15/1987CA1226966A1 Integrated circuit chip package
09/15/1987CA1226965A1 Cmos circuit having a reduced tendency to latch
09/15/1987CA1226847A1 Metallization of ceramics
09/15/1987CA1226766A1 Material vapor deposition technique
09/11/1987WO1987005443A1 High/low doping profile for twin well process
09/11/1987WO1987005442A1 Semiconductor device and method of fabricating the same
09/11/1987WO1987005441A1 Semiconductor device and a method of producing the same
09/11/1987WO1987005440A1 Fabrication process for stacked mos devices
09/11/1987WO1987005439A1 A low temperature method for forming a gate insulator layer for semiconductor devices
09/11/1987WO1987005438A1 Masked ion beam lithography system and method
09/11/1987WO1987005409A1 Methods for applying simultaneously on a plurality of integrated circuit boards a film having a uniform thickness and consisting of arsenic or germanium selenide glass sensitized by a silver salt
09/10/1987DE3706344A1 Schaltungsblock Circuit block
09/09/1987EP0236189A1 Monolithic semiconductor structure of a heterojunction bipolar transistor and a laser
09/09/1987EP0236169A1 Production method for a display screen provided with an active matrix and drain resistances
09/09/1987EP0236123A2 A semiconductor device and method for preparing the same
09/09/1987EP0236089A2 Dynamic random access memory having trench capacitor
09/09/1987EP0236072A2 Ion beam implanter control system
09/09/1987EP0236034A2 Selective electroless plating of vias in vlsi devices
09/09/1987EP0236001A2 Method and apparatus for performing automated circuit board quality inspection
09/09/1987EP0235819A2 Process for producing single crystal semiconductor layer
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