Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1993
12/29/1993EP0575965A2 Method of forming semiconductor crystal and semiconductor device
12/29/1993EP0575889A2 Semiconductor device, resin for sealing same and method of fabricating same
12/29/1993EP0575804A2 Process for isolation of a component of a semi-conductor device
12/29/1993EP0575789A1 Monolithic millimetre-wave integrated circuit and method of its fabrication
12/29/1993EP0575757A1 A method of slicing a semiconductor wafer and an apparatus therefor
12/29/1993EP0575688A2 Programming of LDD-ROM cells
12/29/1993EP0575650A1 Method of reforming an insulating film in a semiconductor device and apparatus therefor
12/29/1993EP0575398A1 Method and device for manufacturing a single product from integrated circuits received on a lead frame
12/29/1993EP0325647B1 A method and apparatus for dry processing or etching a substrate
12/29/1993CN2151538Y Mass carriage
12/29/1993CN1080091A Insulated semiconductor package
12/29/1993CN1023362C Photovoltaic device and method for producing same
12/28/1993US5274778 EPROM register providing a full time static output signal
12/28/1993US5274599 Flash-type nonvolatile semiconductor memory having precise erasing levels
12/28/1993US5274597 Semiconductor memory device capable of driving divided word lines at high speed
12/28/1993US5274594 Static RAM
12/28/1993US5274592 Semiconductor integrated circuit device for high-speed transmission of data and for improving reliability of transfer transistor, applicable to DRAM with voltage-raised word lines
12/28/1993US5274588 Non volatile memory cell structure
12/28/1993US5274587 Non-volatile programmable read only memory device having memory cells each implemented by a memory transistor and a switching transistor coupled in parallel and method of memorizing a data bit
12/28/1993US5274586 Semiconductor device having a capacitor dielectric film of multilayer structure and a method of controlling the same
12/28/1993US5274585 Semiconductor memory device
12/28/1993US5274575 Method of probing test
12/28/1993US5274531 For mounting a circuit component
12/28/1993US5274524 Programmable protection circuit and its monolithic manufacturing
12/28/1993US5274434 Method and apparatus for inspecting foreign particles on real time basis in semiconductor mass production line
12/28/1993US5274420 Beamsplitter type lens elements with pupil-plane stops for lithographic systems
12/28/1993US5274373 Digital analog converter
12/28/1993US5274283 Compound semiconductor integrated circuit device
12/28/1993US5274280 Semiconductor integrated circuit device having separate supply voltages for the logic stage and output stage
12/28/1993US5274279 Thin film CMOS inverter
12/28/1993US5274268 Electric circuit having superconducting layered structure
12/28/1993US5274267 Bipolar transistor with low extrinsic base resistance and low noise
12/28/1993US5274266 Permeable base transistor having selectively grown emitter
12/28/1993US5274265 Bipolar transistor with a particular electrode structure
12/28/1993US5274264 Defect tolerant power distribution network and method for integrated circuits
12/28/1993US5274263 FET structure for use in narrow bandgap semiconductors
12/28/1993US5274262 Protection device
12/28/1993US5274261 Integrated circuit degradation resistant structure
12/28/1993US5274258 High density semiconductor memory device (MBC cell)
12/28/1993US5274257 Floating channel field effect transistor and a fabricating method thereof
12/28/1993US5274255 Structure for providing high resolution modulation of voltage potential in the vicinity of a surface
12/28/1993US5274253 Semiconductor protection device against abnormal voltage
12/28/1993US5274060 Monomers of ether-substituted styrene derivatives
12/28/1993US5273940 Encapsulating around the semiconductor chips having contact pads with a gold bump mated to the substrate and removing some exposed chip material
12/28/1993US5273938 Connecting the first semiconductor die and the first side of the conductive traces pattern and encapsulating followed by doing the same to the second die after removing the transfer film
12/28/1993US5273936 Depositing a silicon dioxide film while the dielectric film is in a slant or tapered form formed over the edge portion of the conductive pattern using Bias ECR method
12/28/1993US5273935 Method of controlling etching with a focused charged beam by detecting electrical current or secondary electrons
12/28/1993US5273934 Method for producing a doped region in a substrate
12/28/1993US5273933 Vapor phase growth method of forming film in process of manufacturing semiconductor device
12/28/1993US5273932 Heating the substrate and using a laser of wavelength less than photon energy required for decomposing the gallium and indium organometallic compounds to effect a difference in growth rate
12/28/1993US5273931 Method of growing epitaxial layers of N-doped II-VI semiconductor compounds
12/28/1993US5273930 Method of forming a non-selective silicon-germanium epitaxial film
12/28/1993US5273929 Method of manufacture transistor having gradient doping during lateral epitaxy
12/28/1993US5273928 Selective oxidation to retain part of the semiconductor film within a trench as a lower electrode
12/28/1993US5273926 Etching the floating gate layer on the gate dielectric layer to have exterior lateral margins and an orifice
12/28/1993US5273925 Method of fabricating semiconductor memory device having a cylindrical capacitor electrode
12/28/1993US5273924 Having a diffusion barrier restricting cross diffusion of the p- and n-type impurities within the polysilicon layer
12/28/1993US5273923 Forming a gate dielectric layer on the active part of the substrate and overlying the tunnel implant region
12/28/1993US5273922 High speed, low gate/drain capacitance DMOS device
12/28/1993US5273921 Methods for fabricating a dual-gated semiconductor-on-insulator field effect transistor
12/28/1993US5273920 Method of fabricating a thin film transistor using hydrogen plasma treatment of the gate dielectric/semiconductor layer interface
12/28/1993US5273918 Using a photoresist with openings as etching, implantation and contacting masks
12/28/1993US5273915 Method for fabricating bipolar junction and MOS transistors on SOI
12/28/1993US5273914 Method of fabricating a CMOS semiconductor devices
12/28/1993US5273913 High performance lateral PNP transistor with buried base contact
12/28/1993US5273912 Diffusing impurities of different types upwardly into the epitaxial layer
12/28/1993US5273856 Positive working photoresist composition containing mid or near UV radiation sensitive quinone diazide and sulfonic acid ester of imide or oxime which does not absorb mid or near UV radiation
12/28/1993US5273829 Epitaxial silicon membranes
12/28/1993US5273807 Substrate having a V-shaped groove of a special configuration in a substrate
12/28/1993US5273775 Process for selectively depositing copper aluminum alloy onto a substrate
12/28/1993US5273642 Monitoring the voltage between the wafer supported in an electrolyte solution and anode for depositing a metal layer
12/28/1993US5273622 Longitudinally moving from station to station
12/28/1993US5273621 Selectively etching a silicon layer over silicon dioxide with water/hydrofluoric acid diluted in nitric acid
12/28/1993US5273616 Method of producing sheets of crystalline material and devices made therefrom
12/28/1993US5273615 Apparatus and method for handling fragile semiconductor wafers
12/28/1993US5273609 Controlling plasma discharges on a wafer and activating to generate energy at more than two discrete levels
12/28/1993US5273589 Method for low pressure rinsing and drying in a process chamber
12/28/1993US5273588 Semiconductor wafer processing CVD reactor apparatus comprising contoured electrode gas directing means
12/28/1993US5273586 Low pressure chemical vapor deposition apparatus, with removal system for remaining ionized gas components
12/28/1993US5273553 Apparatus for bonding semiconductor substrates
12/28/1993US5273423 Heat treatment apparatus
12/28/1993US5273244 Plate-like member conveying apparatus
12/28/1993US5273205 Method and apparatus for silicon fusion bonding of silicon substrates using wet oxygen atmosphere
12/28/1993US5273203 Ceramic-to-conducting-lead hermetic seal
12/28/1993US5273192 Resist layer application apparatus
12/28/1993US5273159 Wafer suspension box
12/28/1993US5273076 Solvent transport device
12/28/1993US5273060 Alcohol spray cleaning system
12/28/1993US5272980 Alignment method for transfer and alignment device
12/28/1993US5272913 Cantilever for a scanning probe microscope and a method of manufacturing the same
12/28/1993US5272880 Liquid vaporizer-feeder
12/28/1993US5272799 Tape feeding apparatus
12/28/1993CA1325685C Method for connecting devices on an integrated circuit substrate to a metallization layer
12/28/1993CA1325582C Process for doping crystals of wide band gap semiconductors
12/27/1993CA2098855A1 Semiconductor device and production method thereof
12/23/1993WO1993026137A1 High performance horizontal diffusion furnace system
12/23/1993WO1993026051A1 Array of integrated micromechanical sensor elements, which are adapted to respond to radiation, and method of making same
12/23/1993WO1993026047A1 Silicon carbide power mosfet with floating field ring and floating field plate
12/23/1993WO1993026044A1 Symmetrical multi-layer metal logic array with continuous substrate taps
12/23/1993WO1993026043A1 Planarization method