Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1993
12/21/1993US5272096 Method for making a bipolar transistor having a silicon carbide layer
12/21/1993US5272095 Method of manufacturing heterojunction transistors with self-aligned metal contacts
12/21/1993US5272042 Positive photoresist system for near-UV to visible imaging
12/21/1993US5272024 Mask-structure and process to repair missing or unwanted phase-shifting elements
12/21/1993US5271993 Method of manufacturing insulation substrate for semiconductor device and metal pattern plate used therefor
12/21/1993US5271972 Method for depositing ozone/TEOS silicon oxide films of reduced surface sensitivity
12/21/1993US5271955 Method for making a semiconductor device having an anhydrous ferroelectric thin film
12/21/1993US5271803 Method of forming finished edge of plural-layer optical membrane
12/21/1993US5271800 Method for anisotropic etching in the manufacture of semiconductor devices
12/21/1993US5271799 Anisotropic etch method
12/21/1993US5271798 Method for selective removal of a material from a wafer's alignment marks
12/21/1993US5271797 Method for patterning metal oxide thin film
12/21/1993US5271796 Method and apparatus for detecting defect on semiconductor substrate surface
12/21/1993US5271774 Method for removing in a centrifuge a liquid from a surface of a substrate
12/21/1993US5271702 Robotic substrate manipulator
12/21/1993US5271516 Isolation structure for contamination sensitive items
12/21/1993US5271264 Method of in-situ particle monitoring in vacuum systems
12/21/1993US5271185 Apparatus for chamfering notch of wafer
12/21/1993US5271148 Used for mounting/encapsulating an integrated circuit
12/21/1993US5271147 Outer bonding tool for tape carrier and method of producing semiconductor device
12/21/1993CA2024639C Ultra high density three-dimensional semiconductor structures
12/21/1993CA2011709C Method of chemical-mechanical polishing an electronic component substrate and polishing slurry therefor
12/21/1993CA1325371C Reagent source for molecular beam epitaxy
12/21/1993CA1325353C Negative resist compositions
12/19/1993CA2098699A1 Compression glass lead-through arrangement
12/16/1993DE4319683A1 Removal of polymer residues on carbon@ basis, useful for cleaning plasma reactors - by excitation of plasma contg. ozone in reactor and evacuating obtd. volatile end prods.
12/16/1993DE4319233A1 Gallium arsenide phosphide epitaxial wafer - has low probability of crack formation during LED mfr.
12/16/1993DE4318866A1 Mfg. MOSFET with lightly doped drain structure - by simple process involving fewer prodn. and masking steps
12/16/1993DE4317570A1 Semiconductor device formed on SOI substrate - has several integrated circuit elements formed in respective semiconductor areas separated from one another by insulating channels, bridged by connecting conductors
12/16/1993DE4219529A1 Verfahren zur Herstellung von Halbleiterbauelementen in CMOS-Technik mit "local interconnects" A process for producing semiconductor devices in CMOS technology with "local interconnects"
12/16/1993DE4219132A1 Bonded silicon@ wafer-glass or silicon@-silicon@ joint prodn. - comprises using laser light radiation to initially fix materials at spot(s) and/or lines and conventional high temp. bonding for pressure and acceleration sensors or micro-system elements
12/16/1993CA2097404A1 System for continuous fabrication of micro-structures and thin film semiconductor devices on elongate substrates
12/15/1993EP0574286A1 Method for assembling hybrid circuits by vacuum bonding and assemblies produced by this method
12/15/1993EP0574275A1 Semiconductor device having capacitor and manufacturing method thereof
12/15/1993EP0574179A2 Optimization of the planarization of a dielectric layer
12/15/1993EP0574178A2 Dry process coating method and apparatus therefor
12/15/1993EP0574149A1 Wafer probe station having integrated guarding, Kelvin connection and shielding systems
12/15/1993EP0574131A2 High-yield methods for programming antifuses
12/15/1993EP0574022A2 Movement actuator/sensor systems
12/15/1993EP0573996A1 Method of manufacturing a semiconductor memory device
12/15/1993EP0573943A1 Method for the manufacture of large single crystals
12/15/1993EP0573921A2 Semiconductor device having a semiconductor film of low oxygen concentration
12/15/1993EP0573911A2 Method for depositing silicon oxide films of improved properties
12/15/1993EP0573855A1 Process for contamination free comminuting of semi-conductor material, especially of silicon
12/15/1993EP0573838A2 Multi-chip-module
12/15/1993EP0573823A2 Deposition method for depositing a semiconductor thin film and manufacturing method of thin film transistors with use of the deposition method
12/15/1993EP0573728A1 Process for fabricating high density contactless EPROMs
12/15/1993EP0573707A2 Apparatus for gas source molecular beam epitaxy
12/15/1993EP0573519A1 A package for integrated circuits
12/15/1993EP0334927B1 Integrated circuit trench cell
12/15/1993EP0282557B1 Output circuit for image sensor
12/15/1993EP0177558B1 Manipulation and handling of integrated circuit dice
12/15/1993CN1023165C Method of manufacturing electric devices
12/14/1993US5271028 Semiconductor laser device
12/14/1993US5271015 Self-diagnostic system for semiconductor memory
12/14/1993US5270977 Dynamic random access memory device capable of performing test mode operation and method of operating such memory device
12/14/1993US5270968 Thin-film transistor for semiconductor memory device and fabricating method thereof
12/14/1993US5270944 Semiconductor integrated circuit device and process for manufacturing the same
12/14/1993US5270797 Method and apparatus for determining a material's characteristics by photoreflectance using improved computer control
12/14/1993US5270794 Fine structure evaluation apparatus and method
12/14/1993US5270771 Aligner and exposure method for manufacturing semiconductor device
12/14/1993US5270600 Magnetic drive device
12/14/1993US5270592 Clock supply circuit layout in a circuit area
12/14/1993US5270583 Impedance control circuit for a semiconductor substrate
12/14/1993US5270573 Resin mold field effect semiconductor device
12/14/1993US5270570 Lead frame for a multiplicity of terminals
12/14/1993US5270569 Method and device in which bottoming of a well in a dielectrically isolated island is assured
12/14/1993US5270561 Semiconductor memory device with a ring-shaped bit line
12/14/1993US5270560 Method and apparatus for measuring workpiece surface topography
12/14/1993US5270557 Quantum interference semiconductor device having a quantum point contact and fabrication process thereof
12/14/1993US5270556 Semiconductor device with upper and lower gate electrode structure
12/14/1993US5270554 High power high frequency metal-semiconductor field-effect transistor formed in silicon carbide
12/14/1993US5270485 High density, three-dimensional, intercoupled circuit structure
12/14/1993US5270482 Wafer carrier process platform
12/14/1993US5270298 Cubic metal oxide thin film epitaxially grown on silicon
12/14/1993US5270267 Curing and passivation of spin on glasses by a plasma process wherein an external polarization field is applied to the substrate
12/14/1993US5270266 Method of adjusting the temperature of a semiconductor wafer
12/14/1993US5270265 Stress relief technique of removing oxide from surface of trench-patterned semiconductor-on-insulator structure
12/14/1993US5270264 Process for filling submicron spaces with dielectric
12/14/1993US5270263 Process for depositing aluminum nitride (AlN) using nitrogen plasma sputtering
12/14/1993US5270262 O-ring package
12/14/1993US5270260 Method and apparatus for connecting a semiconductor chip to a carrier system
12/14/1993US5270259 Method for fabricating an insulating film from a silicone resin using O.sub.
12/14/1993US5270257 Method of making metal oxide semiconductor field effect transistors with a lightly doped drain structure having a recess type gate
12/14/1993US5270256 Method of forming a guard wall to reduce delamination effects
12/14/1993US5270255 Metallization process for good metal step coverage while maintaining useful alignment mark
12/14/1993US5270254 Integrated circuit metallization with zero contact enclosure requirements and method of making the same
12/14/1993US5270253 Method of producing semiconductor device
12/14/1993US5270252 Method of forming platinum and platinum silicide schottky contacts on beta-silicon carbide
12/14/1993US5270250 Method of fabricating semiconductor substrate having very shallow impurity diffusion layer
12/14/1993US5270249 Fabrication process of a semiconductor device having a reduced parasitic capacitance
12/14/1993US5270247 Atomic layer epitaxy of compound semiconductor
12/14/1993US5270246 Manufacturing method of semiconductor multi-layer film and semiconductor laser
12/14/1993US5270245 Method of forming a light emitting diode
12/14/1993US5270244 Method for forming an oxide-filled trench in silicon carbide
12/14/1993US5270243 Dram peripheral circuit contact aspect ratio improvement process
12/14/1993US5270241 Optimized container stacked capacitor DRAM cell utilizing sacrificial oxide deposition and chemical mechanical polishing
12/14/1993US5270240 Four poly EPROM process and structure comprising a conductive source line structure and self-aligned polycrystalline silicon digit lines
12/14/1993US5270239 Method for manufacturing a dynamic random access memory cell
12/14/1993US5270238 Method of making a semiconductor memory device having a double-stacked capacitor structure
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