H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1993
12/14/1993	US5270237 Method for manufacturing mask ROMs by using a protection layer
12/14/1993	US5270236 Method for producing an opening in a layered semiconductor structure or a contact hole in an integrated circuit or DRAM
12/14/1993	US5270235 Semiconductor device fabrication
12/14/1993	US5270234 Deep submicron transistor fabrication method
12/14/1993	US5270233 Method for manufacturing field effect transistor having LDD structure
12/14/1993	US5270232 Process for fabricating field effect transistor
12/14/1993	US5270231 Method of manufacturing device having ferroelectric film
12/14/1993	US5270230 Method for making a conductivity modulation MOSFET
12/14/1993	US5270229 Thin film semiconductor device and process for producing thereof
12/14/1993	US5270228 Method of fabricating gate electrode in recess
12/14/1993	US5270227 Method for fabrication of semiconductor device utilizing ion implantation to eliminate defects
12/14/1993	US5270226 Manufacturing method for LDDFETS using oblique ion implantion technique
12/14/1993	US5270225 Method of making a resonant tunneling semiconductor device
12/14/1993	US5270223 Multiple layer wide bandgap collector structure for bipolar transistors
12/14/1993	US5270222 Method and apparatus for semiconductor device fabrication diagnosis and prognosis
12/14/1993	US5270221 Method of fabricating high quantum efficiency solid state sensors
12/14/1993	US5270077 Method for producing flat CVD diamond film
12/14/1993	US5270074 Removal with aqueous alkali
12/14/1993	US5269882 Method and apparatus for fabrication of thin film semiconductor devices using non-planar, exposure beam lithography
12/14/1993	US5269881 Plasma processing apparatus and plasma cleaning method
12/14/1993	US5269880 Tapering sidewalls of via holes
12/14/1993	US5269879 Method of etching vias without sputtering of underlying electrically conductive layer
12/14/1993	US5269878 Metal patterning with dechlorinization in integrated circuit manufacture
12/14/1993	US5269876 Vapor deposition of silicon crystal
12/14/1993	US5269873 Apparatus for peeling-off a film laminated on a carrier material
12/14/1993	US5269643 Method and apparatus for transferring wafers from wafer carrier to wafer conveyor apparatus in carrierless wafer surface treatment apparatus
12/14/1993	US5269453 Low temperature method for forming solder bump interconnections to a plated circuit trace
12/14/1993	US5269452 Method and apparatus for wirebonding
12/14/1993	US5269401 Rail for conveying integrated circuits with J-shaped leads
12/14/1993	US5269285 Wire saw and slicing method using the same
12/14/1993	CA2019923C Semiconductor film and process for its production
12/14/1993	CA1325292C Adhesive tape for bonding chips thereon
12/09/1993	WO1993025003A1 Sub-nanoscale electronic systems, devices and processes
12/09/1993	WO1993024979A1 Ii-vi laser diodes with quantum wells grown by atomic layer epitaxy and migration enhanced epitaxy
12/09/1993	WO1993024959A1 Semiconductor nonvolatile storage device, semiconductor device, and its manufacture method
12/09/1993	WO1993024958A1 Semiconductor device
12/09/1993	WO1993024954A1 Process for fabricating intrinsic layer and applications
12/09/1993	WO1993024953A1 Transport robot for a machining or processing line for lead frames
12/09/1993	WO1993024925A1 Ceramic substrate and its manufacture, and substrate vacuum-clamping device using ceramic vacuum-clamping board
12/09/1993	WO1993024801A1 Device for heat-treating a magazine for lead frames with electronic components
12/09/1993	WO1993024564A1 Low temperature flexible die attach adhesive and articles using same
12/09/1993	DE4318727A1 Semiconductor device with lead-on-chip-structure - has brazing solder material with no moisture absorption, formed on surface of semiconductor component and fixed to support plate
12/09/1993	DE4318163A1 Repairing white and black defects in light phase displacement structured surfaces - by coating defect area with repair phases slide coating restoring the required phase displacement of the light
12/09/1993	DE4316114A1 X=ray beam mask used in X=ray lithography - comprises absorber contg. bismuth, titanium and nitrogen, and has amorphous structure
12/09/1993	DE4223403C1 Structured doped regions prodn. on solid bodies - by applying amorphous layer onto body, implanting doping material, melting regions of amorphous layer, and etching
12/09/1993	DE4219046A1 Producing roughened orientation marking on crystal wafer - point sand-blasting, e.g. on area of diameter less than 1 mm, and then anisotropically etching
12/09/1993	DE4218652A1 Process for producing aluminium doping profile in semiconductors - by diffusion in vacuum and oxidising atmosphere
12/09/1993	DE4218650A1 Verfahren zur Herstellung eines Quantendrahtes A method of producing a quantum wire
12/09/1993	CA2136343A1 Process for fabricating intrinsic layer and applications
12/09/1993	CA2134755A1 Sub-nanoscale electronic systems, devices and processes
12/08/1993	EP0573312A2 Diamond doping
12/08/1993	EP0573299A1 Position detection method using an optical interference signal and electronic filtering of this signal in the spatial frequency domain
12/08/1993	EP0573297A2 Semiconductor device comprising a TAB tape
12/08/1993	EP0573270A2 Method of preparing compound semiconductor
12/08/1993	EP0573269A2 Method of preparing compound semiconductor
12/08/1993	EP0573258A1 Liquid crystal display device
12/08/1993	EP0573241A2 Semiconductor devices with a double layered silicide structure and process of making it
12/08/1993	EP0573220A2 Dyed i-line positive-working radiation sensitive mixtures
12/08/1993	EP0573213A1 ESD protection of output buffers
12/08/1993	EP0573212A2 Method of etching anti-reflection coating
12/08/1993	EP0573183A1 Wafer probe station with integrated environment control enclosure
12/08/1993	EP0573170A1 High density EEPROM cell array with novel programming scheme and method of manufacture
12/08/1993	EP0573169A1 Segment-erasable flash EPROM
12/08/1993	EP0573168A1 Fast access AMG EPROM
12/08/1993	EP0573164A1 Full feature high density EEPROM cell with poly tunnel spacer and method of manufacture
12/08/1993	EP0573146A1 Fine pitch solder application
12/08/1993	EP0573134A1 Polyimide process for protecting integrated circuits
12/08/1993	EP0573057A1 Integrated circuit structure processing apparatus with chemically corrosion-resistant Al2O3 protective coating on surface of quartz window exposed to corrosive chemicals
12/08/1993	EP0573056A2 Positive resist composition
12/08/1993	EP0573033A1 Method of forming p-type silicon carbide
12/08/1993	EP0573030A2 Amorphous silicon thin film
12/08/1993	EP0572943A1 High resolution etching mask
12/08/1993	EP0572704A1 Method for manufacturing a semiconductor device including method of reforming an insulating film formed by low temperature CVD
12/08/1993	EP0572514A1 Method for continuous assembly of patterned strips and integrated circuit micromodule obtained by said method
12/08/1993	EP0463098B1 A fluxless soldering process
12/08/1993	CN1079351A Device for transportation of electric charge and method for driving same, and apparatus for photoing solid picture
12/07/1993	USH1267 Integrated circuit and lead frame assembly
12/07/1993	US5268989 Multi zone illuminator with embeded process control sensors and light interference elimination circuit
12/07/1993	US5268951 X-ray beam scanning method for producing low distortion or constant distortion in x-ray proximity printing
12/07/1993	US5268874 Reading circuit for semiconductor memory
12/07/1993	US5268871 Power supply tracking regulator for a memory array
12/07/1993	US5268870 Flash EEPROM system and intelligent programming and erasing methods therefor
12/07/1993	US5268744 Method of positioning a wafer with respect to a focal plane of an optical system
12/07/1993	US5268743 Apparatus for measuring flatness of outer lead
12/07/1993	US5268651 In an integrated circuit
12/07/1993	US5268590 CMOS device and process
12/07/1993	US5268588 Semiconductor structure for electrostatic discharge protection
12/07/1993	US5268586 Vertical power MOS device with increased ruggedness and method of fabrication
12/07/1993	US5268585 Non-volatile memory and method of manufacturing the same
12/07/1993	US5268582 P-N junction devices with group IV element-doped group III-V compound semiconductors
12/07/1993	US5268532 Semiconductor device
12/07/1993	US5268333 Forming a borophosilicate glass; etching
12/07/1993	US5268332 Method of integrated circuit fabrication having planarized dielectrics
12/07/1993	US5268330 Process for improving sheet resistance of an integrated circuit device gate
12/07/1993	US5268329 Method of fabricating an integrated circuit interconnection
12/07/1993	US5268327 Epitaxial compositions
12/07/1993	US5268326 Method of making dielectric and conductive isolated island
12/07/1993	US5268325 Method for fabricating a polycrystalline silicon resistive load element in an integrated circuit
12/07/1993	US5268324 Recessed oxide, insulation regions in silicon substrate
12/07/1993	US5268323 Semiconductor array and method for its manufacture

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