| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/18/1994 | US5280187 Electrically programmable and erasable semiconductor memory and method of operating same |
| 01/18/1994 | US5280185 Semiconductor with diffusion barrier |
| 01/18/1994 | US5280184 Three dimensional integrated circuits with lift-off |
| 01/18/1994 | US5280180 Interconnect structure for coupling semiconductor regions and method for making |
| 01/18/1994 | US5280156 Wafer heating apparatus and with ceramic substrate and dielectric layer having electrostatic chucking means |
| 01/18/1994 | US5280154 Radio frequency induction plasma processing system utilizing a uniform field coil |
| 01/18/1994 | US5280139 Multilayer; dielectric, adhesive and electroconductive layer |
| 01/18/1994 | US5279992 Method of producing a wafer having a curved notch |
| 01/18/1994 | US5279991 High density electronic package |
| 01/18/1994 | US5279990 Method of making a small geometry contact using sidewall spacers |
| 01/18/1994 | US5279989 Forming minature contacts over source and drain |
| 01/18/1994 | US5279988 forming opening in dielectric, then electroconductive layer and patterning, then dielectric and magnetic material |
| 01/18/1994 | US5279987 Fabricating planar complementary patterned subcollectors with silicon epitaxial layer |
| 01/18/1994 | US5279985 Semiconductor device and method of fabrication thereof |
| 01/18/1994 | US5279984 Method for producing a semiconductor integrated circuit device in which circuit functions can be remedied or changed |
| 01/18/1994 | US5279983 Method of making a semiconductor memory device |
| 01/18/1994 | US5279982 Forming strip of isolation structure on semiconductor; then overcoating with barrier structure |
| 01/18/1994 | US5279981 Method of reducing the trap density of an oxide film for application to fabricating a nonvolatile memory cell |
| 01/18/1994 | US5279980 Sputtering |
| 01/18/1994 | US5279979 Semiconductor having diffusion region separated from the gap electrode and wiring layer |
| 01/18/1994 | US5279977 Method of manufacturing a semiconductor device for extracting a signal used to monitor potential of a high voltage island |
| 01/18/1994 | US5279976 Forming patterned mask of fluorinated-boron compound overlying dielectric; implanting boron |
| 01/18/1994 | US5279975 Method of testing individual dies on semiconductor wafers prior to singulation |
| 01/18/1994 | US5279973 In mixture of oxygen and an inert gas |
| 01/18/1994 | US5279926 Method and apparatus for removing vapor from a pressurized sprayed liquid in the manufacture of semiconductor integrated circuits |
| 01/18/1994 | US5279925 Masking; illuminating with scanning particle beam |
| 01/18/1994 | US5279921 Pattern formation resist and pattern formation method |
| 01/18/1994 | US5279888 Multilayer; silicon carbide, dielectric, electroconductive polysilicon and wiring layer |
| 01/18/1994 | US5279887 Polycrystalline silicon contact structure |
| 01/18/1994 | US5279869 Using laser |
| 01/18/1994 | US5279865 High throughput interlevel dielectric gap filling process |
| 01/18/1994 | US5279798 Silicon single crystal manufacturing apparatus |
| 01/18/1994 | US5279771 Removal photoresist from substrate |
| 01/18/1994 | US5279711 Chip attach and sealing method |
| 01/18/1994 | US5279706 Forming metal layer, applying photoresist, exposure to radiation |
| 01/18/1994 | US5279705 Using hydrogen fluoride vapors and oxidizer |
| 01/18/1994 | US5279704 Etching intermetallic; forming grooves |
| 01/18/1994 | US5279703 Absorbent substrate; radiating with light source |
| 01/18/1994 | US5279702 Anisotropic liquid phase photochemical copper etch |
| 01/18/1994 | US5279694 Chip mounting techniques for display apparatus |
| 01/18/1994 | US5279687 Preparing substrates by annealing epitaxial layers in the form of nesas and substrates so prepared |
| 01/18/1994 | US5279686 Polycrystalline silicon utilizing single crystal |
| 01/18/1994 | US5279670 Vertical type diffusion apparatus |
| 01/18/1994 | US5279661 Vaporized hydrogen silsesquioxane for depositing a coating |
| 01/18/1994 | US5279623 Method of fabricating flat type electrochemical device |
| 01/18/1994 | US5279316 Multiprocessing sonic bath system for semiconductor wafers |
| 01/18/1994 | US5279077 Method for producing semiconductor wafer |
| 01/18/1994 | US5279045 Minute particle loading method and apparatus |
| 01/18/1994 | US5279029 Ultra high density integrated circuit packages method |
| 01/18/1994 | CA1326155C High resolution e-beam lithographic technique |
| 01/17/1994 | CA2097388A1 Topographical selective patterns |
| 01/14/1994 | CA2100278A1 Curing silicon hydride containing materials by exposure to nitrous oxide |
| 01/13/1994 | DE4321609A1 Integrated semiconductor circuit with pass transistor circuit - responds to control signal applied to pass transistor circuit to select input signal on one of multiple input connections |
| 01/13/1994 | DE4320062A1 Insulating elements in silicon@ semiconductor device - for prodn. of switch of CMOS type and avoiding danger of crystal imperfection |
| 01/13/1994 | DE4223914A1 Vertical power component manufacturing method - interrupting epitaxial growth of lightly-doped semiconductor drift layer for implantation of non-doped ions |
| 01/13/1994 | DE4222512A1 Epitaxial deposition method for producing components on semiconductor substrate - forming components while substrate is placed on support substrate with test, measurement or adjustment structures |
| 01/13/1994 | DE4221564A1 Solder connection method for joining e.g. LED chip and flat copper component - preheating solder, positioning chip, melting solder by short-term temp. increase and lowering chip into position before cooling |
| 01/13/1994 | DE4220875A1 Connecting semiconductor body to contact plates - placing spaced strips of solder foil between contact plate and semiconductor body, and heating parts to melt solder |
| 01/13/1994 | DE4220827A1 Anlage zur Behandlung von Objekten unter Reinluftraum-Bedingungen Plant for the treatment of objects under clean air room conditions |
| 01/12/1994 | EP0578562A1 Procedure for determining the focus of a photolithographic exposure apparatus |
| 01/12/1994 | EP0578507A2 Cleaning solutions including nucleophilic amine compound having reduction and oxidation potentials |
| 01/12/1994 | EP0578505A2 Method of adjusting concentration of developer |
| 01/12/1994 | EP0578410A2 Programmable die identification circuits |
| 01/12/1994 | EP0578351A1 Elastic foamed sheet and wafer-polishing jig using the sheet |
| 01/12/1994 | EP0578307A2 Chip carrier with protective coating for circuitized surface |
| 01/12/1994 | EP0578254A2 Epaxial crowth method of a carbon doped A III - B V compound semiconductor layer |
| 01/12/1994 | EP0578252A2 Semiconductor sensor device |
| 01/12/1994 | EP0578177A2 Heat-resistant negative photoresist composition, photosensitive substrate, and process for forming negative pattern |
| 01/12/1994 | EP0578061A1 Device to withdraw, superimpose and anchor foils for green-tape circuits |
| 01/12/1994 | EP0578040A2 Fluid treatment apparatus and method |
| 01/12/1994 | EP0578028A1 High frequency semiconductor device |
| 01/12/1994 | EP0578011A1 Multi-electrode plasma processing apparatus |
| 01/12/1994 | EP0578010A1 Multi-zone plasma processing method |
| 01/12/1994 | EP0577985A1 Amorphous semiconductor solar module having improved passivation |
| 01/12/1994 | EP0577906A1 Structure preventing a parasitic diode from being switched on in an epitaxial tub of integrated circuits |
| 01/12/1994 | EP0577779A1 Multichip integrated circuit module and method of fabrication |
| 01/12/1994 | EP0577776A1 Graded collector for inductive loads |
| 01/12/1994 | EP0577766A1 Apparatus and method for high throughput sputtering |
| 01/12/1994 | EP0577762A1 Cleaning brush for semiconductor wafer. |
| 01/12/1994 | EP0577743A1 Photodefinable interlevel dielectrics |
| 01/12/1994 | EP0577667A1 Arc source macroparticle filter |
| 01/12/1994 | EP0577623A1 Thyristor with adjustable breakover voltage, and a process for manufacturing it |
| 01/12/1994 | EP0470957B1 Etchant solution for photoresist-patterned metal layers |
| 01/12/1994 | EP0229757B1 A method of bonding two substrates using arylcyclobutene monomeric compositions |
| 01/12/1994 | CN1023450C Method and arrangement for drying substrates aftes treatment in liquid |
| 01/11/1994 | US5278861 Method of treating metals by deposition of materials and furnace for implementing said method |
| 01/11/1994 | US5278799 Semiconductor memory circuit |
| 01/11/1994 | US5278798 Semiconductor memory device |
| 01/11/1994 | US5278787 Semiconductor device and method of manufacturing the same |
| 01/11/1994 | US5278785 Non-volatile memory circuits and architecture |
| 01/11/1994 | US5278784 Non-volatile memory |
| 01/11/1994 | US5278726 Method and apparatus for partially overmolded integrated circuit package |
| 01/11/1994 | US5278704 Information processing apparatus including magnetic material having a predetermined magnetization pattern with respect to a recording medium |
| 01/11/1994 | US5278526 Laminated LC element and method for manufacturing the same |
| 01/11/1994 | US5278494 Wafer probing test machine |
| 01/11/1994 | US5278459 Static semiconductor memory using thin film FET |
| 01/11/1994 | US5278450 Semiconductor contact with discontinuous noble metal |
| 01/11/1994 | US5278449 Alloy having a low eutectic point |
| 01/11/1994 | US5278448 Multilayer of vapor deposited refractory and aluminum |
| 01/11/1994 | US5278442 Electronic packages and smart structures formed by thermal spray deposition |