Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/1993
11/03/1993EP0568015A2 Dynamic random access memory device with intermediate voltage generator interrupting power supply in test operation
11/03/1993EP0567985A2 Process for thin film formation
11/03/1993EP0567939A2 Method of removing small particles from a surface
11/03/1993EP0567937A2 High reliability die processing
11/03/1993EP0567936A1 Power VFET device and method
11/03/1993EP0567878A1 The use of palladium as an adhesion layer and as an electrode in ferroelectric memory devices
11/03/1993EP0567867A2 Oxidation-resistant compound of Cu3Si and fabrication thereof
11/03/1993EP0567815A2 Method of making a contact hole to a doped region
11/03/1993EP0567790A2 Interface control logic for embedding a microprocessor in a gate array
11/03/1993EP0567748A1 Fabrication and applications of rough silicon surfaces
11/03/1993EP0567623A1 Power fet having reduced threshold voltage
11/03/1993EP0556193A4 Method and apparatus for transferring articles between two controlled environments
11/03/1993EP0323249B1 Semiconductor crystal structure and a process for producing the same
11/03/1993CN1078068A Method for forming a semiconductor device
11/03/1993CN1022653C Method for making transistor with silicon single crystal thin section
11/02/1993US5258950 Semiconductor memory device
11/02/1993US5258949 Nonvolatile memory with enhanced carrier generation and method for programming the same
11/02/1993US5258920 Locally orientation specific routing system
11/02/1993US5258891 Multichip module with multilayer wiring substrate
11/02/1993US5258823 Alignment system
11/02/1993US5258808 Exposure apparatus for forming image
11/02/1993US5258706 Method for the recognition of testing errors in the test of microwirings
11/02/1993US5258668 Programmable logic array integrated circuits with cascade connections between logic modules
11/02/1993US5258657 Semiconductor device
11/02/1993US5258650 Pressure transducer
11/02/1993US5258649 Semiconductor device and electronic apparatus using semiconductor device
11/02/1993US5258648 Composite flip chip semiconductor device with an interposer having test contacts formed along its periphery
11/02/1993US5258645 Semiconductor device having MOS transistor and a sidewall with a double insulator layer structure
11/02/1993US5258642 Semiconductor device having reduced parasitic capacitance
11/02/1993US5258641 Semiconductor device for extracting a signal used to monitor potential of a high voltage island at a low voltage island and method of manufacturing the same
11/02/1993US5258637 Semiconductor devices produced according to a method which reduces contact resistance at silicide/active area interfaces
11/02/1993US5258634 Electrically erasable read only memory cell array having elongated control gate in a trench
11/02/1993US5258633 Semiconductor device having an IGFET with diffused gate connection
11/02/1993US5258632 Velocity modulation transistor
11/02/1993US5258631 AlGaAs, transistors
11/02/1993US5258625 Interband single-electron tunnel transistor and integrated circuit
11/02/1993US5258577 Method of forming an electronic device
11/02/1993US5258366 Laser evaporation method for forming high Tc superconducting films
11/02/1993US5258333 Gate, nitriding, oxidation
11/02/1993US5258332 Method of manufacturing semiconductor devices including rounding of corner portions by etching
11/02/1993US5258331 Method of manufacturing resin-encapsulated semiconductor device package using photoresist or pre-peg lead frame dam bars
11/02/1993US5258330 Semiconductor chip assemblies with fan-in leads
11/02/1993US5258329 Method for manufacturing a multi-layered interconnection structure for a semiconductor IC structure
11/02/1993US5258328 Method of forming multilayered wiring structure of semiconductor device
11/02/1993US5258327 MBE growth method for high level devices and integrations
11/02/1993US5258326 Quantum device fabrication method
11/02/1993US5258325 Method for manufacturing a semiconductor device using a circuit transfer film
11/02/1993US5258323 Single crystal silicon on quartz
11/02/1993US5258322 Method of producing semiconductor substrate
11/02/1993US5258321 Manufacturing method for semiconductor memory device having stacked trench capacitors and improved intercell isolation
11/02/1993US5258320 Single crystal silicon arrayed devices for display panels
11/02/1993US5258319 Method of manufacturing a MOS type field effect transistor using an oblique ion implantation step
11/02/1993US5258318 Method of forming a BiCMOS SOI wafer having thin and thick SOI regions of silicon
11/02/1993US5258317 Method for using a field implant mask to correct low doping levels at the outside edges of the base in a walled-emitter transistor structure
11/02/1993US5258267 Process for forming resist pattern
11/02/1993US5258264 Forming metal conductors on semiconductor wafers
11/02/1993US5258257 Radiation sensitive compositions comprising polymer having acid labile groups
11/02/1993US5258246 Integrated circuits
11/02/1993US5258236 Multi-layer thin film structure and parallel processing method for fabricating same
11/02/1993US5258207 Amorphous silicon film, its production and photo semiconductor device utilizing such a film
11/02/1993US5258097 Dry-release method for sacrificial layer microstructure fabrication
11/02/1993US5258096 Method of forming local etch stop landing pads for simultaneous, self-aligned dry etching of contact vias with various depths
11/02/1993US5258095 Method for producing a device having an insulator sandwiched between two semiconductor layers
11/02/1993US5258093 Procss for fabricating a ferroelectric capacitor in a semiconductor device
11/02/1993US5258047 Holder device and semiconductor producing apparatus having same
11/02/1993US5257478 Apparatus for interlayer planarization of semiconductor material
11/02/1993CA2021671C High voltage semiconductor device and fabrication process
10/1993
10/28/1993WO1993021750A1 Multilayer interconnect system for an area array interconnection using solid state diffusion
10/28/1993WO1993021748A1 Membrane dielectric isolation ic fabrication
10/28/1993WO1993021685A1 Stabilizer for switch-mode powered rf plasma processing
10/28/1993WO1993021671A1 Manufacture of grating structures
10/28/1993WO1993021663A1 Process for lift-off of thin film materials from a growth substrate
10/28/1993WO1993021658A1 Integrated circuit with complementary heterojunction field effect transistors
10/28/1993WO1993021656A1 Semiconductor wafer temperature determination by optical measurement of wafer expansion in processing apparatus chamber
10/28/1993WO1993021637A1 Multilayer electrodes for ferroelectric devices
10/28/1993WO1993021536A1 Method for fabricating microstructures
10/28/1993WO1993021365A2 Method for making a discontinuity lattice at the surface of a crystalline substrate
10/28/1993WO1993018543A3 System for transferring substrates in clean rooms
10/28/1993WO1993017459A3 Process for producing a semiconductor structure and semiconductor structure produced according to this process
10/28/1993WO1993017453A3 Ammonia plasma treatment of silicide contact surfaces in semiconductor devices
10/28/1993DE4312651A1 Dynamic random-access memory - provides grouped memory cells each cell contg. capacitor and FET with transfer and sub-transfer gates having respective threshold voltages which alternate between high and low values between cells.
10/28/1993DE4312238A1 Semiconductor memory with short-circuit testing function - has switches for alternately connecting cell select lines in column and=or row direction to current source line and ground, and has current meter for measuring leakage current.
10/28/1993DE4243592A1 Paralleltestschaltung für Halbleiter-Speichervorrichtung Parallel test circuitry for semiconductor memory device
10/28/1993CA2132851A1 Semiconductor wafer temperature determination by optical measurement of wafer expansion in processing apparatus chamber
10/27/1993EP0567419A2 A shifter-based rim phase shifting structure and process to fabricate the same
10/27/1993EP0567332A2 Formation of microstructures by multiple level deep X-ray lithography with sacrificial metal layers
10/27/1993EP0567329A2 Substrate for epitaxy and epitaxy using the substrate
10/27/1993EP0567281A1 Liquid crystal display
10/27/1993EP0567256A2 Method of making a periodic heteroepitaxial semiconductor structure
10/27/1993EP0567169A1 Feature biassing and absorptive phase-shifting techniques to improve optical projection imaging
10/27/1993EP0567127A2 Semiconductor device capable of correctly forming conductor groups
10/27/1993EP0567121A1 Robot assembly
10/27/1993EP0567075A2 A method for producing semiconductor device
10/27/1993EP0567063A2 Anisotropic metal oxide etch
10/27/1993EP0567062A1 Electrical connections to dielectric materials
10/27/1993EP0567016A2 Multi layered wiring board and method for manufacturing the same
10/27/1993EP0567008A2 Process to grow several single crystal and apparatus therefor
10/27/1993EP0566934A2 Job configuration for semiconductor manufacturing
10/27/1993EP0566929A1 Method for manufacturing micromechanical structures from monocrystalline semi-conductor material
10/27/1993EP0566901A2 Electronic devices having metallurgies containing copper-semiconductor compounds
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