| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/11/1994 | US5278441 Method for fabricating a semiconductor transistor and structure thereof |
| 01/11/1994 | US5278440 Semiconductor memory device with improved tunneling characteristics |
| 01/11/1994 | US5278439 Self-aligned dual-bit split gate (DSG) flash EEPROM cell |
| 01/11/1994 | US5278438 Electrically erasable and programmable read-only memory with source and drain regions along sidewalls of a trench structure |
| 01/11/1994 | US5278437 Stacked capacitor type semiconductor memory device and manufacturing method thereof |
| 01/11/1994 | US5278436 Semiconductor integrated circuit device for forming logic circuit including resistance element connected to bipolar transistor with smaller occupied area |
| 01/11/1994 | US5278421 Pattern fabrication method using a charged particle beam and apparatus for realizing same |
| 01/11/1994 | US5278420 Scanning control system involved in an ion-implantation apparatus |
| 01/11/1994 | US5278419 Electron beam exposure process for writing a pattern on an object by an electron beam with a compensation of the proximity effect |
| 01/11/1994 | US5278277 Phenylquinoxaline copolymers |
| 01/11/1994 | US5278199 Comprising polythiol compounds and polyene compounds |
| 01/11/1994 | US5278136 Depositing gold pads on multilayer metal oxides |
| 01/11/1994 | US5278105 Forming plurality regions |
| 01/11/1994 | US5278104 Semiconductor wafer carrier having a dust cover |
| 01/11/1994 | US5278103 Method for the controlled formation of voids in doped glass dielectric films |
| 01/11/1994 | US5278102 SOI device and a fabrication process thereof |
| 01/11/1994 | US5278100 Chemical vapor deposition technique for depositing titanium silicide on semiconductor wafers |
| 01/11/1994 | US5278098 Method for self-aligned polysilicon contact formation |
| 01/11/1994 | US5278096 Transistor fabrication method |
| 01/11/1994 | US5278095 Forming a junctions/p-n/ by controlling the diffusion and oxidation |
| 01/11/1994 | US5278093 Method for forming semiconductor thin film |
| 01/11/1994 | US5278092 Method of forming crystal semiconductor film |
| 01/11/1994 | US5278091 Process to manufacture crown stacked capacitor structures with HSG-rugged polysilicon on all sides of the storage node |
| 01/11/1994 | US5278090 Method for manufacturing a dynamic RAM having 3-dimensional memory cell structure |
| 01/11/1994 | US5278089 Surface treatment |
| 01/11/1994 | US5278085 Single mask process for forming both n-type and p-type gates in a polycrystalline silicon layer during the formation of a semiconductor device |
| 01/11/1994 | US5278084 Method of manufacturing a semiconductor device |
| 01/11/1994 | US5278083 Removal masking layer above a removable planarizing material |
| 01/11/1994 | US5278082 Method for electrically connecting an electrode and impurity-diffused layer formed on a semiconductor substrate |
| 01/11/1994 | US5278078 Method of manufacturing semiconductor device |
| 01/11/1994 | US5278077 Pin-hole patch method for implanted dielectric layer |
| 01/11/1994 | US5278029 Photolithography |
| 01/11/1994 | US5278015 Amorphous silicon film, its production and photo semiconductor device utilizing such a film |
| 01/11/1994 | US5278012 Method for producing thin film multilayer substrate, and method and apparatus for detecting circuit conductor pattern of the substrate |
| 01/11/1994 | US5277985 Alloying, fast heating annealing |
| 01/11/1994 | US5277934 Method for protecting a graphite chuck for a starter filament in the manufacture of polycrystalline silicon |
| 01/11/1994 | US5277867 Method for making high strength injection molded ferrous material |
| 01/11/1994 | US5277835 Aqueous solution having hydrogen fluoride, ammonium fluoride |
| 01/11/1994 | US5277769 Serving the semiconductor region as anode to form pore |
| 01/11/1994 | US5277757 Dry etching method |
| 01/11/1994 | US5277756 Post fabrication processing of semiconductor chips |
| 01/11/1994 | US5277755 Fabrication of three dimensional silicon devices by single side, two-step etching process |
| 01/11/1994 | US5277752 Ionizing gases at constant pressure and temperature |
| 01/11/1994 | US5277751 Method and apparatus for producing low pressure planar plasma using a coil with its axis parallel to the surface of a coupling window |
| 01/11/1994 | US5277750 Using hydrogen iodide gas mixture |
| 01/11/1994 | US5277749 Methods and apparatus for relieving stress and resisting stencil delamination when performing lift-off processes that utilize high stress metals and/or multiple evaporation steps |
| 01/11/1994 | US5277748 Manufacturing electronic device dielectrically isolated or formed on a monocrystalline semiconductor layer on an insulator and an integrated circuit |
| 01/11/1994 | US5277747 Extraction of spatially varying dielectric function from ellipsometric data |
| 01/11/1994 | US5277746 High pressure liquid phase epitaxy reactor chamber and method with direct see through capability |
| 01/11/1994 | US5277740 Apparatus and method for forming a fine pattern |
| 01/11/1994 | US5277725 Process for fabricating a low dielectric composite substrate |
| 01/11/1994 | US5277723 Firing the laminate with conductor material, causing dimensional change |
| 01/11/1994 | US5277715 Removing the adherent particles by filtration |
| 01/11/1994 | US5277702 Plately alumina |
| 01/11/1994 | US5277601 In an electrical connector assembly |
| 01/11/1994 | US5277579 Wafers transferring method in vertical type heat treatment apparatus and the vertical type heat treatment apparatus provided with a wafers transferring system |
| 01/11/1994 | US5277539 Substrate conveying apparatus |
| 01/11/1994 | US5277357 Process for making a metal wall of a package used for accommodating electronic elements |
| 01/11/1994 | US5277356 Wire bonding method |
| 01/11/1994 | US5277215 Method for supplying and discharging gas to and from semiconductor manufacturing equipment and system for executing the same |
| 01/11/1994 | US5276963 Process for obtaining side metallization and articles produced thereby |
| 01/11/1994 | US5276961 Demountable tape-automated bonding method |
| 01/11/1994 | US5276955 Multilayer interconnect system for an area array interconnection using solid state diffusion |
| 01/11/1994 | CA1325915C Method of manufacturing a semiconductor device, in which a negative image is formed on a semiconductor substrate in a positive photolacquer |
| 01/06/1994 | WO1994000885A1 Light emitting device |
| 01/06/1994 | WO1994000882A1 Thin film transistor, solid-state device, display device, and method for manufacturing thin film transistor |
| 01/06/1994 | WO1994000881A1 Single polysilicon layer flash e2prom cell |
| 01/06/1994 | WO1994000880A1 Semiconductor device |
| 01/06/1994 | WO1994000879A1 Pyroelectric sensor and production method therefor |
| 01/06/1994 | WO1994000878A1 Methods of forming a local interconnect and a high resistor polysilicon load |
| 01/06/1994 | WO1994000877A1 Process for producing a storage capacitor |
| 01/06/1994 | WO1994000876A1 Planarising process for integrated semiconductor circuits |
| 01/06/1994 | WO1994000875A1 Semiconductor storage arrangement and process for producing it |
| 01/06/1994 | WO1994000874A1 Process for producing a dish capacitor |
| 01/06/1994 | WO1994000873A1 Process for producing a semiconductor storage device |
| 01/06/1994 | WO1994000872A1 Thermal treatment of a semiconductor wafer |
| 01/06/1994 | WO1994000871A1 Inter-silicide capacitor |
| 01/06/1994 | WO1994000870A2 Chemical vapor deposition from single organometallic precursors |
| 01/06/1994 | WO1994000869A1 Microwave energized deposition process with substrate temperature control |
| 01/06/1994 | WO1994000868A1 Transport system for wafer processing line |
| 01/06/1994 | WO1994000744A1 Device and method for heating objects wherein the temperature of the object is measured |
| 01/06/1994 | WO1994000733A1 Method of an apparatus for interferometrically inspecting a surface of an object |
| 01/06/1994 | WO1994000720A1 Fluid heating system |
| 01/06/1994 | WO1994000622A1 Installation for processing objects under clean-room conditions |
| 01/06/1994 | WO1994000251A1 A plasma cleaning method for removing residues in a plasma treatment chamber |
| 01/06/1994 | CA2139331A1 Light emitting device |
| 01/06/1994 | CA2138951A1 Chemical vapor deposition from single organometallic precursors |
| 01/06/1994 | CA2137471A1 Transport system for wafer processing line |
| 01/05/1994 | EP0577537A1 Confined water fixture for holding wafers undergoing chemical-mechanical polishing |
| 01/05/1994 | EP0577498A1 Vertical JFET transistor having an optimized operation and process for fabricating the same |
| 01/05/1994 | EP0577497A1 Vertical JFET transistor with low gate/substrate capacity and process for making the same |
| 01/05/1994 | EP0577333A1 Temporary connections for fast electrical access to electronic devices |
| 01/05/1994 | EP0577297A2 Self-aligned method of making phase-shifting lithographic masks having three or more phase-shifts |
| 01/05/1994 | EP0577262A2 Use of oxalyl chloride to form chloride-doped silicon dioxide films on silicon substrates |
| 01/05/1994 | EP0577223A1 Mounting structure for a terminal |
| 01/05/1994 | EP0577137A1 A quantum effect device and a method of producing the same |
| 01/05/1994 | EP0577128A1 Method for mounting components and an apparatus therefor |
| 01/05/1994 | EP0577083A1 7,8-cyclopropataxanes with antitumor action |
| 01/05/1994 | EP0577082A1 Fluoro taxols with antitumor activity |
| 01/05/1994 | EP0577080A1 Inspection method of inclination of an IC-package |